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Surface structure studies by x-ray photoelectron diffraction 用x射线光电子衍射研究表面结构
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90051-0
C.S Fadley

Several recent developments and future prospects in the use of core-level X-ray photoelectron diffraction (XPD) for surface structure studies are considered. Experiments involving both standard X-ray sources and synchrotron radiation are discussed.

介绍了核能级x射线光电子衍射(XPD)用于表面结构研究的最新进展和未来展望。讨论了涉及标准x射线源和同步辐射的实验。
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引用次数: 1
Thin-film edge-aligned junctions for small-area surface studies 用于小面积表面研究的薄膜边缘排列结
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90237-5
J.C. MacFarlane, I. Banasiak

A straightforward technique is described whereby the edges of two contiguous films can be precisely aligned without overlap so that the contact area between them is defined by the thickness times the width of the film. In this way junction areas as small as 0.02 μm2 can be achieved with very simple photolithographic techniques. Electron micrographic, electrical and surface studies have been carried out on junctions of this type and preliminary results are reported.

描述了一种简单的技术,其中两个连续薄膜的边缘可以精确地对齐而不重叠,因此它们之间的接触面积由薄膜的厚度乘以宽度来定义。通过这种方法,可以用非常简单的光刻技术实现小至0.02 μm2的结面积。对这种类型的结进行了电子显微、电学和表面研究,并报告了初步结果。
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引用次数: 1
Morphology and structure of indium nitride films 氮化铟薄膜的形貌和结构
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90199-0
C.P. Foley , T.L. Tansley

Growth processes of semiconducting indium nitride prepared by radiofrequency sputtering of a metallic target in a reactive nitrogen plasma have been studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM). Contrary to previous reports progressive nitridation of the target surface is observed [1] and is found to control film morphology and growth rate. Samples prepared from fully nitrided targets are exclusively c-axis oriented and polycrystalline, while other wurtzite planes persist when target nitridation is incomplete. The target process involved here requires the partial pressure of atomic nitrogen to be 10−4 Torr in the RF discharge region close to the target. Surface migration processes are also dependent on the target state. These phenomena are analyzed within the context of the structure zone model [2] while considering a unified approach to crystal growth habit [3].

用x射线衍射仪(XRD)和扫描电镜(SEM)研究了在活性氮等离子体中射频溅射制备半导体氮化铟的过程。与先前的报道相反,观察到目标表面的渐进氮化[1],并发现控制膜形态和生长速度。由完全氮化的靶制备的样品完全是c轴取向和多晶的,而当靶氮化不完全时,其他纤锌矿平面仍然存在。这里涉及的目标过程要求在靠近目标的射频放电区域,原子氮的分压为10−4 Torr。表面迁移过程也取决于目标状态。这些现象在结构带模型[2]的背景下进行分析,同时考虑了晶体生长习惯的统一方法[3]。
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引用次数: 18
Detection of multiple species through isosbestic points in UV-photoemission spectra: Application to sulfide adsorption on copper 利用紫外光发射光谱等吸点检测多种物质:在铜上硫化物吸附中的应用
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90065-0
S.E. Anderson , G.L. Nyberg

When the spectra corresponding to successively greater adsorbate coverages are superimposed, there is often a singular point through which they all pass. This is recognized as an isosbestic point, which is shown should be present whenever there is only a single adsorbate overlying the substrate. The lack of such a point consequently indicates the existence of multiple adsorbate species. These criteria are applied to the adsorption of O2, H2S and benzenethiol on Cu(410). For H2S, two species are detected and assigned to surface and incorporated sulfur.

当相对应的连续较大的吸附质覆盖的光谱叠加时,通常有一个奇异点,它们都通过。这被认为是一个等吸点,当只有一种吸附物覆盖在底物上时,它就会出现。因此,缺少这一点表明存在多种吸附质。这些准则适用于Cu(410)对O2、H2S和苯硫醇的吸附。对于硫化氢,检测到两种硫化氢并将其分配到表面并结合硫。
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引用次数: 1
Field effect studies on MIS structures of n-type Pb0.8Sn0.2Te thin films n型Pb0.8Sn0.2Te薄膜MIS结构的场效应研究
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90211-9
A.L. Dawar , K.V. Ferdinand, C. Jagadish, anil Kumar , Partap Kumar, P.C. Mathur

DC conductivity and Hall coefficient studies were made on MIS structures of n-type Pb0.8Sn0.2Te thin films grown by a flash evaporation technique in the temperature range 77–400 K. The decrease in RH with positive gate field and increase in RH with negative gate field have been attributed to the accumulation and depletion of charge carriers due to bending of bands. Mobility-temperature data have been analyzed in terms of various scattering mechanisms.

