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2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)最新文献

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Towards atomic level simulation of electron devices including the semiconductor-oxide interface 包括半导体-氧化物界面在内的电子器件的原子级模拟
S. Markov, C. Yam, Guanhua Chen, B. Aradi, G. Penazzi, T. Frauenheim
We report a milestone in device modeling whereby a planar MOSFET with extremely thin silicon on insulator channel is simulated at the atomic level, including significant parts of the gate and buried oxides explicitly in the simulation domain, in ab initio fashion, i.e without material or geometrical parameters. We use the density-functional-based tight-binding formalism for constructing the device Hamiltonian, and non-equilibrium Green's functions formalism for calculating electron current. Simulations of Si/SiO2 super-cells agree very well with experimentally observed band-structure phenomena in SiO2-confined sub-6 nm thick Si films. Device simulations of ETSOI MOSFET with 3 nm channel length and sub-nm channel thickness also agree well with reported measurements of the transfer characteristics of a similar transistor.
我们报告了器件建模中的一个里程碑,其中在原子水平上模拟了具有极薄绝缘体沟道硅的平面MOSFET,以从头开始的方式,即没有材料或几何参数,在模拟域中明确地包括栅极的重要部分和埋藏的氧化物。我们使用基于密度泛函的紧密结合形式来构造器件哈密顿量,并使用非平衡格林函数形式来计算电子电流。硅/SiO2超级电池的模拟结果与实验中观察到的SiO2约束下6 nm厚Si薄膜中的能带结构现象吻合得很好。具有3nm沟道长度和亚nm沟道厚度的ETSOI MOSFET的器件模拟也与报道的类似晶体管的传输特性测量结果一致。
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引用次数: 7
Self-forces in 3D finite element Monte Carlo simulations of a 10.7 nm gate length SOI FinFET 10.7 nm栅极长度SOI FinFET三维有限元蒙特卡罗模拟中的自作用力
M. Aldegunde, K. Kalna
Particle-mesh coupling in ensemble Monte Carlo simulations of semiconductor devices results in unphysical self-forces when using unstructured meshes to describe the device geometry. We develop a correction to the driving electric field and show that self-forces can be virtually eliminated on a finite element mesh at a small additional computational cost. The developed methodology is included into a self-consistent 3D finite element Monte Carlo device simulator. We simulate an isolated particle and show the kinetic energy conservation down to a magnitude of 10-10 meV. The methodology is applied to a 10.7 nm gate length FinFET simulation and we find that for a large enough ensemble of particles, the impact of self-forces on the final ID-VG is almost negligible.
在半导体器件的集成蒙特卡罗模拟中,当使用非结构化网格来描述器件几何形状时,粒子网格耦合会导致非物理自作用力。我们对驱动电场进行了修正,并表明可以在有限元网格上以很小的额外计算成本消除自作用力。该方法已应用于自洽三维有限元蒙特卡罗器件模拟器中。我们模拟了一个孤立的粒子,并显示了动能守恒到10-10兆电子伏特的量级。将该方法应用于10.7 nm栅极长度的FinFET模拟,我们发现对于足够大的粒子集合,自作用力对最终ID-VG的影响几乎可以忽略不计。
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引用次数: 2
Novel biosensing devices for medical applications Soft contact-lens sensors for monitoring tear sugar 用于医疗应用的新型生物传感装置监测泪糖的软性隐形眼镜传感器
K. Mitsubayashi
A soft contact-lens amperometric glucose sensor as novel non-invasive device of body sensor network was fabricated and tested. Also, the sensor was utilized to tear glucose monitoring. The sensor was constructed by immobilizing GOD onto a flexible oxygen electrode, which was fabricated using “Soft-MEMS” techniques onto a functional polymer membrane. In purpose of bioinstrumentation, adhesive agents were not used for constructing the flexible biosensor. Linear relationship between glucose concentration and output current was obtained in a range of 0.039-0.537 mmol/l. Current dependences on pH and temperature were also evaluated. The current was largest at pH 7.0 and the current increased when temperature increased. This indicates that the output current depends on enzyme activity. Based on the basic characteristics investigation, the glucose sensor was applied to measurement of glucose in tear fluids on an eye site of a Japan white rabbit. The change of tear glucose level induced by oral-administration of glucose was monitored as a current change of the sensor attached on the eye site. In this investigation, the tear glucose level varied from 0.2 mmol/l to 0.5 mmol/l. Although there was a delay of several tens of minutes towards blood sugar level, it is considered to be possible that non-invasive continuous glucose monitoring can be realized using the flexible biosensor.
