2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474175
R. Kawano, Y. Tsuji, M. Hirano, T. Osaki, K. Kamiya, N. Miki, T. Ide, S. Takeuchi
This paper describes an investigation of drug effects for ion channels with recognizing the intra/extracellular directions. We have previously reported the ion channel recordings with bilayer lipid membranes (BLMs) which formed on a parylene micropore using droplets contact method. However, the low reconstitution probability of ion channels into BLMs has been a major issue. In this study, BLMs area and position are regulated with changing the numbers and positions of the parylene micropores. As a result, the simultaneous single channel recordings of K+ channel expressed in nerve system with BLM array were able to be achieved at the high probability.
{"title":"Intra/extracellular investigation for ion channels with lipid bilayer array at the single molecule level","authors":"R. Kawano, Y. Tsuji, M. Hirano, T. Osaki, K. Kamiya, N. Miki, T. Ide, S. Takeuchi","doi":"10.1109/MEMSYS.2013.6474175","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474175","url":null,"abstract":"This paper describes an investigation of drug effects for ion channels with recognizing the intra/extracellular directions. We have previously reported the ion channel recordings with bilayer lipid membranes (BLMs) which formed on a parylene micropore using droplets contact method. However, the low reconstitution probability of ion channels into BLMs has been a major issue. In this study, BLMs area and position are regulated with changing the numbers and positions of the parylene micropores. As a result, the simultaneous single channel recordings of K+ channel expressed in nerve system with BLM array were able to be achieved at the high probability.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"4 1","pages":"57-58"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78434607","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474412
H. Kishihara, I. Hanasaki, N. Matsuzuka, I. Yamashita, Y. Uraoka, Y. Isono
This research has newly developed the multi-wall carbon nanotubes (MWCNTs) embedded-micro-mechanical resonator working as a novel rarefied gas sensor. The inertial effect of rarefied gas fluid is detected as a variation of the resonance frequency, and the dissipation of the interaction energy between the resonator and the gas molecules affects the damping of oscillation. Thus, two kinds of gaseous species can be distinguished with one device. The MWCNTs have been arranged on the resonator for heightening its sensitivity by the bio-MEMS compatible process. The MWCNTs embedded-resonator has successfully demonstrated to detect and distinguish hydrogen and nitrogen gases under pressures of 0.02 Pa to 0.9 Pa.
{"title":"Development of MWCNT embedded micromechanical resonator working as rarefied gas sensor","authors":"H. Kishihara, I. Hanasaki, N. Matsuzuka, I. Yamashita, Y. Uraoka, Y. Isono","doi":"10.1109/MEMSYS.2013.6474412","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474412","url":null,"abstract":"This research has newly developed the multi-wall carbon nanotubes (MWCNTs) embedded-micro-mechanical resonator working as a novel rarefied gas sensor. The inertial effect of rarefied gas fluid is detected as a variation of the resonance frequency, and the dissipation of the interaction energy between the resonator and the gas molecules affects the damping of oscillation. Thus, two kinds of gaseous species can be distinguished with one device. The MWCNTs have been arranged on the resonator for heightening its sensitivity by the bio-MEMS compatible process. The MWCNTs embedded-resonator has successfully demonstrated to detect and distinguish hydrogen and nitrogen gases under pressures of 0.02 Pa to 0.9 Pa.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"93 1","pages":"985-988"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72863740","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474354
H. Zhu, G. Shan, Cheng Tu, Joshua E-Y Lee
This paper reports the effects of crystal orientations on the temperature coefficient of frequency (TCf) of single crystal silicon square-plate micromechanical resonators vibrating in two distinct contour modes: Lamé mode and square extensional (SE). For the Lamé mode, the same TCf was found over several devices aligned to the <;110> direction, while much greater variation in the TCf was observed among the devices aligned against the <;100> direction. For the SE mode, the devices in both <;100> and <;110> orientations exhibit similar TCf values for varying doping levels. These observations are supported by Keyes' theory and close agreement between experiments and simulations is shown.
