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Interfacial deep levels responsible for schottky barrier formation at semiconductor/metal contacts 负责半导体/金属接触处肖特基势垒形成的界面深度
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90227-2
John D. Dow, Otto F. Sankey, Roland E. Allen

The following facts, and many others, concerning III–V (e.g., GaAs, InP) Schottly barriers can be understood in terms of Fermi-level pinning by interfacial antisite defects (sheltered by vacancies) at semiconductor/metal contacts: (i) the barrier heights are almost independent of the metal in the contact; (ii) the surface Fermi levels can be pinned at sub-monolayer coverages and the pinning energies are almost unaffected by changes of stoichiometry or crystal structure; (iii) the schottky barrier heigh for n-InP with Cu, Ag, or Au is ⋍0.5 eV, but changes to ⋍0.1 eV when reactive metal contacts (Fe, Ni, or Al) are employed because the antisite defects are dominated by P vacancies; and (iv) the dependence on alloy composition or alloys of AlAs, GaAs, GaP, InAs, and GaAs is extremely complex — owing to the dependence of the binding energy for the cation-on-anion-site deep level on alloy composition. Fermi-level pinning by Si dangling bonds at Si/transition-metal silicide interfaces accounts for the following facts: (i) the barrier heights are independent of the transition-metal, to within ⋍0.3 eV; (ii) on the 0.1 eV scale there are chemical trends in barrier heights for n-Si, with the heights decreasing in the order Pt, Pd, and Ni; (iii) barriers form at low metallic coverage, (iv) barrier heights are independent of silicide crystal structure or stoichiometry to ± 0.1 eV; and (v) the barrier heights for n-Si and p-Si add up to approximately the energy of the band gap.

关于III-V(例如,GaAs, InP)肖特利势垒的以下事实,以及许多其他事实,可以从半导体/金属触点上由界面反位缺陷(由空位遮蔽)的费米能级钉住来理解:(i)势垒高度几乎与触点中的金属无关;(ii)表面费米能级可以被钉住在亚单层上,钉住能量几乎不受化学计量或晶体结构变化的影响;(iii)含有Cu、Ag或Au的n-InP的肖特基势垒高度为⋍0.5 eV,但当使用活性金属触点(Fe、Ni或Al)时,由于对位缺陷以P空位为主,肖特基势垒高度变为⋍0.1 eV;(iv) AlAs、GaAs、GaP、InAs和GaAs对合金成分或合金的依赖是极其复杂的——这是由于阳离子对阴离子深层能级的结合能依赖于合金成分。Si悬空键在Si/过渡金属硅化物界面上的费米能级钉住说明了以下事实:(i)势垒高度与过渡金属无关,在⋍0.3 eV内;(ii)在0.1 eV尺度上,n-Si的势垒高度有化学变化趋势,势垒高度依次为Pt、Pd和Ni;(iii)在低金属覆盖率下形成势垒;(iv)势垒高度与硅化物晶体结构或化学计量无关(±0.1 eV);(v) n-Si和p-Si的势垒高度加起来大约等于带隙的能量。
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引用次数: 7
The Chadi total energy algorithm for determining surface geometries 确定表面几何形状的Chadi总能量算法
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90191-6
P.V. Smith

The Chadi total energy minimization technique is probably the simplest, physically realistic approach for determining the surface geometries of solids and has proved highly successful in predicting the surface relaxation and reconstruction of a wide variety of covalent solids. One of the basic assumptions of this method has been that the tight-binding parameters, which describe the dependence of the electronic energy of the system upon the surface configuration of atoms, simply vary as the inverse square of the appropriate interatomic distance. More recent work, however, has shown that there are now strong grounds for doubting the validity of this 1/d2 approximation, and has suggested that a better representation of the spatial dependence of the LCAO model Hamiltonian parameters might be obtained from self-consistent bandstructure calculations performed at different lattice constants. The purpose of this paper is to assess the relative merit of these two alternative models by employing them in a direct determination of some of the lattice dynamical properties of silicon, and to discuss the implications of the results of these calculations for surface structure analyses within the Chadi formalism.

Chadi总能量最小化技术可能是确定固体表面几何形状的最简单,物理上最现实的方法,并且在预测各种共价固体的表面松弛和重建方面非常成功。这种方法的一个基本假设是,描述系统的电子能量与原子表面构型的依赖关系的紧密结合参数,只是随着适当的原子间距离的平方成反比而变化。然而,最近的研究表明,现在有充分的理由怀疑这种1/d2近似的有效性,并提出,在不同晶格常数下进行的自洽带结构计算可能会更好地表示LCAO模型哈密顿参数的空间依赖性。本文的目的是通过直接确定硅的一些晶格动力学特性来评估这两种替代模型的相对优点,并讨论这些计算结果对Chadi形式下表面结构分析的影响。
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引用次数: 3
Chemisorption studies with LEED fine structure analysis LEED精细结构分析的化学吸附研究
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90079-0
S.M. Thurgate, P.J. Jennings

LEED fine structure is found in LEED intensity curves at low energies below emergence thresholds for new diffracted beams. The fine structure is due to the interaction between a reflected beam and a beam which is totally internally reflected by the surface barrier. The fine structure may be strongly affected by chemisorption and this provides a useful technique for surface structural studies. The effects of surface roughening or smoothing, reconstruction and disordered adsorption can be clearly distinguished. Examples of the application of this technique to the oxidation of low index planes of Cu, Ni and W are discussed. It is concluded that LEED fine structure analysis provides valuable information which supplements that obtainable from other compatible surface science techniques.

