2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474234
A. Moazenzadeh, N. Spengler, U. Wallrabe
We present the fabrication of 3D-microtransformers combining a new type of multilayered magnetic core and coil winding with an automatic wirebonder. For the magnetic cores we stapled up to 30 layers of 20 μm thick amorphous metal layers with an industrial laminator. Intermediate layers of 10 μm thick double-sided sticky tape provided adhesion and electrical insulation. Electrical discharge machining was used to precisely cut these magnetic stacks to sub-millimeter cubes. To flip the cubes by 90° and assemble them onto a wafer for coil winding, we produced a receptor wafer providing magnetic landing sites. Subsequently, to wind a primary and secondary coil, one on top of the other, an automatic wirebonder was employed with 25 μm thick insulated Gold wire. A fabricated transformer with a core size of 0.9*0.8*1 mm3 yielded an inductance of 1412 nH and a coupling factor of 97%. The maximum transformer efficiency of 73% was measured at a load of 50 Ω.
{"title":"High-performance, 3D-microtransformers on multilayered magnetic cores","authors":"A. Moazenzadeh, N. Spengler, U. Wallrabe","doi":"10.1109/MEMSYS.2013.6474234","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474234","url":null,"abstract":"We present the fabrication of 3D-microtransformers combining a new type of multilayered magnetic core and coil winding with an automatic wirebonder. For the magnetic cores we stapled up to 30 layers of 20 μm thick amorphous metal layers with an industrial laminator. Intermediate layers of 10 μm thick double-sided sticky tape provided adhesion and electrical insulation. Electrical discharge machining was used to precisely cut these magnetic stacks to sub-millimeter cubes. To flip the cubes by 90° and assemble them onto a wafer for coil winding, we produced a receptor wafer providing magnetic landing sites. Subsequently, to wind a primary and secondary coil, one on top of the other, an automatic wirebonder was employed with 25 μm thick insulated Gold wire. A fabricated transformer with a core size of 0.9*0.8*1 mm3 yielded an inductance of 1412 nH and a coupling factor of 97%. The maximum transformer efficiency of 73% was measured at a load of 50 Ω.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89611924","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474310
O. Thomas, F. Mathieu, W. Mansfield, C. Huang, S. Trolier-McKinstry, L. Nicu
We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.
{"title":"Piezoelectric parametric amplifiers with integrated actuation and sensing capabilities","authors":"O. Thomas, F. Mathieu, W. Mansfield, C. Huang, S. Trolier-McKinstry, L. Nicu","doi":"10.1109/MEMSYS.2013.6474310","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474310","url":null,"abstract":"We report in this work on unprecedented levels of parametric amplification in microelectromechanical systems (MEMS) resonators with integrated piezoelectric actuation and sensing capabilities operated in air. The method presented here relies on accurate analytical modeling taking into account the geometrical nonlinearities inherent to the bridge-like configuration of the resonators used. The model provides, for the first time, precise analytical formula of the quality factor (Q) enhancement depending on the resonant mode examined. Experimental validations were conducted for resonant modes exhibiting, respectively, hard and soft-spring effects when driven in the nonlinear regime; Q amplification by a factor up to 14 has been obtained in air.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90176207","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474193
M. Asadnia, A. Kottapalli, Z. Shen, J. Miao, G. Barbastathis, M. Triantafyllou
In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.
{"title":"Flexible, zero powered, piezoelectric MEMS pressure sensor arrays for fish-like passive underwater sensing in marine vehicles","authors":"M. Asadnia, A. Kottapalli, Z. Shen, J. Miao, G. Barbastathis, M. Triantafyllou","doi":"10.1109/MEMSYS.2013.6474193","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474193","url":null,"abstract":"In an effort to improve the situational awareness of maritime vehicles, flexible MEMS pressure sensor arrays are developed for underwater sensing applications. This paper outlines the development of piezoelectric microdiaphragm pressure sensor arrays that can perform a passive fish-like underwater sensing. Individual sensors have a low footprint of 1.8 × 1.8 mm2 and do not require any power for their operation. An array of 2 by 5 sensors is fabricated, packaged and tested for use on marine vehicle. The proposed array is capable of locating underwater objects by transducing the pressure variations generated by the stimulus.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82178576","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474240
Y. Koyata, M. Ikeuchi, K. Ikuta
We succeeded in developing a new simple and unique method to fabricate enclosed microfluidic channels within Polydimethylsiloxane (PDMS) substrates. The procedure is extremely straight forward, where sacrificial caramel embedded inside solid PDMS simply dissolves to form arbitrary shaped enclosed channels. Arbitrary microchannel network including 3-D interchanges, cross-junctions and very thin (≤1μm) cylindrical channels can be produced with no costly equipment and no cytotoxic material.
