2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474294
Y. Zhang, Y. Tang, L. Carley, G. Fedder
This paper reports on development of a dual-probe scanning tunneling microscopy (STM) system suitable for scaling to 1D array parallel imaging and batch nanofabrication. The 1-D probe array is fabricated using thin-film post CMOS micromachining. Each probe is individually addressable, with its own respective microactuator and on-chip tunneling current sensing electronics. A corresponding external servo-loop array is built for separate control of probe scanning. A macro-goniometer is introduced for probe chip-sample alignment. Using the dual-probe array system, two STM images on a gold calibration sample are obtained simultaneously, and TiO2 nanowires are written on a Ti surface.
{"title":"Active CMOS-MEMS dual probe array for STM based parallel imaging and nanopatterning","authors":"Y. Zhang, Y. Tang, L. Carley, G. Fedder","doi":"10.1109/MEMSYS.2013.6474294","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474294","url":null,"abstract":"This paper reports on development of a dual-probe scanning tunneling microscopy (STM) system suitable for scaling to 1D array parallel imaging and batch nanofabrication. The 1-D probe array is fabricated using thin-film post CMOS micromachining. Each probe is individually addressable, with its own respective microactuator and on-chip tunneling current sensing electronics. A corresponding external servo-loop array is built for separate control of probe scanning. A macro-goniometer is introduced for probe chip-sample alignment. Using the dual-probe array system, two STM images on a gold calibration sample are obtained simultaneously, and TiO2 nanowires are written on a Ti surface.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75010741","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474276
M. Yasui, K. Ikuta
We have constructed world-first generalized model for expecting 3D curing characteristics of photocurable polymer including micro particles. First, our theory is applicable for all polymers that respond to light. Second, we can adapt all kinds of particles to our theory. Moreover, the complicated calculation is not necessary. We can expect 3D curing properties through characteristics of resin and microparticles. Therefore, our theory is useful for developing newly photocurable polymer not only with microparticles, but also without microparticles. We believe that our model becomes fundamental theory for the 2D and 3D microfabrication in the photolithography and microstereolithography.
{"title":"3D general photocurabel model of resin with various kinds of microparticles","authors":"M. Yasui, K. Ikuta","doi":"10.1109/MEMSYS.2013.6474276","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474276","url":null,"abstract":"We have constructed world-first generalized model for expecting 3D curing characteristics of photocurable polymer including micro particles. First, our theory is applicable for all polymers that respond to light. Second, we can adapt all kinds of particles to our theory. Moreover, the complicated calculation is not necessary. We can expect 3D curing properties through characteristics of resin and microparticles. Therefore, our theory is useful for developing newly photocurable polymer not only with microparticles, but also without microparticles. We believe that our model becomes fundamental theory for the 2D and 3D microfabrication in the photolithography and microstereolithography.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74563598","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474203
Renyuan Wang, S. Bhave, K. Bhattacharjee
This paper presents design and vacuum measurements of lithium niobate (LN) contour-mode resonators (CMR). By carefully positioning the interdigital transducer (IDT), we achieved CMRs with kt2×Q of 7%*2150=148 (IDT @ node) or resonators with very high kt2 of 12.3% and spur-attenuated response (IDT @ anti-node). In addition, we demonstrated resonators with frequencies ranging from 400MHz to 800MHz on a single chip.
{"title":"High kt2×Q, multi-frequency lithium niobate resonators","authors":"Renyuan Wang, S. Bhave, K. Bhattacharjee","doi":"10.1109/MEMSYS.2013.6474203","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474203","url":null,"abstract":"This paper presents design and vacuum measurements of lithium niobate (LN) contour-mode resonators (CMR). By carefully positioning the interdigital transducer (IDT), we achieved CMRs with k<sub>t</sub><sup>2</sup>×Q of 7%*2150=148 (IDT @ node) or resonators with very high k<sub>t</sub><sup>2</sup> of 12.3% and spur-attenuated response (IDT @ anti-node). In addition, we demonstrated resonators with frequencies ranging from 400MHz to 800MHz on a single chip.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73279607","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474456
J. Kwon, Ji Sun Yang, Jeong Byung Chae, Sang Kug Chung
This paper presents an untethered microrobot swimming in human blood vessels through electromagnetic actuation to manipulate bio/micro-objects using an acoustically oscillating bubble attached on the microrobot as a grasping tool. First, for the three-dimensional (3D) propulsion of the microrobot in arbitrary shaped blood vessels, an electromagnetic system consisting of the horizontal and vertical pairs of Helmholtz and Maxwell electric coils is designed and manufactured along with the verification of the magnetic flux density generated from the designed system with theory. Using the developed electromagnetic system, the propulsion of a spherical microrobot (800 μm dia.) made of a cylindrical magnet covered with clay is successfully demonstrated in x-y and x-z plains along with a T-shaped glass channel. Second, an acoustically oscillating bubble induced microstreaming is separately investigated by using a high speed camera integrated with a zoom lens and laser as a light source. When a bubble is acoustically excited by a piezoactuator around its natural frequency, it oscillates and simultaneously generates microstreaming and radiation forces, which can be used to manipulate (pull and push) neighboring objects. Finally, as the concept proof, the manipulation of a fish egg (800 μm dia.) in a microfabricated channel with tandem rectangular hills is experimentally achieved by the microrobot incorporated with an acoustically oscillating bubble.
