2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474191
T. Rocheleau, A. Grine, K. Grutter, R. Schneider, N. Quack, M. Wu, C. Nguyen
A self-sustained Radiation-Pressure driven MEMS ring OptoMechanical Oscillator (RP-OMO) attaining an anchor-loss-limited mechanical Q-factor of 10,400 in vacuum has posted a best-to-date phase noise of -102 dBc/Hz at a 1 kHz offset from a 74 MHz carrier, more than 15 dB better than the best previously published mark [1]. While enhanced optical and mechanical Q both serve to lower the optical threshold power required to obtain oscillation, it is the mechanical Q that ends up having the strongest impact on phase noise [2], much as in a traditional MEMS-based oscillator [3]. This motivates a focus on increased mechanical Q-a challenge in previous such devices measured in air-and requires measurement in the absence of gas-damping using a custom optical vacuum measurement system. The improved phase noise performance of these RP-OMOs is now on par with many conventional MEMS-based oscillators and is sufficient for the targeted chip-scale atomic clock application.
{"title":"Enhancement of mechanical Q for low phase noise optomechanical oscillators","authors":"T. Rocheleau, A. Grine, K. Grutter, R. Schneider, N. Quack, M. Wu, C. Nguyen","doi":"10.1109/MEMSYS.2013.6474191","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474191","url":null,"abstract":"A self-sustained Radiation-Pressure driven MEMS ring OptoMechanical Oscillator (RP-OMO) attaining an anchor-loss-limited mechanical Q-factor of 10,400 in vacuum has posted a best-to-date phase noise of -102 dBc/Hz at a 1 kHz offset from a 74 MHz carrier, more than 15 dB better than the best previously published mark [1]. While enhanced optical and mechanical Q both serve to lower the optical threshold power required to obtain oscillation, it is the mechanical Q that ends up having the strongest impact on phase noise [2], much as in a traditional MEMS-based oscillator [3]. This motivates a focus on increased mechanical Q-a challenge in previous such devices measured in air-and requires measurement in the absence of gas-damping using a custom optical vacuum measurement system. The improved phase noise performance of these RP-OMOs is now on par with many conventional MEMS-based oscillators and is sufficient for the targeted chip-scale atomic clock application.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78868977","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474221
Yonghyun Shim, G. Hummel, M. Rais-Zadeh
Phase change materials are attractive candidates for use in ohmic switches as they can be thermally transitioned between amorphous and crystalline states, showing several orders of magnitude change in resistivity. Phase change switches are fast, small form factor, and can be readily integrated with MEMS and CMOS electronics. As such, they have a great potential for implementing next-generation high-speed reconfigurable RF modules. In this paper, we report on the RF properties of germanium tellurium, a PC material, and its use in RF switching applications. Intrinsic resistance and capacitance at the ON (crystalline) and OFF (amorphous) states of a directly heated switch are compared and characterized. Other properties such as phase transition conditions, insertion loss, return loss, and power handling capability of the switch are also measured and analyzed.
{"title":"RF switches using phase change materials","authors":"Yonghyun Shim, G. Hummel, M. Rais-Zadeh","doi":"10.1109/MEMSYS.2013.6474221","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474221","url":null,"abstract":"Phase change materials are attractive candidates for use in ohmic switches as they can be thermally transitioned between amorphous and crystalline states, showing several orders of magnitude change in resistivity. Phase change switches are fast, small form factor, and can be readily integrated with MEMS and CMOS electronics. As such, they have a great potential for implementing next-generation high-speed reconfigurable RF modules. In this paper, we report on the RF properties of germanium tellurium, a PC material, and its use in RF switching applications. Intrinsic resistance and capacitance at the ON (crystalline) and OFF (amorphous) states of a directly heated switch are compared and characterized. Other properties such as phase transition conditions, insertion loss, return loss, and power handling capability of the switch are also measured and analyzed.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90351803","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474308
Jinhyeok Kim, Y. Kawai, N. Inomata, T. Ono
In this paper, we design, fabricate and evaluate a resonant micro-mirror able to amplify the vibration amplitude using parametric amplification. In addition, the spring constant of torsion bars supporting the micro-mirror can be varied by stress generated using an electrothermal actuator, which can tune the resonant frequency of the torsional modes. The parametric amplification of the vibration of the torsional mode is demonstrated by applying a pumping signal using the electrothermal actuator.
