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An electron energy loss spectroscopic study of ethylene chemisorbed on Pd(110) at 110 K 乙烯在110 K下在Pd(110)上化学吸附的电子能量损失谱研究
Pub Date : 1985-05-01 Epub Date: 2003-09-26 DOI: 10.1016/0378-5963(85)90069-8
Michael A. Chesters, Gordon S. McDougall , Martyn E. Pemble , Norman Sheppard

Adsorption of ethylene on the (110) surface of palladium at 110 K gives rise to two related but clearly distinguishable types of electron energy loss (EEL) spectra corresponding to low and high coverage. Most features in the spectra in both coverage regimes can be interpreted in terms of a π-complex of ethylene with the metal surface. Analysis of the corresponding ethylene-d4 EEL spectra and comparison with infrared, Raman and inelastic neutron scattering data for the analogous ethylene complex, Zeise's salt, supports this assignment. The selection rules applicable to dipole and impact scattering both on- and off-specular are employed to determine the orientation of the π-complexes with respect to the surface. At higher coverages additional loss features are observed. These are interpreted in terms of the presence of a small proportion of σ-diadsorbed ethylene complexes bonded to pairs of metal atoms.

乙烯在钯(110)表面在110 K下的吸附产生了两种相关但明显可区分的电子能量损失(EEL)谱,对应于低覆盖率和高覆盖率。在两种覆盖体系下,光谱中的大部分特征都可以用乙烯与金属表面的π配合物来解释。分析相应的乙烯-d4 EEL光谱,并与类似的乙烯配合物(Zeise’s salt)的红外、拉曼和非弹性中子散射数据进行比较,支持这一指派。适用于偶极子散射和冲击散射的选择规则被用于确定π配合物相对于表面的取向。在较高的覆盖率下,可以观察到额外的损失特征。这些解释是由于存在一小部分的σ-二吸附乙烯配合物与金属原子对结合。
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引用次数: 2
Electron surface barrier structure from analysis of barrier scattering features in LEED 从LEED中势垒散射特征分析电子表面势垒结构
Pub Date : 1985-05-01 Epub Date: 2003-09-26 DOI: 10.1016/0378-5963(85)90035-2
M.N. Read

High resolution LEED intensity data from Cu(001), showing barrier scattering features within ∼ 3 eV from a beam threshold, have been analyzed with a two parameter “modified image barrier” (MIB) model and a three parameter “saturated image barrier” (SIB) model. It is found that a range of values of z0, the origin of the image potential tail, in the MIB model can provide a fit of experimental maxima and minima energy locations to within 0.3 eV. With the SIB model, there is a multiplicity of values of z0 (and corresponding value of Us, the value of the potential with respect to the vacuum level at the jellium discontinuity), which can provide a fit to that data to 0.3 eV. Fits to within 0.05 eV were also obtained with parameters outside the values determined by previous authors. It is concluded that the validity of each model and the determination of z0 can only be found from such experimental data if it is fitted to at least 0.05 eV.

来自Cu(001)的高分辨率LEED强度数据显示了距离光束阈值在~ 3ev范围内的势垒散射特征,并使用两参数“修正图像势垒”(MIB)模型和三参数“饱和图像势垒”(SIB)模型进行了分析。研究发现,在MIB模型中,图像势尾原点z0的取值范围可以提供0.3 eV以内的实验最大值和最小能量位置拟合。在SIB模型中,存在多个z0值(以及相应的Us值,即相对于凝胶不连续处真空水平的电位值),可以将该数据拟合到0.3 eV。在先前作者确定的值之外的参数也得到了0.05 eV以内的拟合。可以得出结论,只有当这些实验数据拟合到0.05 eV以上时,才能找到每个模型的有效性和z0的确定。
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引用次数: 0
The growth and structure of RF sputtered indium tin oxide thin films 射频溅射氧化铟锡薄膜的生长与结构
Pub Date : 1985-05-01 Epub Date: 2003-02-10 DOI: 10.1016/0378-5963(85)90200-4
K. Sreenivas, Abhai Mansingh

Indium tin oxide films have been grown by reactively sputtering an indium/tin metallic alloy target in argon-oxygen mixtures. Growth parameters and annealing conditions have been optimized at low temperatures. Reactively sputtered oxide films were highly insulating and did require a post-deposition annealing treatment in a reducing ambient, to become highly transparent and conducting. A new annealing ambient, cracked ammonia, has been found to be very effective and economical. Films have been characterized for their structure and morphology by electron diffraction and scanning electron microscopy respectively. Relative advantages of annealing in cracked ammonia over nitrogen-hydrogen mixtures employed by other workers have been discussed. Films with preferred orientation, high optical transmission (∼ 95%) and low electrical resistivity (3 × 10−4 ω cm) have been obtained.

