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2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)最新文献

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New perspective on lifetime prediction approach for BTI and HCI stressed device and its impact on circuit lifetime BTI和HCI应力器件寿命预测方法的新视角及其对电路寿命的影响
Min-Chul Park, G. Yang, Joon-Sung Yang, Keun-Ho Lee, Young-Kwan Park
Device and circuit lifetime is investigated for poly silicon gated MOSFET. New findings are: (1) More than 1 order lifetime is increased by quantifying the influence of poly depletion effect (PDE) and accumulated trap charge effect (ATCE). (2) We demonstrate that conventional lifetime model produce an incorrect and reverse lifetime result for each degradation data measured by fast and slow method. (3) We evaluate the impact on circuit parameter, propagation delay time (tPD), degradation in the light of new findings.
研究了多晶硅门控MOSFET的器件寿命和电路寿命。新发现有:(1)通过量化聚耗损效应(PDE)和累积陷阱电荷效应(ATCE)的影响,提高了1个量级以上的寿命。(2)我们证明了传统的寿命模型对快速和慢速方法测量的每个退化数据产生了不正确的和相反的寿命结果。(3)根据新发现评估了对电路参数、传播延迟时间(tPD)、退化的影响。
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引用次数: 3
Cell-centered finite volume schemes for semiconductor device simulation 半导体器件模拟的以单元为中心的有限体积方案
K. Rupp, M. Bina, Y. Wimmer, A. Jungel, T. Crasser
Although the traditional finite volume scheme based on boxes obtained from the dual Voronoi grid has been employed successfully for classical semiconductor device simulation for decades, certain drawbacks such as the required Delaunay property of the underlying mesh limit its applicability for two-and particularly three-dimensional device simulations on unstructured meshes. We propose a discretization based on mesh cells rather than dual boxes around vertices, which circumvents the Delaunay requirement, yet preserves all the important features of the traditional method such as exact current conservation. The applicability of our method is demonstrated for classical and semiclassical models to tackle current engineering problems: We consider three-dimensional drift-diffusion simulations of geometric variations of the fin in a FinFET and present results from spatially two-dimensional simulations of a high-voltage nLDMOS device based on spherical harmonics expansions for direct solutions of the Boltzmann transport equation.
尽管基于双Voronoi网格获得的盒子的传统有限体积方案已经成功地应用于经典半导体器件模拟数十年,但某些缺点,如底层网格所需的Delaunay性质,限制了其在非结构化网格上的二维,特别是三维器件模拟的适用性。我们提出了一种基于网格单元而不是围绕顶点的双盒的离散化方法,它绕过了Delaunay要求,但保留了传统方法的所有重要特征,如精确电流守恒。我们的方法适用于经典和半经典模型,以解决当前的工程问题:我们考虑了FinFET中翅片几何变化的三维漂移扩散模拟,并给出了基于玻尔兹曼输运方程直接解的球面谐波展开的高压nLDMOS器件的空间二维模拟结果。
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引用次数: 2
Modelinig and algorithms of device simulation for ultra-high speed devices 超高速器件仿真建模与算法研究
H. Mutoh
The physical models and algorithms of device simulation for ultra-high speed devices are proposed. The propagation of electromagnetic field induced by electrodes cannot be ignored for analyses of ultra-high speed devices. In order to obtain the consistent basic equations for the both of device and electromagnetic field propagation simulations, we newly introduce Nakanishi-Lautrup (NL) field of quantum electrodynamics (QED) to the electromagnetic field model. The models and algorithms are reported with some calculation results.
提出了超高速器件仿真的物理模型和算法。在超高速器件的分析中,电极感应电磁场的传播是不可忽视的。为了获得器件和电磁场传播模拟的一致基本方程,我们将量子电动力学(QED)的Nakanishi-Lautrup (NL)场引入电磁场模型。给出了模型和算法,并给出了一些计算结果。
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引用次数: 6
Time dependent 3-D statistical KMC simulation of high-k degradation including trap generation and electron capture/emission dynamic 高钾离子降解的三维统计KMC模拟,包括陷阱的产生和电子捕获/发射动态
Yijiao Wang, Peng Huang, Xiaoyan Liu, G. Du, Jinfeng Kang
A comprehensive time dependent three dimensional simulation framework for high-k degradation is developed. In this framework, the models that account for trap generation in high-k, capture/emission dynamic, and statistical variability are incorporated in the simulation. The influence of the trap generation model on distribution of traps, threshold voltage, and the amount of trapped charge is investigated in detail, thereby lay a solid foundation for predicting more accurate design margins at circuit/system level in the future.
