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Parallel conducting filaments in resistive switching ZnO thin films 电阻开关氧化锌薄膜中的平行导电丝
IF 1.6 4区 物理与天体物理 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-13 DOI: 10.1063/5.0232595
Tai-Min Liu, Zong-Wei Wu, Ting-An Chien, Pin-Qian Yang, Hua-Shu Hsu, Fang-Yuh Lo
This study examines resistive switching in a Cu/ZnO/ITO structure, uncovering an anomalous phenomenon that provides insights into the mechanisms of parallel conducting filaments in ZnO thin films. The current–voltage (I–V) characteristics exhibit a sharp switch at a positive threshold voltage around 2 V, transitioning from a high resistance pristine state to a low resistance state, interpreted as the formation of a Cu filament via electrochemical metallization. However, after this forming process, the device remains in the low resistance state and cannot reset to a high resistance state in either polarity of the applied voltage, suggesting the presence of a strong, unbreakable Cu filament after the forming process. What makes this phenomenon anomalous is the observed weak bipolar resistive switching in the cycles following the forming cycle, despite the presence of the Cu filament. The I–V characteristics of forward- and reverse-bias sweeps suggest that the weak bipolar resistive switching results from an additional filament formed in parallel with the existing unbreakable Cu filament. Using a parallel conducting filaments model, the resistivity of this additional filament is calculated to be ∼10−7–10−5 Ω m, indicating that this filament is likely generated by oxygen vacancies rather than metal atoms in the ZnO films.
这项研究考察了铜/氧化锌/氧化钛结构中的电阻开关,发现了一种异常现象,为了解氧化锌薄膜中平行导电丝的机制提供了启示。电流-电压(I-V)特性在 2 V 左右的正阈值电压时出现急剧切换,从高电阻原始状态过渡到低电阻状态,这被解释为通过电化学金属化形成了铜丝。然而,在这一形成过程之后,该器件仍处于低电阻状态,无论施加哪种极性的电压,都无法复位到高电阻状态,这表明在形成过程之后,存在着坚固、牢不可破的铜丝。使这一现象反常的是,尽管存在铜丝,但在成型周期之后的周期中观察到了微弱的双极电阻开关。正向和反向偏压扫描的 I-V 特性表明,微弱的双极电阻开关是由于与现有的不易破碎铜丝平行形成的附加铜丝造成的。利用平行导电丝模型,计算出这条附加丝的电阻率为 ∼10-7-10-5 Ω m,这表明这条附加丝很可能是由氧化锌薄膜中的氧空位而不是金属原子产生的。
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引用次数: 0
Numerical analysis of pantograph–catenary coupling vibration for high-speed railways 高速铁路受电弓与轨道联轴器振动的数值分析
IF 1.6 4区 物理与天体物理 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-13 DOI: 10.1063/5.0219474
Like Pan, Peihuo Peng, Liming Chen, Fan He
There is a pronounced coupling vibration between the catenary and pantograph during operation for high-speed railways. In this paper, a pantograph–catenary coupling vibration model is constructed to investigate the vibration characteristics under various working conditions. Two different types of catenaries (simple and elastic chain types) are simulated and compared using the finite element method. The pantograph is simplified into a mass–spring–damping combination member, the contact and messenger wires are set to linear beam cells, and the dropper and stitch wire are set to truss cells. The results suggest that the vibration characteristics of the two types of catenaries and pantograph exhibit different trends. The maximum stresses of the messenger wire, dropper, and contact wire do not follow a monotonically increasing trend with the train speed. The maximum stress of the messenger wire under the simple chain type of catenary is higher when the initial contact force increases from 80 to 120 N. However, the maximum stress under the elastic chain type of catenary is higher when the initial contact force is 60 or 140 N. Except for the initial contact force of 140 N, the maximum stresses of the dropper and contact wire under the simple chain type of catenary are lower than those under the elastic chain type. This work provides a valuable reference for optimizing the design of pantograph–catenary systems.