在低于新衍射光束出现阈值的低能处的LEED强度曲线中发现了LEED精细结构。这种精细的结构是由于反射光束和完全被表面屏障内部反射的光束之间的相互作用。精细结构可能受到化学吸附的强烈影响,这为表面结构研究提供了一种有用的技术。表面粗化或平滑、重建和无序吸附的效果可以清楚地区分。讨论了该技术在铜、镍、钨低折射率面氧化中的应用实例。LEED精细结构分析提供了有价值的信息,是对其他兼容表面科学技术的补充。
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引用次数: 0
Topics in ultraviolet inverse photoemission 紫外光逆发射的主题
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90066-2
V. Dose

Ultraviolet inverse photoemission is an exciting new technique for band mapping of empty electronic states in solids and at surfaces. It includes the energy region between the Fermi and the vacuum level inaccessible by ordinary photoemission. Applications discussed in this paper include band mapping in nickel, spin-resolved studies of iron, and chemisorption of NO and CO on palladium.

紫外逆发射是一种令人兴奋的新技术,用于固体和表面的空电子态的能带映射。它包括费米能级和真空能级之间的能量区域,这是普通光发射无法达到的。本文讨论的应用包括镍的能带映射、铁的自旋分解研究以及NO和CO在钯上的化学吸附。
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引用次数: 2
Hall mobility and field effect mobility studies on PbTe HWE thin films PbTe HWE薄膜的霍尔迁移率和场效应迁移率研究
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90206-5
P.R. Vaya , J. Majhi , B.S.V. Gopalam , C. Dattatreyan

Hall mobility (μH) and field effect mobility (μFE) studies were carried out on PbTe films of different thickness grown on KCl (100) substrates by the hot wall epitaxy (HWE) technique. The Hall mobility was obtained using the standard Van der Pauw technique. The diffused scattering mobility, μD, due to size effect was calculated and compared with μH. A large discrepancy between μH and μD was explained on the basis of a residual mobility contribution which was attributed to the scattering due to grain boundaries, dislocations, cleavage steps and other surface effects. For AC field effect studies an MIS structure with a thin mica spacer between the film surface and metal electrode was used. The field effect mobility, μFE, was obtained at different temperatures from 98 to 156 K in the frequency range of 40 to 200 kHz. The variation of μFE with frequency was found to be largely due to the relaxation of fast surface states having time constants from 1.84 to 0.96 μs in the above temperature range. The activation energy and capture cross-section of these surface states were calculated to be 0.02 eV and 10−19 cm2 respectively. Unlike the Hall mobility, the effective DC field effect mobility derived from the experimental results was found to be independent of film thickness.

采用热壁外延(HWE)技术对KCl(100)衬底上不同厚度的PbTe薄膜的霍尔迁移率(μH)和场效应迁移率(μFE)进行了研究。采用标准的范德保技术获得了霍尔迁移率。计算了由于尺寸效应引起的扩散散射迁移率μD,并与μH进行了比较。μH和μD之间存在较大差异的原因是由于晶界、位错、解理步骤和其他表面效应引起的散射导致了残余迁移率的贡献。对于交流电场效应的研究,采用了一种MIS结构,在薄膜表面和金属电极之间有一层薄云母间隔层。在温度为98 ~ 156 K,频率为40 ~ 200 kHz的范围内,获得了不同温度下的场效应迁移率μFE。μFE随频率的变化主要是由于在上述温度范围内具有时间常数为1.84 ~ 0.96 μs的快表面态的弛豫。这些表面态的活化能和俘获截面分别为0.02 eV和10−19 cm2。与霍尔迁移率不同,由实验结果得出的有效直流场效应迁移率与薄膜厚度无关。
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引用次数: 1
Coadsorption of oxygen and caesium on silver (110) 氧和铯在银上的共吸附(110)
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90078-9
K.C. Prince, M.E. Kordesch

The coadsorption of oxygen and caesium on silver has been studied by means of UPS and TPD. Adsorption of oxygen on a caesiated surface occurs in two stages, with a sticking coefficient, s, of nearly one in the first stage. In the second stage, the sticking coefficient is lower, but still higher than on the clean surface. After adsorption, the oxygen is present in two states, which are identified in TPD. These are ascribed to oxygen atoms adsorbed directly adjacent to Cs atoms, and those more distant from the Cs. Shifts in the Cs 5p lines are consistent with this assignment. The relevance to industrial catalysis of partial oxidation reactions over silver (e.g. epoxidation of ethylene) is discussed.