提出了一种基于时间的高钾退化综合三维仿真框架。在这个框架中,考虑高k陷阱产生、捕获/排放动态和统计变率的模型被纳入模拟。详细研究了陷阱产生模型对陷阱分布、阈值电压和陷阱电荷量的影响,从而为未来在电路/系统层面预测更准确的设计裕度奠定了坚实的基础。
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引用次数: 1
Density-functional-theory-based study of monolayer MoS2 on oxide 基于密度泛函理论的氧化物表面单层MoS2的研究
A. Valsaraj, L. F. Register, S. Banerjee, Jiwon Chang
Monolayer transition metal dichalcogenides (TMDs) are novel gapped two-dimensional materials with unique electrical and optical properties. Here, we study the effect of dielectric oxide slabs on the electronic structure of monolayer MoS2 using density functional theory (DFT) calculations. We also have simulated the effects of O-vacancies in the first few layers of the oxide on the band structure of the MoS2-oxide system, showing here results for vacancies in topmost/MoS2-adjacent O layer.
单层过渡金属二硫族化合物(TMDs)是一种新型的二维间隙材料,具有独特的电学和光学性质。本文利用密度泛函理论(DFT)计算研究了介质氧化板对单层MoS2电子结构的影响。我们还模拟了氧化物的前几层O空位对mos2 -氧化物体系能带结构的影响,这里显示了最顶层/ mos2相邻O层空位的结果。
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引用次数: 1
An analysis of the effect of hydrogen incorporation on electron traps in silicon nitride 氮化硅中含氢对电子阱影响的分析
K. Sonoda, E. Tsukuda, M. Tanizawa, K. Ishikawa, Y. Yamaguchi
The effect of hydrogen incorporation into nitrogen vacancies in silicon nitride on electron trap is analyzed using density functional theory method. A hydrogen atom is attached to a dangling bond which is well separated from other dangling bonds, whereas it is not attached to ones which strongly interact because of lattice distortion. An electron trap level caused by nitrogen vacancy becomes shallow by hydrogen incorporation. An electron is trapped in a deep level created by a silicon dangling bond before hydrogen incorporation, whereas it is trapped in a shallow level created by an anti-bonding state of a siliconsilicon bond after hydrogen incorporation. The simulation results qualitatively explain the experiment in which reduced hydrogen content in silicon nitride shows superior retention characteristics of the programmed state.
利用密度泛函理论方法分析了氮化硅中氮空位含氢对电子阱的影响。一个氢原子附着在一个悬空键上,这个悬空键与其他悬空键分离得很好,而它没有附着在那些由于晶格畸变而发生强烈相互作用的键上。由氮空位引起的电子阱能级因氢的加入而变浅。在氢结合之前,一个电子被困在由硅悬空键产生的深能级中,而在氢结合之后,它被困在由硅硅键的反键状态产生的浅能级中。模拟结果定性地解释了实验中氮化硅中还原氢含量表现出优越的程序态保留特性。
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引用次数: 1
A predictive physical model for hot-carrier degradation in ultra-scaled MOSFETs 超尺度mosfet热载流子退化的预测物理模型
S. Tyaginov, M. Bina, J. Franco, Y. Wimmer, D. Osintsev, B. Kaczer, T. Grasser
We present and validate a novel physics-based model for hot-carrier degradation. The model incorporates such essential ingredients as a superposition of the multivibrational bond dissociation process and single-carrier mechanism, dispersion of the bond-breakage energy, interaction of the electric field and the dipole moment of the bond, and electron-electron scattering. The main requirement is that the model has to be able to cover HCD observed in a family of MOSFETs of identical architecture but with different gate lengths under diverse stress conditions using a unique set of parameters.