{"title":"Sealless 3-D microfluidic channel fabrication by sacrificial caramel template direct-patterning","authors":"Y. Koyata, M. Ikeuchi, K. Ikuta","doi":"10.1109/MEMSYS.2013.6474240","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474240","url":null,"abstract":"We succeeded in developing a new simple and unique method to fabricate enclosed microfluidic channels within Polydimethylsiloxane (PDMS) substrates. The procedure is extremely straight forward, where sacrificial caramel embedded inside solid PDMS simply dissolves to form arbitrary shaped enclosed channels. Arbitrary microchannel network including 3-D interchanges, cross-junctions and very thin (≤1μm) cylindrical channels can be produced with no costly equipment and no cytotoxic material.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72904411","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474211
N. Wang, S. Yoshida, M. Kumano, Y. Kawai, S. Tanaka, M. Esashi
This paper reports on the fabrication and characterization of a novel laterally-driven piezoelectric bimorph MEMS actuator with high aspect-ratio (AR) lead-zirconate-titanate (PZT) structure. In the fabrication process, the PZT structures (AR=8) was successfully fabricated by filling deep Si trenches with nanocomposite sol-gel PZT. A lateral displacement of 10 μm was obtained from a 500-μm-long actuator by bimorph actuation at driving voltages of +25 V/-5 V, while no vertical cross-motion as well as no initial vertical bending was observed. Compared with conventional capacitive comb-drive actuators, this actuator occupies a much smaller area to generate identical force or displacement. This actuator has the potential to become a new actuation technology in MEMS.
{"title":"Laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT sturucture","authors":"N. Wang, S. Yoshida, M. Kumano, Y. Kawai, S. Tanaka, M. Esashi","doi":"10.1109/MEMSYS.2013.6474211","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474211","url":null,"abstract":"This paper reports on the fabrication and characterization of a novel laterally-driven piezoelectric bimorph MEMS actuator with high aspect-ratio (AR) lead-zirconate-titanate (PZT) structure. In the fabrication process, the PZT structures (AR=8) was successfully fabricated by filling deep Si trenches with nanocomposite sol-gel PZT. A lateral displacement of 10 μm was obtained from a 500-μm-long actuator by bimorph actuation at driving voltages of +25 V/-5 V, while no vertical cross-motion as well as no initial vertical bending was observed. Compared with conventional capacitive comb-drive actuators, this actuator occupies a much smaller area to generate identical force or displacement. This actuator has the potential to become a new actuation technology in MEMS.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78789893","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474304
C. Peters, O. Ergeneman, B. Nelson, C. Hierold
We present the fabrication of soft-magnetic helical micro robots employing two-photon polymerization of a superparamagnetic polymer composite. The proposed fabrication method allows for adjusting the magnetic easy axis independent from the helical shape by aligning the embedded superparamagnetic nanoparticles prior to composite crosslinking. In contrast to conventional, shape-anisotropic helical micro swimmers, the proposed devices possess a magnetic easy axis perpendicular to their helical axis and thus benefit from a significant performance increase including a wobbling-free swimming behavior at low speeds as well as an increase in forward velocity of more than 250%. The presented results highlight the importance of the magnetic easy axis for actuation purposes and imply increased performance for the entire class of superparamagnetic polymer actuators.