{"title":"A novel drug delivery method by using a microrobot incorporated with an acoustically oscillating bubble","authors":"J. Kwon, Ji Sun Yang, Jeong Byung Chae, Sang Kug Chung","doi":"10.1109/MEMSYS.2013.6474456","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474456","url":null,"abstract":"This paper presents an untethered microrobot swimming in human blood vessels through electromagnetic actuation to manipulate bio/micro-objects using an acoustically oscillating bubble attached on the microrobot as a grasping tool. First, for the three-dimensional (3D) propulsion of the microrobot in arbitrary shaped blood vessels, an electromagnetic system consisting of the horizontal and vertical pairs of Helmholtz and Maxwell electric coils is designed and manufactured along with the verification of the magnetic flux density generated from the designed system with theory. Using the developed electromagnetic system, the propulsion of a spherical microrobot (800 μm dia.) made of a cylindrical magnet covered with clay is successfully demonstrated in x-y and x-z plains along with a T-shaped glass channel. Second, an acoustically oscillating bubble induced microstreaming is separately investigated by using a high speed camera integrated with a zoom lens and laser as a light source. When a bubble is acoustically excited by a piezoactuator around its natural frequency, it oscillates and simultaneously generates microstreaming and radiation forces, which can be used to manipulate (pull and push) neighboring objects. Finally, as the concept proof, the manipulation of a fish egg (800 μm dia.) in a microfabricated channel with tandem rectangular hills is experimentally achieved by the microrobot incorporated with an acoustically oscillating bubble.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76296653","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474318
F. Loizeau, Hans Peter Lang, Terunobu Akiyama, S. Gautsch, P. Vettiger, A. Tonin, Genki Yoshikawa, C. Gerber, N. D. Rooij
We present the fabrication, characterization and successful medical application of a membrane-type surface stress sensor (MSS), arranged in arrays for molecular detection in gaseous phase. Made out of SOI substrate, a round membrane with a diameter of 500 μm and a thickness of 2.5 μm is suspended by four sensing beams with integrated p-type piezoresistors, composing a full Wheatstone bridge. The membrane is coated with a thin polymer layer, which reacts with volatile molecules and produces a deflection of the membrane. The membranes were functionalized with various polymers and characterized as humidity sensors with a sensitivity of 87 mV/%RH and a time constant (Tau63%) of 1.3 s. Finally, through breath analysis and the use of principal component analysis (PCA), we were able, in a double blind trial, to distinguish cancer patients and healthy persons.
{"title":"Piezoresistive membrane-type surface stress sensor arranged in arrays for cancer diagnosis through breath analysis","authors":"F. Loizeau, Hans Peter Lang, Terunobu Akiyama, S. Gautsch, P. Vettiger, A. Tonin, Genki Yoshikawa, C. Gerber, N. D. Rooij","doi":"10.1109/MEMSYS.2013.6474318","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474318","url":null,"abstract":"We present the fabrication, characterization and successful medical application of a membrane-type surface stress sensor (MSS), arranged in arrays for molecular detection in gaseous phase. Made out of SOI substrate, a round membrane with a diameter of 500 μm and a thickness of 2.5 μm is suspended by four sensing beams with integrated p-type piezoresistors, composing a full Wheatstone bridge. The membrane is coated with a thin polymer layer, which reacts with volatile molecules and produces a deflection of the membrane. The membranes were functionalized with various polymers and characterized as humidity sensors with a sensitivity of 87 mV/%RH and a time constant (Tau63%) of 1.3 s. Finally, through breath analysis and the use of principal component analysis (PCA), we were able, in a double blind trial, to distinguish cancer patients and healthy persons.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84571513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474213
H. Yamasaki, K. Terao, T. Suzuki, F. Simokawa, H. Takao
Application of `small area' plasma has become important for bio/medical applications. In this study, a novel device to create patternable atmospheric-pressure plasma-jet array is newly proposed, and the evaluation results of the fabricated devices are reported for the first time. The array device is fabricated by bonding a PDMS microchannel layer and a glass wafer. Discharge electrodes for plasma creation are fabricated by Au/Cr layers. Since the discharge starting voltages strongly depends on shapes and the gap of two electrodes, they were designed and selected based on the Paschen's law to lower their discharge starting voltages. Micro plasma jet array are created by multi-channel gas discharges individually in microfluidic channels on a chip, and a 2.54mm spatial resolution of plasma-jet was obtained in the first fabricated device.