高速铁路在运行过程中,受电弓和集电弓之间会产生明显的耦合振动。本文构建了一个受电弓-导轨耦合振动模型,以研究各种工况下的振动特性。使用有限元法模拟并比较了两种不同类型的导管(简单型和弹性链型)。受电弓被简化为质量-弹簧-阻尼组合件,接触线和信使线被设置为线性梁单元,垂线和缝线被设置为桁架单元。结果表明,两种类型的导管和受电弓的振动特性呈现出不同的趋势。信使钢丝、垂管和接触钢丝的最大应力并不随列车速度呈单调增长趋势。当初始接触力从 80 牛增加到 120 牛时,简单链式导管架下信使线的最大应力较高;而当初始接触力为 60 牛或 140 牛时,弹性链式导管架下的最大应力较高。这项研究为优化受电弓-牵引系统的设计提供了有价值的参考。
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引用次数: 0
The effects of metal oxides doping on the surface stability of In2O3 for CO2 hydrogenation 掺杂金属氧化物对 In2O3 在 CO2 加氢过程中表面稳定性的影响
IF 1.6 4区 物理与天体物理 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-13 DOI: 10.1063/5.0224256
Xingtang Xu, Yanwei Li, Guang Sun, Jianliang Cao, Yan Wang, Xulong Qin
The significance of maintaining the surface stability of the In2O3 catalyst in the conversion of CO2 to methanol through hydrogenation cannot be overstated. To improve surface stability, doping with metal oxides is usually employed. To explore high-efficiency In2O3 based catalysts, density functional theory calculations were utilized to explore the effects of doping CuO, Co2O3, NiO, TiO2, HfO2, Nb2O3, Ta2O5, and CeO2 on the stability of the In2O3(110) surface. It was found that in a CO atmosphere, the crucial step in determining the creation of oxygen vacancies on the In2O3 plane occurred during the desorption of CO2 from the vacancy location. The results indicate that doping CuO, Co2O3, NiO, Nb2O3, Ta2O5, and CeO2 on the In2O3(110) surface promotes the reduction process through the reaction of CO with the O atoms on the surface, resulting in reduced surface stability. Conversely, the doping of Ti and Hf can raise the reaction energy barriers for CO reacting with the O atoms on the surface and enhance CO2 molecule adsorption on vacant sites, thereby suggesting the potential of TiO2 and HfO2 as effective modifiers to improve the efficiency and durability of the In2O3 catalyst. Furthermore, it is crucial to enhance its stability by modifying the density of the electron cloud or Fermi level of the In2O3 catalyst.
在通过氢化将二氧化碳转化为甲醇的过程中,保持 In2O3 催化剂表面稳定性的重要性怎么强调都不过分。为了提高表面稳定性,通常会采用掺杂金属氧化物的方法。为了探索基于 In2O3 的高效催化剂,研究人员利用密度泛函理论计算探讨了掺杂 CuO、Co2O3、NiO、TiO2、HfO2、Nb2O3、Ta2O5 和 CeO2 对 In2O3(110) 表面稳定性的影响。研究发现,在一氧化碳气氛中,决定 In2O3 表面产生氧空位的关键步骤发生在 CO2 从空位位置解吸的过程中。结果表明,在 In2O3(110)表面掺杂 CuO、Co2O3、NiO、Nb2O3、Ta2O5 和 CeO2 会通过 CO 与表面的 O 原子反应促进还原过程,导致表面稳定性降低。相反,Ti 和 Hf 的掺杂可以提高 CO 与表面 O 原子反应的反应能垒,增强 CO2 分子在空位上的吸附,从而表明 TiO2 和 HfO2 有可能成为有效的改性剂,提高 In2O3 催化剂的效率和耐用性。此外,通过改变 In2O3 催化剂的电子云密度或费米水平来提高其稳定性也至关重要。
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引用次数: 0
Experimental examination on electrochemical micro-machining of Mg–Li–Sr biomedical alloy: Application of ANOVA, Deng’s similarity, and ANFIS for effective modeling optimization 镁-锂-硒生物医用合金电化学微加工实验研究应用方差分析、邓氏相似性和 ANFIS 有效优化模型
IF 1.6 4区 物理与天体物理 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-13 DOI: 10.1063/5.0220057
V. Kavimani, P. M. Gopal, V. Sivamaran, Sameer Algburi, Debabrata Barik, Prabhu Paramasivam, Abdullah H. Alsabhan, Shamshad Alam
In this work, a newly discovered biomedical grade Magnesium–Lithium–Strontium (Mg–Li–Sr) alloy is machined using electrochemical machining technology. Two main output constraints employed on the research project to evaluate machinability are surface roughness (Ra) and material removal rate (MRR). Changing feed rate (FR), current, electrolyte concentration (EC), and voltage is required in order to carry out experimental experiments. The trials were designed using the Taguchi method. The ANOVA findings show that current is the most significant factor, after voltage as the most significant input parameter in regulating Ra and MRR. The ideal parameter configuration for the CRITIC-linked Deng’s similarity approach method was 5 V, 1 A of current, 0.4 mm/min of FR, and 20 g/l of EC. The final product was a 0.0323 mm/min MRR and a 2.61 μm surface roughness. Furthermore, the response variables are anticipated using the adaptive neuro-fuzzy Inference System, which finally results in predictions that are very similar to the experimental results.