制作并测试了一种新型的无创体感测网络装置——软性接触镜式安培葡萄糖传感器。此外,该传感器还用于撕裂血糖监测。该传感器是通过将GOD固定在柔性氧电极上构建的,而柔性氧电极是用“软mems”技术在功能聚合物膜上制造的。在生物仪器中,不使用粘接剂来构建柔性生物传感器。葡萄糖浓度与输出电流在0.039 ~ 0.537 mmol/l范围内呈线性关系。电流对pH和温度的依赖性也进行了评估。pH 7.0时电流最大,温度升高电流增大。这表明输出电流取决于酶的活性。在基本特性研究的基础上,将葡萄糖传感器应用于日本大白兔眼部位泪液中葡萄糖的测定。口服葡萄糖引起的泪液葡萄糖水平的变化是通过附着在眼睛部位的传感器的电流变化来监测的。在本研究中,泪液葡萄糖水平从0.2 mmol/l到0.5 mmol/l不等。虽然对血糖水平有几十分钟的延迟,但使用柔性生物传感器可以实现无创连续血糖监测。
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引用次数: 5
Current status and future prospects of non-volatile memory modeling 非易失性存储器建模的现状与展望
A. Benvenuti, A. Ghetti, A. Mauri, Haijun Liu, C. Mouli
We briefly discuss the evolution of Non-Volatile Memory (NVM) technology in term of macro-trends and their implications for modeling activities in an industrial R&D environment. Some examples of difficult modeling issues for different NVM techologies are mentioned, and finally both present needs and future challanges are critically reviewed.
本文简要讨论了非易失性存储器(NVM)技术在宏观趋势方面的演变及其对工业研发环境中建模活动的影响。文中提到了不同NVM技术的一些困难建模问题的例子,最后对当前的需求和未来的挑战进行了批判性的回顾。
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引用次数: 6
Optimization of Si MOS transistors for THz detection using TCAD simulation 利用TCAD仿真优化用于太赫兹探测的Si MOS晶体管
R. Jain, H. Rucker, N. Mohapatra
We present a TCAD simulation study for Silicon MOSFET terahertz detectors. The impact of transistor doping profile optimization on detector performance is analyzed. Time-domain simulations are used to extract the DC response to THz excitations and to explore the impact of different device parasitics. It is shown that the DC response can be improved by (1) minimizing the source-side parasitic resistance (2) maximizing the drain-side parasitic resistance and (3) minimizing the drain-to-body and channel-to-body capacitances.
本文提出了一种硅MOSFET太赫兹探测器的TCAD仿真研究。分析了晶体管掺杂谱优化对探测器性能的影响。时域模拟用于提取太赫兹激励下的直流响应,并探讨不同器件寄生的影响。结果表明,通过(1)最小化源侧寄生电阻(2)最大化漏侧寄生电阻(3)最小化漏侧和通道对体电容,可以改善直流响应。
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引用次数: 3
Optimization of program and erase characteristics of two bit flash memory P-channel cell structure using TCAD 利用TCAD优化二位闪存p通道单元结构的程序和擦除特性
H. Hayashi, V. Axelrad, M. Mochizuki, T. Hayashi, T. Maruyama, Kazuya Suzuki, Y. Nagatomo
This paper presents the optimization of the two bit flash memory P-channel cell structure using efficient 2D write and erase model. Our proposed cell structure stores charge at either Source and/or Drain sides of the gate in an SiN film and is based on method of programming by DAHE and erasing by FN tunneling. It is found that expansion of cell window and the improvement of erase characteristic depend on the optimization of the gate-film overlap under gate of the SiN film.
本文提出了一种利用高效二维写入和擦除模型对两位闪存p通道单元结构进行优化的方法。我们提出的电池结构是基于DAHE编程方法和FN隧道擦除方法,在SiN薄膜的栅极的源侧和/或漏侧存储电荷。研究发现,细胞窗的扩大和擦除特性的改善取决于优化SiN膜栅下的栅膜重叠。
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引用次数: 0
Experimental and theoretical investigation of the ‘apparent’ mobility degradation in Bulk and UTBB-FDSOI devices: A focus on the near-spacer-region resistance 体积和UTBB-FDSOI器件中“明显”迁移率退化的实验和理论研究:关注近间隔区电阻
D. Rideau, F. Monsieur, O. Nier, Y. Niquet, J. Lacord, V. Quenette, G. Mugny, G. Hiblot, G. Gouget, M. Quoirin, L. Silvestri, F. Nallet, C. Tavernier, H. Jaouen
This paper investigates the mobility `apparent' channel length dependency in nanometric devices. Based on a series of current and capacitance measurements, we report clear (VG)-1 dependencies of the access resistance in Bulk but also in FDSOI devices. We show that the μeff-Leff degradation observed at small L can be inferred from this gate-bias dependency. By means of numerical simulation, we show that in the near-spacer-region injection velocity saturation occurs and the spreading resistance exhibits a (VG)-1 dependency. A comparison between Bulk and FDSOI devices clearly shows that even in the absence of LDD-counter-doping (pocket), and channel doping, the near-spacer-region resistance is far to be negligible and can contribute up to ~30% of the total resistance (rTOT =VD/IDS) of a ~22nm device.
