2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474304
C. Peters, O. Ergeneman, B. Nelson, C. Hierold
We present the fabrication of soft-magnetic helical micro robots employing two-photon polymerization of a superparamagnetic polymer composite. The proposed fabrication method allows for adjusting the magnetic easy axis independent from the helical shape by aligning the embedded superparamagnetic nanoparticles prior to composite crosslinking. In contrast to conventional, shape-anisotropic helical micro swimmers, the proposed devices possess a magnetic easy axis perpendicular to their helical axis and thus benefit from a significant performance increase including a wobbling-free swimming behavior at low speeds as well as an increase in forward velocity of more than 250%. The presented results highlight the importance of the magnetic easy axis for actuation purposes and imply increased performance for the entire class of superparamagnetic polymer actuators.
{"title":"Superparamagnetic swimming microrobots with adjusted magnetic anisotropy","authors":"C. Peters, O. Ergeneman, B. Nelson, C. Hierold","doi":"10.1109/MEMSYS.2013.6474304","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474304","url":null,"abstract":"We present the fabrication of soft-magnetic helical micro robots employing two-photon polymerization of a superparamagnetic polymer composite. The proposed fabrication method allows for adjusting the magnetic easy axis independent from the helical shape by aligning the embedded superparamagnetic nanoparticles prior to composite crosslinking. In contrast to conventional, shape-anisotropic helical micro swimmers, the proposed devices possess a magnetic easy axis perpendicular to their helical axis and thus benefit from a significant performance increase including a wobbling-free swimming behavior at low speeds as well as an increase in forward velocity of more than 250%. The presented results highlight the importance of the magnetic easy axis for actuation purposes and imply increased performance for the entire class of superparamagnetic polymer actuators.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"1 1","pages":"564-567"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78840486","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474450
T. Kasahara, J. Mizuno, S. Matsunami, T. Edura, M. Tsuwaki, J. Oshima, C. Adachi, S. Shoji
We developed a multi-color microfluidic organic light emitting device, which consists of liquid organic light emitting diodes (OLEDs) and electrochemiluminescence (ECL) devices. A 3 × 3 matrix of emitting pixels was fabricated in SU-8 microchannels sandwiched between polyethylene naphthalate (PEN) and glass substrates with indium tin oxide (ITO) anode and cathode pairs. Liquid organic semiconductor and ECL solutions as liquid emitters were injected into the microchannels. The electroluminescence (EL) and ECL were successfully obtained at the emitting pixels in the microchannels. The proposed structure can be applicable for multi-color liquid-based display.
{"title":"Multi-color microfluidic organic light emitting device using electroluminescence and electrochemiluminescence","authors":"T. Kasahara, J. Mizuno, S. Matsunami, T. Edura, M. Tsuwaki, J. Oshima, C. Adachi, S. Shoji","doi":"10.1109/MEMSYS.2013.6474450","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474450","url":null,"abstract":"We developed a multi-color microfluidic organic light emitting device, which consists of liquid organic light emitting diodes (OLEDs) and electrochemiluminescence (ECL) devices. A 3 × 3 matrix of emitting pixels was fabricated in SU-8 microchannels sandwiched between polyethylene naphthalate (PEN) and glass substrates with indium tin oxide (ITO) anode and cathode pairs. Liquid organic semiconductor and ECL solutions as liquid emitters were injected into the microchannels. The electroluminescence (EL) and ECL were successfully obtained at the emitting pixels in the microchannels. The proposed structure can be applicable for multi-color liquid-based display.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"5 1","pages":"1133-1136"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88825102","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper reports a single-step process to fabricate superhydrophobic micro/nano dual-scale (MNDS) poly(dimethylsiloxane) (PDMS) membrane replicated directly from ultra-low-surface-energy MNDS silicon substrate at high temperature without surfactant coating. MNDS silicon surface with ultra-low surface energy was simply fabricated by an improved deep reactive ion etching (DRIE) process. The huge reduction of surface energy and the formation of high-density nanostructures (i.e. nanotips) on well-designed microstructures (i.e. inverted pyramids and V-shape grooves) were realized simultaneously due to the enhancement of passivation step of DRIE process. Therefore, the high-temperature thermal cross-linking process, even higher than 180°C, can be directly utilized on the pattern replication of PDMS without surfactant coating to strengthen the precision. After studying of heating temperature and time, the MNDS PDMS membrane with the static contact angle (CA) of ~151° was realized at the optimized temperature of 85°C after 1-hour heating. The plasma treatment of the same improved DRIE process was utilized to enhance the hydrophobicity. The CA achieved up to more than 160°, while the CA hysteresis was reduced to below 10°.
