2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474225
Philip Zwanenburg, Xiao Li, Xinyu Liu
Multi-step analytical tests such as enzyme-linked immunosorbent assay (ELISA) require delivery of multiple fluids into a reaction zone and counting of incubation time at different steps. This paper presents a new type of paper-based magnetic valves that can count the time and turn on or off a fluidic flow accordingly, enabling timed fluid control in paper-based microfluidics. The timing function of these valves is realized using a paper timing channel with an ionic resistor, which can detect the event of a solution flowing through the resistor and trigger an electromagnet (through a simple circuit) to open or close a paper cantilever valve. Based on this principle, we developed normally-open and normally-closed valves with a timing period up to 30.3±2.1 minutes (sufficient for ELISA on paper-based platforms). Using the normally-open valve, we performed an enzyme-based colorimetric reaction commonly used for signal amplification of ELISAs, which requires a timed delivery of enzyme substrate to a reaction zone. This design adds a new fluid-control component to the tool set for developing paper-based microfluidic devices, and has the potential to improve the user-friendliness of these devices.
{"title":"Magnetic valves with programmable timing capability for fluid control in paper-based microfluidics","authors":"Philip Zwanenburg, Xiao Li, Xinyu Liu","doi":"10.1109/MEMSYS.2013.6474225","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474225","url":null,"abstract":"Multi-step analytical tests such as enzyme-linked immunosorbent assay (ELISA) require delivery of multiple fluids into a reaction zone and counting of incubation time at different steps. This paper presents a new type of paper-based magnetic valves that can count the time and turn on or off a fluidic flow accordingly, enabling timed fluid control in paper-based microfluidics. The timing function of these valves is realized using a paper timing channel with an ionic resistor, which can detect the event of a solution flowing through the resistor and trigger an electromagnet (through a simple circuit) to open or close a paper cantilever valve. Based on this principle, we developed normally-open and normally-closed valves with a timing period up to 30.3±2.1 minutes (sufficient for ELISA on paper-based platforms). Using the normally-open valve, we performed an enzyme-based colorimetric reaction commonly used for signal amplification of ELISAs, which requires a timed delivery of enzyme substrate to a reaction zone. This design adds a new fluid-control component to the tool set for developing paper-based microfluidic devices, and has the potential to improve the user-friendliness of these devices.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"28 1","pages":"253-256"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77898402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474322
R. Maimon, O. Lahav, Y. Gerson, O. Zohar, H. Berko, S. Krylov
This paper introduces a design, fabrication, integration and characterization, of a novel high-grade single axis tuning fork gyroscope (TFG), based on dual detection techniques - capacitive and optic (DDT-CO). This is the first time that the capacitive and optical sensing approaches are used, for the registering of the in-plane drive and in-plane sense mode responses. The two techniques are combined in the same fully functional vacuum packaged device with integrated electronics. We present the results of the rate-table performance study, and the sensor's main figures of merit. We show that the use of dual sensing significantly simplifies the silicon on insulator (SOI) fabrication process, allowing the achievement of tactical grade performance, including angular random walk (ARW) less than 0.15 °/√hr and in-run bias instability (BI) less than 2 °/hr.
{"title":"Tactical grade micro gyroscope with dual capcitive/optical sensing","authors":"R. Maimon, O. Lahav, Y. Gerson, O. Zohar, H. Berko, S. Krylov","doi":"10.1109/MEMSYS.2013.6474322","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474322","url":null,"abstract":"This paper introduces a design, fabrication, integration and characterization, of a novel high-grade single axis tuning fork gyroscope (TFG), based on dual detection techniques - capacitive and optic (DDT-CO). This is the first time that the capacitive and optical sensing approaches are used, for the registering of the in-plane drive and in-plane sense mode responses. The two techniques are combined in the same fully functional vacuum packaged device with integrated electronics. We present the results of the rate-table performance study, and the sensor's main figures of merit. We show that the use of dual sensing significantly simplifies the silicon on insulator (SOI) fabrication process, allowing the achievement of tactical grade performance, including angular random walk (ARW) less than 0.15 °/√hr and in-run bias instability (BI) less than 2 °/hr.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"1 1","pages":"637-640"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85697387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474318
F. Loizeau, Hans Peter Lang, Terunobu Akiyama, S. Gautsch, P. Vettiger, A. Tonin, Genki Yoshikawa, C. Gerber, N. D. Rooij
We present the fabrication, characterization and successful medical application of a membrane-type surface stress sensor (MSS), arranged in arrays for molecular detection in gaseous phase. Made out of SOI substrate, a round membrane with a diameter of 500 μm and a thickness of 2.5 μm is suspended by four sensing beams with integrated p-type piezoresistors, composing a full Wheatstone bridge. The membrane is coated with a thin polymer layer, which reacts with volatile molecules and produces a deflection of the membrane. The membranes were functionalized with various polymers and characterized as humidity sensors with a sensitivity of 87 mV/%RH and a time constant (Tau63%) of 1.3 s. Finally, through breath analysis and the use of principal component analysis (PCA), we were able, in a double blind trial, to distinguish cancer patients and healthy persons.
