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Reduced Variability in Threshold Switches Using Heterostructures of SiOx and Vertically Aligned MoS2 利用SiOx异质结构和垂直排列的MoS2降低阈值开关的可变性
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-12 DOI: 10.1002/aelm.202500800
Jimin Lee, Rana Walied Ahmad, Sofía Cruces, Dennis Braun, Lukas Völkel, Ke Ran, Joachim Mayer, Stephan Menzel, Alwin Daus, Max C. Lemme
Two-dimensional (2D) materials and their heterostructures offer promising pathways for intercalated ion migration and regulated filament growth in resistive switching (RS) devices, enabled by their van der Waals (vdW) gaps. In vertically aligned 2D materials, this vdW gap-mediated ion transport holds great potential for high-density integration and reliable RS performance for memristor crossbar arrays. However, the fundamental switching mechanisms and their contributions to the RS remain inadequately understood. In this work, we investigate silver (Ag) filament-based threshold switching (TS) in heterostructures comprising vertically aligned 2D molybdenum disulfide (VAMoS2) grown via sulfurization and silicon oxide (SiOx). Compared to SiOx-only devices, the SiOx/VAMoS2 devices exhibit TS with higher on-threshold and hold voltages, each approximately 0.4 V, faster switching times down to 356 ns under a 4 V pulse, and a lower cycle-to-cycle on-current variability of 3.0%. A physics-based, variability-aware model reveals that confined Ag ion migration within the vdW gaps in VAMoS2 forms ultrathin seed filaments, which guide filament growth in the SiOx layer. These findings establish SiOx/VAMoS2 heterostructures as a promising concept for reliable TS in vertical device architectures for emerging memories and neuromorphic computing.
二维(2D)材料及其异质结构为嵌入离子迁移和调节电阻开关(RS)器件中的灯丝生长提供了有希望的途径,这是由它们的范德华(vdW)间隙实现的。在垂直排列的二维材料中,这种vdW间隙介导的离子输运具有很大的潜力,可以用于记忆电阻器交叉棒阵列的高密度集成和可靠的RS性能。然而,基本的转换机制及其对RS的贡献仍然没有得到充分的了解。在这项工作中,我们研究了由硫化和氧化硅(SiOx)生长的垂直排列的二维二硫化钼(VAMoS2)组成的异质结构中银(Ag)丝基阈值开关(TS)。与纯SiOx器件相比,SiOx/VAMoS2器件具有更高的导通阈值和保持电压(每个电压约为0.4 V),更快的开关时间(在4v脉冲下可降至356 ns)和更低的周期间导通电流变异性(3.0%)。基于物理的可变感知模型表明,在VAMoS2的vdW间隙内受限的Ag离子迁移形成了超薄的种子丝,并引导了SiOx层中丝的生长。这些发现确立了SiOx/VAMoS2异质结构作为新兴记忆和神经形态计算垂直器件体系结构中可靠TS的有前途的概念。
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引用次数: 0
Electrically Tunable Room-Temperature Microwave Oscillations in GaN/AlN Triple-Barrier Resonant Tunneling Diodes 氮化镓/氮化铝三势垒共振隧道二极管中电可调谐室温微波振荡
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-11 DOI: 10.1002/aelm.202500419
Jimy Encomendero, Naomi Pieczulewski, Eegene Chung, Vladimir Protasenko, David A. Muller, Debdeep Jena, Huili Grace Xing
Resonant tunneling is a quantum mechanical effect that enables electrons to traverse classically forbidden regions of space. The engineering of this quantum effect in wide-bandgap semiconductors promises important technological benefits as it seamlessly combines ultra-fast electron transport dynamics with superior power-handling capabilities. Here, we report the first realization of highly coherent electronic quantum interference and resonant tunneling injection in wide-bandgap triple-barrier heterostructures. Enabled by the high structural quality of the GaN/AlN triple-barrier active region, we observe multiple resonant tunneling peaks and negative differential conductance at room temperature. The robustness of the inter-well resonant tunneling current is experimentally confirmed via temperature-dependent electronic transport and the generation of electrically tunable microwave oscillations. These results represent a stepping stone in the engineering of intersubband tunneling transport in wide-bandgap III-nitride semiconductors, raising hopes for the realization of intersubband optical amplification and frequency-modulated resonant tunneling oscillators.
