首页 > 最新文献

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献

英文 中文
Electrical conductivity and Seebeck coefficient measurements of single nanowires by utilizing a microfabricated thermoelectric nanowire characterization platform 利用微加工热电纳米线表征平台测量单纳米线的电导率和塞贝克系数
Z. Wang, S. Adhikari, M. Kroener, D. Kojda, R. Mitdank, S. F. Fischer, W. Toellner, K. Nielsch, P. Woias
We demonstrate the fabrication and improvements of our next generation Thermoelectric Nanowire Characterization Platform (TNCP) that is utilized to investigate the thermoelectric properties of individual nanowires to obtain the Seebeck coefficient S, electrical conductivity σ and thermal conductivity κ from the same test specimen. Only from these data, the so-called figure of merit ZT can be obtained for a single nanowire. In order to analyze the structural composition of single nanowires the TNCP has also to fulfill the purpose of a sample holder used in Transmission Electron Microscopy. Our second generation of TNCPs has been designed for these purposes. As before, individual nanowires are assembled on the TNCP by means of dielectrophoresis. After this assembly the nanowire is merely physically contacted to the electrodes on the TNCP. Contact generation is in first place done by an electron beam-induced deposition (EBID) process of Pt and measurements of S and σ are carried out on individual nanowires and presented here. As the EBID process is very complex and difficult to handle we have developed a novel method using a shadow mask process for the local evaporation of platinum to generate ohmic contact between the nanowire and the surrounding electrodes.
我们展示了下一代热电纳米线表征平台(TNCP)的制造和改进,该平台用于研究单个纳米线的热电特性,从而从同一试样中获得塞贝克系数S,电导率σ和导热系数κ。只有从这些数据中,才能得到单根纳米线的所谓质量曲线ZT。为了分析单纳米线的结构组成,TNCP还必须满足在透射电子显微镜中使用的样品夹的目的。我们的第二代tncp就是为此目的而设计的。和以前一样,单个纳米线通过介质电泳的方式组装在TNCP上。组装后,纳米线仅与TNCP上的电极物理接触。接触产生首先是通过电子束诱导沉积(EBID)工艺完成的,S和σ的测量是在单个纳米线上进行的,并在这里给出。由于EBID工艺非常复杂且难以处理,我们开发了一种新的方法,使用阴影掩膜工艺使铂的局部蒸发在纳米线和周围电极之间产生欧姆接触。
{"title":"Electrical conductivity and Seebeck coefficient measurements of single nanowires by utilizing a microfabricated thermoelectric nanowire characterization platform","authors":"Z. Wang, S. Adhikari, M. Kroener, D. Kojda, R. Mitdank, S. F. Fischer, W. Toellner, K. Nielsch, P. Woias","doi":"10.1109/MEMSYS.2013.6474290","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474290","url":null,"abstract":"We demonstrate the fabrication and improvements of our next generation Thermoelectric Nanowire Characterization Platform (TNCP) that is utilized to investigate the thermoelectric properties of individual nanowires to obtain the Seebeck coefficient S, electrical conductivity σ and thermal conductivity κ from the same test specimen. Only from these data, the so-called figure of merit ZT can be obtained for a single nanowire. In order to analyze the structural composition of single nanowires the TNCP has also to fulfill the purpose of a sample holder used in Transmission Electron Microscopy. Our second generation of TNCPs has been designed for these purposes. As before, individual nanowires are assembled on the TNCP by means of dielectrophoresis. After this assembly the nanowire is merely physically contacted to the electrodes on the TNCP. Contact generation is in first place done by an electron beam-induced deposition (EBID) process of Pt and measurements of S and σ are carried out on individual nanowires and presented here. As the EBID process is very complex and difficult to handle we have developed a novel method using a shadow mask process for the local evaporation of platinum to generate ohmic contact between the nanowire and the surrounding electrodes.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75663145","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Combinatorial differentiation induction of embrionic bodies in "PASCL (Pneumatically Actuated Spheroids Culture Lab-on-chip)" “气动驱动球体培养芯片实验室”中胚胎体的组合分化诱导
A. Yasukawa, M. Ikeuchi, K. Ikuta
This paper reports the fabrication, combinatorial differentiation and analysis of embryonic bodies (EBs) in one device called “PASCL (Pneumatically Actuated Spheroids Culture Lab-on-chip)”. We demonstrated EBs formation from human adipose derived stem cells (ADSC), differentiation into adipocytes and osteoblasts and staining for differentiation monitoring all in one PASCL.
