2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)最新文献
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474265
Joohyun Kim, Sunwoo Han, Keunhan Park, Bong-Jae Lee, W. King, Jungchul Lee
We report the application of scanning thermoreflectance microscopy for steady - as well as periodic-temperature calibration of a microheater-integrated atomic force microscope cantilever (or heated microcantilever). While the heated microcantilever was operated with either DC or AC powers, local thermoreflectance signals were measured using a home-built scanning thermoreflectance microscope and converted into local temperatures using a calibration with Raman thermometry. For our scanning thermoreflectance microscopy, temporal resolution of 10 μs and spatial resolution of 2 μm were achieved. The shrinkage of the AC temperature oscillation amplitude was observed as the modulation frequency increased and thermal cut-off frequency near 1 kHz was found. In addition, strong thickness-dependent thermoreflectance signals were experimentally confirmed and might be useful for noncontact thickness measurements of free standing microelectromechanical systems devices having uniform temperatures.
{"title":"DC and AC electrothermal charicterization of heated microcantilevers using scanning thermoreflectance microscopy","authors":"Joohyun Kim, Sunwoo Han, Keunhan Park, Bong-Jae Lee, W. King, Jungchul Lee","doi":"10.1109/MEMSYS.2013.6474265","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474265","url":null,"abstract":"We report the application of scanning thermoreflectance microscopy for steady - as well as periodic-temperature calibration of a microheater-integrated atomic force microscope cantilever (or heated microcantilever). While the heated microcantilever was operated with either DC or AC powers, local thermoreflectance signals were measured using a home-built scanning thermoreflectance microscope and converted into local temperatures using a calibration with Raman thermometry. For our scanning thermoreflectance microscopy, temporal resolution of 10 μs and spatial resolution of 2 μm were achieved. The shrinkage of the AC temperature oscillation amplitude was observed as the modulation frequency increased and thermal cut-off frequency near 1 kHz was found. In addition, strong thickness-dependent thermoreflectance signals were experimentally confirmed and might be useful for noncontact thickness measurements of free standing microelectromechanical systems devices having uniform temperatures.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"5 1","pages":"409-412"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85615069","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474333
P. Pai, F. K. Chowdhury, H. Pourzand, M. Tabib-Azar
This work focuses on understanding the behavior of 3D hemispherical shells operating in wineglass resonance mode through finite element modeling (FEM). Fabrication of the hemispherical shells was done using micromachining technique. The quality factor of the device was in excess of 10,000 when operated in 50mT vacuum. The shell showed better than 95% sphericity and had an rms surface roughness of ~5nm. The separation in the degenerate frequencies of 4-node wineglass resonance was 5 Hz at a resonant frequency of 22 kHz. Modeling of the device behavior relates the frequency mismatch to the asymmetry in the shell and quantifies it.
{"title":"Fabrication and testing of hemispherical MEMS wineglass resonators","authors":"P. Pai, F. K. Chowdhury, H. Pourzand, M. Tabib-Azar","doi":"10.1109/MEMSYS.2013.6474333","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474333","url":null,"abstract":"This work focuses on understanding the behavior of 3D hemispherical shells operating in wineglass resonance mode through finite element modeling (FEM). Fabrication of the hemispherical shells was done using micromachining technique. The quality factor of the device was in excess of 10,000 when operated in 50mT vacuum. The shell showed better than 95% sphericity and had an rms surface roughness of ~5nm. The separation in the degenerate frequencies of 4-node wineglass resonance was 5 Hz at a resonant frequency of 22 kHz. Modeling of the device behavior relates the frequency mismatch to the asymmetry in the shell and quantifies it.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"26 1","pages":"677-680"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85954149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474203
Renyuan Wang, S. Bhave, K. Bhattacharjee
This paper presents design and vacuum measurements of lithium niobate (LN) contour-mode resonators (CMR). By carefully positioning the interdigital transducer (IDT), we achieved CMRs with kt2×Q of 7%*2150=148 (IDT @ node) or resonators with very high kt2 of 12.3% and spur-attenuated response (IDT @ anti-node). In addition, we demonstrated resonators with frequencies ranging from 400MHz to 800MHz on a single chip.