{"title":"Superparamagnetic swimming microrobots with adjusted magnetic anisotropy","authors":"C. Peters, O. Ergeneman, B. Nelson, C. Hierold","doi":"10.1109/MEMSYS.2013.6474304","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474304","url":null,"abstract":"We present the fabrication of soft-magnetic helical micro robots employing two-photon polymerization of a superparamagnetic polymer composite. The proposed fabrication method allows for adjusting the magnetic easy axis independent from the helical shape by aligning the embedded superparamagnetic nanoparticles prior to composite crosslinking. In contrast to conventional, shape-anisotropic helical micro swimmers, the proposed devices possess a magnetic easy axis perpendicular to their helical axis and thus benefit from a significant performance increase including a wobbling-free swimming behavior at low speeds as well as an increase in forward velocity of more than 250%. The presented results highlight the importance of the magnetic easy axis for actuation purposes and imply increased performance for the entire class of superparamagnetic polymer actuators.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78840486","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474171
N. Thanh-Vinh, N. Binh-Khiem, K. Matsumoto, I. Shimoyama
We propose a highly sensitive three-dimensional tactile sensor using the structure of elastic micro pyramids pressing on piezoresistive cantilevers. In the structure of the sensor we proposed, the forces acting on the surface of the elastomer were transmitted to the cantilevers through the pyramids. The key point of our sensor was that the cantilevers were not completely embedded inside the elastomer: a cavity under each cantilever enabled the larger deformation and thus the larger resistance change of the cantilever. Therefore the high sensitivity of the sensor could be obtained. Moreover, by using four cantilevers aligned with four pyramids, the three-dimensional force sensor was realized. The sensitivities of our sensor to forces in normal and lateral directions were about 50 times and 2.4 times higher, respectively, compared to those of a tactile sensor with the ultrathin cantilevers embedded inside an elastomer [1].
{"title":"High sensitive 3D tactile sensor with the structure of elastic pyramids on piezoresistive cantilevers","authors":"N. Thanh-Vinh, N. Binh-Khiem, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2013.6474171","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474171","url":null,"abstract":"We propose a highly sensitive three-dimensional tactile sensor using the structure of elastic micro pyramids pressing on piezoresistive cantilevers. In the structure of the sensor we proposed, the forces acting on the surface of the elastomer were transmitted to the cantilevers through the pyramids. The key point of our sensor was that the cantilevers were not completely embedded inside the elastomer: a cavity under each cantilever enabled the larger deformation and thus the larger resistance change of the cantilever. Therefore the high sensitivity of the sensor could be obtained. Moreover, by using four cantilevers aligned with four pyramids, the three-dimensional force sensor was realized. The sensitivities of our sensor to forces in normal and lateral directions were about 50 times and 2.4 times higher, respectively, compared to those of a tactile sensor with the ultrathin cantilevers embedded inside an elastomer [1].","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78936821","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474351
U. Shah, M. Sterner, J. Oberhammer
This paper reports for the first time on RF nonlinearity analysis of complex multi-device RF MEMS circuits. The nonlinearity analysis is done for the two most commonly-used RF MEMS tuneable-circuit concepts, i.e. digital MEMS varactor banks and MEMS switched capacitor banks. In addition, the nonlinearity of a novel MEMS tuneable capacitor concept by the authors, based on a MEMS actuator with discrete tuning steps, is discussed. This paper presents closed-form analytical formulas for the IIP3 (nonlinearity) of the three MEMS multi-device circuit concepts, and an analysis of the nonlinearity based on measured device parameters (capacitance, gap), of the different concepts. Finally, this paper also investigates the effect of scaling of the circuit complexity, i.e. the degradation of the overall circuit linearity depending on the number of stages/bits of the MEMS-tuning circuit.
{"title":"Analysis of linearity degradation in multi-stage RF MEMS circuits","authors":"U. Shah, M. Sterner, J. Oberhammer","doi":"10.1109/MEMSYS.2013.6474351","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474351","url":null,"abstract":"This paper reports for the first time on RF nonlinearity analysis of complex multi-device RF MEMS circuits. The nonlinearity analysis is done for the two most commonly-used RF MEMS tuneable-circuit concepts, i.e. digital MEMS varactor banks and MEMS switched capacitor banks. In addition, the nonlinearity of a novel MEMS tuneable capacitor concept by the authors, based on a MEMS actuator with discrete tuning steps, is discussed. This paper presents closed-form analytical formulas for the IIP3 (nonlinearity) of the three MEMS multi-device circuit concepts, and an analysis of the nonlinearity based on measured device parameters (capacitance, gap), of the different concepts. Finally, this paper also investigates the effect of scaling of the circuit complexity, i.e. the degradation of the overall circuit linearity depending on the number of stages/bits of the MEMS-tuning circuit.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76668745","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474225
Philip Zwanenburg, Xiao Li, Xinyu Liu
Multi-step analytical tests such as enzyme-linked immunosorbent assay (ELISA) require delivery of multiple fluids into a reaction zone and counting of incubation time at different steps. This paper presents a new type of paper-based magnetic valves that can count the time and turn on or off a fluidic flow accordingly, enabling timed fluid control in paper-based microfluidics. The timing function of these valves is realized using a paper timing channel with an ionic resistor, which can detect the event of a solution flowing through the resistor and trigger an electromagnet (through a simple circuit) to open or close a paper cantilever valve. Based on this principle, we developed normally-open and normally-closed valves with a timing period up to 30.3±2.1 minutes (sufficient for ELISA on paper-based platforms). Using the normally-open valve, we performed an enzyme-based colorimetric reaction commonly used for signal amplification of ELISAs, which requires a timed delivery of enzyme substrate to a reaction zone. This design adds a new fluid-control component to the tool set for developing paper-based microfluidic devices, and has the potential to improve the user-friendliness of these devices.