{"title":"Piezoresistive membrane-type surface stress sensor arranged in arrays for cancer diagnosis through breath analysis","authors":"F. Loizeau, Hans Peter Lang, Terunobu Akiyama, S. Gautsch, P. Vettiger, A. Tonin, Genki Yoshikawa, C. Gerber, N. D. Rooij","doi":"10.1109/MEMSYS.2013.6474318","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474318","url":null,"abstract":"We present the fabrication, characterization and successful medical application of a membrane-type surface stress sensor (MSS), arranged in arrays for molecular detection in gaseous phase. Made out of SOI substrate, a round membrane with a diameter of 500 μm and a thickness of 2.5 μm is suspended by four sensing beams with integrated p-type piezoresistors, composing a full Wheatstone bridge. The membrane is coated with a thin polymer layer, which reacts with volatile molecules and produces a deflection of the membrane. The membranes were functionalized with various polymers and characterized as humidity sensors with a sensitivity of 87 mV/%RH and a time constant (Tau63%) of 1.3 s. Finally, through breath analysis and the use of principal component analysis (PCA), we were able, in a double blind trial, to distinguish cancer patients and healthy persons.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"33 1","pages":"621-624"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84571513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474300
S. de Pedro, V. Cadarso, X. Muñoz‐Berbel, J. Plaza, J. Sort, J. Brugger, S. Buttgenbach, A. Llobera
This paper reports the implementation of magnetic variable optical attenuators (M-VOA) by soft lithography (SLT) and using polydimethylsiloxane (PDMS) as constituent material. Two different fabrication protocols are used and compared. In the first case, a two-layer structure containing a clean PDMS layer on a magnetic PDMS (M-PDMS) layer is fabricated by SLT. M-PDMS is obtained by doping clean PDMS with different ferrofluid (FF) amounts. The second protocol consists of selectively dispensing droplets of FF by the inkjet printing technique (IPT) on a clean and non-cured PDMS structure previously defined by SLT. The optical and mechanical properties of structures fabricated using both protocols and containing similar ferrofluid amounts are compared.
{"title":"Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies","authors":"S. de Pedro, V. Cadarso, X. Muñoz‐Berbel, J. Plaza, J. Sort, J. Brugger, S. Buttgenbach, A. Llobera","doi":"10.1109/MEMSYS.2013.6474300","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474300","url":null,"abstract":"This paper reports the implementation of magnetic variable optical attenuators (M-VOA) by soft lithography (SLT) and using polydimethylsiloxane (PDMS) as constituent material. Two different fabrication protocols are used and compared. In the first case, a two-layer structure containing a clean PDMS layer on a magnetic PDMS (M-PDMS) layer is fabricated by SLT. M-PDMS is obtained by doping clean PDMS with different ferrofluid (FF) amounts. The second protocol consists of selectively dispensing droplets of FF by the inkjet printing technique (IPT) on a clean and non-cured PDMS structure previously defined by SLT. The optical and mechanical properties of structures fabricated using both protocols and containing similar ferrofluid amounts are compared.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"1 1","pages":"548-551"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88500187","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474170
J. Lee, S. Pyo, M.-O Kim, T. Chung, H. Lee, S.-C Lim, J. Park, J. Kim
We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical resistance in each sensing part. High gauge factor up to 272 and fast response less than 10 ms have been experimentally verified from the presented tactile sensor. The deviated contact resistance change from the initial value was less than 3% after repeated force input of 15 mN for 180,000 cycles.