本文报道了在一个名为PASCL(气动驱动球体培养芯片实验室)的设备上制备、组合分化和分析胚胎体(EBs)。我们证明了人脂肪源性干细胞(ADSC)形成EBs,分化为脂肪细胞和成骨细胞,并在一个PASCL中染色以监测分化。
{"title":"Combinatorial differentiation induction of embrionic bodies in \"PASCL (Pneumatically Actuated Spheroids Culture Lab-on-chip)\"","authors":"A. Yasukawa, M. Ikeuchi, K. Ikuta","doi":"10.1109/MEMSYS.2013.6474397","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474397","url":null,"abstract":"This paper reports the fabrication, combinatorial differentiation and analysis of embryonic bodies (EBs) in one device called “PASCL (Pneumatically Actuated Spheroids Culture Lab-on-chip)”. We demonstrated EBs formation from human adipose derived stem cells (ADSC), differentiation into adipocytes and osteoblasts and staining for differentiation monitoring all in one PASCL.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74706775","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Spira Mirabilis enhanced density gradient centrifguation 螺旋藻增强密度梯度离心
S. Kearney, D. Kinahan, J. Ducrée
The centrifugal microfluidic “lab-on-a-disc” paradigm is particularly suited to the pre-conditioning of whole blood. In this work we define the geometry of sedimentation chambers using the Spira Mirabilis (equiangular spiral) and so enhance the Boycott Effect and increase the speed at which blood may be stratified using a density gradient media. We find that using the Spira Mirabilis defined chambers can increase the speed of stratification by up to 25% compared with equivalent linear chambers.
离心微流体“盘上实验室”模式特别适合全血预处理。在这项工作中,我们使用Spira Mirabilis(等角螺旋)定义了沉降室的几何形状,从而增强了Boycott效应,并提高了使用密度梯度介质分层血液的速度。我们发现,与等效线性室相比,使用Mirabilis Spira定义的室可以将分层速度提高25%。
{"title":"Spira Mirabilis enhanced density gradient centrifguation","authors":"S. Kearney, D. Kinahan, J. Ducrée","doi":"10.1109/MEMSYS.2013.6474427","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474427","url":null,"abstract":"The centrifugal microfluidic “lab-on-a-disc” paradigm is particularly suited to the pre-conditioning of whole blood. In this work we define the geometry of sedimentation chambers using the Spira Mirabilis (equiangular spiral) and so enhance the Boycott Effect and increase the speed at which blood may be stratified using a density gradient media. We find that using the Spira Mirabilis defined chambers can increase the speed of stratification by up to 25% compared with equivalent linear chambers.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73229956","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Bistable multiple-mass elecrostatic generator for low-frequency vibration energy harvesting 用于低频振动能量收集的双稳态多质量静电发电机
F. Cottone, P. Basset, R. Guillemet, D. Galayko, F. Marty, T. Bourouina
This paper reports a novel vibration energy harvester (VEH) design consisting of a double-mass contactless frequency-up converter with buckled clamped-clamped beams. The vibration to electricity conversion is performed through a MEMS silicon micro electrostatic vibration energy harvester (e-VEH) based on in-plane gap-closing interdigitated combs. Despite the fact that the converter itself is designed to resonate at 162 Hz, the use of the bistable stage as mechanical exciter allows a gain factor of hundred when converting low-frequency vibrations (20-40 Hz) into electrical energy.