{"title":"Patternable atmospheric-pressure plasma jets with gas discharge in microfluidic channel array","authors":"H. Yamasaki, K. Terao, T. Suzuki, F. Simokawa, H. Takao","doi":"10.1109/MEMSYS.2013.6474213","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474213","url":null,"abstract":"Application of `small area' plasma has become important for bio/medical applications. In this study, a novel device to create patternable atmospheric-pressure plasma-jet array is newly proposed, and the evaluation results of the fabricated devices are reported for the first time. The array device is fabricated by bonding a PDMS microchannel layer and a glass wafer. Discharge electrodes for plasma creation are fabricated by Au/Cr layers. Since the discharge starting voltages strongly depends on shapes and the gap of two electrodes, they were designed and selected based on the Paschen's law to lower their discharge starting voltages. Micro plasma jet array are created by multi-channel gas discharges individually in microfluidic channels on a chip, and a 2.54mm spatial resolution of plasma-jet was obtained in the first fabricated device.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77673808","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474366
A. Fraiwan, S. Mukherjee, S. Sundermier, S. Choi
We report a paper-based microbial fuel cell (MFC) generating a maximum power of 5.5 μW/cm2. The MFC features (1) a paper-based proton exchange membrane by infiltrating sulfonated sodium polystyrene sulfonate and (2) micro-fabricated paper chambers by patterning hydrophobic barriers of photoresist. Once a sample was added to the device, a current of 74 μA generated without any startup time. This paper-based MFC has the advantages of ease of use, low production cost, and high portability. The voltage produced was increased by 1.9× when two MFC devices were linked in series while operating lifetime was significantly enhanced in parallel.
{"title":"A microfabricated paper-based microbial fuel cell","authors":"A. Fraiwan, S. Mukherjee, S. Sundermier, S. Choi","doi":"10.1109/MEMSYS.2013.6474366","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474366","url":null,"abstract":"We report a paper-based microbial fuel cell (MFC) generating a maximum power of 5.5 μW/cm2. The MFC features (1) a paper-based proton exchange membrane by infiltrating sulfonated sodium polystyrene sulfonate and (2) micro-fabricated paper chambers by patterning hydrophobic barriers of photoresist. Once a sample was added to the device, a current of 74 μA generated without any startup time. This paper-based MFC has the advantages of ease of use, low production cost, and high portability. The voltage produced was increased by 1.9× when two MFC devices were linked in series while operating lifetime was significantly enhanced in parallel.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90599375","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474328
E. Heubel, L. Velásquez-García
We report the design, fabrication, and experimental characterization of a novel fully microfabricated retarding potential analyzer (RPA) with performance better than the state-of-the-art. Our device comprises a set of bulk-micromachined electrode grids with apertures and inter-electrode spacing compatible with high-density plasma measurements; the thick electrodes also make our ion energy sensor more resistant to ablation in harsh environments than previously reported miniaturized RPAs. Our RPA includes a set of microfabricated deflection springs for robust and compliant alignment of the grid apertures across the grid stack, which greatly increases the signal strength and minimizes the ion interception, resulting in a tenfold improvement in peak signal amplitude compared to an RPA with unaligned grids and similar inter-electrode spacing.