{"title":"Crystallographic and eigenmode dependence of TCf for single crystal silicon contour mode resonators","authors":"H. Zhu, G. Shan, Cheng Tu, Joshua E-Y Lee","doi":"10.1109/MEMSYS.2013.6474354","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474354","url":null,"abstract":"This paper reports the effects of crystal orientations on the temperature coefficient of frequency (TCf) of single crystal silicon square-plate micromechanical resonators vibrating in two distinct contour modes: Lamé mode and square extensional (SE). For the Lamé mode, the same TCf was found over several devices aligned to the <;110> direction, while much greater variation in the TCf was observed among the devices aligned against the <;100> direction. For the SE mode, the devices in both <;100> and <;110> orientations exhibit similar TCf values for varying doping levels. These observations are supported by Keyes' theory and close agreement between experiments and simulations is shown.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"1 1","pages":"761-764"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85542208","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474249
M. Tsang, F. Herrault, R. Shafer, M. Allen
The mechanical and electrochemical properties of magnesium are favorable for biomedical and energy storage applications. However, magnesium microfabrication has been limited to sub-micron-thick film technologies (i.e., sputtering or evaporation). This paper presents three magnesium microfabrication approaches for thicknesses greater than 10 μm: 1) laser-cutting and 2) chemical etching of 70-μm-thick commercial magnesium foil; and 3) through-mold electroplating of magnesium from non-aqueous solution. The fabrication technologies are compared on minimum feature size, morphology, uniformity, composition and electrical resistivity. Preliminary results confirmed that the 50-μm-thick electroplated material composition compared favorably with commercial magnesium foil. The measured electrical resistivities of commercial and electrodeposited magnesium were 5.3 μΩ·cm and 8.7 μΩ·cm, respectively. Thick magnesium microstructures can be fabricated through several means to serve a broad range of MEMS-based applications.
{"title":"Methods for the microfabrication of magnesium","authors":"M. Tsang, F. Herrault, R. Shafer, M. Allen","doi":"10.1109/MEMSYS.2013.6474249","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474249","url":null,"abstract":"The mechanical and electrochemical properties of magnesium are favorable for biomedical and energy storage applications. However, magnesium microfabrication has been limited to sub-micron-thick film technologies (i.e., sputtering or evaporation). This paper presents three magnesium microfabrication approaches for thicknesses greater than 10 μm: 1) laser-cutting and 2) chemical etching of 70-μm-thick commercial magnesium foil; and 3) through-mold electroplating of magnesium from non-aqueous solution. The fabrication technologies are compared on minimum feature size, morphology, uniformity, composition and electrical resistivity. Preliminary results confirmed that the 50-μm-thick electroplated material composition compared favorably with commercial magnesium foil. The measured electrical resistivities of commercial and electrodeposited magnesium were 5.3 μΩ·cm and 8.7 μΩ·cm, respectively. Thick magnesium microstructures can be fabricated through several means to serve a broad range of MEMS-based applications.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"1 1","pages":"347-350"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88703712","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474228
H. Zec, T. Rane, Dr. Wen-Chy Chu, Vivian Wang, Dr. Tza-Huei Wang
A programmable droplet-based platform which performs multiplexed single nucleotide polymorphism analysis on an array of plant genomic DNA samples is presented. This device has the potential to meet the demand for flexible and cost-effective tools that can perform high throughput genetic screening for applications such as allelic variation detection in agriculture. The microfluidic droplet-based device accepts an unlimited number of sample plugs containing genomic plant DNA from a multi-well plate. Each plug is separated by a fluorinated immiscible carrier fluid to prevent cross-contamination. Once plugs are loaded on to the device, mechanical chopping of these sample plugs is performed to digitize them into smaller daughter droplets. The device then performs subsequent synchronization-free, robust injection of multiple single nucleotide polymorphism interrogating probes in to the sample daughter droplets on-demand. This microfluidic platform combines the excellent control of valve-based microfluidics with the high-throughput capability of droplet microfluidics. Furthermore, generation of a one-dimensional array of combinatorial mixtures of DNA-probe droplets in which the sequence of drops is maintained throughout the device leads to automatic spatial indexing of these droplets, precluding the need for barcoding to identify droplet contents. We expect this flexible platform to expand the range of applications of droplet microfluidics to include applications requiring high degrees of multiplexing as well as high throughput screening of arrays of samples.
