A simple method that improves the resolution of phase measurement in differential phase-contrast scanning transmission electron microscopy for closed-type environmental cell applications was developed and tested using a model sample simulating environmental cell observations. Because the top and bottom membranes of an environmental cell are typically far apart, the images from these membranes are shifted widely by tilt-series acquisition, and averaging the images after alignment can effectively eliminate undesired signals from the membranes while improving the signal from the object of interest. It was demonstrated that a phase precision of 2π/100 rad is well achievable using the proposed method for the sample in an environmental cell.
我们开发了一种简单的方法来提高差分相位对比(DPC)扫描透射电子显微镜在封闭式环境细胞应用中的相位测量分辨率,并使用模拟环境细胞观测的模型样品进行了测试。由于环境细胞的顶部和底部膜通常相距甚远,倾斜系列采集会使这些膜的图像发生较大偏移,而对齐后的图像进行平均可以有效消除来自膜的不需要的信号,同时改善来自感兴趣物体的信号。实验证明,对于环境细胞中的样品,使用所提出的方法可以很好地实现 2π/100 rad 的相位精度。
{"title":"Resolution improvement of differential phase-contrast microscopy via tilt-series acquisition for environmental cell application.","authors":"Kazutaka Mitsuishi, Fumiaki Ichihashi, Yoshio Takahashi, Katsuaki Nakazawa, Masaki Takeguchi, Ayako Hashimoto, Toshiaki Tanigaki","doi":"10.1093/jmicro/dfae049","DOIUrl":"10.1093/jmicro/dfae049","url":null,"abstract":"<p><p>A simple method that improves the resolution of phase measurement in differential phase-contrast scanning transmission electron microscopy for closed-type environmental cell applications was developed and tested using a model sample simulating environmental cell observations. Because the top and bottom membranes of an environmental cell are typically far apart, the images from these membranes are shifted widely by tilt-series acquisition, and averaging the images after alignment can effectively eliminate undesired signals from the membranes while improving the signal from the object of interest. It was demonstrated that a phase precision of 2π/100 rad is well achievable using the proposed method for the sample in an environmental cell.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"92-97"},"PeriodicalIF":0.0,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142482451","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The direct observation of the morphological changes in silicon-based negative electrode (Si-based negative electrode) materials during battery charging and discharging is useful for handling such materials and in electrode plate design. We developed an operando scanning electron microscopy (operando SEM) technique to quantitatively evaluate the expansion and contraction of Si-based negative electrode materials. A small all-solid-state lithium-ion battery was charged and discharged, and the expansion/contraction of particles while harnessing capacity was observed using SEM. We found that in a silicon monosilicate (SiO)/graphite negative electrode, SiO expanded first during charging, and graphite contracted first during discharging. Our study provides insights into the relationship between capacity and expansion and contraction coefficient of Si-based negative electrode materials.
{"title":"Observation of morphological changes in silicon-based negative-electrode active materials during charging/discharging using Operando scanning electron microscopy.","authors":"Takako Kurosawa, Noriaki Fukumoto, Kaoru Inoue, Emiko Igaki","doi":"10.1093/jmicro/dfae060","DOIUrl":"10.1093/jmicro/dfae060","url":null,"abstract":"<p><p>The direct observation of the morphological changes in silicon-based negative electrode (Si-based negative electrode) materials during battery charging and discharging is useful for handling such materials and in electrode plate design. We developed an operando scanning electron microscopy (operando SEM) technique to quantitatively evaluate the expansion and contraction of Si-based negative electrode materials. A small all-solid-state lithium-ion battery was charged and discharged, and the expansion/contraction of particles while harnessing capacity was observed using SEM. We found that in a silicon monosilicate (SiO)/graphite negative electrode, SiO expanded first during charging, and graphite contracted first during discharging. Our study provides insights into the relationship between capacity and expansion and contraction coefficient of Si-based negative electrode materials.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"137-141"},"PeriodicalIF":0.0,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142959860","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
It is challenging to image structures in liquids for electron microscopy (EM); thus, low-temperature imaging has been developed, initially for aqueous systems. Organic liquids (OLs) are widely used as dispersants, although their cryogenic EM (cryo-EM) imaging is less common than that of aqueous systems. This is because the basic properties (e.g. vapor pressure, density and amorphousness) of OL in the solid state have not been extensively investigated, preventing the determination of whether the observed structure is free from artifacts. Herein, I summarized physical data related to the phase change, and the solid density at 77 K and sublimation speed for some OLs were measured independently to discuss the applicability of OLs for cryo-EM. Among various OL properties, the sublimation temperature, pressure and rate and crystallinity are important for cryo-EM. The sublimation-related properties are used to judge whether the OL is stable during storage, observation and sample preparation such as etching. These properties were calculated, and the calculated sublimation speed matched with that measured by cryogenic scanning EM movie imaging. Crystallinity was estimated using the difference between the extrapolated temperature-dependent liquid density and the solid density of frozen OLs measured in liquid nitrogen. Artifacts observed upon freezing were exemplified by focused ion beam cross-sections of OL-in-water emulsions, and cracks, voids and wrinkles are found in the OL phase at a large shrinkage ratio. The study findings show that the applicability of OLs largely differs for structural isomers and that appropriate OLs are required for the cryo-EM imaging of nonaqueous systems.