共振隧穿是一种量子力学效应,它使电子能够穿越经典的空间禁区。这种量子效应在宽带隙半导体中的工程保证了重要的技术优势,因为它无缝地结合了超高速电子传输动力学和卓越的功率处理能力。在这里,我们报道了高相干电子量子干涉和共振隧道注入在宽带隙三势垒异质结构中的首次实现。由于GaN/AlN三势垒有源区的高结构质量,我们在室温下观察到多个共振隧道峰和负差分电导。通过温度相关的电子输运和电可调谐微波振荡的产生,实验证实了阱间共振隧道电流的鲁棒性。这些结果为宽带隙iii型氮化物半导体子带间隧穿输运工程奠定了基础,为实现子带间光放大和调频谐振隧穿振荡器带来了希望。
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引用次数: 0
Monolithic Co-Integration of Vertical FET and Memristor for 1T1R Cell 1T1R电池垂直场效应管与忆阻器的单片协整
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-11 DOI: 10.1002/aelm.202500742
Fubo Jiao, Weiqi Dang, Gong-Jie Ruan, Jiameng Sun, Xiaoyu Sun, Dehe Kong, Yinzhi Huang, Yuxuan Yuan, Qin Liu, Sicheng Chen, Long Zhao, Cong Wang, Pengfei Wang, Chen Pan, Yajun Fu, Shi-Jun Liang
One-transistor-one-memristor (1T1R) structures are essential for large-scale memristor arrays, as they enable precise read and write operations for individual cells. Currently, most 1T1R designs employ planar field-effect transistors with laterally arranged source, drain, and channel, which limit the achievable array density within a planar layout. Here, we demonstrate a compact, vertically integrated 1T1R cell by stacking a MoS2 vertical field-effect transistor (VFET) with a HfO2 memristor. The VFET channel achieves a footprint of only 10 µm2, which reduces reliance on advanced lithography and enables a reduced 1T1R cell area compared with some reported standard 0.18 µm silicon-based 1T1R implementations. The cell exhibits highly uniform resistive switching, with coefficients of variation (Cv) of only 3.4% in the high-resistance state (HRS) and 6.2% in the low-resistance state (LRS). Furthermore, it achieves quasi-linear conductance modulation across six discrete levels via VFET gate control. This demonstration establishes a scalable, area-efficient platform for 3D in-memory computing and neuromorphic structures.
单晶体管-单忆阻器(1T1R)结构对于大规模忆阻器阵列是必不可少的,因为它们可以对单个单元进行精确的读写操作。目前,大多数1T1R设计采用横向排列源极、漏极和通道的平面场效应晶体管,这限制了在平面布局内可实现的阵列密度。在这里,我们展示了一个紧凑的,垂直集成的1T1R电池,通过堆叠一个MoS2垂直场效应晶体管(VFET)与一个HfO2忆阻器。VFET通道的占地面积仅为10µm2,这减少了对先进光刻技术的依赖,与一些报道的标准0.18µm硅基1T1R实现相比,可以减少1T1R单元面积。该电池表现出高度均匀的电阻开关,在高阻状态(HRS)和低阻状态(LRS)下,变异系数(Cv)仅为3.4%和6.2%。此外,它通过VFET栅极控制实现了六个离散电平的准线性电导调制。该演示为3D内存计算和神经形态结构建立了一个可扩展的,面积高效的平台。
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引用次数: 0
Achieving Directional Oil Manipulation by Open Inducing Structure for Electrowetting Displays 利用开放式感应结构实现电润湿显示器的定向油操纵
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-09 DOI: 10.1002/aelm.202500843
Qilu Li, Yuxin You, Tinghong Yang, Simin Ma, Wenzhen Chen, Yuhuai Yang, Guofu Zhou, Jiawei Lai, Dong Yuan
Oil movement control is crucial for optimizing the optical performance of electrowetting display (EWD) devices. Herein, an open inducing structure (OIS) is introduced, which is directly formed by photoembossing of dielectric layer materials into EWD pixels, aiming to regulate oil dynamics by inducing local electric field inhomogeneity. The OIS is designed with a frustum‐shaped profile, circumventing secondary processing requirements and abrupt aperture ratio changes associated with traditional cylindrical notch structures. Optimal height of OIS is in the range of 10%–30% of the pixel wall height. Utilizing photoembossing combined with predefined mask patterns enables precise control of the structure's position, quantity, and height. Experimental results demonstrate that this OIS effectively reduces the oil aperture voltage, guides directional oil movement, and enhances the device's optoelectronic performance without compromising the aperture ratio. This study provides a versatile and scalable oil control strategy for EWD devices, offering broad device compatibility.
