Pub Date : 2010-12-01DOI: 10.1109/TENCON.2010.5686136
Yongfeng Han, H. Kimura
This paper deals with motions obtaining of an underwater robot arm which have multi-degree of freedom by using reinforcement learning algorithms. A natural gradient Actor-Critic algorithm which uses Eligibility Traces is applied to the robot arm. In this algorithm, motion planning problems are modeled as finite state Markov decision processes. The robot arm is developed to have 4 joints, each joint consists 1 servo motor. The experiment results show the robot arm successfully learning to swim by feasible learning steps.
{"title":"Motions obtaining of multi-degree-freedom underwater robot by using reinforcement learning algorithms","authors":"Yongfeng Han, H. Kimura","doi":"10.1109/TENCON.2010.5686136","DOIUrl":"https://doi.org/10.1109/TENCON.2010.5686136","url":null,"abstract":"This paper deals with motions obtaining of an underwater robot arm which have multi-degree of freedom by using reinforcement learning algorithms. A natural gradient Actor-Critic algorithm which uses Eligibility Traces is applied to the robot arm. In this algorithm, motion planning problems are modeled as finite state Markov decision processes. The robot arm is developed to have 4 joints, each joint consists 1 servo motor. The experiment results show the robot arm successfully learning to swim by feasible learning steps.","PeriodicalId":101683,"journal":{"name":"TENCON 2010 - 2010 IEEE Region 10 Conference","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129641903","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-01DOI: 10.1109/TENCON.2010.5686677
Y. Kawashima, Kousuke Yamamoto, M. Sato, T. Matsunaga, K. Nakahara, D. Yamashita, Hidefumi Matsuzaki, G. Uchida, K. Koga, M. Shiratani, M. Kondo
We have measured photoluminescence spectra of crystalline and amorphous Si nanoparticles dispersed in methanol to demonstrate exciton generation under 244nm and 405nm laser light excitation. The photoluminescence spectra have broad peaks centered at 484–500nm, indicating exciton generation in crystalline and amorphous Si nanoparticles. In addition, the peaks corresponding to the recombination centers at their surface defects are observed at 324nm–380nm. This indicates the importance of termination of surface defects on nanoparticles for application to solar cells.
{"title":"Photoluminescence of Si nanoparticles synthesized using multi-hollow discharge plasma CVD","authors":"Y. Kawashima, Kousuke Yamamoto, M. Sato, T. Matsunaga, K. Nakahara, D. Yamashita, Hidefumi Matsuzaki, G. Uchida, K. Koga, M. Shiratani, M. Kondo","doi":"10.1109/TENCON.2010.5686677","DOIUrl":"https://doi.org/10.1109/TENCON.2010.5686677","url":null,"abstract":"We have measured photoluminescence spectra of crystalline and amorphous Si nanoparticles dispersed in methanol to demonstrate exciton generation under 244nm and 405nm laser light excitation. The photoluminescence spectra have broad peaks centered at 484–500nm, indicating exciton generation in crystalline and amorphous Si nanoparticles. In addition, the peaks corresponding to the recombination centers at their surface defects are observed at 324nm–380nm. This indicates the importance of termination of surface defects on nanoparticles for application to solar cells.","PeriodicalId":101683,"journal":{"name":"TENCON 2010 - 2010 IEEE Region 10 Conference","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125839617","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-01DOI: 10.1109/TENCON.2010.5686632
M. Sasaki, Wahyudiono, T. Kiyan, H. Akiyama, M. Goto, Yousuke Suga, Toshiyuki Watanabe
In this work, reactions of phenol were carried out in supercritical argon (critical temperature, Tc: 150.7 K, critical pressure, Pc: 4.8 MPa) with pulsed discharge plasma to understand reaction characteristics and to evaluate possibility that this technique will be applicable for a new “green” polymerization technique of functional polymeric materials. Experiments in subcritical water or in supercritical argon were conducted through the operation of a specially-designed SUS316 batch-type reactor (inner volume: 900 mL) at 373–523 K and 1–25 MPa, or at 303–373 K and 5–15 MPa, respectively. The electrode configuration consisted of a point (negative electrode) and a planar surface (positive electrode), which were made of tungsten and stainless steel, respectively. The distance between the two electrodes was fixed at 1 mm. Two kinds of power supply devices (BPFN and MPC) were employed. As results using a BPFN, it was found that reaction behavior in subcritical water at 373–523 K, 1–25 MPa with less than 4000 times pulsed discharges basically similar to that in supercritical argon, but polymerized products of phenol could be obtained under larger pulsed discharge times like 5000 times at identical conditions. In contrast, phenol could be converted into hydroquinone but no polymerized product could be confirmed in supercritical argon. On the surface of the electrode used, it was found that phenol could be converted into amorphous graphite oxide with pulsed discharge plasma treatment in supercritical argon. This finding will be expected as a new method for the carbon-based functional materials in supercritical argon.