{"title":"A microfluidic droplet platform for multiplexed single nucleotide polymorphism analysis of an array plant genomic DNA samples","authors":"H. Zec, T. Rane, Dr. Wen-Chy Chu, Vivian Wang, Dr. Tza-Huei Wang","doi":"10.1109/MEMSYS.2013.6474228","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474228","url":null,"abstract":"A programmable droplet-based platform which performs multiplexed single nucleotide polymorphism analysis on an array of plant genomic DNA samples is presented. This device has the potential to meet the demand for flexible and cost-effective tools that can perform high throughput genetic screening for applications such as allelic variation detection in agriculture. The microfluidic droplet-based device accepts an unlimited number of sample plugs containing genomic plant DNA from a multi-well plate. Each plug is separated by a fluorinated immiscible carrier fluid to prevent cross-contamination. Once plugs are loaded on to the device, mechanical chopping of these sample plugs is performed to digitize them into smaller daughter droplets. The device then performs subsequent synchronization-free, robust injection of multiple single nucleotide polymorphism interrogating probes in to the sample daughter droplets on-demand. This microfluidic platform combines the excellent control of valve-based microfluidics with the high-throughput capability of droplet microfluidics. Furthermore, generation of a one-dimensional array of combinatorial mixtures of DNA-probe droplets in which the sequence of drops is maintained throughout the device leads to automatic spatial indexing of these droplets, precluding the need for barcoding to identify droplet contents. We expect this flexible platform to expand the range of applications of droplet microfluidics to include applications requiring high degrees of multiplexing as well as high throughput screening of arrays of samples.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"112 1","pages":"263-266"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84957071","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474230
S. Tanaka, M. Yoshida, H. Hirano, T. Somekawa, M. Fujita, M. Esashi
Wafer-bonding-based integration can be rapidly and easily tested between different types of devices by wafer-to-wafer flip-chip transfer technology described in this paper. Devices to be tested (e.g. MEMS) on a support wafer are bonded and electrically connected with a target wafer (e.g. LSI) using sticky silicone bumps, and then any of the devices are selectively debonded from the support wafer by backside laser irradiation. After transferred, the device is temporary sealed with a silicone ring, and underfill polymer can be used for permanent bonding. Because silicone bonding is made just by physical contact at room temperature, and the elasticity of silicone absorbs mismatch in thermal expansion, integration between different materials of wafer is possible. For practical demonstration, LiNbO3-based SAW resonators were transferred to an LSI wafer.
{"title":"Wafer-to-wafer selective flip-chip transfer by sticky silicone bonding and laser debonding for rapid and easy integration test","authors":"S. Tanaka, M. Yoshida, H. Hirano, T. Somekawa, M. Fujita, M. Esashi","doi":"10.1109/MEMSYS.2013.6474230","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474230","url":null,"abstract":"Wafer-bonding-based integration can be rapidly and easily tested between different types of devices by wafer-to-wafer flip-chip transfer technology described in this paper. Devices to be tested (e.g. MEMS) on a support wafer are bonded and electrically connected with a target wafer (e.g. LSI) using sticky silicone bumps, and then any of the devices are selectively debonded from the support wafer by backside laser irradiation. After transferred, the device is temporary sealed with a silicone ring, and underfill polymer can be used for permanent bonding. Because silicone bonding is made just by physical contact at room temperature, and the elasticity of silicone absorbs mismatch in thermal expansion, integration between different materials of wafer is possible. For practical demonstration, LiNbO3-based SAW resonators were transferred to an LSI wafer.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"1 1","pages":"271-274"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86994466","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474206
J. Cho, Jialiang Yan, J. A. Gregory, H. Eberhart, R. L. Peterson, K. Najafi
This paper presents a novel 3-D fabrication process of microstructures using high-Q materials. The key feature of this process is the use of a blow torch that can provide intensive localized heat up to 2500°C in a very short time (<;10 sec), above the melting temperatures of many high-Q materials such as fused silica. Surface roughness of 5.3 Å is realized in fused silica, which is crucial for high optical and mechanical quality factors (Q). We demonstrate the fabrication of micro hemisphere and half-toroid (birdbath) geometries from 100μm-thick fused silica substrates. We also create micro birdbath resonators by batch-level releasing the birdbath shells and demonstrate one of the best mechanical Q and low stiffness and damping anisotropies among existing micro mechanical resonators. The birdbath resonator is promising for emerging applications such as micro rate-integrating gyroscope (μ-RIG).
{"title":"High-Q fused silica birdbath and hemispherical 3-D resonators made by blow torch molding","authors":"J. Cho, Jialiang Yan, J. A. Gregory, H. Eberhart, R. L. Peterson, K. Najafi","doi":"10.1109/MEMSYS.2013.6474206","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474206","url":null,"abstract":"This paper presents a novel 3-D fabrication process of microstructures using high-Q materials. The key feature of this process is the use of a blow torch that can provide intensive localized heat up to 2500°C in a very short time (<;10 sec), above the melting temperatures of many high-Q materials such as fused silica. Surface roughness of 5.3 Å is realized in fused silica, which is crucial for high optical and mechanical quality factors (Q). We demonstrate the fabrication of micro hemisphere and half-toroid (birdbath) geometries from 100μm-thick fused silica substrates. We also create micro birdbath resonators by batch-level releasing the birdbath shells and demonstrate one of the best mechanical Q and low stiffness and damping anisotropies among existing micro mechanical resonators. The birdbath resonator is promising for emerging applications such as micro rate-integrating gyroscope (μ-RIG).","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"29 1","pages":"177-180"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87415451","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474420
T. Tonooka, K. Sato, R. Kawano, T. Osaki, S. Takeuchi
We developed horizontal lipid bilayers by the Droplets Contact Method (DCM). DCM is the easiest and most efficient method to form lipid bilayers. However, the lipid bilayers formed by our previous method could not be used for simultaneous electrophysiological and optical measurements because the bilayers are vertically oriented and therefore optically invisible. We performed DCM on patterned micro-droplets, so that the horizontal lipid bilayers were obtained. We visualized the lipid bilayer formation by an optical microscope and detected the current signals of the pore-forming membrane protein, α-hemolysin.