{"title":"Basic properties of solidified organic liquids at a cryogenic temperature for electron microscopic visualization and sample preparation of dispersion systems.","authors":"Satoshi Okada","doi":"10.1093/jmicro/dfae059","DOIUrl":"10.1093/jmicro/dfae059","url":null,"abstract":"<p><p>It is challenging to image structures in liquids for electron microscopy (EM); thus, low-temperature imaging has been developed, initially for aqueous systems. Organic liquids (OLs) are widely used as dispersants, although their cryogenic EM (cryo-EM) imaging is less common than that of aqueous systems. This is because the basic properties (e.g. vapor pressure, density and amorphousness) of OL in the solid state have not been extensively investigated, preventing the determination of whether the observed structure is free from artifacts. Herein, I summarized physical data related to the phase change, and the solid density at 77 K and sublimation speed for some OLs were measured independently to discuss the applicability of OLs for cryo-EM. Among various OL properties, the sublimation temperature, pressure and rate and crystallinity are important for cryo-EM. The sublimation-related properties are used to judge whether the OL is stable during storage, observation and sample preparation such as etching. These properties were calculated, and the calculated sublimation speed matched with that measured by cryogenic scanning EM movie imaging. Crystallinity was estimated using the difference between the extrapolated temperature-dependent liquid density and the solid density of frozen OLs measured in liquid nitrogen. Artifacts observed upon freezing were exemplified by focused ion beam cross-sections of OL-in-water emulsions, and cracks, voids and wrinkles are found in the OL phase at a large shrinkage ratio. The study findings show that the applicability of OLs largely differs for structural isomers and that appropriate OLs are required for the cryo-EM imaging of nonaqueous systems.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"124-133"},"PeriodicalIF":0.0,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142959854","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Correction to: Low-dose measurement of electric potential distribution in organic light-emitting diode by phase-shifting electron holography with 3D tensor decomposition.","authors":"","doi":"10.1093/jmicro/dfae058","DOIUrl":"10.1093/jmicro/dfae058","url":null,"abstract":"","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"144"},"PeriodicalIF":0.0,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142900766","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Correction to: Microstructural observation of casein micelles in milk by cryo-electron microscopy of vitreous sections (CEMOVIS).","authors":"","doi":"10.1093/jmicro/dfae053","DOIUrl":"10.1093/jmicro/dfae053","url":null,"abstract":"","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"142"},"PeriodicalIF":0.0,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142633904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The anisotropic electronic structure of MgB2C2 was studied using soft X-ray emission spectroscopy electron microscopes. MgB2C2 fragments were selected by examining C K-emission profiles. C and B K-emission and Mg L-emission spectra were obtained, revealing common and distinct structures that reflect the mixing of valence orbitals. Since the material is reported to have two-dimensional B-C honeycomb layers, the orientational dependence of these emission spectra was also examined. Experimental data were compared with the theoretically calculated partial density of states of the valence bands (VBs) of the material. The C K-emission profile showed an apparent orientational dependence, while the B K-emission exhibited minimal dependence. This difference originated from the different energy distributions of C-2pz and B-2pz components in the VBs. The Mg L-emission intensity was very small, likely due to charge transfer from Mg atoms to B-N layers. The Mg L-emission profile showed a peak related to structures in C-K and B-K. An unexpected intensity was observed just above the VBs, which also showed orientational dependence, possibly due to a small deviation from the ideal composition of Mg:B:C = 1:2:2.