本文报道了一种新型振动能量采集器(VEH)的设计方案,该方案由双质量非接触式上频变换器和弯曲夹紧梁组成。通过基于面内闭锁梳的微机电系统(MEMS)硅微静电振动能量采集器(e-VEH)实现振动到电的转换。尽管转换器本身被设计为在162hz共振,但使用双稳级作为机械激励器,在将低频振动(20- 40hz)转换为电能时,允许增益因子为100。
{"title":"Bistable multiple-mass elecrostatic generator for low-frequency vibration energy harvesting","authors":"F. Cottone, P. Basset, R. Guillemet, D. Galayko, F. Marty, T. Bourouina","doi":"10.1109/MEMSYS.2013.6474379","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474379","url":null,"abstract":"This paper reports a novel vibration energy harvester (VEH) design consisting of a double-mass contactless frequency-up converter with buckled clamped-clamped beams. The vibration to electricity conversion is performed through a MEMS silicon micro electrostatic vibration energy harvester (e-VEH) based on in-plane gap-closing interdigitated combs. Despite the fact that the converter itself is designed to resonate at 162 Hz, the use of the bistable stage as mechanical exciter allows a gain factor of hundred when converting low-frequency vibrations (20-40 Hz) into electrical energy.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72746096","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Portable continuous glucose monitoring systems with implantable fluorescent hydrogel microfibers 可植入荧光水凝胶微纤维的便携式连续血糖监测系统
M. Takahashi, Y. Heo, T. Kawanishi, T. Okitsu, S. Takeuchi
We present a portable glucose monitoring system comprised of an implantable fluorescent-hydrogel sensor, wearable photo detector, microcontroller, wireless device and software for transdermal, continuous glucose monitoring. Although we showed the potential of the fluorescent-hydrogel fibers for applying to long-term, implanted glucose monitoring, “true” continuous glucose monitoring with a portable monitoring system has yet to be realized. In the system that we propose here, the calculated glucose values show a good correlation with the actual blood glucose concentrations. The portable device attached to the ear of a rat and measured the fluorescence intensity for three days. Therefore, our system shows the potential for practical, “true,” continuous glucose monitoring.
我们提出了一种便携式血糖监测系统,该系统由植入式荧光水凝胶传感器、可穿戴式光电探测器、微控制器、无线设备和软件组成,用于透皮连续血糖监测。虽然我们展示了荧光水凝胶纤维应用于长期植入式血糖监测的潜力,但“真正的”便携式监测系统的连续血糖监测尚未实现。在我们这里提出的系统中,计算出的葡萄糖值与实际血糖浓度有很好的相关性。该便携式装置附着在大鼠的耳朵上,连续三天测量荧光强度。因此,我们的系统显示了实际、“真实”、连续血糖监测的潜力。
{"title":"Portable continuous glucose monitoring systems with implantable fluorescent hydrogel microfibers","authors":"M. Takahashi, Y. Heo, T. Kawanishi, T. Okitsu, S. Takeuchi","doi":"10.1109/MEMSYS.2013.6474439","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474439","url":null,"abstract":"We present a portable glucose monitoring system comprised of an implantable fluorescent-hydrogel sensor, wearable photo detector, microcontroller, wireless device and software for transdermal, continuous glucose monitoring. Although we showed the potential of the fluorescent-hydrogel fibers for applying to long-term, implanted glucose monitoring, “true” continuous glucose monitoring with a portable monitoring system has yet to be realized. In the system that we propose here, the calculated glucose values show a good correlation with the actual blood glucose concentrations. The portable device attached to the ear of a rat and measured the fluorescence intensity for three days. Therefore, our system shows the potential for practical, “true,” continuous glucose monitoring.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79076831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Adaptable test-bed for characterization of micro-wineglass resonators 微型葡萄酒杯谐振器特性的适应性试验台
D. Senkal, M. Ahamed, A. Trusov, A. Shkel
We present an adaptable test-bed for characterization of 3-D micro-wineglass resonators. The test-bed provides two interchangeable modes of excitation: (1) Mechanical pinging using a piezo actuated probe assembly, (2) electrostatic excitation using assembled electrode structures with <; 20 μm capacitive gaps. Two modes of detection is also available: Optical pick-up using laser Doppler vibrometry and capacitive detection. 3-D micro-glassblown wineglass resonators were used to demonstrate the capabilities of the test-bed. Electrostatic excitation and capacitive detection was used to obtain the frequency response of a glass resonator showing a Q-factor of 40,000 at 14.8 kHz. Piezo-pinging was used to obtain the time domain response of a resonator, showing a 28 Hz frequency split (0.1% relative split) between the two degenerate wineglass modes (f1 = 22036 Hz, f2 = 22064 Hz).
