2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474381
Hao Ren, S. Rangaswami, Hyung-Sool Lee, Junseok Chae
We report a micro-scale microbial fuel cell (MFC), having an ultramicroelectrode (UME) as its anode, aiming for a miniaturized energy converter of carbon-neutral renewable energy. Micro-scale MFCs have been studied for many years, yet the power density of them is orders of magnitude lower than that of macro-scale counterparts. In order to address this limitation, this work utilizes a ring-shape UME, which aims to enhance the diffusion of ions at the vicinity of micro-organisms, forming their biofilm on the UME. Areal and volumetric power densities of 7.72 W/m2 and 3,658 W/m3 are obtained, respectively; both are the highest ever reported among all MFCs to date, regardless of their sizes. In addition to the power densities, coulombic efficiency (CE) of 70 % and energy efficiencies of 20 % are marked, which makes the micro-scale MFC an attractive alternative in existing energy conversion portfolio.
{"title":"A micro-scale microbial fule cell (MFC) having ultramicroelectrode (UME) anode","authors":"Hao Ren, S. Rangaswami, Hyung-Sool Lee, Junseok Chae","doi":"10.1109/MEMSYS.2013.6474381","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474381","url":null,"abstract":"We report a micro-scale microbial fuel cell (MFC), having an ultramicroelectrode (UME) as its anode, aiming for a miniaturized energy converter of carbon-neutral renewable energy. Micro-scale MFCs have been studied for many years, yet the power density of them is orders of magnitude lower than that of macro-scale counterparts. In order to address this limitation, this work utilizes a ring-shape UME, which aims to enhance the diffusion of ions at the vicinity of micro-organisms, forming their biofilm on the UME. Areal and volumetric power densities of 7.72 W/m2 and 3,658 W/m3 are obtained, respectively; both are the highest ever reported among all MFCs to date, regardless of their sizes. In addition to the power densities, coulombic efficiency (CE) of 70 % and energy efficiencies of 20 % are marked, which makes the micro-scale MFC an attractive alternative in existing energy conversion portfolio.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83182706","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474164
K. Higashi, T. Kano, N. Miki
This paper demonstrates a microbial-robot that migrates in low Reynolds number fluidic environments powered by motile flagellated bacteria. To immobilize the flagellated bacteria strongly, we utilized bacterial cellulose (BC), which was produced by Gluconacetobacter xylinus. We evaluated the adhesion between the BC and the flagellated bacteria, Aliivibrio fischeri using a microfluidic shear device and confirmed that the superiority of BC over conventional MEMS materials. Conical-shaped BC was produced by Gluconacetobacter xylinus in conical microholes with a help of oxygen concentration gradient. A. fischeri were successfully immobilized onto the BC structure to form a microbial-robot, which could swim in culture media at an average speed of 4.8 μm/s.
{"title":"A self-swimming microbial-robot using microfabricated biopolymer","authors":"K. Higashi, T. Kano, N. Miki","doi":"10.1109/MEMSYS.2013.6474164","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474164","url":null,"abstract":"This paper demonstrates a microbial-robot that migrates in low Reynolds number fluidic environments powered by motile flagellated bacteria. To immobilize the flagellated bacteria strongly, we utilized bacterial cellulose (BC), which was produced by Gluconacetobacter xylinus. We evaluated the adhesion between the BC and the flagellated bacteria, Aliivibrio fischeri using a microfluidic shear device and confirmed that the superiority of BC over conventional MEMS materials. Conical-shaped BC was produced by Gluconacetobacter xylinus in conical microholes with a help of oxygen concentration gradient. A. fischeri were successfully immobilized onto the BC structure to form a microbial-robot, which could swim in culture media at an average speed of 4.8 μm/s.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84273007","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474464
M. Hiraoka, P. Fiorini, B. Vandecasteele, H. Tanaka, T. Podprocky, S. van Put, M. O. de Beeck, T. Matsuno, I. Yamashita
We developed a new type of conductive polymer (CP) actuator, specifically designed for miniaturized pumps and valves for lab-on-a-chip (LoC) applications. CP films soaked in an electrolyte solution reversibly change their thickness upon bias application. A large stroke actuator was fabricated by stacking several CP layers, bonded together by means of epoxy dots. The CP deposition process was optimized for obtaining the low surface roughness required for stacking. The maximum strain of stacked actuators and of individual layers was identical (13%), indicating that the dot gluing process eliminates strain losses previously observed in multi-layers actuators. Pumps and valves were fabricated and mounted on a microfluidic chip.
