2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474265
Joohyun Kim, Sunwoo Han, Keunhan Park, Bong-Jae Lee, W. King, Jungchul Lee
We report the application of scanning thermoreflectance microscopy for steady - as well as periodic-temperature calibration of a microheater-integrated atomic force microscope cantilever (or heated microcantilever). While the heated microcantilever was operated with either DC or AC powers, local thermoreflectance signals were measured using a home-built scanning thermoreflectance microscope and converted into local temperatures using a calibration with Raman thermometry. For our scanning thermoreflectance microscopy, temporal resolution of 10 μs and spatial resolution of 2 μm were achieved. The shrinkage of the AC temperature oscillation amplitude was observed as the modulation frequency increased and thermal cut-off frequency near 1 kHz was found. In addition, strong thickness-dependent thermoreflectance signals were experimentally confirmed and might be useful for noncontact thickness measurements of free standing microelectromechanical systems devices having uniform temperatures.
{"title":"DC and AC electrothermal charicterization of heated microcantilevers using scanning thermoreflectance microscopy","authors":"Joohyun Kim, Sunwoo Han, Keunhan Park, Bong-Jae Lee, W. King, Jungchul Lee","doi":"10.1109/MEMSYS.2013.6474265","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474265","url":null,"abstract":"We report the application of scanning thermoreflectance microscopy for steady - as well as periodic-temperature calibration of a microheater-integrated atomic force microscope cantilever (or heated microcantilever). While the heated microcantilever was operated with either DC or AC powers, local thermoreflectance signals were measured using a home-built scanning thermoreflectance microscope and converted into local temperatures using a calibration with Raman thermometry. For our scanning thermoreflectance microscopy, temporal resolution of 10 μs and spatial resolution of 2 μm were achieved. The shrinkage of the AC temperature oscillation amplitude was observed as the modulation frequency increased and thermal cut-off frequency near 1 kHz was found. In addition, strong thickness-dependent thermoreflectance signals were experimentally confirmed and might be useful for noncontact thickness measurements of free standing microelectromechanical systems devices having uniform temperatures.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85615069","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474333
P. Pai, F. K. Chowdhury, H. Pourzand, M. Tabib-Azar
This work focuses on understanding the behavior of 3D hemispherical shells operating in wineglass resonance mode through finite element modeling (FEM). Fabrication of the hemispherical shells was done using micromachining technique. The quality factor of the device was in excess of 10,000 when operated in 50mT vacuum. The shell showed better than 95% sphericity and had an rms surface roughness of ~5nm. The separation in the degenerate frequencies of 4-node wineglass resonance was 5 Hz at a resonant frequency of 22 kHz. Modeling of the device behavior relates the frequency mismatch to the asymmetry in the shell and quantifies it.
{"title":"Fabrication and testing of hemispherical MEMS wineglass resonators","authors":"P. Pai, F. K. Chowdhury, H. Pourzand, M. Tabib-Azar","doi":"10.1109/MEMSYS.2013.6474333","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474333","url":null,"abstract":"This work focuses on understanding the behavior of 3D hemispherical shells operating in wineglass resonance mode through finite element modeling (FEM). Fabrication of the hemispherical shells was done using micromachining technique. The quality factor of the device was in excess of 10,000 when operated in 50mT vacuum. The shell showed better than 95% sphericity and had an rms surface roughness of ~5nm. The separation in the degenerate frequencies of 4-node wineglass resonance was 5 Hz at a resonant frequency of 22 kHz. Modeling of the device behavior relates the frequency mismatch to the asymmetry in the shell and quantifies it.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85954149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474450
T. Kasahara, J. Mizuno, S. Matsunami, T. Edura, M. Tsuwaki, J. Oshima, C. Adachi, S. Shoji
We developed a multi-color microfluidic organic light emitting device, which consists of liquid organic light emitting diodes (OLEDs) and electrochemiluminescence (ECL) devices. A 3 × 3 matrix of emitting pixels was fabricated in SU-8 microchannels sandwiched between polyethylene naphthalate (PEN) and glass substrates with indium tin oxide (ITO) anode and cathode pairs. Liquid organic semiconductor and ECL solutions as liquid emitters were injected into the microchannels. The electroluminescence (EL) and ECL were successfully obtained at the emitting pixels in the microchannels. The proposed structure can be applicable for multi-color liquid-based display.