{"title":"Single-step fabrication of superhydrophobic micro/nano dual-scale PDMS film replicated from ultra-low-surface-energy mold","authors":"Xiao-Sheng Zhang, Bai-Hong Jin, Shi-Gan Chu, N. Peter, Fu-Yun Zhu, Hai-Xia Zhang","doi":"10.1109/MEMSYS.2013.6474245","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474245","url":null,"abstract":"This paper reports a single-step process to fabricate superhydrophobic micro/nano dual-scale (MNDS) poly(dimethylsiloxane) (PDMS) membrane replicated directly from ultra-low-surface-energy MNDS silicon substrate at high temperature without surfactant coating. MNDS silicon surface with ultra-low surface energy was simply fabricated by an improved deep reactive ion etching (DRIE) process. The huge reduction of surface energy and the formation of high-density nanostructures (i.e. nanotips) on well-designed microstructures (i.e. inverted pyramids and V-shape grooves) were realized simultaneously due to the enhancement of passivation step of DRIE process. Therefore, the high-temperature thermal cross-linking process, even higher than 180°C, can be directly utilized on the pattern replication of PDMS without surfactant coating to strengthen the precision. After studying of heating temperature and time, the MNDS PDMS membrane with the static contact angle (CA) of ~151° was realized at the optimized temperature of 85°C after 1-hour heating. The plasma treatment of the same improved DRIE process was utilized to enhance the hydrophobicity. The CA achieved up to more than 160°, while the CA hysteresis was reduced to below 10°.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"3 1","pages":"331-334"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87018720","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474234
A. Moazenzadeh, N. Spengler, U. Wallrabe
We present the fabrication of 3D-microtransformers combining a new type of multilayered magnetic core and coil winding with an automatic wirebonder. For the magnetic cores we stapled up to 30 layers of 20 μm thick amorphous metal layers with an industrial laminator. Intermediate layers of 10 μm thick double-sided sticky tape provided adhesion and electrical insulation. Electrical discharge machining was used to precisely cut these magnetic stacks to sub-millimeter cubes. To flip the cubes by 90° and assemble them onto a wafer for coil winding, we produced a receptor wafer providing magnetic landing sites. Subsequently, to wind a primary and secondary coil, one on top of the other, an automatic wirebonder was employed with 25 μm thick insulated Gold wire. A fabricated transformer with a core size of 0.9*0.8*1 mm3 yielded an inductance of 1412 nH and a coupling factor of 97%. The maximum transformer efficiency of 73% was measured at a load of 50 Ω.
{"title":"High-performance, 3D-microtransformers on multilayered magnetic cores","authors":"A. Moazenzadeh, N. Spengler, U. Wallrabe","doi":"10.1109/MEMSYS.2013.6474234","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474234","url":null,"abstract":"We present the fabrication of 3D-microtransformers combining a new type of multilayered magnetic core and coil winding with an automatic wirebonder. For the magnetic cores we stapled up to 30 layers of 20 μm thick amorphous metal layers with an industrial laminator. Intermediate layers of 10 μm thick double-sided sticky tape provided adhesion and electrical insulation. Electrical discharge machining was used to precisely cut these magnetic stacks to sub-millimeter cubes. To flip the cubes by 90° and assemble them onto a wafer for coil winding, we produced a receptor wafer providing magnetic landing sites. Subsequently, to wind a primary and secondary coil, one on top of the other, an automatic wirebonder was employed with 25 μm thick insulated Gold wire. A fabricated transformer with a core size of 0.9*0.8*1 mm3 yielded an inductance of 1412 nH and a coupling factor of 97%. The maximum transformer efficiency of 73% was measured at a load of 50 Ω.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"5 1","pages":"287-290"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89611924","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474310
O. Thomas, F. Mathieu, W. Mansfield, C. Huang, S. Trolier-McKinstry, L. Nicu
We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.