在这项工作中,使用电化学加工技术加工了一种新发现的生物医学级镁-锂-锶(Mg-Li-Sr)合金。在该研究项目中,用于评估加工性能的两个主要输出约束条件是表面粗糙度 (Ra) 和材料去除率 (MRR)。为了进行实验,需要改变进给速度 (FR)、电流、电解液浓度 (EC) 和电压。试验采用田口方法进行设计。方差分析结果表明,电流是调节 Ra 和 MRR 最重要的输入参数,仅次于电压。CRITIC 链接邓相似性方法的理想参数配置为 5 V、1 A 电流、0.4 mm/min FR 和 20 g/l EC。最终产品的 MRR 为 0.0323 mm/min,表面粗糙度为 2.61 μm。此外,还利用自适应神经模糊推理系统对响应变量进行了预测,最终得出的预测结果与实验结果非常相似。
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引用次数: 0
Solid-state reactions at niobium–germanium interfaces in hybrid quantum electronics 混合量子电子学中铌锗界面的固态反应
IF 1.6 4区 物理与天体物理 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-13 DOI: 10.1063/5.0221366
B. Langa, D. Sapkota, I. Lainez, R. Haight, B. Srijanto, L. Feldman, H. Hijazi, X. Zhu, L. Hu, M. Kim, K. Sardashti
Hybrid superconductor–semiconductor materials systems are promising candidates for quantum computing applications. Their integration into superconducting electronics has enabled on-demand voltage tunability at millikelvin temperatures. Ge quantum wells have been among the semiconducting platforms interfaced with superconducting Al to realize voltage tunable Josephson junctions. Here, we explore Nb as a superconducting material in direct contact with Ge channels by focusing on the solid-state reactions at the Nb/Ge interfaces. We employ Nb evaporation at cryogenic temperatures (∼100 K) to establish a baseline structure with atomically and chemically abrupt Nb/Ge interfaces. By conducting systematic photoelectron spectroscopy and transport measurements on Nb/Ge samples across varying annealing temperatures, we elucidated the influence of Ge out-diffusion on the ultimate performance of superconducting electronics. This study underlines the need for low-temperature growth to minimize chemical intermixing and band bending at the Nb/Ge interfaces.
混合超导体-半导体材料系统是量子计算应用的理想候选材料。将它们集成到超导电子器件中,可以在毫开尔文温度下实现按需电压可调。Ge 量子阱是与超导 Al 相连接的半导体平台之一,可实现电压可调的约瑟夫森结。在这里,我们通过重点研究铌/锗界面的固态反应,探索铌作为超导材料与 Ge 沟道的直接接触。我们采用在低温(∼100 K)下蒸发铌的方法,建立了具有原子和化学突变铌/锗界面的基线结构。通过对不同退火温度下的 Nb/Ge 样品进行系统的光电子能谱和传输测量,我们阐明了 Ge 外扩散对超导电子器件最终性能的影响。这项研究强调了低温生长的必要性,以尽量减少铌/锗界面上的化学混杂和带弯曲。
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引用次数: 0
Semantic segmentation algorithm for pantograph based on multi-scale strip pooling attention mechanism and application research 基于多尺度条带汇集关注机制的受电弓语义分割算法及应用研究
IF 1.6 4区 物理与天体物理 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-13 DOI: 10.1063/5.0230117
Renjie Shi, Liming Li, Shubin Zheng, Yizhou Mao, Xiaoxue An
Detecting pantographs remains a challenging task due to complex scenes, variable weather conditions, and noise interference. Existing pantograph detection methods struggle to effectively segment the complete shape of the pantograph from intricate backgrounds and adverse weather, and they often exhibit inadequate real-time performance. To address these challenges, we propose a novel pantograph segmentation method that leverages a deep learning multi-scale strip pooling attention mechanism. Our approach utilizes the PidNet semantic segmentation network as the baseline architecture, while we introduce a newly designed multi-scale strip pooling attention mechanism specifically for the detail extraction branch. The multi-scale strip convolution branch effectively extracts the pantograph pixel-level detail features, while the pooling branch effectively extracts the macroscopic features of the pantograph. The unique linear interpolation method effectively mitigates the influence of weather, enhancing segmentation accuracy while maintaining a lightweight structure. In the context aggregation branch, a multi-scale context aggregation module utilizing gated convolution has been developed to replace the original network’s module, which possesses strong pantograph positioning capabilities. In comparison to existing pantograph detection methods, our model demonstrates the ability to accurately segment the pantograph with a clearly defined shape, effectively filter out extraneous background noise, and exhibit high robustness to variations in illumination and weather conditions. In addition, a rich pantograph dataset was created, including various scenarios and weather conditions, which also enhanced the robustness of the model. When the IOU and accuracy are 92.91% and 96.04%, respectively, the inference speed can still exceed 30 FPS on a single 2080Ti GPU.