{"title":"Parametrically driven resonant micro-mirror scanner with tunable springs","authors":"Jinhyeok Kim, Y. Kawai, N. Inomata, T. Ono","doi":"10.1109/MEMSYS.2013.6474308","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474308","url":null,"abstract":"In this paper, we design, fabricate and evaluate a resonant micro-mirror able to amplify the vibration amplitude using parametric amplification. In addition, the spring constant of torsion bars supporting the micro-mirror can be varied by stress generated using an electrothermal actuator, which can tune the resonant frequency of the torsional modes. The parametric amplification of the vibration of the torsional mode is demonstrated by applying a pumping signal using the electrothermal actuator.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89976595","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474419
W. Tonomura, Y. Mori, S. Konishi
This paper reports spatially arranged pyrolyzed polymer-gold probes to allow high-sensitivity monitoring of spatially distributed chemicals. Pyrolyzed polymer is a promising carbon material for applications of electrochemical sensors. Out-of-plane gold microelectrodes coated by polymer film (parylene-C) are transformed to conductive carbon-gold materials by annealing at 1000°C for 2h in a vacuum chamber. 3D probe technology using wire bonding makes it possible to provide the spatially arranged microelectrodes. This paper demonstrates pyrolyzed polymer-gold 3D probes have high sensitivity and wider electrochemical potential window than typical electrochemical electrode materials such as gold to realize spatial chemical sensing.
{"title":"High-sensitivity erectrochemical sensor using pyrolyzed polymer-gold 3D probe arrays for spatial chemical sensing","authors":"W. Tonomura, Y. Mori, S. Konishi","doi":"10.1109/MEMSYS.2013.6474419","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474419","url":null,"abstract":"This paper reports spatially arranged pyrolyzed polymer-gold probes to allow high-sensitivity monitoring of spatially distributed chemicals. Pyrolyzed polymer is a promising carbon material for applications of electrochemical sensors. Out-of-plane gold microelectrodes coated by polymer film (parylene-C) are transformed to conductive carbon-gold materials by annealing at 1000°C for 2h in a vacuum chamber. 3D probe technology using wire bonding makes it possible to provide the spatially arranged microelectrodes. This paper demonstrates pyrolyzed polymer-gold 3D probes have high sensitivity and wider electrochemical potential window than typical electrochemical electrode materials such as gold to realize spatial chemical sensing.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83692065","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474195
K. Wei, Yi Zhao
Most of currently employed laparoscopes use a single and non-tunable solid lens to visualize the surgical environment during minimal invasive interventions. These devices are limited due to the loss of depth perception, fixed view direction and narrow field-of-view (FOV). In this study, a three-dimensional deformable liquid lens array with adaptive focusing and directional view capability is developed. Miniature liquid lenses sealed by deformable membranes are arranged on a flexible substrate. During the operation, the flexible substrate where the liquid lenses reside is driven by hydraulic pressure and bulges into different curvatures, which results in the maximal angular difference of the optical axes of individual lenses in the array from 0° to 45°. The focal length of each lens can be simultaneously tuned from 64.3mm to 2.1mm. At the directional view of 45° and focal length of 2.1mm, the overall FOV exceeds 150°. This work promises the potential of directional and wide angle laparoscopic imaging where space constraint is a concern.
{"title":"A three-dimensional deformable liquid lens array for directional and wide angle laparoscopic imaging","authors":"K. Wei, Yi Zhao","doi":"10.1109/MEMSYS.2013.6474195","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474195","url":null,"abstract":"Most of currently employed laparoscopes use a single and non-tunable solid lens to visualize the surgical environment during minimal invasive interventions. These devices are limited due to the loss of depth perception, fixed view direction and narrow field-of-view (FOV). In this study, a three-dimensional deformable liquid lens array with adaptive focusing and directional view capability is developed. Miniature liquid lenses sealed by deformable membranes are arranged on a flexible substrate. During the operation, the flexible substrate where the liquid lenses reside is driven by hydraulic pressure and bulges into different curvatures, which results in the maximal angular difference of the optical axes of individual lenses in the array from 0° to 45°. The focal length of each lens can be simultaneously tuned from 64.3mm to 2.1mm. At the directional view of 45° and focal length of 2.1mm, the overall FOV exceeds 150°. This work promises the potential of directional and wide angle laparoscopic imaging where space constraint is a concern.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86655804","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474467
H. Hasegawa, T. Teshima, H. Onoe, S. Takeuchi
In this study, we purpose a centrifuge-based dynamic microarray system (CDM) for trapping micro-sized samples sequentially from only 10 μl of the samples. Our system enables us to make an array of microbeads only with a spin-coater. The air can be introduced to the microchannel to isolate and encapsulate the trapped beads by the specific speed rotation because the microbeads were fixed at the outlet of the trapping spots by the centrifugal force. We optimized rotation speed for trapping with the high trapping yield and successfully controlled sample/solution/air introduction. This device can also release the trapped beads by flowing liquid backward, which allows us to retrieve the microbeads and reuse the device. The presented technology marks an essential step towards a high efficient portable CDM for point-of-care use.