利用软 X 射线发射光谱电子显微镜研究了 MgB2C2 的各向异性电子结构。通过检查 C K 发射图谱选择了 MgB2C2 片段。获得的 C 和 B K 发射光谱以及 Mg L 发射光谱揭示了反映价轨道混合的常见和独特结构。据报道,这种材料具有二维 B-C 蜂窝层,因此还研究了这些发射光谱的取向依赖性。实验数据与理论计算的材料价带部分状态密度进行了比较。C K 发射曲线显示出明显的方向依赖性,而 B K 发射则显示出最小的依赖性。这种差异源于价带中 C-2pz 和 B-2pz 成分的能量分布不同。镁的 L 发射强度非常小,这可能是由于电荷从镁原子转移到了 B-N 层。镁的 L 发射曲线显示了一个与 C-K 和 B-K 结构有关的峰值。在价带的正上方观察到了一个意想不到的强度,它也显示了取向依赖性,这可能是由于与 Mg:B:C = 1:2:2 的理想组成存在微小偏差。
{"title":"Anisotropic electronic structure study of MgB2C2 using soft X-ray emission spectroscopy microscopes.","authors":"Yuki Hada, Masami Terauchi, Tomoya Saito, Yohei K Sato, Masaaki Baba, Masatoshi Takeda","doi":"10.1093/jmicro/dfae048","DOIUrl":"10.1093/jmicro/dfae048","url":null,"abstract":"<p><p>The anisotropic electronic structure of MgB2C2 was studied using soft X-ray emission spectroscopy electron microscopes. MgB2C2 fragments were selected by examining C K-emission profiles. C and B K-emission and Mg L-emission spectra were obtained, revealing common and distinct structures that reflect the mixing of valence orbitals. Since the material is reported to have two-dimensional B-C honeycomb layers, the orientational dependence of these emission spectra was also examined. Experimental data were compared with the theoretically calculated partial density of states of the valence bands (VBs) of the material. The C K-emission profile showed an apparent orientational dependence, while the B K-emission exhibited minimal dependence. This difference originated from the different energy distributions of C-2pz and B-2pz components in the VBs. The Mg L-emission intensity was very small, likely due to charge transfer from Mg atoms to B-N layers. The Mg L-emission profile showed a peak related to structures in C-K and B-K. An unexpected intensity was observed just above the VBs, which also showed orientational dependence, possibly due to a small deviation from the ideal composition of Mg:B:C = 1:2:2.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"86-91"},"PeriodicalIF":0.0,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142482449","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Accurately deriving the momentum transfer dependence of the dielectric function ε(q, ω) using angle-resolved electron energy loss spectroscopy (AR-EELS) is necessary for evaluating the average electron-hole distance, i.e. the exciton size, in materials. Achieving accurate exciton size evaluations will promote the comprehension of optical functionality in materials such as photocatalysts. However, for amorphous materials, it is difficult to accurately derive ε(q, ω) because the elastic scattering intensity originating from the amorphous structure and the inelastic scattering intensity associated with elastic scattering overlap in the EELS spectrum. In this study, a method to remove these overlapping intensities from the EELS spectrum is proposed to accurately derive ε(q, ω) of an amorphous material. Amorphous SiO2 (am-SiO2) was subjected to AR-EELS measurements, and ε(q, ω) of am-SiO2 was derived after removing the intensity due to the amorphous structure using the proposed method. Thereafter, the exciton absorption intensity and the exciton size were evaluated. Applying the proposed method, the exciton absorption intensity was considerably suppressed in the q-region after 1.0 Å-1, where the elastic and inelastic scattering intensities originating from the amorphous structure are dominant. The exciton size evaluated was 2 nm ($ pm $ 1 nm), consistent with the theoretically predicted size of ∼1 nm. Therefore, the proposed method is effective for deriving accurate ε(q, ω), facilitating exciton size evaluation for amorphous materials using AR-EELS.