在77 ~ 400 K的温度范围内,研究了用闪蒸法生长的n型Pb0.8Sn0.2Te薄膜的直流电导率和霍尔系数。正栅场下相对湿度的降低和负栅场下相对湿度的增加是由于能带弯曲导致载流子的积累和损耗。从各种散射机制的角度分析了迁移率-温度数据。
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引用次数: 0
Recent progress of amorphous silicon technology and its application to optoelectronic devices 非晶硅技术及其在光电器件中的应用进展
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90219-3
Yoshihiro Hamakawa

A review is given on recent progress in tetrahedrally-bonded amorphous semiconductors and their technological applications to optoelectronic devices. First, some significant advantages of these materials are pointed out, and tangible instances are demonstrated from current technological topics. The present state of the art in optoelectronic device development with this new kind of thin film is then reviewed, and the technical data are summarized and discussed.

综述了近年来四面体键合非晶半导体的研究进展及其在光电器件中的应用。首先,指出了这些材料的一些显著优点,并从当前的技术课题中举出了具体的例子。然后回顾了利用这种新型薄膜开发光电器件的现状,并对技术数据进行了总结和讨论。
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引用次数: 6
Properties of ultrathin metallic films on Si(111) determined by high-resolution electron energy loss spectroscopy 用高分辨率电子能量损失谱法测定Si(111)上超薄金属薄膜的性质
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90073-X
J.E Demuth, B.N.J Persson

UV photoemission, low energy electron diffraction and high-resolution electron energy loss spectroscopy (EELS) have been used in situ to study the nature of 1–25 Å of Au and Pd deposited on Si(111) at temperatures of 20 and 300 K. New information is obtained regarding the formation, nature and microstructure of these metallic layers. We describe and apply a theoretical analysis of EELS which allows the determination of DC transport properties in these ultrathin layers. All metallic layers exhibit significantly higher resistivities than expected in comparison to bulk metal silicides or metallic glass phases, and can be attributed to diffuse scattering of conduction electrons at the interface. The interaction and behavior of atomic hydrogen with these films as detected by EELS is also described and found to convey additional information about their microstructure.

利用紫外光发射、低能电子衍射和高分辨率电子能量损失谱(EELS)原位研究了在20和300 K温度下沉积在Si(111)上的Au和Pd的1-25 Å性质。获得了有关这些金属层的形成、性质和微观结构的新信息。我们描述并应用了EELS的理论分析,可以确定这些超薄层中的直流输运特性。与大块金属硅化物或金属玻璃相相比,所有金属层都表现出比预期更高的电阻率,这可以归因于界面上传导电子的扩散散射。原子氢与这些薄膜的相互作用和行为也被描述为EELS检测,并发现传递有关其微观结构的附加信息。
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引用次数: 0
Structure of silicon oxide films prepared by vacuum deposition 真空沉积制备氧化硅薄膜的结构
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90193-X
Yoshio Saito, Chihiro Kaito, Kenzo Nishio, Toshio Naiki

The structure of thin silicon oxide films 5 nm in thickness, which were prepared by electron beam evaporation of SiO2 glass onto a NaCl substrate, has been examined by high resolution electron microscopy and diffraction. Although the films which were prepared with substrate temperatures ranging from room up to 400°C gave rise to amorphous haloes, lattice fringes in areas 1–2 nm in extent were, however, seen in the micrographs. It is shown that the film is composed of α-quartz micro-crystallites. Crystals of α-cristobalite with sizes of several tens of nanometers appeared at a substrate temperature of 500°C. At a substrate temperature of 600°C, β-cristobalite crystals with sizes of several tens of nanometers appeared. The structural changes due to the substrate temperature were attributed to incorporation of sodium atoms from the substrate into the SiO2 film.