由于场景复杂、天气条件多变和噪声干扰,受电弓的检测仍然是一项具有挑战性的任务。现有的受电弓检测方法难以从错综复杂的背景和恶劣的天气中有效地分割出受电弓的完整形状,而且它们往往表现出不足的实时性。为了应对这些挑战,我们提出了一种利用深度学习多尺度条带汇集注意力机制的新型受电弓分割方法。我们的方法利用 PidNet 语义分割网络作为基线架构,同时专门为细节提取分支引入了新设计的多尺度条带汇集关注机制。多尺度条带卷积分支能有效提取受电弓像素级的细节特征,而池化分支则能有效提取受电弓的宏观特征。独特的线性插值方法有效减轻了天气的影响,在保持轻量级结构的同时提高了分割精度。在上下文聚合分支中,开发了一个利用门控卷积的多尺度上下文聚合模块,以取代原有网络的模块,该模块具有很强的受电弓定位能力。与现有的受电弓检测方法相比,我们的模型能够准确分割形状清晰的受电弓,有效过滤无关的背景噪声,并对光照和天气条件的变化表现出较高的鲁棒性。此外,我们还创建了一个丰富的受电弓数据集,其中包括各种场景和天气条件,这也增强了模型的鲁棒性。当 IOU 和准确率分别为 92.91% 和 96.04% 时,在单个 2080Ti GPU 上的推理速度仍可超过 30 FPS。
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引用次数: 0
Does the full configuration interaction method based on quantum phase estimation with Trotter decomposition satisfy the size consistency condition? 基于量子相位估计和特罗特分解的全构型相互作用方法是否满足尺寸一致性条件?
IF 1.6 4区 物理与天体物理 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-13 DOI: 10.1063/5.0223661
Kenji Sugisaki
Electronic structure calculations of atoms and molecules are considered to be a promising application for quantum computers. Two key algorithms, the quantum phase estimation (QPE) and the variational quantum eigensolver (VQE), have been extensively studied. The condition that the energy of a dimer consisting of two monomers separated by a large distance should be equal to twice the energy of a monomer, known as size consistency, is essential in quantum chemical calculations. Recently, we reported that the size consistency condition can be violated by Trotterization in the unitary coupled cluster singles and doubles ansatz in the VQE when employing molecular orbitals delocalized to the dimer [Sugisaki et al., J. Comput. Chem. 45, 2204 (2024)]. It is well known that the full configuration interaction (full-CI) energy is invariant to arbitrary rotations of molecular orbitals, and therefore, the QPE-based full-CI should theoretically satisfy the size consistency. However, Trotterization of the time evolution operator can break the size consistency conditions. In this work, we investigated whether size consistency can be maintained with Trotterization of the time evolution operator in QPE-based full-CI calculations. Our numerical simulations revealed that size consistency in the QPE-based full-CI is not automatically violated by using molecular orbitals delocalized to the dimer, but employing an appropriate Trotter decomposition condition is crucial to maintain size consistency. We also report on the acceleration of QPE simulations through the sequential addition of ancillary qubits.