{"title":"Derivation method of the dielectric function of amorphous materials using angle-resolved electron energy loss spectroscopy for exciton size evaluation.","authors":"Tomoya Saito, Yohei K Sato, Masami Terauchi","doi":"10.1093/jmicro/dfae056","DOIUrl":"10.1093/jmicro/dfae056","url":null,"abstract":"<p><p>Accurately deriving the momentum transfer dependence of the dielectric function ε(q, ω) using angle-resolved electron energy loss spectroscopy (AR-EELS) is necessary for evaluating the average electron-hole distance, i.e. the exciton size, in materials. Achieving accurate exciton size evaluations will promote the comprehension of optical functionality in materials such as photocatalysts. However, for amorphous materials, it is difficult to accurately derive ε(q, ω) because the elastic scattering intensity originating from the amorphous structure and the inelastic scattering intensity associated with elastic scattering overlap in the EELS spectrum. In this study, a method to remove these overlapping intensities from the EELS spectrum is proposed to accurately derive ε(q, ω) of an amorphous material. Amorphous SiO2 (am-SiO2) was subjected to AR-EELS measurements, and ε(q, ω) of am-SiO2 was derived after removing the intensity due to the amorphous structure using the proposed method. Thereafter, the exciton absorption intensity and the exciton size were evaluated. Applying the proposed method, the exciton absorption intensity was considerably suppressed in the q-region after 1.0 Å-1, where the elastic and inelastic scattering intensities originating from the amorphous structure are dominant. The exciton size evaluated was 2 nm ($ pm $ 1 nm), consistent with the theoretically predicted size of ∼1 nm. Therefore, the proposed method is effective for deriving accurate ε(q, ω), facilitating exciton size evaluation for amorphous materials using AR-EELS.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"117-123"},"PeriodicalIF":0.0,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11957257/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143191528","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Correction to: Structures of multisubunit membrane complexes with the CRYO ARM 200.","authors":"","doi":"10.1093/jmicro/dfae057","DOIUrl":"10.1093/jmicro/dfae057","url":null,"abstract":"","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"143"},"PeriodicalIF":0.0,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11957265/pdf/","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142900771","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This report revisits the statistical atom location by channeling enhanced microanalysis method, correcting the dopant site occupancy error by applying an appropriate error propagation rule. A revised equation for calculating the uncertainty in the determined dopant fractions is proposed. The revised equation is expected to correct the uncertainty in the determined dopant fractions, which is particularly significant in cases of low dopant concentrations and variable dopant occupancies across inequivalent host atomic sites. The approach is validated using Eu-doped Ca2SnO4 as a typical model system.
本报告重新探讨了沟道强化微分析(St-ALCHEMI)统计原子定位方法,通过应用适当的误差传播规则纠正了掺杂位点占有误差。提出了一个用于计算所确定的掺杂分数不确定性的修订方程。修订后的公式有望修正已确定掺杂分数的不确定性,这在掺杂浓度较低和不等效主原子位点的掺杂占位不稳定的情况下尤为重要。该方法以掺 Eu 的 Ca2SnO4 为典型模型系统进行了验证。
{"title":"Improved dopant fraction variance estimation in statistical ALCHEMI based on correct error propagation rule.","authors":"Akimitsu Ishizuka, Masahiro Ohtsuka, Shunsuke Muto","doi":"10.1093/jmicro/dfae052","DOIUrl":"10.1093/jmicro/dfae052","url":null,"abstract":"<p><p>This report revisits the statistical atom location by channeling enhanced microanalysis method, correcting the dopant site occupancy error by applying an appropriate error propagation rule. A revised equation for calculating the uncertainty in the determined dopant fractions is proposed. The revised equation is expected to correct the uncertainty in the determined dopant fractions, which is particularly significant in cases of low dopant concentrations and variable dopant occupancies across inequivalent host atomic sites. The approach is validated using Eu-doped Ca2SnO4 as a typical model system.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"134-136"},"PeriodicalIF":0.0,"publicationDate":"2025-03-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142549394","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yasushi Azuma, Kazuhiro Kumagai, Naoki Kunishima, Koichiro Ito
X-ray microscopy using computed tomography is an excellent 3D imaging instrument. Three-dimensional X-ray microscopy (3DXRM) is a nondestructive imaging technique used to inspect internal and external structures in units of submicrometers or less. The 3DXRM, although attractive, is mostly used as an observation instrument and is limited as a measurement system in quantitative evaluation and quality control. Calibration is required for use in measurement systems such as coordinate measurement systems, and specific standard samples and evaluation procedures are needed. The certified values of the standard samples must ideally be traceable to the International System of Units (SI). In the 3DXRM measurement system, line structures (LSs) are fabricated as prototype standard samples to conduct magnification calibration. In this study, we evaluated the LS intervals using calibrated cross-sectional scanning electron microscopy (SEM). A comparison of the evaluation results between SEM and 3DXRM for the LS intervals provided the magnification calibration factor for 3DXRM and validated the LSs, whereby the interval methods and feasibility of constructing an SI traceability system were evaluated using the calibrated SEM. Consequently, a magnification calibration factor of 1.01 was obtained for 3DXRM based on the intervals of the LSs evaluated by SEM. A possible route for realizing SI-traceable magnification calibration of 3DXRM has been presented.