{"title":"Centrifuge-based dynamic microarray system toward an array of a few amount of sample","authors":"H. Hasegawa, T. Teshima, H. Onoe, S. Takeuchi","doi":"10.1109/MEMSYS.2013.6474467","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474467","url":null,"abstract":"In this study, we purpose a centrifuge-based dynamic microarray system (CDM) for trapping micro-sized samples sequentially from only 10 μl of the samples. Our system enables us to make an array of microbeads only with a spin-coater. The air can be introduced to the microchannel to isolate and encapsulate the trapped beads by the specific speed rotation because the microbeads were fixed at the outlet of the trapping spots by the centrifugal force. We optimized rotation speed for trapping with the high trapping yield and successfully controlled sample/solution/air introduction. This device can also release the trapped beads by flowing liquid backward, which allows us to retrieve the microbeads and reuse the device. The presented technology marks an essential step towards a high efficient portable CDM for point-of-care use.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88430965","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474329
S. Foland, Jeong-Bong Lee
We report the design, fabrication, and characterization of a high-resolution biaxial strain sensor based on guided-mode resonance (GMR) in a two-dimensional, asymmetric titanium dioxide nanograting embedded at the surface of a polydimethylsiloxane slab. The highly-compliant strain sensing technique used in this 2D GMR sensor relies on the shifting of the reflected resonant wavelengths, demonstrating a sensitivity of 4.8 nm/percent strain (%ε), which can be detected accurately by a high resolution spectrometer, thus providing exceptionally accurate strain measurements. To the best of our knowledge, this is the first demonstration of a 2D deformable GMR device, and the first demonstration of a 2D photonic strain sensor of this kind.
我们报道了一种基于导模共振(GMR)的高分辨率双轴应变传感器的设计、制造和表征，该传感器位于嵌入在聚二甲基硅氧烷板表面的二维非对称二氧化钛纳米光栅中。highly-compliant应变传感技术用于这2 d GMR传感器依靠反射谐振波长的改变,表明灵敏度为4.8 nm /应变(%ε)百分比,可通过高分辨率光谱仪检测准确,从而提供非常精确的应变测量。据我们所知，这是二维可变形GMR器件的首次演示，也是此类二维光子应变传感器的首次演示。
{"title":"A highly-compliant asymmetric 2D guided-mode resonance sensor for simultaneous measurement of dual-axis strain","authors":"S. Foland, Jeong-Bong Lee","doi":"10.1109/MEMSYS.2013.6474329","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474329","url":null,"abstract":"We report the design, fabrication, and characterization of a high-resolution biaxial strain sensor based on guided-mode resonance (GMR) in a two-dimensional, asymmetric titanium dioxide nanograting embedded at the surface of a polydimethylsiloxane slab. The highly-compliant strain sensing technique used in this 2D GMR sensor relies on the shifting of the reflected resonant wavelengths, demonstrating a sensitivity of 4.8 nm/percent strain (%ε), which can be detected accurately by a high resolution spectrometer, thus providing exceptionally accurate strain measurements. To the best of our knowledge, this is the first demonstration of a 2D deformable GMR device, and the first demonstration of a 2D photonic strain sensor of this kind.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77135567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474183
T. Liu, Guangyi Sun, Jong Jin Kim, C. Yang, C. Kim
We present a 2 cm-diameter rotary stage electrostatically actuated by ~15 VDC. Multiple rings of an ionic liquid are used as both low-friction mechanical bearings and electric connections between the rotor and the substrate. The ring-bearing device is the first that was successfully rotated by electrostatic forces among the recent rotary devices involving a liquid bearing. Compared with the recent side-driven counterpart, the bottom-driven device of this report not only reduces the actuation voltage but also enables a reliable capacitive position sensing.