{"title":"Magnetic valves with programmable timing capability for fluid control in paper-based microfluidics","authors":"Philip Zwanenburg, Xiao Li, Xinyu Liu","doi":"10.1109/MEMSYS.2013.6474225","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474225","url":null,"abstract":"Multi-step analytical tests such as enzyme-linked immunosorbent assay (ELISA) require delivery of multiple fluids into a reaction zone and counting of incubation time at different steps. This paper presents a new type of paper-based magnetic valves that can count the time and turn on or off a fluidic flow accordingly, enabling timed fluid control in paper-based microfluidics. The timing function of these valves is realized using a paper timing channel with an ionic resistor, which can detect the event of a solution flowing through the resistor and trigger an electromagnet (through a simple circuit) to open or close a paper cantilever valve. Based on this principle, we developed normally-open and normally-closed valves with a timing period up to 30.3±2.1 minutes (sufficient for ELISA on paper-based platforms). Using the normally-open valve, we performed an enzyme-based colorimetric reaction commonly used for signal amplification of ELISAs, which requires a timed delivery of enzyme substrate to a reaction zone. This design adds a new fluid-control component to the tool set for developing paper-based microfluidic devices, and has the potential to improve the user-friendliness of these devices.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77898402","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474292
Tina He, Rui Yang, S. Rajgopal, M. A. Tupta, S. Bhunia, M. Mehregany, P. Feng
We report experimental demonstration of nanoscale electromechanical contact-mode switches with clearly high comparative performance, enabled by polycrystalline silicon carbide (poly-SiC) nanomechanical cantilevers, in a three-terminal, gate-controlled, lateral configuration. We have recorded the complete time evolution of the measured switching events in ambient air, by switching devices on and off for ≥105-106 cycles without failure (i.e., devices still alive; special accelerated tests are needed to properly `exhaust' the device and approach its intrinsic lifetime). These SiC nanoelectromechanical systems (NEMS) based switches have all dimensions but length in nanometer scale, and demonstrate on/off ratios of ~104 or higher, with repeatable performance over days in air. We have also demonstrated SiC NEMS switches operating at high temperature (T≈500°C) in air. With a typical motional volume of only ~1μm3 and long `hot' switching cycles in air, these SiC devices exhibit strong potential toward realizing robust NEMS switches and logic circuits.
{"title":"Robust silicon carbide (SiC) nanoelectromechanical switches with long cycles in ambient and high temperature conditions","authors":"Tina He, Rui Yang, S. Rajgopal, M. A. Tupta, S. Bhunia, M. Mehregany, P. Feng","doi":"10.1109/MEMSYS.2013.6474292","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474292","url":null,"abstract":"We report experimental demonstration of nanoscale electromechanical contact-mode switches with clearly high comparative performance, enabled by polycrystalline silicon carbide (poly-SiC) nanomechanical cantilevers, in a three-terminal, gate-controlled, lateral configuration. We have recorded the complete time evolution of the measured switching events in ambient air, by switching devices on and off for ≥105-106 cycles without failure (i.e., devices still alive; special accelerated tests are needed to properly `exhaust' the device and approach its intrinsic lifetime). These SiC nanoelectromechanical systems (NEMS) based switches have all dimensions but length in nanometer scale, and demonstrate on/off ratios of ~104 or higher, with repeatable performance over days in air. We have also demonstrated SiC NEMS switches operating at high temperature (T≈500°C) in air. With a typical motional volume of only ~1μm3 and long `hot' switching cycles in air, these SiC devices exhibit strong potential toward realizing robust NEMS switches and logic circuits.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73974130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)
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