在氩氧混合物中,用反应溅射法制备了铟锡氧化物薄膜。在低温条件下对生长参数和退火条件进行了优化。反应性溅射氧化膜是高度绝缘的,需要在还原环境中进行沉积后退火处理,才能变得高度透明和导电。一种新的退火环境——裂解氨是一种经济有效的退火环境。用电子衍射和扫描电镜对膜的结构和形貌进行了表征。讨论了在裂解氨中退火与其他工人采用的氮氢混合物相比的相对优点。获得了具有择优取向、高透光率(~ 95%)和低电阻率(3 × 10−4 ω cm)的薄膜。
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引用次数: 4
X-ray photoelectron spectroscopy of oxidized pyrrhotite surfaces 氧化磁黄铁矿表面的x射线光电子能谱
Pub Date : 1985-05-01 Epub Date: 2003-09-26 DOI: 10.1016/0378-5963(85)90061-3
A.N. Buckley, R. Woods

The oxidation of fracture surfaces of a pyrrhotite mineral of composition Fe0.89S at ambient conditions in air has been studied by X-ray photoelectron spectroscopy (XPS). Fe(2p) and Fe(3p) spectra indicated that iron had diffused from the outermost layers of the mineral lattice to form a hydrated iron(III) oxide or hydro-oxide. The corresponding S(2p) spectrum exhibited a shifted component at a binding energy increasing with time of exposure. It is considered that this component arises from the formation of iron-deficient sulfides with the iron content decreasing with increasing oxidation time.

用x射线光电子能谱(XPS)研究了成分为Fe0.89S的磁黄铁矿矿物在空气环境条件下断口的氧化。铁(2p)和铁(3p)光谱表明铁从矿物晶格的最外层扩散形成水合铁(III)氧化物或氢氧化物。相应的S(2p)谱在结合能随曝光时间的增加而变化。认为该成分是由于形成了缺铁的硫化物,铁含量随着氧化时间的延长而降低。
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引用次数: 82
A composite insulator structure for VLSI multilevel metallization 一种用于VLSI多层金属化的复合绝缘子结构
Pub Date : 1985-05-01 Epub Date: 2003-02-10 DOI: 10.1016/0378-5963(85)90233-8
George S. Gati

Dense and complex circuit layouts in integrated circuits often require multilevel interconnecting wiring. At IBM East Fishkill sputtered SiO2 is used to provide insulation between the wiring levels. Defects in the insulating layers can result in interlevel shorts (ILS). If a projection from one metal layer is inadequately covered with the insulator it may short to the metal layer above. Since the inadequacy of coverage is a result of the non-conformal coating that results from sputter deposition, a relatively thin layer of conformal PECVD SixNy deposited upon the top of the SiO2 will provide adequate insulation over projections. Electrical testing of special test patterns showed significant improvement in ILS using the structure described.

集成电路中密集而复杂的电路布局往往需要多级互连布线。在IBM East Fishkill,溅射SiO2用于在布线层之间提供绝缘。绝缘层的缺陷会导致层间短路。如果一个金属层的突出部分没有被绝缘体充分覆盖,它可能会短路到上面的金属层。由于覆盖不足是由于溅射沉积导致的不合格涂层造成的,因此在SiO2顶部沉积一层相对较薄的保形PECVD SixNy将为凸出部分提供足够的绝缘。特殊测试模式的电气测试表明,使用所描述的结构可以显著改善ILS。
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引用次数: 1
Roughening transitions on the helium crystal-superfluid interface 氦晶体-超流体界面上的粗化转变
Pub Date : 1985-05-01 Epub Date: 2003-02-10 DOI: 10.1016/0378-5963(85)90203-X
A.V. Babkin, K.O. Keshishev, D.B. Kopeliovich, A.Ya. Parshin

We have studied the equilibrium shapes of large 4He crystals at two different roughening transitions (TR1 = 1.2 K, TR2 = 0.9 K) by a simple optical technique. The method used provides the temperature and angular dependences of the surface stiffness. The measured surface stiffness appears to be constant in the close vicinities of the roughening transitions (|TTR| ∼ 0.001−0.05TR, ϕ ∼ 0.005−0.1), in strong disagreement with two current theories, viz., the phenomenological “mean field theory” and the lattice model calculations.

我们用简单的光学技术研究了两种不同粗化转变(TR1 = 1.2 K, TR2 = 0.9 K)下的大4He晶体的平衡形状。所使用的方法提供了表面刚度的温度和角度依赖性。测量的表面刚度在粗化转变(|T - TR| ~ 0.001 - 0.05TR, φ ~ 0.005 - 0.1)的附近似乎是恒定的,这与目前的两种理论,即现象学的“平均场理论”和晶格模型计算强烈不一致。
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引用次数: 3
Some strategies for quantitative scanning Auger electron microscopy 定量扫描俄歇电子显微镜的一些策略
Pub Date : 1985-05-01 Epub Date: 2003-09-26 DOI: 10.1016/0378-5963(85)90046-7
R. Browning , D.C. Peacock, M. Prutton

The general applicability of power law forms of the background in electron spectra is pointed out and exploited for background removal from under Auger peaks. This form of B(E) is found to be extremely sensitive to instrumental alignment and to fault-free construction - an observation which can be used to set up analyser configurations in an accurate way. Also, differences between N(E) and B(E) can be used to derive a spectrometer transmission function T(E). The questions of information density in an energy-analysing spatially-resolving instrument are addressed after reliable instrumental characterization has been established. Strategies involving ratio histograms, showing the population distribution of the ratio of a pair of Auger peak heights, composition scatter diagrams and windowed imaging are discussed and illustrated.