{"title":"Development of a new chemical synthesis method with pulsed discharge plasma in sub- and supercritical fluids","authors":"M. Sasaki, Wahyudiono, T. Kiyan, H. Akiyama, M. Goto, Yousuke Suga, Toshiyuki Watanabe","doi":"10.1109/TENCON.2010.5686632","DOIUrl":"https://doi.org/10.1109/TENCON.2010.5686632","url":null,"abstract":"In this work, reactions of phenol were carried out in supercritical argon (critical temperature, Tc: 150.7 K, critical pressure, Pc: 4.8 MPa) with pulsed discharge plasma to understand reaction characteristics and to evaluate possibility that this technique will be applicable for a new “green” polymerization technique of functional polymeric materials. Experiments in subcritical water or in supercritical argon were conducted through the operation of a specially-designed SUS316 batch-type reactor (inner volume: 900 mL) at 373–523 K and 1–25 MPa, or at 303–373 K and 5–15 MPa, respectively. The electrode configuration consisted of a point (negative electrode) and a planar surface (positive electrode), which were made of tungsten and stainless steel, respectively. The distance between the two electrodes was fixed at 1 mm. Two kinds of power supply devices (BPFN and MPC) were employed. As results using a BPFN, it was found that reaction behavior in subcritical water at 373–523 K, 1–25 MPa with less than 4000 times pulsed discharges basically similar to that in supercritical argon, but polymerized products of phenol could be obtained under larger pulsed discharge times like 5000 times at identical conditions. In contrast, phenol could be converted into hydroquinone but no polymerized product could be confirmed in supercritical argon. On the surface of the electrode used, it was found that phenol could be converted into amorphous graphite oxide with pulsed discharge plasma treatment in supercritical argon. This finding will be expected as a new method for the carbon-based functional materials in supercritical argon.","PeriodicalId":101683,"journal":{"name":"TENCON 2010 - 2010 IEEE Region 10 Conference","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124698196","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-01DOI: 10.1109/TENCON.2010.5686588
M. Hanada, H. Nakazato, Hitoshi Watanabe
Recently multimedia applications such as music or video streaming, video teleconferencing and IP telephony have been flourishing in packet-switched networks. Applications that generate such real-time data can have very diverse quality-of-service (QoS) requirements. In order to guarantee diverse QoS requirements, the combined use of a packet scheduling algorithm based on Generalized Processor Sharing (GPS) and leaky bucket traffic regulator is the most successful QoS mechanism. GPS can provide a minimum guaranteed service rate for each session and tight delay bounds for leaky bucket constrained sessions. However, the delay bounds for leaky bucket constrained sessions under GPS are unnecessarily large because each session is served according to its associated constant weight until the session buffer is empty. In order to solve the problem, a scheduling policy called Output Rate-Controlled Generalized Processor Sharing (ORC-GPS) has been proposed in [10]. ORC-GPS is a rate-based scheduling like GPS, and controls the service rate in order to lower the delay bounds for leaky bucket constrained sessions. In this paper, we extend the delay bounds calculation for single-node networks introduced in [10] to multi-node networks and compare ORC-GPS with GPS in terms of end-to-end delay bounds through numerical experiments.