原子和分子的电子结构计算被认为是量子计算机的一项前景广阔的应用。量子相位估算(QPE)和可变量子求解器(VQE)这两种关键算法已得到广泛研究。在量子化学计算中,由两个相距甚远的单体组成的二聚体的能量应等于一个单体能量的两倍,这一条件被称为尺寸一致性。最近,我们报告了在 VQE 中的单元耦合簇单倍和双倍解析中,当采用二聚体中的分子轨道时,尺寸一致性条件可能会被 Trotterization 违反[Sugisaki 等人,J. Comput. Chem. 45, 2204 (2024)]。众所周知,全构型相互作用(full-CI)能量对分子轨道的任意旋转是不变的,因此,基于 QPE 的全构型相互作用理论上应该满足尺寸一致性。然而,时间演化算子的 Trotterization 会破坏尺寸一致性条件。在这项工作中,我们研究了在基于 QPE 的全 CI 计算中,时间演化算子的 Trotterization 是否能保持尺寸一致性。我们的数值模拟结果表明,在基于 QPE 的全 CI 计算中,使用分散到二聚体的分子轨道并不会自动破坏尺寸一致性,但采用适当的 Trotter 分解条件对保持尺寸一致性至关重要。我们还报告了通过依次添加辅助量子比特来加速 QPE 模拟的情况。
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引用次数: 0
Numerical investigation and sensitivity analysis of MHD ternary nanofluid flow between perforated squeezed Riga plates under the surveillance of microcantilever sensor 微悬臂传感器监控下穿孔挤压里加板之间的 MHD 三元纳米流体流动的数值研究与敏感性分析
IF 1.6 4区 物理与天体物理 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-13 DOI: 10.1063/5.0218608
Rajakumari Rammoorthi, Dhivya Mohanavel
This study addresses the magnetohydrodynamic flow of a squeezed ternary nanofluid between two horizontal parallel Riga plates. The importance of this problem lies in understanding the complex interactions between magnetic fields, nanofluid dynamics, and heat transfer, which are crucial for optimizing thermal management systems. This study utilizes a numerical approach, specifically a collocation method implemented in MATLAB, to solve the governing equations with high precision. Key results acquired indicate that the magnetic field and Riga plate actuator significantly enhance fluid velocity, whereas the variation in thermal conductivity, radiation, and viscous dissipation increases the temperature distribution. Quantitative analysis illustrates the impact of all these factors on skin friction and Nusselt number. Sensitivity analysis using the response surface methodology exhibits the conditions for optimized heat transfer. The novelty of this work lies in its comprehensive analysis of the magnetohydrodynamic flow in the presence of a microcantilever sensor, which provides deep understanding of optimization of heat transfer rates. This research offers a detailed examination of the combined effects of various physical phenomena and also validates them through graphical comparisons with existing studies.
本研究探讨了挤压三元纳米流体在两块水平平行的里加板之间的磁流体流动。该问题的重要性在于理解磁场、纳米流体动力学和热传递之间复杂的相互作用,这对于优化热管理系统至关重要。本研究采用数值方法,特别是在 MATLAB 中实施的配位法,来高精度地求解支配方程。获得的主要结果表明,磁场和里加板致动器显著提高了流体速度,而热导率、辐射和粘性耗散的变化则增加了温度分布。定量分析说明了所有这些因素对表皮摩擦和努塞尔特数的影响。利用响应面方法进行的敏感性分析表明了优化传热的条件。这项工作的新颖之处在于它对存在微悬臂传感器的磁流体流动进行了全面分析,为优化传热率提供了深刻的理解。这项研究详细考察了各种物理现象的综合影响,并通过与现有研究的图形比较进行了验证。
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引用次数: 0
Numerical optimization of lead-based and lead-free absorber materials for perovskite solar cell (PSC) architectures: A SCAPS-1D simulation 针对过氧化物太阳能电池(PSC)结构的铅基和无铅吸收剂材料的数值优化:SCAPS-1D 模拟
IF 1.6 4区 物理与天体物理 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-13 DOI: 10.1063/5.0217486
Mostafizur Rahaman, Mahmudul Hasan, Rayan Md. Moinuddin, Md. Nasirul Islam
Due to the negative environmental impact, the usage of lead in perovskite solar cells has been a matter of concern. Moreover, a suitable replacement of Pb with similar optoelectrical properties is hard to find. MAPbI3 is the most common material that has been studied for solar PV applications. Compared to MAPbI3, Cs2TiBr6 and MASnI3 have been less studied. In this study, their potential in solar cell applications has been investigated. Titanium and tin are two materials that have been used in numerous studies as an alternative to Pb-based perovskite. However, the lack of optimization and combinations of electron transport layer (ETL) and hole transport layer (HTL) material choices leave a lot to be desired. In this study, two different perovskite absorber layers, Cs2TiBr6 and MASnI3, have been simulated, optimized, and compared with Pb-based MAPbI3, where La-doped BaSnO3 is used as ETL and CuSbS2 as HTL in identical cell architectures. La-doped BaSnO3 is well known for its high electron mobility and excellent optical properties, which makes it an ideal candidate for ETL. On the other hand, CuSbS2 has appropriate band alignment with perovskite materials and has a high absorption profile to be used as HTL. The simulations were analyzed by optimizing key parameters like absorber layer thickness, defect density, and temperature. The optimized device architecture reached the power conversion efficiencies (PCE) of 29.45% for MASnI3, followed by MAPbI3 (22.47%) and Cs2TiBr6 (21.96%). The result indicates that high performance lead-free perovskite cells are very much possible through proper material selection and optimization.