我们提出了一种用于表征三维微酒杯谐振器的适应性试验台。该试验台提供两种可互换的激励模式:(1)使用压电驱动探头组件的机械ping,(2)使用<;20 μm电容隙。两种检测模式也可用:使用激光多普勒振动仪的光学拾取和电容检测。利用三维微玻璃吹制葡萄酒杯谐振器验证了该试验台的性能。采用静电激励和电容检测得到了14.8 kHz时q因子为40000的玻璃谐振器的频率响应。利用压电ping得到谐振器的时域响应,在两个简并酒杯模式(f1 = 22036 Hz, f2 = 22064 Hz)之间出现了28hz的频率分裂(0.1%的相对分裂)。
{"title":"Adaptable test-bed for characterization of micro-wineglass resonators","authors":"D. Senkal, M. Ahamed, A. Trusov, A. Shkel","doi":"10.1109/MEMSYS.2013.6474280","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474280","url":null,"abstract":"We present an adaptable test-bed for characterization of 3-D micro-wineglass resonators. The test-bed provides two interchangeable modes of excitation: (1) Mechanical pinging using a piezo actuated probe assembly, (2) electrostatic excitation using assembled electrode structures with <; 20 μm capacitive gaps. Two modes of detection is also available: Optical pick-up using laser Doppler vibrometry and capacitive detection. 3-D micro-glassblown wineglass resonators were used to demonstrate the capabilities of the test-bed. Electrostatic excitation and capacitive detection was used to obtain the frequency response of a glass resonator showing a Q-factor of 40,000 at 14.8 kHz. Piezo-pinging was used to obtain the time domain response of a resonator, showing a 28 Hz frequency split (0.1% relative split) between the two degenerate wineglass modes (f1 = 22036 Hz, f2 = 22064 Hz).","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79234701","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Metamaterial tunable filter with liquid metal 液态金属超材料可调滤波器
W. M. Zhu, W. Zhang, R. F. Huang, S. Ting, G. Lo, D. Kwong, A. Liu
In this paper, we demonstrate a metamaterial tunable filter with liquid metal, which can be tuned by adjusting the size and position of the air gap within the liquid metal. In experiment, it measures a 2.3 GHz tuning range for the tunable metmaterial unit with the working wavelength of 8.9 GHz. The tuning of 5 × 5 unit array is also demonstrated. Different from traditional metamaterials [1, 2], the metal patterns of the tunable metamaterial filter are liquid state which can be reshaped once fabricated. The liquid state metal pattern not only advances in flexible tuning method, but also results in large tuning range for vast applications, such as tunable filter, accelerometer and optical switch.