{"title":"Miniaturized pumps and valves, based on conductive polimer actuators, for lab-on-chip application","authors":"M. Hiraoka, P. Fiorini, B. Vandecasteele, H. Tanaka, T. Podprocky, S. van Put, M. O. de Beeck, T. Matsuno, I. Yamashita","doi":"10.1109/MEMSYS.2013.6474464","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474464","url":null,"abstract":"We developed a new type of conductive polymer (CP) actuator, specifically designed for miniaturized pumps and valves for lab-on-a-chip (LoC) applications. CP films soaked in an electrolyte solution reversibly change their thickness upon bias application. A large stroke actuator was fabricated by stacking several CP layers, bonded together by means of epoxy dots. The CP deposition process was optimized for obtaining the low surface roughness required for stacking. The maximum strain of stacked actuators and of individual layers was identical (13%), indicating that the dot gluing process eliminates strain losses previously observed in multi-layers actuators. Pumps and valves were fabricated and mounted on a microfluidic chip.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84353230","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474446
T. Nakakubo, K. Matsumoto, I. Shimoyama
We propose a patterning method of micro droplets. First, electrically charge droplets were dispersed in nonpolar solvent using electro-emulsification. Particularly, we obtained uniform droplets constantly by a double nozzle configuration with a smooth jet of the continuous phase. Then, the charged droplets were assembled in nonpolar solvent by electrostatic latent image. The charge value was estimated higher than ordinary ionized particles because the electrical charge was generated by the induction charging between the liquid interface at the nozzle and the electrode. Also, the charge of the droplets does not depend on the surface properties of the materials in the dispersed phase. Moreover, the size of the droplets could be controlled by changing the flow rate of the dispersed phase. Therefore, this method is expected to expand in application like sensors and composite materials.
{"title":"Patterning of micro-droplets in nonpolar solvent by electro-emulsification and electrophoresis","authors":"T. Nakakubo, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2013.6474446","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474446","url":null,"abstract":"We propose a patterning method of micro droplets. First, electrically charge droplets were dispersed in nonpolar solvent using electro-emulsification. Particularly, we obtained uniform droplets constantly by a double nozzle configuration with a smooth jet of the continuous phase. Then, the charged droplets were assembled in nonpolar solvent by electrostatic latent image. The charge value was estimated higher than ordinary ionized particles because the electrical charge was generated by the induction charging between the liquid interface at the nozzle and the electrode. Also, the charge of the droplets does not depend on the surface properties of the materials in the dispersed phase. Moreover, the size of the droplets could be controlled by changing the flow rate of the dispersed phase. Therefore, this method is expected to expand in application like sensors and composite materials.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83388186","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474385
Y.-S. Wu, I.C. Fang, C. Chieng, F. Tseng
In this paper, we successfully developed a fuel-self-propelled reaction device without consuming any external source of energy for passive micro direct methanol fuel cell (μDMFC) anodes by using the physical phenomenon of surface tension through three-type micro fluidic structures. Firstly, to prevent the backflow of fuel from the reaction zone due to generated gas pressure, highly dense micro-channels were arranged for fuel self-feeding. Interlaced V-shaped micro ribs were then arranged across the reaction zone to rapidly and uniformly distribute fuel into the reaction chambers. Lastly, in the reaction chambers, we combined micro and nano structures as platinum (Pt) catalyst support both to increase the reaction surface area and to remove the gas exhaust [1] for the performance enhancement of micro DMFCs.