指出了电子能谱中背景幂律形式的一般适用性,并利用幂律形式从俄歇峰下去除背景。这种形式的B(E)被发现对仪器校准和无故障结构极其敏感-这种观察可以用来精确地设置分析仪配置。此外,N(E)和B(E)之间的差异可以用来推导光谱仪透射函数T(E)。在建立了可靠的仪器表征后,解决了能量分析空间分辨仪器中的信息密度问题。讨论并说明了包括比值直方图、成分散点图和窗口成像在内的策略。比值直方图显示了一对俄歇峰高比值的总体分布。
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引用次数: 3
Surface compositions of the two phases of differently prepared Ni-Cr-Al and Ni-Cr-Al-Zr samples 不同制备的Ni-Cr-Al和Ni-Cr-Al- zr样品的两相表面组成
Pub Date : 1985-05-01 Epub Date: 2003-09-26 DOI: 10.1016/0378-5963(85)90050-9
M.M. El Gomati, M. Prutton, R.H. Roberts

The surface compositions of the α/β and γ/γ' phases of different metallographic preparations of Ni-15Cr-24Al and Ni-15Cr-24Al-0.3Zr (at%) alloys are presented. Surfaces investigated include a mechanically polished surface for both alloys, a mechanically polished acid etched surface of the Ni-Cr-Al-Zr both before heating and after heating to 600°C for several hours, and the underlying surface of this latter sample exposed by ball cratering. Both phases of all surfaces considered show depletion of Al. It is concluded that the Al depletion is not an artefact of the sample metallographic preparation or the analytical procedure. This is supported by analysis of the composition of a sample scratched in situ under UHV. It is further concluded that the Al depletion is due to oxidation during bakeout. Cr-rich features in both the α/β and γ/γ' phases are reported. An optimal two dimensionally smoothed Cr Auger image is presented showing these features which are considered to be due to the αCr solid solution particles or clustering of these particles in the α/β phase and the Ni solid solution component in the γ/γ' phase.

研究了Ni-15Cr-24Al和Ni-15Cr-24Al-0.3 zr (at%)合金不同金相制备过程中α/β和γ/γ′相的表面组成。所研究的表面包括两种合金的机械抛光表面,Ni-Cr-Al-Zr在加热前和加热至600°C数小时后的机械抛光酸蚀表面,以及后一种样品的下表面。所考虑的所有表面的两相都显示出铝的损耗。由此得出结论,铝的损耗不是样品金相制备或分析过程的人工产物。这是由在特高压下原位划伤的样品的成分分析支持的。进一步得出铝的损耗是由于焙烧过程中的氧化所致。α/β相和γ/γ′相均具有富cr特征。二维光滑Cr俄格图像显示了这些特征,这些特征被认为是由于αCr固溶体颗粒或这些颗粒在α/β相中聚集而Ni固溶体成分在γ/γ′相中。
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引用次数: 1
The contribution of kinetic nucleation theories to studies of Volmer-Weber thin film growth 动力学成核理论对Volmer-Weber薄膜生长研究的贡献
Pub Date : 1985-05-01 Epub Date: 2003-02-10 DOI: 10.1016/0378-5963(85)90182-5
B.F. Usher

Extensive study of the vapour deposition of noble metals onto UHV cleaved alkali halide crystal surfaces has made an important contribution to the development of time-dependent nucleation theory. There nevertheless remain significant inconsistencies between results obtained from different studies of identical systems. The role which the time-dependent kinetic approach to nucleation theory has played in the past and that which it might take in the future are discussed.

贵重金属在特高压劈裂碱卤化物晶体表面气相沉积的广泛研究,对时变成核理论的发展作出了重要贡献。然而,从相同系统的不同研究中获得的结果之间仍然存在显著的不一致。讨论了随时间变化的动力学方法在成核理论中过去所起的作用和将来可能发挥的作用。
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引用次数: 11
Some properties of Si(111) and Ge(111) cleaved surfaces at low temperatures 低温下Si(111)和Ge(111)切割表面的一些性质
Pub Date : 1985-05-01 Epub Date: 2003-09-26 DOI: 10.1016/0378-5963(85)90032-7
V.A. Grazhulis, V.F. Kuleshov

Low-temperature experimental results on Ge(111) and Si(111) surfaces prepared by crystal cleavage in ultra-high vacuum (∼ 10-10 Torr), liquid N2, and liquid He are presented and briefly discussed. Some of these results are reanalyzed and new interpretations are suggested.

介绍了在超高真空(~ 10-10 Torr)、液态N2和液态He条件下晶体解理制备Ge(111)和Si(111)表面的低温实验结果,并进行了简要讨论。对其中的一些结果进行了重新分析,并提出了新的解释。
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引用次数: 2
期刊
Applications of Surface Science
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