{"title":"High kt2×Q, multi-frequency lithium niobate resonators","authors":"Renyuan Wang, S. Bhave, K. Bhattacharjee","doi":"10.1109/MEMSYS.2013.6474203","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474203","url":null,"abstract":"This paper presents design and vacuum measurements of lithium niobate (LN) contour-mode resonators (CMR). By carefully positioning the interdigital transducer (IDT), we achieved CMRs with k<sub>t</sub><sup>2</sup>×Q of 7%*2150=148 (IDT @ node) or resonators with very high k<sub>t</sub><sup>2</sup> of 12.3% and spur-attenuated response (IDT @ anti-node). In addition, we demonstrated resonators with frequencies ranging from 400MHz to 800MHz on a single chip.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"37 1","pages":"165-168"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73279607","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474292
Tina He, Rui Yang, S. Rajgopal, M. A. Tupta, S. Bhunia, M. Mehregany, P. Feng
We report experimental demonstration of nanoscale electromechanical contact-mode switches with clearly high comparative performance, enabled by polycrystalline silicon carbide (poly-SiC) nanomechanical cantilevers, in a three-terminal, gate-controlled, lateral configuration. We have recorded the complete time evolution of the measured switching events in ambient air, by switching devices on and off for ≥105-106 cycles without failure (i.e., devices still alive; special accelerated tests are needed to properly `exhaust' the device and approach its intrinsic lifetime). These SiC nanoelectromechanical systems (NEMS) based switches have all dimensions but length in nanometer scale, and demonstrate on/off ratios of ~104 or higher, with repeatable performance over days in air. We have also demonstrated SiC NEMS switches operating at high temperature (T≈500°C) in air. With a typical motional volume of only ~1μm3 and long `hot' switching cycles in air, these SiC devices exhibit strong potential toward realizing robust NEMS switches and logic circuits.
{"title":"Robust silicon carbide (SiC) nanoelectromechanical switches with long cycles in ambient and high temperature conditions","authors":"Tina He, Rui Yang, S. Rajgopal, M. A. Tupta, S. Bhunia, M. Mehregany, P. Feng","doi":"10.1109/MEMSYS.2013.6474292","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474292","url":null,"abstract":"We report experimental demonstration of nanoscale electromechanical contact-mode switches with clearly high comparative performance, enabled by polycrystalline silicon carbide (poly-SiC) nanomechanical cantilevers, in a three-terminal, gate-controlled, lateral configuration. We have recorded the complete time evolution of the measured switching events in ambient air, by switching devices on and off for ≥105-106 cycles without failure (i.e., devices still alive; special accelerated tests are needed to properly `exhaust' the device and approach its intrinsic lifetime). These SiC nanoelectromechanical systems (NEMS) based switches have all dimensions but length in nanometer scale, and demonstrate on/off ratios of ~104 or higher, with repeatable performance over days in air. We have also demonstrated SiC NEMS switches operating at high temperature (T≈500°C) in air. With a typical motional volume of only ~1μm3 and long `hot' switching cycles in air, these SiC devices exhibit strong potential toward realizing robust NEMS switches and logic circuits.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"451 1","pages":"516-519"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73974130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474276
M. Yasui, K. Ikuta
We have constructed world-first generalized model for expecting 3D curing characteristics of photocurable polymer including micro particles. First, our theory is applicable for all polymers that respond to light. Second, we can adapt all kinds of particles to our theory. Moreover, the complicated calculation is not necessary. We can expect 3D curing properties through characteristics of resin and microparticles. Therefore, our theory is useful for developing newly photocurable polymer not only with microparticles, but also without microparticles. We believe that our model becomes fundamental theory for the 2D and 3D microfabrication in the photolithography and microstereolithography.
{"title":"3D general photocurabel model of resin with various kinds of microparticles","authors":"M. Yasui, K. Ikuta","doi":"10.1109/MEMSYS.2013.6474276","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474276","url":null,"abstract":"We have constructed world-first generalized model for expecting 3D curing characteristics of photocurable polymer including micro particles. First, our theory is applicable for all polymers that respond to light. Second, we can adapt all kinds of particles to our theory. Moreover, the complicated calculation is not necessary. We can expect 3D curing properties through characteristics of resin and microparticles. Therefore, our theory is useful for developing newly photocurable polymer not only with microparticles, but also without microparticles. We believe that our model becomes fundamental theory for the 2D and 3D microfabrication in the photolithography and microstereolithography.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"17 1","pages":"453-456"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74563598","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474294
Y. Zhang, Y. Tang, L. Carley, G. Fedder
This paper reports on development of a dual-probe scanning tunneling microscopy (STM) system suitable for scaling to 1D array parallel imaging and batch nanofabrication. The 1-D probe array is fabricated using thin-film post CMOS micromachining. Each probe is individually addressable, with its own respective microactuator and on-chip tunneling current sensing electronics. A corresponding external servo-loop array is built for separate control of probe scanning. A macro-goniometer is introduced for probe chip-sample alignment. Using the dual-probe array system, two STM images on a gold calibration sample are obtained simultaneously, and TiO2 nanowires are written on a Ti surface.