{"title":"Design and fabrication of fuel-self-propelled reaction device for passive micro direct methanol fuel cell anodes","authors":"Y.-S. Wu, I.C. Fang, C. Chieng, F. Tseng","doi":"10.1109/MEMSYS.2013.6474385","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474385","url":null,"abstract":"In this paper, we successfully developed a fuel-self-propelled reaction device without consuming any external source of energy for passive micro direct methanol fuel cell (μDMFC) anodes by using the physical phenomenon of surface tension through three-type micro fluidic structures. Firstly, to prevent the backflow of fuel from the reaction zone due to generated gas pressure, highly dense micro-channels were arranged for fuel self-feeding. Interlaced V-shaped micro ribs were then arranged across the reaction zone to rapidly and uniformly distribute fuel into the reaction chambers. Lastly, in the reaction chambers, we combined micro and nano structures as platinum (Pt) catalyst support both to increase the reaction surface area and to remove the gas exhaust [1] for the performance enhancement of micro DMFCs.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83888149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474272
P. C. Fletcher, R. Mangalam, L. Martin, W. King
We report field emission from nanometer-sharp tips of polarized PbZr0.2Ti0.8O3 (PZT) and silicon. The ferroelectric PZT emitters are a high-density array of single-crystal silicon tips that are coated with a 30 nm thick film of crystalline PZT in a batch fabrication process. The PZT emitter tips begin to emit electrons at fields as low as 2 V/μm and reach threshold emission at fields as low as 3.9 V/μm. This is considerably lower than the threshold field of 7.2 V/μm for uncoated silicon emitter tips. This improvement is about one order of magnitude improvement over previous publications for silicon tips. Using a Fowler-Nordheim analysis, we calculate the effective work function of the PZT film to be 1.00 eV and the field amplification factor to be 1525.
{"title":"Low voltage field emission from PbZr0.2Ti0.8O3-coated silicon nanotips","authors":"P. C. Fletcher, R. Mangalam, L. Martin, W. King","doi":"10.1109/MEMSYS.2013.6474272","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474272","url":null,"abstract":"We report field emission from nanometer-sharp tips of polarized PbZr0.2Ti0.8O3 (PZT) and silicon. The ferroelectric PZT emitters are a high-density array of single-crystal silicon tips that are coated with a 30 nm thick film of crystalline PZT in a batch fabrication process. The PZT emitter tips begin to emit electrons at fields as low as 2 V/μm and reach threshold emission at fields as low as 3.9 V/μm. This is considerably lower than the threshold field of 7.2 V/μm for uncoated silicon emitter tips. This improvement is about one order of magnitude improvement over previous publications for silicon tips. Using a Fowler-Nordheim analysis, we calculate the effective work function of the PZT film to be 1.00 eV and the field amplification factor to be 1525.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86903403","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474342
Wu Zhang, W. Zhu, Julius Ming-Lin Tsai, G. Lo, Dim-Lee Kwong, Er-Ping Li, Ai Qun Liu
The polarization of electromagnetic (EM) wave plays an essential role in the application of optoelectronics, life science microscopy and photographic display[1]. The conversion of EM wave in one polarized direction to its orthogonal direction is usually quite weak in natural materials. This paper presents a tunable metamaterial which rotates the polarized direction up to 20° in THz regime. The metamaterial can be transformed to its non-superimposable mirror image and tunes the polarization angle, which can be applied as tunable wave plate and optical switch in THz regime.
{"title":"Thz polarizer using tunable metamaterials","authors":"Wu Zhang, W. Zhu, Julius Ming-Lin Tsai, G. Lo, Dim-Lee Kwong, Er-Ping Li, Ai Qun Liu","doi":"10.1109/MEMSYS.2013.6474342","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474342","url":null,"abstract":"The polarization of electromagnetic (EM) wave plays an essential role in the application of optoelectronics, life science microscopy and photographic display[1]. The conversion of EM wave in one polarized direction to its orthogonal direction is usually quite weak in natural materials. This paper presents a tunable metamaterial which rotates the polarized direction up to 20° in THz regime. The metamaterial can be transformed to its non-superimposable mirror image and tunes the polarization angle, which can be applied as tunable wave plate and optical switch in THz regime.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88314380","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474298
Yoshitaka Yoshizumi, Y. Date, K. Ohkubo, M. Yokokawa, Hiroaki Suzuki
Zinc/platinum (Zn/Pt) bimetallic micromotors have been developed. They moved based on the reduction of fuel compounds such as bromine, p-benzoquinone, and methanol at the surface of the Pt and the oxidation (dissolution) of Zn that occur simultaneously. The redox potential of Zn2+/Zn is very negative and was advantageous to cause the redox reactions. The motion of the motor and the reactions that occurred on the surface were investigated. With test motors containing Ni, it was revealed that the Zn/Pt motors showed almost unidirectional motion to the Zn side. Toxicity of Zn2+ is relatively lower than that of other metal ions. Also, the motor features the use of mild compounds such as methanol that are not harmful to tissues or organisms as their fuels.