{"title":"Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes","authors":"J. Lee, S. Pyo, M.-O Kim, T. Chung, H. Lee, S.-C Lim, J. Park, J. Kim","doi":"10.1109/MEMSYS.2013.6474170","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474170","url":null,"abstract":"We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical resistance in each sensing part. High gauge factor up to 272 and fast response less than 10 ms have been experimentally verified from the presented tactile sensor. The deviated contact resistance change from the initial value was less than 3% after repeated force input of 15 mN for 180,000 cycles.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"540 1","pages":"37-40"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80225290","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474171
N. Thanh-Vinh, N. Binh-Khiem, K. Matsumoto, I. Shimoyama
We propose a highly sensitive three-dimensional tactile sensor using the structure of elastic micro pyramids pressing on piezoresistive cantilevers. In the structure of the sensor we proposed, the forces acting on the surface of the elastomer were transmitted to the cantilevers through the pyramids. The key point of our sensor was that the cantilevers were not completely embedded inside the elastomer: a cavity under each cantilever enabled the larger deformation and thus the larger resistance change of the cantilever. Therefore the high sensitivity of the sensor could be obtained. Moreover, by using four cantilevers aligned with four pyramids, the three-dimensional force sensor was realized. The sensitivities of our sensor to forces in normal and lateral directions were about 50 times and 2.4 times higher, respectively, compared to those of a tactile sensor with the ultrathin cantilevers embedded inside an elastomer [1].
{"title":"High sensitive 3D tactile sensor with the structure of elastic pyramids on piezoresistive cantilevers","authors":"N. Thanh-Vinh, N. Binh-Khiem, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2013.6474171","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474171","url":null,"abstract":"We propose a highly sensitive three-dimensional tactile sensor using the structure of elastic micro pyramids pressing on piezoresistive cantilevers. In the structure of the sensor we proposed, the forces acting on the surface of the elastomer were transmitted to the cantilevers through the pyramids. The key point of our sensor was that the cantilevers were not completely embedded inside the elastomer: a cavity under each cantilever enabled the larger deformation and thus the larger resistance change of the cantilever. Therefore the high sensitivity of the sensor could be obtained. Moreover, by using four cantilevers aligned with four pyramids, the three-dimensional force sensor was realized. The sensitivities of our sensor to forces in normal and lateral directions were about 50 times and 2.4 times higher, respectively, compared to those of a tactile sensor with the ultrathin cantilevers embedded inside an elastomer [1].","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"33 1","pages":"41-44"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78936821","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474366
A. Fraiwan, S. Mukherjee, S. Sundermier, S. Choi
We report a paper-based microbial fuel cell (MFC) generating a maximum power of 5.5 μW/cm2. The MFC features (1) a paper-based proton exchange membrane by infiltrating sulfonated sodium polystyrene sulfonate and (2) micro-fabricated paper chambers by patterning hydrophobic barriers of photoresist. Once a sample was added to the device, a current of 74 μA generated without any startup time. This paper-based MFC has the advantages of ease of use, low production cost, and high portability. The voltage produced was increased by 1.9× when two MFC devices were linked in series while operating lifetime was significantly enhanced in parallel.
{"title":"A microfabricated paper-based microbial fuel cell","authors":"A. Fraiwan, S. Mukherjee, S. Sundermier, S. Choi","doi":"10.1109/MEMSYS.2013.6474366","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474366","url":null,"abstract":"We report a paper-based microbial fuel cell (MFC) generating a maximum power of 5.5 μW/cm2. The MFC features (1) a paper-based proton exchange membrane by infiltrating sulfonated sodium polystyrene sulfonate and (2) micro-fabricated paper chambers by patterning hydrophobic barriers of photoresist. Once a sample was added to the device, a current of 74 μA generated without any startup time. This paper-based MFC has the advantages of ease of use, low production cost, and high portability. The voltage produced was increased by 1.9× when two MFC devices were linked in series while operating lifetime was significantly enhanced in parallel.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"65 1","pages":"809-812"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90599375","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474328
E. Heubel, L. Velásquez-García
We report the design, fabrication, and experimental characterization of a novel fully microfabricated retarding potential analyzer (RPA) with performance better than the state-of-the-art. Our device comprises a set of bulk-micromachined electrode grids with apertures and inter-electrode spacing compatible with high-density plasma measurements; the thick electrodes also make our ion energy sensor more resistant to ablation in harsh environments than previously reported miniaturized RPAs. Our RPA includes a set of microfabricated deflection springs for robust and compliant alignment of the grid apertures across the grid stack, which greatly increases the signal strength and minimizes the ion interception, resulting in a tenfold improvement in peak signal amplitude compared to an RPA with unaligned grids and similar inter-electrode spacing.