{"title":"Output Rate-Controlled Generalized Processor Sharing: End-to-end delay bounds calculation","authors":"M. Hanada, H. Nakazato, Hitoshi Watanabe","doi":"10.1109/TENCON.2010.5686588","DOIUrl":"https://doi.org/10.1109/TENCON.2010.5686588","url":null,"abstract":"Recently multimedia applications such as music or video streaming, video teleconferencing and IP telephony have been flourishing in packet-switched networks. Applications that generate such real-time data can have very diverse quality-of-service (QoS) requirements. In order to guarantee diverse QoS requirements, the combined use of a packet scheduling algorithm based on Generalized Processor Sharing (GPS) and leaky bucket traffic regulator is the most successful QoS mechanism. GPS can provide a minimum guaranteed service rate for each session and tight delay bounds for leaky bucket constrained sessions. However, the delay bounds for leaky bucket constrained sessions under GPS are unnecessarily large because each session is served according to its associated constant weight until the session buffer is empty. In order to solve the problem, a scheduling policy called Output Rate-Controlled Generalized Processor Sharing (ORC-GPS) has been proposed in [10]. ORC-GPS is a rate-based scheduling like GPS, and controls the service rate in order to lower the delay bounds for leaky bucket constrained sessions. In this paper, we extend the delay bounds calculation for single-node networks introduced in [10] to multi-node networks and compare ORC-GPS with GPS in terms of end-to-end delay bounds through numerical experiments.","PeriodicalId":101683,"journal":{"name":"TENCON 2010 - 2010 IEEE Region 10 Conference","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131833538","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-01DOI: 10.1109/TENCON.2010.5686130
K. Tatsuguchi, S. Sibasato, D. Nakamura, T. Okada, Y. Yoshinaga, H. Enaida, T. Ishibashi
We proposed a new visualization procedure for oxygen saturation in retinal capillary vessels by spectroscopic imaging. Four-wavelength spectroscopic imaging was used for a mesurement of capillary vessel region.
{"title":"Spectroscopic imaging of oxygen saturation level in retinal capillary vessels area","authors":"K. Tatsuguchi, S. Sibasato, D. Nakamura, T. Okada, Y. Yoshinaga, H. Enaida, T. Ishibashi","doi":"10.1109/TENCON.2010.5686130","DOIUrl":"https://doi.org/10.1109/TENCON.2010.5686130","url":null,"abstract":"We proposed a new visualization procedure for oxygen saturation in retinal capillary vessels by spectroscopic imaging. Four-wavelength spectroscopic imaging was used for a mesurement of capillary vessel region.","PeriodicalId":101683,"journal":{"name":"TENCON 2010 - 2010 IEEE Region 10 Conference","volume":"108 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131496271","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-01DOI: 10.1109/TENCON.2010.5686704
G. Uchida, Shota Nunomutra, H. Miyata, S. Iwashita, Dsaisuke Yamashita, Hidefumi Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani
We present detailed measurements on breakdown voltage (Vf) in a RF discharge with Si(CH3)2(OCH3)2 gas diluted with Ar. When Ar concentration (PAr) is increased, the Vf gradually decreases up to PAr = 50 %, and then is followed by a drastic decrease. The PAr dependence of Vf is well explained by a feature of the ion-induced secondary electron emission coefficient (γ) deduced from measured Paschen curves. A drastic increase in Ar ion flux with PAr induces high emission of electrons from cathode surface, resulting in lowing Vf.