{"title":"Piezoelectric parametric amplifiers with integrated actuation and sensing capabilities","authors":"O. Thomas, F. Mathieu, W. Mansfield, C. Huang, S. Trolier-McKinstry, L. Nicu","doi":"10.1109/MEMSYS.2013.6474310","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474310","url":null,"abstract":"We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"31 1","pages":"588-591"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90176207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474193
M. Asadnia, A. Kottapalli, Z. Shen, J. Miao, G. Barbastathis, M. Triantafyllou
In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.
{"title":"Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles","authors":"M. Asadnia, A. Kottapalli, Z. Shen, J. Miao, G. Barbastathis, M. Triantafyllou","doi":"10.1109/MEMSYS.2013.6474193","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474193","url":null,"abstract":"In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"18 1","pages":"126-129"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82178576","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474296
T. Chishiro, T. Ono, S. Konishi
This paper proposes a pantograph mechanism to convert swelling motion of pneumatic balloon actuator (hereafter PBA) into linear contraction motion. PBA swells in nature by internal pressurization. Bending PBA, which was previously proposed, converts swelling into bending motion by bimorph mechanism. In addition, we reported conversion from bending motion of PBA into contraction elsewhere. This paper presents direct conversion from swelling motion into contraction by a pantograph mechanism. Direct conversion improves conversion efficiency and performance of actuator. A developed single actuator could achieve efficient conversion and generate 1.2N at 80kPa in the case of 6mm×6mm×400μm device (5mm×5mm balloon). Design for outputs accumulation is also demonstrated. Medical forceps and endoscope are demonstrated as promising medical application of the contracting motion PBA.
{"title":"Pantograph mechanism for conversion from swelling into contraction motion of pneumatic balloon actuator","authors":"T. Chishiro, T. Ono, S. Konishi","doi":"10.1109/MEMSYS.2013.6474296","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474296","url":null,"abstract":"This paper proposes a pantograph mechanism to convert swelling motion of pneumatic balloon actuator (hereafter PBA) into linear contraction motion. PBA swells in nature by internal pressurization. Bending PBA, which was previously proposed, converts swelling into bending motion by bimorph mechanism. In addition, we reported conversion from bending motion of PBA into contraction elsewhere. This paper presents direct conversion from swelling motion into contraction by a pantograph mechanism. Direct conversion improves conversion efficiency and performance of actuator. A developed single actuator could achieve efficient conversion and generate 1.2N at 80kPa in the case of 6mm×6mm×400μm device (5mm×5mm balloon). Design for outputs accumulation is also demonstrated. Medical forceps and endoscope are demonstrated as promising medical application of the contracting motion PBA.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"8 1","pages":"532-535"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82214009","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474227
N. Rajabi, J. Bahnemann, T. Tzeng, A. Zeng, J. Muller
A novel lab-on-a-chip is presented for the high-throughput preparation of mammalian cell samples. The microfluidic chip consists of two temperature zones and five functional modules with a total number of four fluidic inlet and three outlet channels for sample collection. The key modules of the chip are a rapid split-and-recombine micromixer for biological system perturbation, a chaotic advection “stirred” incubation channel for lowered residence time distribution, and a spiral channel for efficient particle separation and media exchange. The passive chip is suitable for dynamic pulse experiments for metabolic analyses in cell compartments.