{"title":"Active CMOS-MEMS dual probe array for STM based parallel imaging and nanopatterning","authors":"Y. Zhang, Y. Tang, L. Carley, G. Fedder","doi":"10.1109/MEMSYS.2013.6474294","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474294","url":null,"abstract":"This paper reports on development of a dual-probe scanning tunneling microscopy (STM) system suitable for scaling to 1D array parallel imaging and batch nanofabrication. The 1-D probe array is fabricated using thin-film post CMOS micromachining. Each probe is individually addressable, with its own respective microactuator and on-chip tunneling current sensing electronics. A corresponding external servo-loop array is built for separate control of probe scanning. A macro-goniometer is introduced for probe chip-sample alignment. Using the dual-probe array system, two STM images on a gold calibration sample are obtained simultaneously, and TiO2 nanowires are written on a Ti surface.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"17 1","pages":"524-527"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75010741","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474240
Y. Koyata, M. Ikeuchi, K. Ikuta
We succeeded in developing a new simple and unique method to fabricate enclosed microfluidic channels within Polydimethylsiloxane (PDMS) substrates. The procedure is extremely straight forward, where sacrificial caramel embedded inside solid PDMS simply dissolves to form arbitrary shaped enclosed channels. Arbitrary microchannel network including 3-D interchanges, cross-junctions and very thin (≤1μm) cylindrical channels can be produced with no costly equipment and no cytotoxic material.
{"title":"Sealless 3-D microfluidic channel fabrication by sacrificial caramel template direct-patterning","authors":"Y. Koyata, M. Ikeuchi, K. Ikuta","doi":"10.1109/MEMSYS.2013.6474240","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474240","url":null,"abstract":"We succeeded in developing a new simple and unique method to fabricate enclosed microfluidic channels within Polydimethylsiloxane (PDMS) substrates. The procedure is extremely straight forward, where sacrificial caramel embedded inside solid PDMS simply dissolves to form arbitrary shaped enclosed channels. Arbitrary microchannel network including 3-D interchanges, cross-junctions and very thin (≤1μm) cylindrical channels can be produced with no costly equipment and no cytotoxic material.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"4 1","pages":"311-314"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72904411","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474351
U. Shah, M. Sterner, J. Oberhammer
This paper reports for the first time on RF nonlinearity analysis of complex multi-device RF MEMS circuits. The nonlinearity analysis is done for the two most commonly-used RF MEMS tuneable-circuit concepts, i.e. digital MEMS varactor banks and MEMS switched capacitor banks. In addition, the nonlinearity of a novel MEMS tuneable capacitor concept by the authors, based on a MEMS actuator with discrete tuning steps, is discussed. This paper presents closed-form analytical formulas for the IIP3 (nonlinearity) of the three MEMS multi-device circuit concepts, and an analysis of the nonlinearity based on measured device parameters (capacitance, gap), of the different concepts. Finally, this paper also investigates the effect of scaling of the circuit complexity, i.e. the degradation of the overall circuit linearity depending on the number of stages/bits of the MEMS-tuning circuit.
{"title":"Analysis of linearity degradation in multi-stage RF MEMS circuits","authors":"U. Shah, M. Sterner, J. Oberhammer","doi":"10.1109/MEMSYS.2013.6474351","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474351","url":null,"abstract":"This paper reports for the first time on RF nonlinearity analysis of complex multi-device RF MEMS circuits. The nonlinearity analysis is done for the two most commonly-used RF MEMS tuneable-circuit concepts, i.e. digital MEMS varactor banks and MEMS switched capacitor banks. In addition, the nonlinearity of a novel MEMS tuneable capacitor concept by the authors, based on a MEMS actuator with discrete tuning steps, is discussed. This paper presents closed-form analytical formulas for the IIP3 (nonlinearity) of the three MEMS multi-device circuit concepts, and an analysis of the nonlinearity based on measured device parameters (capacitance, gap), of the different concepts. Finally, this paper also investigates the effect of scaling of the circuit complexity, i.e. the degradation of the overall circuit linearity depending on the number of stages/bits of the MEMS-tuning circuit.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"25 1","pages":"749-752"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76668745","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474456
J. Kwon, Ji Sun Yang, Jeong Byung Chae, Sang Kug Chung
This paper presents an untethered microrobot swimming in human blood vessels through electromagnetic actuation to manipulate bio/micro-objects using an acoustically oscillating bubble attached on the microrobot as a grasping tool. First, for the three-dimensional (3D) propulsion of the microrobot in arbitrary shaped blood vessels, an electromagnetic system consisting of the horizontal and vertical pairs of Helmholtz and Maxwell electric coils is designed and manufactured along with the verification of the magnetic flux density generated from the designed system with theory. Using the developed electromagnetic system, the propulsion of a spherical microrobot (800 μm dia.) made of a cylindrical magnet covered with clay is successfully demonstrated in x-y and x-z plains along with a T-shaped glass channel. Second, an acoustically oscillating bubble induced microstreaming is separately investigated by using a high speed camera integrated with a zoom lens and laser as a light source. When a bubble is acoustically excited by a piezoactuator around its natural frequency, it oscillates and simultaneously generates microstreaming and radiation forces, which can be used to manipulate (pull and push) neighboring objects. Finally, as the concept proof, the manipulation of a fish egg (800 μm dia.) in a microfabricated channel with tandem rectangular hills is experimentally achieved by the microrobot incorporated with an acoustically oscillating bubble.