{"title":"Effects of Ar addition on breakdown voltage in a Si(CH3)2(OCH3)2 RF discharge","authors":"G. Uchida, Shota Nunomutra, H. Miyata, S. Iwashita, Dsaisuke Yamashita, Hidefumi Matsuzaki, K. Kamataki, N. Itagaki, K. Koga, M. Shiratani","doi":"10.1109/TENCON.2010.5686704","DOIUrl":"https://doi.org/10.1109/TENCON.2010.5686704","url":null,"abstract":"We present detailed measurements on breakdown voltage (V<inf>f</inf>) in a RF discharge with Si(CH<inf>3</inf>)<inf>2</inf>(OCH<inf>3</inf>)<inf>2</inf> gas diluted with Ar. When Ar concentration (P<inf>Ar</inf>) is increased, the V<inf>f</inf> gradually decreases up to P<inf>Ar</inf> = 50 %, and then is followed by a drastic decrease. The P<inf>Ar</inf> dependence of V<inf>f</inf> is well explained by a feature of the ion-induced secondary electron emission coefficient (γ) deduced from measured Paschen curves. A drastic increase in Ar ion flux with P<inf>Ar</inf> induces high emission of electrons from cathode surface, resulting in lowing V<inf>f</inf>.","PeriodicalId":101683,"journal":{"name":"TENCON 2010 - 2010 IEEE Region 10 Conference","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123143773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-01DOI: 10.1109/TENCON.2010.5686443
M. Aritsugi, Kyoko Nagano
In this paper, we investigate recovery processing for stream processing systems with high availability in local area networks (LANs) in which not so many resources are available. We focus on a simple high availability distributed stream processing system model where each processing node in a query network has a backup node. We discuss pros and cons of several approaches to recovery processing from single-node fail-stop failures in the system model running in LANs with limited resources. In particular, we compare the approaches in terms of suitability to LANs, recovery cost and throughput. Some results of simulation in which recovery approaches were compared in terms of recovery cost and throughput are shown.
{"title":"Recovery processing for high availability stream processing systems in local area networks","authors":"M. Aritsugi, Kyoko Nagano","doi":"10.1109/TENCON.2010.5686443","DOIUrl":"https://doi.org/10.1109/TENCON.2010.5686443","url":null,"abstract":"In this paper, we investigate recovery processing for stream processing systems with high availability in local area networks (LANs) in which not so many resources are available. We focus on a simple high availability distributed stream processing system model where each processing node in a query network has a backup node. We discuss pros and cons of several approaches to recovery processing from single-node fail-stop failures in the system model running in LANs with limited resources. In particular, we compare the approaches in terms of suitability to LANs, recovery cost and throughput. Some results of simulation in which recovery approaches were compared in terms of recovery cost and throughput are shown.","PeriodicalId":101683,"journal":{"name":"TENCON 2010 - 2010 IEEE Region 10 Conference","volume":"104 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122240176","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-01DOI: 10.1109/TENCON.2010.5686694
Yanli Ji, Atsushi Shimada, R. Taniguchi
In this paper, a new action recognition system is proposed, which employs 3D FAST corner detection in ROI, compact 3D descriptor to represent action information, and SOM to learn and recognize actions. Through detecting 3D FAST corners in ROI, action information of shape and motion can be obtained, and noise corners can be deleted at the same time. Furthermore, based on 3D HOG, we produce a simpler descriptor which is proposed by shortening the support region of interest points, combining symmetric bins after orientation quantization using icosahedron, and keeping the top value bin of quantized histogram. Compared with the descriptor before adjustment, our descriptor uses only 80 bins other than 960 bins to describe one interest point, which saves much computation time and memory. Our frame matching experiment on descriptor also certifies that our descriptor outperforms the previous one. Our descriptor is applied to recognize actions on KTH and Hollywood databases, and the results show that it performs well.