{"title":"Microfluidic device for the continuous preparation of eukaryotic cells for metabolic analysis","authors":"N. Rajabi, J. Bahnemann, T. Tzeng, A. Zeng, J. Muller","doi":"10.1109/MEMSYS.2013.6474227","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474227","url":null,"abstract":"A novel lab-on-a-chip is presented for the high-throughput preparation of mammalian cell samples. The microfluidic chip consists of two temperature zones and five functional modules with a total number of four fluidic inlet and three outlet channels for sample collection. The key modules of the chip are a rapid split-and-recombine micromixer for biological system perturbation, a chaotic advection “stirred” incubation channel for lowered residence time distribution, and a spiral channel for efficient particle separation and media exchange. The passive chip is suitable for dynamic pulse experiments for metabolic analyses in cell compartments.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"22 1","pages":"259-262"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86217669","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474288
J. Tao, H. Cai, J. Wu, J. Tsai, Q. Zhang, J. Lin, A. Liu
This paper reports a compact optical wavelength tracker, which consists of an electrically controlled tunable micro-ring resonator and a flip-chip bonded photodiode. The input optical wavelength is measured and the wavelength change is tracked by analyzing the photocurrent variation of the photodiode. This wavelength tracker has compact size (0.5 mm × 1.5 mm), high resolution (3 pm), cost-effective and can be easily integrated with other devices on a single chip. It offers a simple chip-level optical wavelength tracking and detection approach for low-cost batch production, which has potential applications in optical sensors and fiber communications.
本文报道了一种紧凑的光学波长跟踪器，它由一个电控可调微环谐振器和一个倒装键合光电二极管组成。测量输入光波长，并通过分析光电二极管的光电流变化跟踪波长的变化。该波长跟踪器具有紧凑的尺寸(0.5 mm × 1.5 mm)，高分辨率(3 pm)，具有成本效益，并且可以轻松地与单个芯片上的其他设备集成。它为低成本批量生产提供了一种简单的芯片级光学波长跟踪和检测方法，在光学传感器和光纤通信中具有潜在的应用前景。
{"title":"Optical wavelength signal detector via tunable micro-ring resonator for sensor applications","authors":"J. Tao, H. Cai, J. Wu, J. Tsai, Q. Zhang, J. Lin, A. Liu","doi":"10.1109/MEMSYS.2013.6474288","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474288","url":null,"abstract":"This paper reports a compact optical wavelength tracker, which consists of an electrically controlled tunable micro-ring resonator and a flip-chip bonded photodiode. The input optical wavelength is measured and the wavelength change is tracked by analyzing the photocurrent variation of the photodiode. This wavelength tracker has compact size (0.5 mm × 1.5 mm), high resolution (3 pm), cost-effective and can be easily integrated with other devices on a single chip. It offers a simple chip-level optical wavelength tracking and detection approach for low-cost batch production, which has potential applications in optical sensors and fiber communications.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"39 1","pages":"500-503"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82949917","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474211
N. Wang, S. Yoshida, M. Kumano, Y. Kawai, S. Tanaka, M. Esashi
This paper reports on the fabrication and characterization of a novel laterally-driven piezoelectric bimorph MEMS actuator with high aspect-ratio (AR) lead-zirconate-titanate (PZT) structure. In the fabrication process, the PZT structures (AR=8) was successfully fabricated by filling deep Si trenches with nanocomposite sol-gel PZT. A lateral displacement of 10 μm was obtained from a 500-μm-long actuator by bimorph actuation at driving voltages of +25 V/-5 V, while no vertical cross-motion as well as no initial vertical bending was observed. Compared with conventional capacitive comb-drive actuators, this actuator occupies a much smaller area to generate identical force or displacement. This actuator has the potential to become a new actuation technology in MEMS.
{"title":"Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture","authors":"N. Wang, S. Yoshida, M. Kumano, Y. Kawai, S. Tanaka, M. Esashi","doi":"10.1109/MEMSYS.2013.6474211","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474211","url":null,"abstract":"This paper reports on the fabrication and characterization of a novel laterally-driven piezoelectric bimorph MEMS actuator with high aspect-ratio (AR) lead-zirconate-titanate (PZT) structure. In the fabrication process, the PZT structures (AR=8) was successfully fabricated by filling deep Si trenches with nanocomposite sol-gel PZT. A lateral displacement of 10 μm was obtained from a 500-μm-long actuator by bimorph actuation at driving voltages of +25 V/-5 V, while no vertical cross-motion as well as no initial vertical bending was observed. Compared with conventional capacitive comb-drive actuators, this actuator occupies a much smaller area to generate identical force or displacement. This actuator has the potential to become a new actuation technology in MEMS.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"7 1","pages":"197-200"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78789893","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)
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