{"title":"Horizontal lipid bilayers formed by droplets contact method on patterned micro-droplets","authors":"T. Tonooka, K. Sato, R. Kawano, T. Osaki, S. Takeuchi","doi":"10.1109/MEMSYS.2013.6474420","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474420","url":null,"abstract":"We developed horizontal lipid bilayers by the Droplets Contact Method (DCM). DCM is the easiest and most efficient method to form lipid bilayers. However, the lipid bilayers formed by our previous method could not be used for simultaneous electrophysiological and optical measurements because the bilayers are vertically oriented and therefore optically invisible. We performed DCM on patterned micro-droplets, so that the horizontal lipid bilayers were obtained. We visualized the lipid bilayer formation by an optical microscope and detected the current signals of the pore-forming membrane protein, α-hemolysin.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"11 1","pages":"1015-1016"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82743198","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474266
T. Kobayashi, N. Makimoto, T. Oikawa, A. Wada, H. Funakubo, R. Maeda
We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d31 of the tetra-PZT thin films have increased to 65.5 μC/Cm2, 20 V, and -42 pm/V by applying AC voltage of 80 V as "wakeup" treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.
{"title":"Linear actuation piezoelectric microcantilever using tetragonal composition PZT thin films","authors":"T. Kobayashi, N. Makimoto, T. Oikawa, A. Wada, H. Funakubo, R. Maeda","doi":"10.1109/MEMSYS.2013.6474266","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474266","url":null,"abstract":"We have fabricated piezoelectric microcantilevers using tetragonal composition Pb(Zr0.3, Ti0.7)O3 (tetra-PZT) thin films and characterized their displacement-voltage behavior under AC actuation condition. The remnant polarization, coercive voltage and piezoelectric constant d31 of the tetra-PZT thin films have increased to 65.5 μC/Cm2, 20 V, and -42 pm/V by applying AC voltage of 80 V as \"wakeup\" treatment. The fabricated piezoelectric microcantilevers using tetra-PZT thin films have successfully demonstrated linear displacement-voltage behavior under AC actuation condition between -15 V to 15 V.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"29 1","pages":"413-416"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83287854","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474284
B. Morana, G. Fiorentino, G. Pandraud, J. Creemer, P. Sarro
Here we present a method to strongly reduce the oxidation of conductive polycrystalline silicon carbide (poly-SiC) layers. We employed a thin (45 nm) layer of aluminum oxide (Al2O3) as protective coating against oxidation. This layer was deposited by atomic layer deposition (ALD) to achieve a high quality and conformal coating. Microheaters made of nitrogen doped poly-SiC (poly-SiC:N) were oxidized at elevated temperatures in both wet and dry atmospheres. Electrical characterizations of the microheaters show that the proposed coating is able to reduce the oxide growth by a factor of 11 for wet oxidation at 1000 °C.
{"title":"Ald aluminum oxide as protective coating against oxidation of LPCVD SiC microhotplates","authors":"B. Morana, G. Fiorentino, G. Pandraud, J. Creemer, P. Sarro","doi":"10.1109/MEMSYS.2013.6474284","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474284","url":null,"abstract":"Here we present a method to strongly reduce the oxidation of conductive polycrystalline silicon carbide (poly-SiC) layers. We employed a thin (45 nm) layer of aluminum oxide (Al2O3) as protective coating against oxidation. This layer was deposited by atomic layer deposition (ALD) to achieve a high quality and conformal coating. Microheaters made of nitrogen doped poly-SiC (poly-SiC:N) were oxidized at elevated temperatures in both wet and dry atmospheres. Electrical characterizations of the microheaters show that the proposed coating is able to reduce the oxide growth by a factor of 11 for wet oxidation at 1000 °C.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"1973 1","pages":"484-487"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90212997","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)
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