本文演示了一种利用液态金属的超材料可调谐滤波器,该滤波器可以通过调节液态金属内部气隙的大小和位置来调谐。实验结果表明,该可调谐材料单元的调谐范围为2.3 GHz,工作波长为8.9 GHz。并对5 × 5单元阵列的调谐进行了演示。与传统的超材料不同[1,2],可调谐超材料滤波器的金属图案是液态的,一旦制成就可以重塑。液态金属图案不仅在灵活的调谐方法上取得了进步,而且在可调谐滤波器、加速度计和光开关等广泛应用中具有大的调谐范围。
{"title":"Metamaterial tunable filter with liquid metal","authors":"W. M. Zhu, W. Zhang, R. F. Huang, S. Ting, G. Lo, D. Kwong, A. Liu","doi":"10.1109/MEMSYS.2013.6474345","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474345","url":null,"abstract":"In this paper, we demonstrate a metamaterial tunable filter with liquid metal, which can be tuned by adjusting the size and position of the air gap within the liquid metal. In experiment, it measures a 2.3 GHz tuning range for the tunable metmaterial unit with the working wavelength of 8.9 GHz. The tuning of 5 × 5 unit array is also demonstrated. Different from traditional metamaterials [1, 2], the metal patterns of the tunable metamaterial filter are liquid state which can be reshaped once fabricated. The liquid state metal pattern not only advances in flexible tuning method, but also results in large tuning range for vast applications, such as tunable filter, accelerometer and optical switch.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85193224","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
An on-chip opto-mechanical accelerometer 片上光机械加速度计
B. Dong, H. Cai, J. Tsai, D. Kwong, A. Liu
Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their practical applications [2]. In this paper, a novel in-plane opto-mechanical accelerometer is demonstrated, which employs Whisper Gallery Mode (WGM) ring resonator (RR) as a displacement sensor that monolithically integrated with a nano-tethered proof mass with high mechanical Q-factor. Utilizing design optimized for strong opto-mechanical interactions allows the detection with high sensitivity of 3.279 pm/g at low-power operation.
光学加速度计具有优越的位移分辨率和抗电磁干扰能力,这为从惯性导航到消费电子产品的广泛应用带来了好处[1,2]。然而,芯片规模集成的不可能阻碍了它们的实际应用[2]。本文介绍了一种新型的平面内光机械加速度计,该计采用耳语廊模式(WGM)环形谐振器(RR)作为位移传感器,并将其与具有高机械q因子的纳米系链防块单片集成。利用优化的强光-机械相互作用设计,可以在低功耗下以3.279 pm/g的高灵敏度进行检测。
{"title":"An on-chip opto-mechanical accelerometer","authors":"B. Dong, H. Cai, J. Tsai, D. Kwong, A. Liu","doi":"10.1109/MEMSYS.2013.6474323","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474323","url":null,"abstract":"Optically enabled accelerometers offer superior displacement resolution and resilience to electromagnetic interference, which brought benefits to a wide range of applications ranging from inertial navigation to consumer electronics [1, 2]. However, impossible chip scale integration hampered their practical applications [2]. In this paper, a novel in-plane opto-mechanical accelerometer is demonstrated, which employs Whisper Gallery Mode (WGM) ring resonator (RR) as a displacement sensor that monolithically integrated with a nano-tethered proof mass with high mechanical Q-factor. Utilizing design optimized for strong opto-mechanical interactions allows the detection with high sensitivity of 3.279 pm/g at low-power operation.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85148241","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
A miniature fiber-optic raster scanner for 2D optocal imaging of biological tissue 用于生物组织二维光学成像的微型光纤光栅扫描仪
H. Mansoor, H. Zeng, I. Tai, J. Zhao, M. Chiao
This paper presents a handheld device for reflectance confocal imaging of biological tissue. A two-dimensional fiber optic raster scanner has been designed, manufactured and assembled in standard half-inch lens tubes. The scanner is driven by electromagnetic forces and provides large actuation range of ≥1 mm in both directions with driving current of ≤ 200 mA. Light polarization effects have been employed to improve image quality and contrast. The confocal scanner has lateral resolution of about 1.5 μm with imaging speed of 6 frames per second. Confocal images of a resolution target, fruit fly wing and excised normal human colon tissue were obtained as a preliminary study.