采用电子束蒸发法在NaCl衬底上制备了厚度为5 nm的氧化硅薄膜,并用高分辨电子显微镜和衍射仪对其结构进行了研究。虽然在室温至400℃的衬底温度下制备的薄膜会产生无定形光晕,但在显微照片中可以看到1-2 nm范围内的晶格条纹。结果表明,该薄膜由α-石英微晶组成。在500℃的衬底温度下,α-方石英出现了几十纳米大小的晶体。在600℃的衬底温度下,出现了几十纳米大小的β-方石英晶体。由于衬底温度引起的结构变化归因于衬底中的钠原子掺入SiO2薄膜。
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引用次数: 7
The electrical and optical properties of LiAlxB1−x thin films LiAlxB1−x薄膜的电学和光学性质
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90215-6
Hiroshi Kezuka, Makio Akimoto, Yotaro Taguchi, Kokuya Iwamura, Tomomo Masaki

The electrical and optical properties of LiAlxB1−x thin films deposited at 350°C by the Sandwich-Type Evaporation Method are measured. These films are metallic with a resistivity of (1–4) × 105 ohm cm at room temperature. In addition, we have developed a unique method. named the Brewster Angle Method (BAM), for obtaining the optical constants of thin films for LiAlxB1−x. In this method reflection coefficients are measured on the surface of thin films at any angle of incidence using a HeNe laser beam. The optical constants are calculated from the Brewster angle, φB, at the minimum value of reflection coefficient |RB|min. For a typical LiAlxB1−x film the optical constants are n = 1.42 − j0.31 and the complex dielectric constants are ϵ = 1.94 − j0.87.

用夹层蒸发法测定了350℃下沉积的LiAlxB1−x薄膜的电学和光学性能。这些薄膜是金属的,在室温下电阻率为(1-4)× 105欧姆厘米。此外,我们还开发了一种独特的方法。命名为布鲁斯特角法(BAM),用于获得LiAlxB1−x薄膜的光学常数。在该方法中,利用He氖激光束在薄膜表面以任意入射角测量反射系数。光学常数由反射系数|RB|min最小值处的布鲁斯特角φB计算。对于典型的LiAlxB1−x薄膜,其光学常数为n = 1.42−j0.31,复介电常数为ε = 1.94−j0.87。
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引用次数: 1
MEED study of some crystalline surfaces 某些晶体表面的MEED研究
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90036-4
G. Shimaoka

A new medium energy electron diffraction (MEED) system, which can observe both back scattering (BSMEED) and forward scattering (RMEED) patterns from the same surface of crystalline solids has been designed. Results obtained from MgO(001) and GaAs(001) indicate that MEED has the following favourable characteristics: (1) Unlike LEED, post-acceleration of the diffracted beam with a grid is not necessary for MEED. The diffraction pattern can be seen directly on a fluorescent screen. (2) Collimation and focusing of the incident beam are readily achieved and sharp diffraction spots are observed. (3) Unlike RHEED, a strictly flat surface is not necessary for MEED. Relatively rough, but clean surfaces can produce diffraction patterns. (4) From Kikuchi lines or bands it is possible to determine the precise orientation of the crystal surface. (5) By changing the energy of the incident beam it is possible to observe the surface layer both in two and three dimensions.

设计了一种新型中能电子衍射(MEED)系统,该系统可以同时观测固体晶体同一表面的后向散射(BSMEED)和前向散射(RMEED)。从MgO(001)和GaAs(001)得到的结果表明,MEED具有以下有利特征:(1)与LEED不同,MEED不需要带网格的衍射光束的后加速。衍射图样可以直接在荧光屏上看到。(2)入射光束的准直和聚焦很容易实现,并观察到尖锐的衍射斑点。(3)与RHEED不同,MEED不需要严格平坦的表面。相对粗糙但干净的表面可以产生衍射图案。(4)从菊池线或带可以确定晶体表面的精确方向。(5)通过改变入射光束的能量,可以在二维和三维上观察到表层。
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引用次数: 0
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Applications of Surface Science
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