{"title":"Multi-color microfluidic organic light emitting device using electroluminescence and electrochemiluminescence","authors":"T. Kasahara, J. Mizuno, S. Matsunami, T. Edura, M. Tsuwaki, J. Oshima, C. Adachi, S. Shoji","doi":"10.1109/MEMSYS.2013.6474450","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474450","url":null,"abstract":"We developed a multi-color microfluidic organic light emitting device, which consists of liquid organic light emitting diodes (OLEDs) and electrochemiluminescence (ECL) devices. A 3 × 3 matrix of emitting pixels was fabricated in SU-8 microchannels sandwiched between polyethylene naphthalate (PEN) and glass substrates with indium tin oxide (ITO) anode and cathode pairs. Liquid organic semiconductor and ECL solutions as liquid emitters were injected into the microchannels. The electroluminescence (EL) and ECL were successfully obtained at the emitting pixels in the microchannels. The proposed structure can be applicable for multi-color liquid-based display.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88825102","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474300
S. de Pedro, V. Cadarso, X. Muñoz‐Berbel, J. Plaza, J. Sort, J. Brugger, S. Buttgenbach, A. Llobera
This paper reports the implementation of magnetic variable optical attenuators (M-VOA) by soft lithography (SLT) and using polydimethylsiloxane (PDMS) as constituent material. Two different fabrication protocols are used and compared. In the first case, a two-layer structure containing a clean PDMS layer on a magnetic PDMS (M-PDMS) layer is fabricated by SLT. M-PDMS is obtained by doping clean PDMS with different ferrofluid (FF) amounts. The second protocol consists of selectively dispensing droplets of FF by the inkjet printing technique (IPT) on a clean and non-cured PDMS structure previously defined by SLT. The optical and mechanical properties of structures fabricated using both protocols and containing similar ferrofluid amounts are compared.
{"title":"Magnetically-actuated variable optical attenuators using ferrofluid-doped elastomer implemented by combination of soft lithography and inkjet printing technologies","authors":"S. de Pedro, V. Cadarso, X. Muñoz‐Berbel, J. Plaza, J. Sort, J. Brugger, S. Buttgenbach, A. Llobera","doi":"10.1109/MEMSYS.2013.6474300","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474300","url":null,"abstract":"This paper reports the implementation of magnetic variable optical attenuators (M-VOA) by soft lithography (SLT) and using polydimethylsiloxane (PDMS) as constituent material. Two different fabrication protocols are used and compared. In the first case, a two-layer structure containing a clean PDMS layer on a magnetic PDMS (M-PDMS) layer is fabricated by SLT. M-PDMS is obtained by doping clean PDMS with different ferrofluid (FF) amounts. The second protocol consists of selectively dispensing droplets of FF by the inkjet printing technique (IPT) on a clean and non-cured PDMS structure previously defined by SLT. The optical and mechanical properties of structures fabricated using both protocols and containing similar ferrofluid amounts are compared.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88500187","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper reports a single-step process to fabricate superhydrophobic micro/nano dual-scale (MNDS) poly(dimethylsiloxane) (PDMS) membrane replicated directly from ultra-low-surface-energy MNDS silicon substrate at high temperature without surfactant coating. MNDS silicon surface with ultra-low surface energy was simply fabricated by an improved deep reactive ion etching (DRIE) process. The huge reduction of surface energy and the formation of high-density nanostructures (i.e. nanotips) on well-designed microstructures (i.e. inverted pyramids and V-shape grooves) were realized simultaneously due to the enhancement of passivation step of DRIE process. Therefore, the high-temperature thermal cross-linking process, even higher than 180°C, can be directly utilized on the pattern replication of PDMS without surfactant coating to strengthen the precision. After studying of heating temperature and time, the MNDS PDMS membrane with the static contact angle (CA) of ~151° was realized at the optimized temperature of 85°C after 1-hour heating. The plasma treatment of the same improved DRIE process was utilized to enhance the hydrophobicity. The CA achieved up to more than 160°, while the CA hysteresis was reduced to below 10°.
