Pub Date : 2014-01-01DOI: 10.3788/CO.20140701.0156
杨. Y. Fei, 安其昌 An Qi-chang, 张景旭 Zhang Jing-xu
Firstly,Power Spectral Density( PSD) is proposed for mirror surface figure evaluation in the large aperture telescope system as for some difficulties for Root Mean Square( RMS) in the evaluation of large scale variety and disadvantage of robust for rigid body displacement. Then,the decomposition arithmetic of PSD is analyzed with Zernike polynomial,and Zernike polynomial spectrum energy distribution is analyzed in some order. The algorithm has been used in the surface figure evaluation of a Φ 500 mm mirror,and energy distribution in the frequency domain of the actual mirror surface has been obtained. The experimental results indicate that the evaluation of PSD is more practical when used in large aperture mirror for their manufacture and testing and for the error budget allocation in telescope system. Finally,a kind of noncorrelative sub-aperture stitching method for evaluation of reflective mirror shape based on PSD is proposed which can be used in the large aperture telescope.
{"title":"Mirror surface figure evaluation based on power spectral density","authors":"杨. Y. Fei, 安其昌 An Qi-chang, 张景旭 Zhang Jing-xu","doi":"10.3788/CO.20140701.0156","DOIUrl":"https://doi.org/10.3788/CO.20140701.0156","url":null,"abstract":"Firstly,Power Spectral Density( PSD) is proposed for mirror surface figure evaluation in the large aperture telescope system as for some difficulties for Root Mean Square( RMS) in the evaluation of large scale variety and disadvantage of robust for rigid body displacement. Then,the decomposition arithmetic of PSD is analyzed with Zernike polynomial,and Zernike polynomial spectrum energy distribution is analyzed in some order. The algorithm has been used in the surface figure evaluation of a Φ 500 mm mirror,and energy distribution in the frequency domain of the actual mirror surface has been obtained. The experimental results indicate that the evaluation of PSD is more practical when used in large aperture mirror for their manufacture and testing and for the error budget allocation in telescope system. Finally,a kind of noncorrelative sub-aperture stitching method for evaluation of reflective mirror shape based on PSD is proposed which can be used in the large aperture telescope.","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"69 1","pages":"156-162"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86441862","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-01-01DOI: 10.3788/CO.20140701.0137
孙鸽 Sun Ge, 马冬梅 Ma Dongmei, 张海涛 Zhang Hai-tao
To acquire the spatial frequency response of the interferometer,the testing method on instrument transfer function( ITF) of interferometer was researched. First,the theoretical calculation model of instrument transfer function of imaging system was established,and the testing model of Fizeau interferometer was simulated via lens design program. Then the theoretical value was calculated and anaysed. Comparing ITF based on the method of sine phase plate with the theoretical ITF,the error is less than 0. 6%,and this method is proved to be feasible via the simulation of the optical design program.
{"title":"Interferometer instrument transfer function testing method","authors":"孙鸽 Sun Ge, 马冬梅 Ma Dongmei, 张海涛 Zhang Hai-tao","doi":"10.3788/CO.20140701.0137","DOIUrl":"https://doi.org/10.3788/CO.20140701.0137","url":null,"abstract":"To acquire the spatial frequency response of the interferometer,the testing method on instrument transfer function( ITF) of interferometer was researched. First,the theoretical calculation model of instrument transfer function of imaging system was established,and the testing model of Fizeau interferometer was simulated via lens design program. Then the theoretical value was calculated and anaysed. Comparing ITF based on the method of sine phase plate with the theoretical ITF,the error is less than 0. 6%,and this method is proved to be feasible via the simulation of the optical design program.","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"70 1","pages":"137-143"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76540933","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-01-01DOI: 10.3788/CO.20140701.0079
王珣 Wang Xun, 金春水 Jin Chunshui, 匡尚奇 Kuang Shang-qi, 喻波 Yu Bo
This paper reviews the "in situ"surface analysis and monitoring techniques for contamination induced in Extreme Ultraviolet Lithography( EUVL). It introduces the EUV lithography,reflective multilayer mirror and the mechanism of carbon contamination induced by EUV. It points out the requirement of the "in situ"surface analysis techniques in EUV lithography. The mainly surface analysis techniques are discussed. Analyzed results show the applied potentiality of each measurement used in the EUV optical system. Finally,it points out that the Fiber-based ellipsometry has further application prospect in "in situ"surface contamination monitoring of EUV lithography.