使用计算机断层扫描(CT)的 X 射线显微镜是一种出色的三维成像仪器。三维 X 射线显微镜(3DXRM)是一种无损成像技术,用于检查单位为亚微米或更小的内部和外部结构。三维 X 射线显微镜虽然很有吸引力,但主要用作观察仪器,在定量评估和质量控制方面作为测量系统受到限制。在坐标测量系统等测量系统中使用时需要校准,并且需要特定的标准样品和评估程序。标准样品的认证值最好能溯源至国际单位制 (SI)。在 3DXRM 测量系统中,线结构 (LS) 被制作为原型标准样品,用于进行放大率校准。在本研究中,我们使用校准过的横截面扫描电子显微镜 (SEM) 对 LS 间隔进行了评估。通过比较扫描电子显微镜和 3DXRM 对 LS 间隔的评估结果,为 3DXRM 提供了放大倍率校准系数,并验证了 LS,从而使用校准的扫描电子显微镜评估了构建 SI 可追溯性系统的间隔方法和可行性。因此,根据 SEM 评估的 LS 间隔,3DXRM 的放大校准系数为 1.01。介绍了实现 SI 可追踪的 3DXRM 放大率校准的可能途径。
{"title":"Magnification calibration of X-ray 3D microscopy using micro-line structures.","authors":"Yasushi Azuma, Kazuhiro Kumagai, Naoki Kunishima, Koichiro Ito","doi":"10.1093/jmicro/dfae045","DOIUrl":"10.1093/jmicro/dfae045","url":null,"abstract":"<p><p>X-ray microscopy using computed tomography is an excellent 3D imaging instrument. Three-dimensional X-ray microscopy (3DXRM) is a nondestructive imaging technique used to inspect internal and external structures in units of submicrometers or less. The 3DXRM, although attractive, is mostly used as an observation instrument and is limited as a measurement system in quantitative evaluation and quality control. Calibration is required for use in measurement systems such as coordinate measurement systems, and specific standard samples and evaluation procedures are needed. The certified values of the standard samples must ideally be traceable to the International System of Units (SI). In the 3DXRM measurement system, line structures (LSs) are fabricated as prototype standard samples to conduct magnification calibration. In this study, we evaluated the LS intervals using calibrated cross-sectional scanning electron microscopy (SEM). A comparison of the evaluation results between SEM and 3DXRM for the LS intervals provided the magnification calibration factor for 3DXRM and validated the LSs, whereby the interval methods and feasibility of constructing an SI traceability system were evaluated using the calibrated SEM. Consequently, a magnification calibration factor of 1.01 was obtained for 3DXRM based on the intervals of the LSs evaluated by SEM. A possible route for realizing SI-traceable magnification calibration of 3DXRM has been presented.</p>","PeriodicalId":74193,"journal":{"name":"Microscopy (Oxford, England)","volume":" ","pages":"48-56"},"PeriodicalIF":0.0,"publicationDate":"2025-01-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142309284","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}