本文研究了纳米器件中迁移率“表观”通道长度的依赖性。基于一系列电流和电容测量,我们报告了Bulk器件中以及FDSOI器件中接入电阻的明确(VG)-1依赖性。我们证明了在小L处观察到的μeff-Leff退化可以从这种门偏倚依赖性推断出来。通过数值模拟,我们发现在近间隔区,注入速度出现饱和,扩散阻力呈(VG)-1关系。对Bulk和FDSOI器件的比较清楚地表明,即使在没有ldd反掺杂(口袋)和通道掺杂的情况下,近间隔区电阻也远不可忽略,可以贡献高达~22nm器件总电阻(rTOT =VD/IDS)的~30%。
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引用次数: 6
3D coupled electro-thermal FinFET simulations including the fin shape dependence of the thermal conductivity 三维耦合电热FinFET模拟,包括翅片形状对导热系数的依赖性
L. Wang, A. Brown, M. Nedjalkov, C. Alexander, B. Cheng, C. Millar, A. Asenov
A thermal simulation module, based on the solution of the coupled Heat Flow, Poisson, and Current Continuity Equations, has been developed and implemented in the `atomistic' simulator GARAND to investigate the impact of self heating on FinFET DC operation. A progressive study of coupled electro-thermal simulation for FinFETs is presented. A new approximate formula for the reduced thermal conductivity due to phonon-boundary scattering in the fin is presented which considers both the fin height and the fin width, and is both position and temperature dependent. Simulation results for a SOI FinFET and a bulk FinFET example are compared and analysed.
基于热流、泊松和电流连续性方程的耦合解,在“原子”模拟器GARAND中开发并实现了热模拟模块,以研究自加热对FinFET直流工作的影响。本文提出了一种针对非场效应管的耦合电热模拟方法。提出了一个新的近似公式,该公式考虑了翅片高度和翅片宽度,并且与位置和温度有关。对SOI FinFET和本体FinFET的仿真结果进行了比较和分析。
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引用次数: 23
Single dopant nanowire transistors: Influence of phonon scattering and temperature 单掺杂纳米线晶体管:声子散射和温度的影响
H. Carrillo-Nuñez, M. Bescond, E. Dib, N. Cavassilas, M. Lannoo
A three-dimensional self-consistent non-equilibrium Green's function approach is used to investigate the influence of phonon scattering in single dopant nanowire transistors. Phonon interactions are described within the self-consistent Born approximation in which both acoustic and optical phonons are included. Transport properties are then analyzed in the ballistic and scattering regimes. Ballistic results first confirm the current hysteresis due to two different screening mechanisms of the dopant reported by Mil'nikov et-al [1]. The transition between them is smoothed by the interactions with acoustic phonons which suppress the current hysteresis. Interestingly our findings also show a beneficial impact of the optical phonon interactions. They generate a phonon-assisted resonant tunneling from which can result a higher current than in the ballistic regime. Finally a temperature dependance analysis shows that the hysteresis should be restored at lower temperatures.
采用三维自洽非平衡格林函数方法研究了单掺杂纳米线晶体管中声子散射的影响。声子相互作用是在自洽玻恩近似中描述的,其中声子和光学声子都包括在内。然后分析了在弹道和散射状态下的输运特性。弹道实验结果首先证实了由于milnikov等人报道的掺杂剂的两种不同筛选机制导致的电流滞后。它们之间的过渡通过与声子的相互作用来平滑,声子抑制了电流滞后。有趣的是,我们的发现也显示了光学声子相互作用的有益影响。它们产生声子辅助共振隧穿,由此产生比弹道状态下更高的电流。最后,通过温度依赖性分析表明,在较低的温度下,磁滞可以恢复。
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引用次数: 0
The discrepancy between the uniform and variability aware atomistic TCAD simulations of decananometer bulk MOSFETs and FinFETs 十纳米体mosfet和finfet的均匀和可变性感知原子TCAD模拟之间的差异
F. Adamu-Lema, S. Amoroso, X. Wang, B. Cheng, L. Shifren, R. Aitken, S. Sinha, G. Yeric, A. Asenov
In this paper we discus results from `atomistic' and continuous simulation of decananometer scale bulk MOSFETs and FinFETs. We study the behaviour of important figures of merit including threshold voltage, off current and on current. We provide physical explanation for the origin of the discrepancies between the averaged values obtained from the statistical simulations and the results from the continuous doping simulation. Based on our analysis we clearly demonstrate that there are increasing errors in the doping distributions when device TCAD simulations are calibrated using continuous doping profiles. This questions the use of continuous doping profiles in the routine calibration and TCAD based optimisation of decananometer scale bulk MOSFETs and FinFET.
本文讨论了十纳米尺度体mosfet和finfet的“原子”和连续模拟结果。我们研究了包括阈值电压、关断电流和通断电流在内的重要参数的行为。我们对统计模拟得到的平均值与连续掺杂模拟得到的结果之间的差异给出了物理解释。根据我们的分析,我们清楚地表明,当使用连续掺杂曲线校准器件TCAD模拟时,掺杂分布的误差会增加。这对连续掺杂配置文件在常规校准和基于TCAD的十纳米级体mosfet和FinFET优化中的使用提出了质疑。
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引用次数: 0
期刊
2014 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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