{"title":"Techniques of radiation contamination monitoring for extreme ultraviolet devices","authors":"王珣 Wang Xun, 金春水 Jin Chunshui, 匡尚奇 Kuang Shang-qi, 喻波 Yu Bo","doi":"10.3788/CO.20140701.0079","DOIUrl":"https://doi.org/10.3788/CO.20140701.0079","url":null,"abstract":"This paper reviews the \"in situ\"surface analysis and monitoring techniques for contamination induced in Extreme Ultraviolet Lithography( EUVL). It introduces the EUV lithography,reflective multilayer mirror and the mechanism of carbon contamination induced by EUV. It points out the requirement of the \"in situ\"surface analysis techniques in EUV lithography. The mainly surface analysis techniques are discussed. Analyzed results show the applied potentiality of each measurement used in the EUV optical system. Finally,it points out that the Fiber-based ellipsometry has further application prospect in \"in situ\"surface contamination monitoring of EUV lithography.","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"64 1","pages":"79-88"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73863770","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-01-01DOI: 10.3788/CO.20140706.0879
王卫兵 Wang Wei-bing, 王挺峰 Wang Ting-feng, 郭. G. Jin
{"title":"Analysis for opto-electrical acquisition tracking and pointing control technology on satellite","authors":"王卫兵 Wang Wei-bing, 王挺峰 Wang Ting-feng, 郭. G. Jin","doi":"10.3788/CO.20140706.0879","DOIUrl":"https://doi.org/10.3788/CO.20140706.0879","url":null,"abstract":"","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"58 1","pages":"879-888"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80157356","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-01-01DOI: 10.3788/CO.20140701.0144
王. W. Fei, 戢运峰 Ji Yun-feng, 冯. F. Gang, 徐作冬 Xu Zuo-dong, 邵碧波 Shao Bibo
As for the nonlinear effects of infrared focal plane arrays intensity response,a nonlinear calibration method is proposed based on single wavelength laser. Experimental equipment is designed for measuring,and the nonlinear calibration curve of the focal plane array is obtained through the measuring equiprment. Experimental results show that this method aviods the influence of infrared focal plane arrays spectral response nonuniformity,and meets the requirement of generality and practicability of the device in the engineering technology,which ensures the high accuracy of measurement as well as simpleness.
{"title":"Method for measuring nonlinear calibrated curve of infrared focal plane arrays","authors":"王. W. Fei, 戢运峰 Ji Yun-feng, 冯. F. Gang, 徐作冬 Xu Zuo-dong, 邵碧波 Shao Bibo","doi":"10.3788/CO.20140701.0144","DOIUrl":"https://doi.org/10.3788/CO.20140701.0144","url":null,"abstract":"As for the nonlinear effects of infrared focal plane arrays intensity response,a nonlinear calibration method is proposed based on single wavelength laser. Experimental equipment is designed for measuring,and the nonlinear calibration curve of the focal plane array is obtained through the measuring equiprment. Experimental results show that this method aviods the influence of infrared focal plane arrays spectral response nonuniformity,and meets the requirement of generality and practicability of the device in the engineering technology,which ensures the high accuracy of measurement as well as simpleness.","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"53 2","pages":"144-149"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91478018","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-01-01DOI: 10.3788/CO.20140701.0112
Hermsdorf Jorg Hermsdorf Jorg, Kaierle Stefan Kaierle Stefan
{"title":"Benefits of optogalvanic effect and beam shaping for laser stabilized GMA welding","authors":"Hermsdorf Jorg Hermsdorf Jorg, Kaierle Stefan Kaierle Stefan","doi":"10.3788/CO.20140701.0112","DOIUrl":"https://doi.org/10.3788/CO.20140701.0112","url":null,"abstract":"","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"382 1","pages":"112-117"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83464042","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-01-01DOI: 10.3788/CO.20140705.0837
王. W. Yang, 卢. L. Jia, 韩力英 Han Li-ying, 贺永洁 He Yong-jie
{"title":"Design of individual intraocular lens based on wavefront aberrations","authors":"王. W. Yang, 卢. L. Jia, 韩力英 Han Li-ying, 贺永洁 He Yong-jie","doi":"10.3788/CO.20140705.0837","DOIUrl":"https://doi.org/10.3788/CO.20140705.0837","url":null,"abstract":"","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"13 1","pages":"837-843"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86781148","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-01-01DOI: 10.3788/CO.20140705.0855
代晓珂 Dai Xiao-ke, 金春水 Jin Chunshui, 于杰 Yu Jie
To keep the advantages of fiber point diffraction interferometer which is easy to align and control the diffracted light,we design a new wavefront reference source( WRS). WRS can keep the advantages of fiber point diffraction interferometer and pin-hole point diffraction interferometer,and it also can be used to test the wavefront aberration of larger NA optical system for Extreme Ultraviolet Lithography( EUVL). The analysis of error for this new WRS and calibration of the system error is very important for realizing a more accurate test of wavefront aberration. Based on the analysis of various errors,we study the calibration algorithm in detail,and obtain the tolerance of several WRS important components including that the angle tolerance of rotation stage is0. 5° and the deviation factor is 0. 5% when rotation is away optical axis.