{"title":"Electrostatic bottom-driven rotary stage on multiple conductive liquid-ring bearings","authors":"T. Liu, Guangyi Sun, Jong Jin Kim, C. Yang, C. Kim","doi":"10.1109/MEMSYS.2013.6474183","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474183","url":null,"abstract":"We present a 2 cm-diameter rotary stage electrostatically actuated by ~15 VDC. Multiple rings of an ionic liquid are used as both low-friction mechanical bearings and electric connections between the rotor and the substrate. The ring-bearing device is the first that was successfully rotated by electrostatic forces among the recent rotary devices involving a liquid bearing. Compared with the recent side-driven counterpart, the bottom-driven device of this report not only reduces the actuation voltage but also enables a reliable capacitive position sensing.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77535635","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474325
M. Elsayed, F. Nabki, M. El-Gamal
This work introduces a novel dodecagon bulk mode gyroscope structure with parallel plate comb drives. A major contribution, compared to prior art, is that adding combs connected to the central disk structure, at the points of maximum vibration amplitudes, increases the drive strength and results in significant improvement in sensitivity. This can enable the fabrication of high performance bulk-mode gyroscopes in standard commercial MEMS technologies. Prototypes were measured to operate at frequencies of ~1.5 MHz, with quality factors of ~33,000, at a 10 mTorr vacuum level. Preliminary measurements using discrete electronics show a rate sensitivity of 0.31 μV/°/sec, corresponding to a capacitance sensitivity of 0.43 aF/°/sec/electrode.
{"title":"A combined comb / bulk mode gyroscope structure for enhanced sensitivity","authors":"M. Elsayed, F. Nabki, M. El-Gamal","doi":"10.1109/MEMSYS.2013.6474325","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474325","url":null,"abstract":"This work introduces a novel dodecagon bulk mode gyroscope structure with parallel plate comb drives. A major contribution, compared to prior art, is that adding combs connected to the central disk structure, at the points of maximum vibration amplitudes, increases the drive strength and results in significant improvement in sensitivity. This can enable the fabrication of high performance bulk-mode gyroscopes in standard commercial MEMS technologies. Prototypes were measured to operate at frequencies of ~1.5 MHz, with quality factors of ~33,000, at a 10 mTorr vacuum level. Preliminary measurements using discrete electronics show a rate sensitivity of 0.31 μV/°/sec, corresponding to a capacitance sensitivity of 0.43 aF/°/sec/electrode.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86925333","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474287
M. Muoth, K. Chikkadi, Yu Liu, C. Hierold
Carbon nanotubes can withstand large elastic deformation and show pronounced piezoresistive effects which make them promising candidates for low-power strain sensors in the large strain regime. Integration of individual suspended nanotubes into complex microelectromechanical devices, including gate structures, is still a challenge. Here, ultraclean carbon nanotubes spanning across actuated MEMS electrodes are operated as suspended Carbon Nanotube Field-Effect Transistors (CNT-FETs) under repeated variable strain up to 4.5%, thus acting as small-sized piezoresistive strain gauges whose gauge factor is electrostatically tuned by the gate. We present the first quantified electromechanical analysis of suspended CNT-FETs to uniaxial strain applied by on-chip micro actuators.
{"title":"Suspended CNT-FET piezoresistive strain gauges: Chirality assignment and quantitative analysis","authors":"M. Muoth, K. Chikkadi, Yu Liu, C. Hierold","doi":"10.1109/MEMSYS.2013.6474287","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474287","url":null,"abstract":"Carbon nanotubes can withstand large elastic deformation and show pronounced piezoresistive effects which make them promising candidates for low-power strain sensors in the large strain regime. Integration of individual suspended nanotubes into complex microelectromechanical devices, including gate structures, is still a challenge. Here, ultraclean carbon nanotubes spanning across actuated MEMS electrodes are operated as suspended Carbon Nanotube Field-Effect Transistors (CNT-FETs) under repeated variable strain up to 4.5%, thus acting as small-sized piezoresistive strain gauges whose gauge factor is electrostatically tuned by the gate. We present the first quantified electromechanical analysis of suspended CNT-FETs to uniaxial strain applied by on-chip micro actuators.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90156041","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)
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