{"title":"Single-step fabrication of superhydrophobic micro/nano dual-scale PDMS film replicated from ultra-low-surface-energy mold","authors":"Xiao-Sheng Zhang, Bai-Hong Jin, Shi-Gan Chu, N. Peter, Fu-Yun Zhu, Hai-Xia Zhang","doi":"10.1109/MEMSYS.2013.6474245","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474245","url":null,"abstract":"This paper reports a single-step process to fabricate superhydrophobic micro/nano dual-scale (MNDS) poly(dimethylsiloxane) (PDMS) membrane replicated directly from ultra-low-surface-energy MNDS silicon substrate at high temperature without surfactant coating. MNDS silicon surface with ultra-low surface energy was simply fabricated by an improved deep reactive ion etching (DRIE) process. The huge reduction of surface energy and the formation of high-density nanostructures (i.e. nanotips) on well-designed microstructures (i.e. inverted pyramids and V-shape grooves) were realized simultaneously due to the enhancement of passivation step of DRIE process. Therefore, the high-temperature thermal cross-linking process, even higher than 180°C, can be directly utilized on the pattern replication of PDMS without surfactant coating to strengthen the precision. After studying of heating temperature and time, the MNDS PDMS membrane with the static contact angle (CA) of ~151° was realized at the optimized temperature of 85°C after 1-hour heating. The plasma treatment of the same improved DRIE process was utilized to enhance the hydrophobicity. The CA achieved up to more than 160°, while the CA hysteresis was reduced to below 10°.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87018720","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474227
N. Rajabi, J. Bahnemann, T. Tzeng, A. Zeng, J. Muller
A novel lab-on-a-chip is presented for the high-throughput preparation of mammalian cell samples. The microfluidic chip consists of two temperature zones and five functional modules with a total number of four fluidic inlet and three outlet channels for sample collection. The key modules of the chip are a rapid split-and-recombine micromixer for biological system perturbation, a chaotic advection “stirred” incubation channel for lowered residence time distribution, and a spiral channel for efficient particle separation and media exchange. The passive chip is suitable for dynamic pulse experiments for metabolic analyses in cell compartments.
{"title":"Microfluidic device for the continuous preparation of eukaryotic cells for metabolic analysis","authors":"N. Rajabi, J. Bahnemann, T. Tzeng, A. Zeng, J. Muller","doi":"10.1109/MEMSYS.2013.6474227","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474227","url":null,"abstract":"A novel lab-on-a-chip is presented for the high-throughput preparation of mammalian cell samples. The microfluidic chip consists of two temperature zones and five functional modules with a total number of four fluidic inlet and three outlet channels for sample collection. The key modules of the chip are a rapid split-and-recombine micromixer for biological system perturbation, a chaotic advection “stirred” incubation channel for lowered residence time distribution, and a spiral channel for efficient particle separation and media exchange. The passive chip is suitable for dynamic pulse experiments for metabolic analyses in cell compartments.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86217669","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474322
R. Maimon, O. Lahav, Y. Gerson, O. Zohar, H. Berko, S. Krylov
This paper introduces a design, fabrication, integration and characterization, of a novel high-grade single axis tuning fork gyroscope (TFG), based on dual detection techniques - capacitive and optic (DDT-CO). This is the first time that the capacitive and optical sensing approaches are used, for the registering of the in-plane drive and in-plane sense mode responses. The two techniques are combined in the same fully functional vacuum packaged device with integrated electronics. We present the results of the rate-table performance study, and the sensor's main figures of merit. We show that the use of dual sensing significantly simplifies the silicon on insulator (SOI) fabrication process, allowing the achievement of tactical grade performance, including angular random walk (ARW) less than 0.15 °/√hr and in-run bias instability (BI) less than 2 °/hr.
{"title":"Tactical grade micro gyroscope with dual capcitive/optical sensing","authors":"R. Maimon, O. Lahav, Y. Gerson, O. Zohar, H. Berko, S. Krylov","doi":"10.1109/MEMSYS.2013.6474322","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474322","url":null,"abstract":"This paper introduces a design, fabrication, integration and characterization, of a novel high-grade single axis tuning fork gyroscope (TFG), based on dual detection techniques - capacitive and optic (DDT-CO). This is the first time that the capacitive and optical sensing approaches are used, for the registering of the in-plane drive and in-plane sense mode responses. The two techniques are combined in the same fully functional vacuum packaged device with integrated electronics. We present the results of the rate-table performance study, and the sensor's main figures of merit. We show that the use of dual sensing significantly simplifies the silicon on insulator (SOI) fabrication process, allowing the achievement of tactical grade performance, including angular random walk (ARW) less than 0.15 °/√hr and in-run bias instability (BI) less than 2 °/hr.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85697387","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474296
T. Chishiro, T. Ono, S. Konishi
This paper proposes a pantograph mechanism to convert swelling motion of pneumatic balloon actuator (hereafter PBA) into linear contraction motion. PBA swells in nature by internal pressurization. Bending PBA, which was previously proposed, converts swelling into bending motion by bimorph mechanism. In addition, we reported conversion from bending motion of PBA into contraction elsewhere. This paper presents direct conversion from swelling motion into contraction by a pantograph mechanism. Direct conversion improves conversion efficiency and performance of actuator. A developed single actuator could achieve efficient conversion and generate 1.2N at 80kPa in the case of 6mm×6mm×400μm device (5mm×5mm balloon). Design for outputs accumulation is also demonstrated. Medical forceps and endoscope are demonstrated as promising medical application of the contracting motion PBA.