{"title":"A compact 3D descriptor in ROI for human action recognition","authors":"Yanli Ji, Atsushi Shimada, R. Taniguchi","doi":"10.1109/TENCON.2010.5686694","DOIUrl":"https://doi.org/10.1109/TENCON.2010.5686694","url":null,"abstract":"In this paper, a new action recognition system is proposed, which employs 3D FAST corner detection in ROI, compact 3D descriptor to represent action information, and SOM to learn and recognize actions. Through detecting 3D FAST corners in ROI, action information of shape and motion can be obtained, and noise corners can be deleted at the same time. Furthermore, based on 3D HOG, we produce a simpler descriptor which is proposed by shortening the support region of interest points, combining symmetric bins after orientation quantization using icosahedron, and keeping the top value bin of quantized histogram. Compared with the descriptor before adjustment, our descriptor uses only 80 bins other than 960 bins to describe one interest point, which saves much computation time and memory. Our frame matching experiment on descriptor also certifies that our descriptor outperforms the previous one. Our descriptor is applied to recognize actions on KTH and Hollywood databases, and the results show that it performs well.","PeriodicalId":101683,"journal":{"name":"TENCON 2010 - 2010 IEEE Region 10 Conference","volume":"62 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116597962","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Crowd density estimation is important in crowd analysis, this paper proposes a new approach used for crowd density estimation. First, background is removed by using a combination of optical flow and background subtract methods. Then according to texture analysis, a set of new feature is extracted from foreground image. Finally, a self-organizing map neural network is used for classifying different crowds. Some experimental results show compared to former crowd estimation methods, the proposed approach can carry out the estimation more accurately, the rate of true classification is 85.6% on a data set of 500 images.
{"title":"A new approach of crowd density estimation","authors":"Wei Li, Xiaojuan Wu, Koichi Matsumoto, Hua-An Zhao","doi":"10.1109/TENCON.2010.5685978","DOIUrl":"https://doi.org/10.1109/TENCON.2010.5685978","url":null,"abstract":"Crowd density estimation is important in crowd analysis, this paper proposes a new approach used for crowd density estimation. First, background is removed by using a combination of optical flow and background subtract methods. Then according to texture analysis, a set of new feature is extracted from foreground image. Finally, a self-organizing map neural network is used for classifying different crowds. Some experimental results show compared to former crowd estimation methods, the proposed approach can carry out the estimation more accurately, the rate of true classification is 85.6% on a data set of 500 images.","PeriodicalId":101683,"journal":{"name":"TENCON 2010 - 2010 IEEE Region 10 Conference","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123669246","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2010-12-01DOI: 10.1109/TENCON.2010.5686686
K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, Kousuke Yamamoto, W. M. Nakamura, D. Yamashita, Hidefumi Matsuzaki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani
We have deposited cluster-free B-doped a-Si:H films using a SiH4+B10H14 multi-hollow discharge plasma CVD method. We have studied gas flow rate ratio R=[B10H14]/[SiH4] dependence of deposition rate and absorbance of films together with plasma emission intensities. Deposition rate increases sharply from 0.8nm/s R=0.0 % to 2.2nm/s for R=0.53%, but SiH emission intensity is almost constant for R=0–2.0%. These results suggest BxHy radicals enhance surface reaction probability of SiH3 radicals. The optical bandgap of films is around 1.9eV, being larger than that of conventional B-doped films.
{"title":"Cluster-free B-doped a-Si:H films deposited using SiH4 + B10H14 multi-hollow discharges","authors":"K. Nakahara, Y. Kawashima, M. Sato, T. Matsunaga, Kousuke Yamamoto, W. M. Nakamura, D. Yamashita, Hidefumi Matsuzaki, G. Uchida, N. Itagaki, K. Koga, M. Shiratani","doi":"10.1109/TENCON.2010.5686686","DOIUrl":"https://doi.org/10.1109/TENCON.2010.5686686","url":null,"abstract":"We have deposited cluster-free B-doped a-Si:H films using a SiH<inf>4</inf>+B<inf>10</inf>H<inf>14</inf> multi-hollow discharge plasma CVD method. We have studied gas flow rate ratio R=[B<inf>10</inf>H<inf>14</inf>]/[SiH<inf>4</inf>] dependence of deposition rate and absorbance of films together with plasma emission intensities. Deposition rate increases sharply from 0.8nm/s R=0.0 % to 2.2nm/s for R=0.53%, but SiH emission intensity is almost constant for R=0–2.0%. These results suggest B<inf>x</inf>H<inf>y</inf> radicals enhance surface reaction probability of SiH<inf>3</inf> radicals. The optical bandgap of films is around 1.9eV, being larger than that of conventional B-doped films.","PeriodicalId":101683,"journal":{"name":"TENCON 2010 - 2010 IEEE Region 10 Conference","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2010-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123674133","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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