{"title":"Analysis on error and tolerance for the wavefront reference source of point diffraction interferometer","authors":"代晓珂 Dai Xiao-ke, 金春水 Jin Chunshui, 于杰 Yu Jie","doi":"10.3788/CO.20140705.0855","DOIUrl":"https://doi.org/10.3788/CO.20140705.0855","url":null,"abstract":"To keep the advantages of fiber point diffraction interferometer which is easy to align and control the diffracted light,we design a new wavefront reference source( WRS). WRS can keep the advantages of fiber point diffraction interferometer and pin-hole point diffraction interferometer,and it also can be used to test the wavefront aberration of larger NA optical system for Extreme Ultraviolet Lithography( EUVL). The analysis of error for this new WRS and calibration of the system error is very important for realizing a more accurate test of wavefront aberration. Based on the analysis of various errors,we study the calibration algorithm in detail,and obtain the tolerance of several WRS important components including that the angle tolerance of rotation stage is0. 5° and the deviation factor is 0. 5% when rotation is away optical axis.","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"54 39 1","pages":"855-862"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88496941","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-01-01DOI: 10.3788/co.20140704.0657
高. G. Yan, 刘洪波 Liu Hong-bo, 王. W. Li, 顾国超 Gu Guo-chao
{"title":"Design and manufacture of a large-area collimation solar simulator","authors":"高. G. Yan, 刘洪波 Liu Hong-bo, 王. W. Li, 顾国超 Gu Guo-chao","doi":"10.3788/co.20140704.0657","DOIUrl":"https://doi.org/10.3788/co.20140704.0657","url":null,"abstract":"","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"10 1","pages":"657-664"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84599082","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-01-01DOI: 10.3788/CO.20140706.0975
宋淑梅 Song Shu-mei
A kind of manufacturing and testing method for rectangular off-axis aspheric lightweight mirror is introduced. In order to overcome the corner effect,double-swing polishing( DSP) method is proposed. A DSP machine is made to achieve satisfying manufacturing result. The DSP and the 4-pole method are successfully applied for manufacturing optical system in the spectrometer. Four rectangular off-axis aspheric mirrors with the largest size of 266 mm × 110 mm are polished,and the final surface precision figures are better than0. 020λ( RMS,@ 633 nm). Manufacturing result shows that the double-swing polishing method improves the polishing efficiency and reduces the optical surface medium frequency error.
介绍了一种矩形离轴非球面轻量化反射镜的制造和检测方法。为了克服边角效应，提出了双摆动抛光(DSP)方法。制作了DSP机床，取得了满意的加工效果。将DSP和四极法成功地应用于光谱仪光学系统的制造。对最大尺寸为266 mm × 110 mm的4块矩形离轴非球面反射镜进行抛光处理，最终表面精度优于0。020λ(RMS，@ 633 nm)。制造结果表明，双摆式抛光方法提高了抛光效率，减小了光表面中频误差。
{"title":"Manufacturing and testing of rectangular off-axis aspheric mirror with double-swing polishing method","authors":"宋淑梅 Song Shu-mei","doi":"10.3788/CO.20140706.0975","DOIUrl":"https://doi.org/10.3788/CO.20140706.0975","url":null,"abstract":"A kind of manufacturing and testing method for rectangular off-axis aspheric lightweight mirror is introduced. In order to overcome the corner effect,double-swing polishing( DSP) method is proposed. A DSP machine is made to achieve satisfying manufacturing result. The DSP and the 4-pole method are successfully applied for manufacturing optical system in the spectrometer. Four rectangular off-axis aspheric mirrors with the largest size of 266 mm × 110 mm are polished,and the final surface precision figures are better than0. 020λ( RMS,@ 633 nm). Manufacturing result shows that the double-swing polishing method improves the polishing efficiency and reduces the optical surface medium frequency error.","PeriodicalId":10133,"journal":{"name":"Chinese Journal of Optics and Applied Optics","volume":"39 1","pages":"975-981"},"PeriodicalIF":0.0,"publicationDate":"2014-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90717883","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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