由于铅对环境的负面影响,在过氧化物太阳能电池中使用铅一直是个令人担忧的问题。此外,很难找到具有类似光电特性的合适的铅替代品。MAPbI3 是太阳能光伏应用研究中最常见的材料。与 MAPbI3 相比,Cs2TiBr6 和 MASnI3 的研究较少。本研究调查了它们在太阳能电池应用中的潜力。钛和锡这两种材料在大量研究中被用作铅基过氧化物的替代品。然而,电子传输层(ETL)和空穴传输层(HTL)材料的选择缺乏优化和组合,还有很多需要改进的地方。本研究模拟、优化了两种不同的包晶吸收层 Cs2TiBr6 和 MASnI3,并将其与铅基 MAPbI3 进行了比较,在相同的电池结构中,掺 La 的 BaSnO3 用作 ETL,CuSbS2 用作 HTL。众所周知,掺 La 的 BaSnO3 具有高电子迁移率和优异的光学特性,因此是 ETL 的理想候选材料。另一方面,CuSbS2 与过氧化物材料具有适当的能带排列,并且具有高吸收曲线,可用作 HTL。通过优化吸收层厚度、缺陷密度和温度等关键参数,对模拟结果进行了分析。优化器件结构后,MASnI3 的功率转换效率 (PCE) 达到 29.45%,其次是 MAPbI3(22.47%)和 Cs2TiBr6(21.96%)。结果表明,通过适当的材料选择和优化,高性能无铅包晶电池是完全可能实现的。
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引用次数: 0
Low-energy N+ ion beam induced chemical vapor deposition using tetraethyl orthosilicate, hexamethyldisiloxane, or hexamethyldigermane 使用正硅酸四乙酯、六甲基二硅氧烷或六甲基二锗烷的低能 N+ 离子束诱导化学气相沉积技术
IF 1.6 4区 物理与天体物理 Q4 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-09-11 DOI: 10.1063/5.0214908
Satoru Yoshimura, Takae Takeuchi, Masato Kiuchi
In this study, we conducted an experiment in which a source material was sprayed onto a substrate with simultaneous N+ ion beam injections. Hexamethyldisiloxane (HMDSO) or tetraethyl orthosilicate (TEOS) was used as a source material. The energy of N+ ions was set at 100 eV. The substrate temperature was set at room temperature. As a result of each trial, a film was deposited on the substrate in both HMDSO and TEOS cases. The film was analyzed by x-ray photoelectron spectroscopy (XPS) and Fourier transform infrared (FTIR) spectroscopy. We found that the film was silicon dioxide and nitrogen atoms (2–4 at. %) were included in the film. For comparison, a trial was also conducted in which hexamethyldigermane (HMDG) was sprayed onto a substrate with simultaneous 30 eV N+ ion beam injections. Although HMDG had no oxygen atoms in its molecule, XPS and FTIR results showed that the film was germanium oxide containing nitrogen (2 at. %).
在这项研究中,我们进行了一项实验,将源材料喷射到基底上,同时注入 N+ 离子束。我们使用六甲基二硅氧烷(HMDSO)或正硅酸四乙酯(TEOS)作为源材料。N+ 离子的能量设定为 100 eV。基底温度设定为室温。每次试验的结果都是在 HMDSO 和 TEOS 的基底上沉积出一层薄膜。通过 X 射线光电子能谱 (XPS) 和傅立叶变换红外光谱 (FTIR) 对薄膜进行了分析。我们发现薄膜是二氧化硅,其中含有氮原子(2-4%)。为了进行比较,我们还进行了一项试验,将六甲基二锗 (HMDG) 喷射到基底上,同时注入 30 eV N+ 离子束。虽然 HMDG 分子中没有氧原子,但 XPS 和傅立叶变换红外光谱结果表明,薄膜是含氮(2%)的氧化锗。
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引用次数: 0
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