用UPS和TPD研究了氧和铯在银上的共吸附。氧在铯表面的吸附分两个阶段进行,第一个阶段的吸附系数s接近于1。在第二阶段,粘着系数较低,但仍高于清洁表面。吸附后,氧以两种状态存在,这两种状态在TPD中被识别出来。这是由直接吸附在Cs原子附近的氧原子和那些离Cs更远的氧原子引起的。c5p线的变化与这个分配是一致的。讨论了银的部分氧化反应(如乙烯的环氧化)与工业催化的相关性。
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引用次数: 1
Secondary ion yields of polymers 聚合物的仲离子产率
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90039-X
T. Ogama, H. Kurokawa, I. Karino

The secondary ion yields of polytetrafluoroethylene (PTFE) and polyethylene (PE) were compared with that of Al+ emitted from Al2O3 using mixed samples of their powders. The surface compositions of mixtures were measured by means of X-ray photoemission spectroscopy (XPS). Secondary ion mass spectrometry (SIMS) measurements with 1 keV Ar+ showed that the secondary ion yields of CF+ from PTFE and C2H+3 from PE were ∼ 20 and ∼ 4 times larger than that of Al+ from Al2O3, respectively. The sputtering yield of PTFE was also examined by weight loss measurements; the results suggest that the large secondary ion yield of PTFE is primarily due to its large sputtering yield.

对聚四氟乙烯(PTFE)和聚乙烯(PE)的二次离子产率与Al2O3中Al+的二次离子产率进行了比较。用x射线光发射光谱(XPS)测定了混合物的表面成分。用1 keV的Ar+进行二次离子质谱(SIMS)测量,结果表明,从PTFE中得到CF+和从PE中得到C2H+3的二次离子产率分别是从Al2O3中得到Al+的20倍和4倍。用失重法测定了聚四氟乙烯的溅射收率;结果表明,聚四氟乙烯的二次离子产率高主要是由于其溅射产率高。
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引用次数: 1
Electron beam induced effects at silicon-transition metal silicide interfaces 电子束在硅过渡金属硅化物界面上的诱导效应
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90229-6
K.A. Pandelisev, E.Y. Wang, J.C. Kelly

Transition metal silicides were made by the vacuum thermal annealing of 20 nm metal layers on silicon substrates. The samples were then argon sputtered at 2 keV in a UHV Auger system till the silicide-silicon interface was reached. The interface was irradiated with electrons and the Auger spectrum recorded at regular time intervals. Metal atoms which had diffused into the silicon were found to be moving towards the surface under electron bombardment. A surface silicide layer 1–2 nm thick was formed by these migrating metal atoms. Pd, Pt and Cr silicides on (100) and (111) silicon surfaces were observed. The electron induced migration was much stronger for the Pd2SiSi interface than for either the Pt2SiSi or CrSi2Si interface.

采用真空热退火的方法,在硅衬底上制备了20 nm的过渡金属硅化物。然后在特高压俄歇系统中用2 keV的氩气溅射样品,直至达到硅化物-硅界面。用电子照射界面,每隔一定时间记录俄歇谱。已经扩散到硅中的金属原子被发现在电子轰击下向表面移动。这些迁移的金属原子在表面形成1 ~ 2nm厚的硅化物层。在(100)和(111)硅表面观察到Pd、Pt和Cr硅化物。Pd2SiSi界面的电子诱导迁移比Pt2SiSi或CrSi2Si界面强得多。
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引用次数: 5
Functional dependence of electron mobility on the distance of remote donor impurities from the interface in AlGaAs/GaAs heterostructures AlGaAs/GaAs异质结构中电子迁移率对远端给体杂质离界面距离的功能依赖
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90232-6
J. Szymański, D. Neilson, F. Green, P.G. Kemeny, B.J. Linard

We investigate the scattering of electrons in a quasi-two-dimensional electron gas at the AlGaAs/GaAs interface, off ionized impurities located in AlGaAs. We use multiple-scattering (t-matrix) techniques to calculate the mobility and bound state energy of the electrons.

我们研究了准二维电子气体中电子在AlGaAs/GaAs界面上的散射,电离了位于AlGaAs中的杂质。我们使用多重散射(t矩阵)技术来计算电子的迁移率和束缚态能。
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引用次数: 0
Recent progress in the nondestructive analysis of surfaces, thin films, and interfaces by spectroellipsometry 光谱椭偏法无损分析表面、薄膜和界面的最新进展
Pub Date : 1985-05-01 DOI: 10.1016/0378-5963(85)90212-0
D.E. Aspnes

The advantages of spectroellipsometry include relative instrumentational simplicity, sensitivity to composition, density, and microstructure of thin films, submonolayer sensitivity to adsorbates, overlayers, and interfaces, and the capability of providing this information nondestructively, in real time, and in any transparent ambient. In this paper I discuss present trends and likely future directions for instrumentation, data analysis, and applications, and illustrate present capabilities by various examples.

光谱椭偏法的优点包括仪器相对简单,对薄膜的成分、密度和微观结构的灵敏度,对吸附物、覆盖层和界面的亚单层灵敏度,以及在任何透明环境下无损地、实时地提供这些信息的能力。在本文中,我讨论了仪器、数据分析和应用程序的当前趋势和可能的未来方向,并通过各种示例说明了当前的功能。
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引用次数: 13
期刊
Applications of Surface Science
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