{"title":"A novel drug delivery method by using a microrobot incorporated with an acoustically oscillating bubble","authors":"J. Kwon, Ji Sun Yang, Jeong Byung Chae, Sang Kug Chung","doi":"10.1109/MEMSYS.2013.6474456","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474456","url":null,"abstract":"This paper presents an untethered microrobot swimming in human blood vessels through electromagnetic actuation to manipulate bio/micro-objects using an acoustically oscillating bubble attached on the microrobot as a grasping tool. First, for the three-dimensional (3D) propulsion of the microrobot in arbitrary shaped blood vessels, an electromagnetic system consisting of the horizontal and vertical pairs of Helmholtz and Maxwell electric coils is designed and manufactured along with the verification of the magnetic flux density generated from the designed system with theory. Using the developed electromagnetic system, the propulsion of a spherical microrobot (800 μm dia.) made of a cylindrical magnet covered with clay is successfully demonstrated in x-y and x-z plains along with a T-shaped glass channel. Second, an acoustically oscillating bubble induced microstreaming is separately investigated by using a high speed camera integrated with a zoom lens and laser as a light source. When a bubble is acoustically excited by a piezoactuator around its natural frequency, it oscillates and simultaneously generates microstreaming and radiation forces, which can be used to manipulate (pull and push) neighboring objects. Finally, as the concept proof, the manipulation of a fish egg (800 μm dia.) in a microfabricated channel with tandem rectangular hills is experimentally achieved by the microrobot incorporated with an acoustically oscillating bubble.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"323 1","pages":"1157-1160"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76296653","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2013-03-07DOI: 10.1109/MEMSYS.2013.6474213
H. Yamasaki, K. Terao, T. Suzuki, F. Simokawa, H. Takao
Application of `small area' plasma has become important for bio/medical applications. In this study, a novel device to create patternable atmospheric-pressure plasma-jet array is newly proposed, and the evaluation results of the fabricated devices are reported for the first time. The array device is fabricated by bonding a PDMS microchannel layer and a glass wafer. Discharge electrodes for plasma creation are fabricated by Au/Cr layers. Since the discharge starting voltages strongly depends on shapes and the gap of two electrodes, they were designed and selected based on the Paschen's law to lower their discharge starting voltages. Micro plasma jet array are created by multi-channel gas discharges individually in microfluidic channels on a chip, and a 2.54mm spatial resolution of plasma-jet was obtained in the first fabricated device.
{"title":"Patternable atmospheric-pressure plasma jets with gas discharge in microfluidic channel array","authors":"H. Yamasaki, K. Terao, T. Suzuki, F. Simokawa, H. Takao","doi":"10.1109/MEMSYS.2013.6474213","DOIUrl":"https://doi.org/10.1109/MEMSYS.2013.6474213","url":null,"abstract":"Application of `small area' plasma has become important for bio/medical applications. In this study, a novel device to create patternable atmospheric-pressure plasma-jet array is newly proposed, and the evaluation results of the fabricated devices are reported for the first time. The array device is fabricated by bonding a PDMS microchannel layer and a glass wafer. Discharge electrodes for plasma creation are fabricated by Au/Cr layers. Since the discharge starting voltages strongly depends on shapes and the gap of two electrodes, they were designed and selected based on the Paschen's law to lower their discharge starting voltages. Micro plasma jet array are created by multi-channel gas discharges individually in microfluidic channels on a chip, and a 2.54mm spatial resolution of plasma-jet was obtained in the first fabricated device.","PeriodicalId":92162,"journal":{"name":"2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)","volume":"17 1","pages":"205-208"},"PeriodicalIF":0.0,"publicationDate":"2013-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77673808","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)
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