我们提出并验证了一种新的基于物理的热载流子降解模型。该模型包含了多振动键解离过程与单载流子机制的叠加、键断裂能量的弥散、电场与键偶极矩的相互作用以及电子-电子散射等基本成分。主要要求是,该模型必须能够覆盖在具有相同架构但在不同应力条件下使用一组独特参数具有不同栅极长度的mosfet系列中观察到的HCD。
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引用次数: 24
Interplay among Bilayer pseudoSpin field-effect transistor (BiSFET) performance, BiSFET scaling and condensate strength 双层伪自旋场效应晶体管(BiSFET)性能、BiSFET缩放和冷凝强度之间的相互作用
X. Mou, L. Register, S. Banerjee
It has been proposed that superfluid excitonic condensates may be possible in dielectrically separated graphene layers or other two-dimensional materials. This possibility was the basis for the proposed ultra-low power Bilayer pseudoSpin Field-effect Transistor (BiSFET). Previously, we developed an atomistic tight-binding quantum transport simulator, including the non-local exchange interaction, and used it to demonstrate the essential excitonic superfluid transport physics which underlies the proposed BiSFET in presence of such a condensate. Here we report on extension of that work to analyze dependencies on device scaling and the condensate strength of BiSFET performance and required device parameters including interlayer conductance, and critical current and voltage.
有人提出,在介电分离的石墨烯层或其他二维材料中可能存在超流体激子凝聚。这种可能性是提出的超低功率双层伪自旋场效应晶体管(BiSFET)的基础。之前,我们开发了一个原子紧密结合量子输运模拟器,包括非局部交换相互作用,并使用它来演示基本的激子超流体输运物理,这是在这种凝聚态存在下提出的BiSFET的基础。在这里,我们报告了该工作的扩展,以分析器件缩放和BiSFET性能的冷凝强度的依赖关系,以及所需的器件参数,包括层间电导,临界电流和电压。
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引用次数: 4
Modeling self-heating effects in AlGaN/GaN electronic devices during static and dynamic operation mode 静态和动态工作模式下AlGaN/GaN电子器件的自热效应建模
A. Tallarico, P. Magnone, E. Sangiorgi, C. Fiegna
In this paper, we present a study of the self-heating effects in GaN-based power devices during static and dynamic operation mode by means of Sentaurus TCAD. A physical model interface (PMI), accounting for the temperature dependence of the thermal boundary resistance (TBR), has been implemented in the simulator in order to realistically model self-heating effects. In particular, we take into account for the TBR associated to the nucleation layer between GaN and SiC substrate. Moreover, the thermal contribution of the mutual heating among adjacent devices has been considered. Finally, we have investigated the influence of the temperature on the surface charges trapping and de-trapping phenomena showing two different traps occupancy transients. While one of the two occurs also in the isothermal condition, the second one is temperature activated.
本文利用Sentaurus TCAD研究了氮化镓功率器件在静态和动态工作模式下的自热效应。为了真实地模拟自热效应,在仿真器中实现了考虑热边界阻温度依赖性的物理模型界面(PMI)。特别地,我们考虑到与GaN和SiC衬底之间的成核层相关的TBR。此外,还考虑了相邻器件之间相互加热的热贡献。最后,我们研究了温度对表面电荷捕获和释放现象的影响,显示了两种不同的陷阱占用瞬态。其中一种反应也发生在等温条件下,而另一种反应是温度激活的。
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引用次数: 0
The role of electron viscosity on plasma-wave instability in HEMTs 电子粘度对hemt等离子体波不稳定性的影响
He Wang, Wenshen Li, Jinyu Zhang, Yan Wang, Zhiping Yu
Conditions for terahertz (THz) radiation due to the plasma-wave instability in the channel of HEMTs are re-examined by considering the electron viscosity in carrier hydrodynamic transport. Not only the DC output I-V characteristics are affected, but also the window for plasma-wave instability is altered by the term with viscosity in the transport equation. The solution procedure and numerical study are presented. The analysis has been applied to recent experimental work and it is shown that the device parameters required for plasma-wave instability are more stringent than those reported in the up-to-date THz emission experiments.
考虑载流子流体动力学输运中的电子黏度,重新研究了由于等离子体波不稳定导致的hemt通道中太赫兹辐射的条件。不仅直流输出的I-V特性受到影响,而且等离子体波不稳定性的窗口也会因输运方程中的黏度项而改变。给出了求解过程和数值研究。该分析已应用于最近的实验工作,结果表明,等离子体波不稳定性所需的器件参数比最新太赫兹发射实验中报道的更为严格。
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引用次数: 4
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2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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