{"title":"Batch-fabricated MEMS retarding potential analyzer for high-accuracy ion energy measurements","authors":"E. Heubel, L. Velásquez-García","doi":"10.1109/MEMSYS.2013.6474328","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474328","url":null,"abstract":"We report the design, fabrication, and experimental characterization of a novel fully microfabricated retarding potential analyzer (RPA) with performance better than the state-of-the-art. Our device comprises a set of bulk-micromachined electrode grids with apertures and inter-electrode spacing compatible with high-density plasma measurements; the thick electrodes also make our ion energy sensor more resistant to ablation in harsh environments than previously reported miniaturized RPAs. Our RPA includes a set of microfabricated deflection springs for robust and compliant alignment of the grid apertures across the grid stack, which greatly increases the signal strength and minimizes the ion interception, resulting in a tenfold improvement in peak signal amplitude compared to an RPA with unaligned grids and similar inter-electrode spacing.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90603025","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474457
H. Wakioka, S. Yamamoto, K. Tabata, M. Sugiyama
This paper reports a droplet formation device having nanochannels fabricated with femtosecond-laser-assisted etching. With the combination of nanochannels embedded in a substrate and microchannels on the substrate surface, approximately 650 nm diameter water phase liquid droplets (approximately 150 aL in volume) have been produced. In addition, we confirmed that enzyme reaction inside a femtoliter or attoliter droplet was digitally observed by fluorescence for the first time. Such droplets can be used for single-molecule enzymology instead of conventional arrays of femtoliter chambers [1].
{"title":"Attoliter order droplet formation using nanochannels and enzyme reaction inside a droplet","authors":"H. Wakioka, S. Yamamoto, K. Tabata, M. Sugiyama","doi":"10.1109/MEMSYS.2013.6474457","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474457","url":null,"abstract":"This paper reports a droplet formation device having nanochannels fabricated with femtosecond-laser-assisted etching. With the combination of nanochannels embedded in a substrate and microchannels on the substrate surface, approximately 650 nm diameter water phase liquid droplets (approximately 150 aL in volume) have been produced. In addition, we confirmed that enzyme reaction inside a femtoliter or attoliter droplet was digitally observed by fluorescence for the first time. Such droplets can be used for single-molecule enzymology instead of conventional arrays of femtoliter chambers [1].","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81422545","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474200
R. Sochol, C. Glick, K. Lee, T. Brubaker, A. Lu, M. Wah, S. Gao, E. Hicks, K. T. Wolf, K. Iwai, L. P. Lee, L. Lin
Autonomous fluidic components are critical to the advancement of integrated micro/nanofluidic circuitry for lab-on-a-chip applications, such as point-of-care (POC) molecular diagnostics and on-site chemical detection. Previously, a wide range of self-regulating microfluidic components, such as fluidic diodes, have been developed; however, achieving effective functionality at ultra-low Reynolds number (e.g., Re <; 0.05) has remained a significant challenge. To overcome this issue, here we introduce single-layer microfluidic “domino” diodes, which utilize free-standing rotational microstructures - constructed in situ via optofluidic lithography - in order to passively regulate the fluidic resistance based on the flow polarity, thereby enabling flow rectification under ultra-low Re conditions. COMSOL simulation results revealed a theoretical Diodicity (Di) of 31 for a singular domino diode component. Experimental results (for systems with four microstructures) revealed Di's ranging from 13.0±1.9 to 25.4±1.9 corresponding to 0.025 <; Re <; 0.030 and 0.010 <; Re <; 0.015 flow, respectively, which represent the largest Di's reported for Re <; 0.05 fluid flow.
{"title":"Single-layer “domino” diodes via optofluidic lithography for ultra-low Reynolds number applications","authors":"R. Sochol, C. Glick, K. Lee, T. Brubaker, A. Lu, M. Wah, S. Gao, E. Hicks, K. T. Wolf, K. Iwai, L. P. Lee, L. Lin","doi":"10.1109/MEMSYS.2013.6474200","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474200","url":null,"abstract":"Autonomous fluidic components are critical to the advancement of integrated micro/nanofluidic circuitry for lab-on-a-chip applications, such as point-of-care (POC) molecular diagnostics and on-site chemical detection. Previously, a wide range of self-regulating microfluidic components, such as fluidic diodes, have been developed; however, achieving effective functionality at ultra-low Reynolds number (e.g., Re <; 0.05) has remained a significant challenge. To overcome this issue, here we introduce single-layer microfluidic “domino” diodes, which utilize free-standing rotational microstructures - constructed in situ via optofluidic lithography - in order to passively regulate the fluidic resistance based on the flow polarity, thereby enabling flow rectification under ultra-low Re conditions. COMSOL simulation results revealed a theoretical Diodicity (Di) of 31 for a singular domino diode component. Experimental results (for systems with four microstructures) revealed Di's ranging from 13.0±1.9 to 25.4±1.9 corresponding to 0.025 <; Re <; 0.030 and 0.010 <; Re <; 0.015 flow, respectively, which represent the largest Di's reported for Re <; 0.05 fluid flow.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87528240","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)
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