{"title":"Bimetallic micromotor autonomously movable in biofuels","authors":"Yoshitaka Yoshizumi, Y. Date, K. Ohkubo, M. Yokokawa, Hiroaki Suzuki","doi":"10.1109/MEMSYS.2013.6474298","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474298","url":null,"abstract":"Zinc/platinum (Zn/Pt) bimetallic micromotors have been developed. They moved based on the reduction of fuel compounds such as bromine, p-benzoquinone, and methanol at the surface of the Pt and the oxidation (dissolution) of Zn that occur simultaneously. The redox potential of Zn2+/Zn is very negative and was advantageous to cause the redox reactions. The motion of the motor and the reactions that occurred on the surface were investigated. With test motors containing Ni, it was revealed that the Zn/Pt motors showed almost unidirectional motion to the Zn side. Toxicity of Zn2+ is relatively lower than that of other metal ions. Also, the motor features the use of mild compounds such as methanol that are not harmful to tissues or organisms as their fuels.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88377564","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474252
T. Osaki, K. Kamiya, R. Kawano, S. Takeuchi
This paper aimed to develop a pendant liposome system that allows the access to both internal and external solutions of the formed liposomes. The access to the internal solution was achieved by a through-hole fabricated on the substrate, which was designed underneath the pendant-like, dome-shaped liposome. The formation of a uniform-size liposome array was based on our previous works that applied an electrospray deposition technique for a lipid micropatterning. With rehydration of the lipid pattern, we could observe a formation of a dome-shaped liposome array covering over the holes and a release of the liposomes. We further intend for exchanging the internal solution and/or encapsulating biological components with the developed system.
{"title":"Pendant liposome system to access the internal solution","authors":"T. Osaki, K. Kamiya, R. Kawano, S. Takeuchi","doi":"10.1109/MEMSYS.2013.6474252","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474252","url":null,"abstract":"This paper aimed to develop a pendant liposome system that allows the access to both internal and external solutions of the formed liposomes. The access to the internal solution was achieved by a through-hole fabricated on the substrate, which was designed underneath the pendant-like, dome-shaped liposome. The formation of a uniform-size liposome array was based on our previous works that applied an electrospray deposition technique for a lipid micropatterning. With rehydration of the lipid pattern, we could observe a formation of a dome-shaped liposome array covering over the holes and a release of the liposomes. We further intend for exchanging the internal solution and/or encapsulating biological components with the developed system.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87958210","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474207
R. B. Erarslan, S. Z. Lulec, U. Adiyan, S. Olcer, Y. Temiz, Y. Leblebici, H. Torun, H. Urey
This paper reports a micro electro-mechanical system (MEMS) based sensor array integrated with CMOS-based optical readout. The integrated architecture has several unique features and reported here for the first time. MEMS devices are passive and there are no electrical connections to the MEMS sensor array. Thus the architecture is scalable to large array formats for parallel measurement applications and can even be made as a disposable cartridge in the future using self-aligning features. A CMOS-based readout integrated circuit (ROIC) is integrated to the MEMS chip. Via holes are defined on ROIC by customized post-processing to enable integrated optical readout. A diffraction grating interferometer-based optical readout is realized by pixel-level illumination of the MEMS chip through the via holes and by capturing the reflected light using a photodetector array on the CMOS chip.
{"title":"MEMS sensor array platform integrated with CMOS based optical readout","authors":"R. B. Erarslan, S. Z. Lulec, U. Adiyan, S. Olcer, Y. Temiz, Y. Leblebici, H. Torun, H. Urey","doi":"10.1109/MEMSYS.2013.6474207","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474207","url":null,"abstract":"This paper reports a micro electro-mechanical system (MEMS) based sensor array integrated with CMOS-based optical readout. The integrated architecture has several unique features and reported here for the first time. MEMS devices are passive and there are no electrical connections to the MEMS sensor array. Thus the architecture is scalable to large array formats for parallel measurement applications and can even be made as a disposable cartridge in the future using self-aligning features. A CMOS-based readout integrated circuit (ROIC) is integrated to the MEMS chip. Via holes are defined on ROIC by customized post-processing to enable integrated optical readout. A diffraction grating interferometer-based optical readout is realized by pixel-level illumination of the MEMS chip through the via holes and by capturing the reflected light using a photodetector array on the CMOS chip.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86679363","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)
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