本文介绍了一种用于生物组织反射共聚焦成像的手持装置。在标准的半英寸透镜管中设计、制造并组装了一种二维光纤光栅扫描仪。该扫描仪采用电磁力驱动,驱动电流≤200ma,双向驱动范围≥1mm。光偏振效应被用来提高图像质量和对比度。共聚焦扫描仪的横向分辨率约为1.5 μm,成像速度为6帧/秒。作为初步研究,获得了分辨率目标、果蝇翅膀和切除的正常人类结肠组织的共聚焦图像。
{"title":"A miniature fiber-optic raster scanner for 2D optocal imaging of biological tissue","authors":"H. Mansoor, H. Zeng, I. Tai, J. Zhao, M. Chiao","doi":"10.1109/MEMSYS.2013.6474196","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474196","url":null,"abstract":"This paper presents a handheld device for reflectance confocal imaging of biological tissue. A two-dimensional fiber optic raster scanner has been designed, manufactured and assembled in standard half-inch lens tubes. The scanner is driven by electromagnetic forces and provides large actuation range of ≥1 mm in both directions with driving current of ≤ 200 mA. Light polarization effects have been employed to improve image quality and contrast. The confocal scanner has lateral resolution of about 1.5 μm with imaging speed of 6 frames per second. Confocal images of a resolution target, fruit fly wing and excised normal human colon tissue were obtained as a preliminary study.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83726094","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Impedance biosensor based on interdigitated electrode arrays for detection of low levels of E.coli O157:H7 基于交叉指状电极阵列的阻抗生物传感器检测低水平大肠杆菌O157:H7
S. G. Dastider, Syed Barizuddin, Yifan Wu, M. Dweik, M. Almasri
We report an interdigitated electrode array (IDEA) impedance biosensor with rapid detection of Escherichia coli O157:H7. This biosensor has significantly better detection capability compared with the conventional microbiological testing method. The total detection time for this biosensor is under 3 hours. Dielectrophoresis (DEP) is used in conjunction with impedance spectroscopy to improve the detection capability of the biosensor. The IDEA surface is functionalized using anti-E.coli antibody for selectivity of the bacteria. The dose response was in-between 3 × 106 CFU/mL and 3 × 102 CFU/mL. This is 10 fold better than the detection limit previously reported using impedance based biosensors.
我们报道了一种能够快速检测大肠杆菌O157:H7的交叉指状电极阵列阻抗生物传感器。与传统的微生物检测方法相比,该传感器具有明显更好的检测能力。该生物传感器的总检测时间在3小时以下。Dielectrophoresis (DEP)与impedance spectroscopy(阻抗谱)结合使用来提高生物传感器的检测能力。IDEA表面使用anti-E功能化。大肠杆菌抗体对细菌的选择性。剂量效应介于3 × 106 CFU/mL和3 × 102 CFU/mL之间。这比以前报道的基于阻抗的生物传感器的检测极限好10倍。
{"title":"Impedance biosensor based on interdigitated electrode arrays for detection of low levels of E.coli O157:H7","authors":"S. G. Dastider, Syed Barizuddin, Yifan Wu, M. Dweik, M. Almasri","doi":"10.1109/MEMSYS.2013.6474404","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474404","url":null,"abstract":"We report an interdigitated electrode array (IDEA) impedance biosensor with rapid detection of Escherichia coli O157:H7. This biosensor has significantly better detection capability compared with the conventional microbiological testing method. The total detection time for this biosensor is under 3 hours. Dielectrophoresis (DEP) is used in conjunction with impedance spectroscopy to improve the detection capability of the biosensor. The IDEA surface is functionalized using anti-E.coli antibody for selectivity of the bacteria. The dose response was in-between 3 × 106 CFU/mL and 3 × 102 CFU/mL. This is 10 fold better than the detection limit previously reported using impedance based biosensors.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83357216","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
期刊
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1