{"title":"Pantograph mechanism for conversion from swelling into contraction motion of pneumatic balloon actuator","authors":"T. Chishiro, T. Ono, S. Konishi","doi":"10.1109/MEMSYS.2013.6474296","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474296","url":null,"abstract":"This paper proposes a pantograph mechanism to convert swelling motion of pneumatic balloon actuator (hereafter PBA) into linear contraction motion. PBA swells in nature by internal pressurization. Bending PBA, which was previously proposed, converts swelling into bending motion by bimorph mechanism. In addition, we reported conversion from bending motion of PBA into contraction elsewhere. This paper presents direct conversion from swelling motion into contraction by a pantograph mechanism. Direct conversion improves conversion efficiency and performance of actuator. A developed single actuator could achieve efficient conversion and generate 1.2N at 80kPa in the case of 6mm×6mm×400μm device (5mm×5mm balloon). Design for outputs accumulation is also demonstrated. Medical forceps and endoscope are demonstrated as promising medical application of the contracting motion PBA.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82214009","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474170
J. Lee, S. Pyo, M.-O Kim, T. Chung, H. Lee, S.-C Lim, J. Park, J. Kim
We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical resistance in each sensing part. High gauge factor up to 272 and fast response less than 10 ms have been experimentally verified from the presented tactile sensor. The deviated contact resistance change from the initial value was less than 3% after repeated force input of 15 mN for 180,000 cycles.
{"title":"Development of flexible tactile sensor based on contact resistance of integrated carbon nanotubes","authors":"J. Lee, S. Pyo, M.-O Kim, T. Chung, H. Lee, S.-C Lim, J. Park, J. Kim","doi":"10.1109/MEMSYS.2013.6474170","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474170","url":null,"abstract":"We have developed a novel three dimensional tactile sensor based on vertically aligned carbon nanotubes. The carbon nanotubes were directly synthesized on silicon microstructures and these CNTs-on-microstructures were integrated to flexible polydimethylsiloxane layers. Each tactile sensor has four sensing parts and the direction of force can be detected by monitoring the increase or decrease of electrical resistance in each sensing part. High gauge factor up to 272 and fast response less than 10 ms have been experimentally verified from the presented tactile sensor. The deviated contact resistance change from the initial value was less than 3% after repeated force input of 15 mN for 180,000 cycles.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80225290","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474288
J. Tao, H. Cai, J. Wu, J. Tsai, Q. Zhang, J. Lin, A. Liu
This paper reports a compact optical wavelength tracker, which consists of an electrically controlled tunable micro-ring resonator and a flip-chip bonded photodiode. The input optical wavelength is measured and the wavelength change is tracked by analyzing the photocurrent variation of the photodiode. This wavelength tracker has compact size (0.5 mm × 1.5 mm), high resolution (3 pm), cost-effective and can be easily integrated with other devices on a single chip. It offers a simple chip-level optical wavelength tracking and detection approach for low-cost batch production, which has potential applications in optical sensors and fiber communications.
本文报道了一种紧凑的光学波长跟踪器，它由一个电控可调微环谐振器和一个倒装键合光电二极管组成。测量输入光波长，并通过分析光电二极管的光电流变化跟踪波长的变化。该波长跟踪器具有紧凑的尺寸(0.5 mm × 1.5 mm)，高分辨率(3 pm)，具有成本效益，并且可以轻松地与单个芯片上的其他设备集成。它为低成本批量生产提供了一种简单的芯片级光学波长跟踪和检测方法，在光学传感器和光纤通信中具有潜在的应用前景。
{"title":"Optical wavelength signal detector via tunable micro-ring resonator for sensor applications","authors":"J. Tao, H. Cai, J. Wu, J. Tsai, Q. Zhang, J. Lin, A. Liu","doi":"10.1109/MEMSYS.2013.6474288","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474288","url":null,"abstract":"This paper reports a compact optical wavelength tracker, which consists of an electrically controlled tunable micro-ring resonator and a flip-chip bonded photodiode. The input optical wavelength is measured and the wavelength change is tracked by analyzing the photocurrent variation of the photodiode. This wavelength tracker has compact size (0.5 mm × 1.5 mm), high resolution (3 pm), cost-effective and can be easily integrated with other devices on a single chip. It offers a simple chip-level optical wavelength tracking and detection approach for low-cost batch production, which has potential applications in optical sensors and fiber communications.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":null,"pages":null},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82949917","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)
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