{"title":"Batch-fabricated MEMS retarding potential analyzer for high-accuracy ion energy measurements","authors":"E. Heubel, L. Velásquez-García","doi":"10.1109/MEMSYS.2013.6474328","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474328","url":null,"abstract":"We report the design, fabrication, and experimental characterization of a novel fully microfabricated retarding potential analyzer (RPA) with performance better than the state-of-the-art. Our device comprises a set of bulk-micromachined electrode grids with apertures and inter-electrode spacing compatible with high-density plasma measurements; the thick electrodes also make our ion energy sensor more resistant to ablation in harsh environments than previously reported miniaturized RPAs. Our RPA includes a set of microfabricated deflection springs for robust and compliant alignment of the grid apertures across the grid stack, which greatly increases the signal strength and minimizes the ion interception, resulting in a tenfold improvement in peak signal amplitude compared to an RPA with unaligned grids and similar inter-electrode spacing.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"8 1","pages":"661-664"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90603025","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474457
H. Wakioka, S. Yamamoto, K. Tabata, M. Sugiyama
This paper reports a droplet formation device having nanochannels fabricated with femtosecond-laser-assisted etching. With the combination of nanochannels embedded in a substrate and microchannels on the substrate surface, approximately 650 nm diameter water phase liquid droplets (approximately 150 aL in volume) have been produced. In addition, we confirmed that enzyme reaction inside a femtoliter or attoliter droplet was digitally observed by fluorescence for the first time. Such droplets can be used for single-molecule enzymology instead of conventional arrays of femtoliter chambers [1].
{"title":"Attoliter order droplet formation using nanochannels and enzyme reaction inside a droplet","authors":"H. Wakioka, S. Yamamoto, K. Tabata, M. Sugiyama","doi":"10.1109/MEMSYS.2013.6474457","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474457","url":null,"abstract":"This paper reports a droplet formation device having nanochannels fabricated with femtosecond-laser-assisted etching. With the combination of nanochannels embedded in a substrate and microchannels on the substrate surface, approximately 650 nm diameter water phase liquid droplets (approximately 150 aL in volume) have been produced. In addition, we confirmed that enzyme reaction inside a femtoliter or attoliter droplet was digitally observed by fluorescence for the first time. Such droplets can be used for single-molecule enzymology instead of conventional arrays of femtoliter chambers [1].","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"60 1","pages":"1161-1164"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81422545","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474200
R. Sochol, C. Glick, K. Lee, T. Brubaker, A. Lu, M. Wah, S. Gao, E. Hicks, K. T. Wolf, K. Iwai, L. P. Lee, L. Lin
Autonomous fluidic components are critical to the advancement of integrated micro/nanofluidic circuitry for lab-on-a-chip applications, such as point-of-care (POC) molecular diagnostics and on-site chemical detection. Previously, a wide range of self-regulating microfluidic components, such as fluidic diodes, have been developed; however, achieving effective functionality at ultra-low Reynolds number (e.g., Re <; 0.05) has remained a significant challenge. To overcome this issue, here we introduce single-layer microfluidic “domino” diodes, which utilize free-standing rotational microstructures - constructed in situ via optofluidic lithography - in order to passively regulate the fluidic resistance based on the flow polarity, thereby enabling flow rectification under ultra-low Re conditions. COMSOL simulation results revealed a theoretical Diodicity (Di) of 31 for a singular domino diode component. Experimental results (for systems with four microstructures) revealed Di's ranging from 13.0±1.9 to 25.4±1.9 corresponding to 0.025 <; Re <; 0.030 and 0.010 <; Re <; 0.015 flow, respectively, which represent the largest Di's reported for Re <; 0.05 fluid flow.
{"title":"Single-layer “domino” diodes via optofluidic lithography for ultra-low Reynolds number applications","authors":"R. Sochol, C. Glick, K. Lee, T. Brubaker, A. Lu, M. Wah, S. Gao, E. Hicks, K. T. Wolf, K. Iwai, L. P. Lee, L. Lin","doi":"10.1109/MEMSYS.2013.6474200","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474200","url":null,"abstract":"Autonomous fluidic components are critical to the advancement of integrated micro/nanofluidic circuitry for lab-on-a-chip applications, such as point-of-care (POC) molecular diagnostics and on-site chemical detection. Previously, a wide range of self-regulating microfluidic components, such as fluidic diodes, have been developed; however, achieving effective functionality at ultra-low Reynolds number (e.g., Re <; 0.05) has remained a significant challenge. To overcome this issue, here we introduce single-layer microfluidic “domino” diodes, which utilize free-standing rotational microstructures - constructed in situ via optofluidic lithography - in order to passively regulate the fluidic resistance based on the flow polarity, thereby enabling flow rectification under ultra-low Re conditions. COMSOL simulation results revealed a theoretical Diodicity (Di) of 31 for a singular domino diode component. Experimental results (for systems with four microstructures) revealed Di's ranging from 13.0±1.9 to 25.4±1.9 corresponding to 0.025 <; Re <; 0.030 and 0.010 <; Re <; 0.015 flow, respectively, which represent the largest Di's reported for Re <; 0.05 fluid flow.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"46 1","pages":"153-156"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87528240","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)
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