油液运动控制是优化电润湿显示(EWD)器件光学性能的关键。本文介绍了一种开放诱导结构(OIS),该结构是将介质层材料直接光压成edwd像素,通过诱导局部电场不均匀性来调节油液动力学。OIS设计成截锥体形状,避免了二次加工要求和传统圆柱形缺口结构相关的突然孔径比变化。OIS的最佳高度为像素墙高度的10%-30%。利用光压印结合预定义的掩模图案,可以精确控制结构的位置、数量和高度。实验结果表明,该方法在不影响孔径比的前提下,有效地降低了油孔径电压,引导了油的定向运动,提高了器件的光电性能。这项研究为EWD设备提供了一种通用的、可扩展的油控策略,提供了广泛的设备兼容性。
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引用次数: 0
High‐Performance and Energy‐Efficient Sub‐5 nm 2D Double‐Gate MOSFETs Based on Silicon Arsenide Monolayers (Adv. Electron. Mater. 5/2026) 基于砷化硅单层的高性能、高能效亚5nm二维双栅mosfet板牙。5/2026)
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-09 DOI: 10.1002/aelm.70300
Dogukan Hazar Ozbey, Engin Durgun
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引用次数: 0
Concealable and Field-Free Physical Unclonable Function Based on Voltage-Controlled Magnetic Tunnel Junctions 基于压控磁隧道结的可隐藏无场物理不可克隆函数
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-05 DOI: 10.1002/aelm.202500814
Thomas Neuner, Jaimin Kang, Jordan Athas, Christian Duffee, Noraica Davila Melendez, Jordan A. Katine, Pedram Khalili Amiri
Physical unclonable functions (PUFs) leverage intrinsic stochastic variations of physical properties to generate secure cryptographic keys. Magnetic random-access memory (MRAM) is a strong candidate for PUF implementations due to its high density, reliability, and complementary-metal-oxide-semiconductor (CMOS) compatibility. However, MRAM-PUFs reported to date remain vulnerable to adversarial attacks such as side-channel analysis, highlighting the need for effective concealment strategies. Here, a concealable PUF based on an array of 384 nanoscale perpendicular voltage-controlled magnetic tunnel junctions (V-MTJs) is demonstrated. The PUF uses a combination of deterministic and stochastic switching mechanisms for its operation. Variations in the spin transfer torque (STT)-assisted switching voltage generate unique PUF responses, which are concealed through voltage-controlled magnetic anisotropy (VCMA)-induced stochastic switching. Once concealed, it is shown that the PUF responses can be reliably recovered by STT-assisted deterministic switching. The proposed PUF is magnetic-field-free, reliable, and CMOS-compatible, while exhibiting near-ideal entropy (0.98) and inter-Hamming distance (0.508). These results establish a pathway toward secure, scalable MRAM-PUFs for future hardware security applications.
物理不可克隆函数(puf)利用物理属性的固有随机变化来生成安全的加密密钥。磁性随机存取存储器(MRAM)由于其高密度、可靠性和互补金属氧化物半导体(CMOS)兼容性而成为PUF实现的有力候选者。然而,迄今为止报道的mram - puf仍然容易受到对抗性攻击,例如侧信道分析,这突出了对有效隐藏策略的需求。本文展示了一种基于384个纳米级垂直电压控制磁隧道结(V-MTJs)阵列的可隐藏PUF。PUF使用确定性和随机切换机制的组合来运行。自旋传递转矩(STT)辅助开关电压的变化会产生独特的PUF响应,这些响应被压控磁各向异性(VCMA)诱导的随机开关所掩盖。一旦被隐藏,PUF响应可以通过stt辅助的确定性开关可靠地恢复。所提出的PUF无磁场,可靠,cmos兼容,同时具有接近理想的熵(0.98)和汉明间距离(0.508)。这些结果为未来的硬件安全应用建立了通往安全、可扩展的mram - puf的途径。
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引用次数: 0
Performance Enhancement in Hafnium Oxide Through Homogeneous and Heterogeneous co-Doping Strategies 通过均相和非均相共掺杂策略增强氧化铪的性能
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-05 DOI: 10.1002/aelm.202500764
Shouzhuo Yang, David Lehninger, Markus Neuber, Amir Pourjafar, Yannick Raffel, Ayse Sünbül, Anant Rastogi, Peter Reinig, Thomas Kämpfe, Konrad Seidel, Maximilian Lederer
Fluorite structure ferroelectrics, especially hafnium oxide, are widely investigated for their application in non-volatile memories, sensors, actuators, RF devices, and energy harvesters. Due to the metastable nature of the ferroelectric phase in these materials, dopants, and process parameters need to be optimized for its stabilization. Here, we present clear evidence of how dopants affect the properties in this material system and solutions to achieve improved reliability, desired crystallization behavior, and polarization hysteresis shape/position through co-doping. Finally, the benefits of co-doping in a variety of application fields are demonstrated. This study provides a comprehensive ‘co-doping toolkit’ for tailoring fluorite-structure ferroelectrics to meet specific application requirements.
萤石结构铁电体,特别是氧化铪,因其在非易失性存储器、传感器、致动器、射频器件和能量采集器中的应用而受到广泛的研究。由于铁电相在这些材料中的亚稳性质,需要优化掺杂剂和工艺参数以使其稳定。在这里,我们提供了明确的证据,证明掺杂剂如何影响该材料体系和解决方案的性能,从而通过共掺杂提高可靠性、期望的结晶行为和极化滞后形状/位置。最后,展示了共掺杂在各种应用领域的优势。这项研究提供了一个全面的“共掺杂工具包”,用于定制萤石结构铁电体,以满足特定的应用要求。
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引用次数: 0
Twisted MoS2 Bilayers as Functional Elements in Memtransistors: Hysteresis, Optical Signatures, and Photocurrent Kinetics 扭曲二硫化钼双分子层作为mem晶体管的功能元件:迟滞、光学特征和光电流动力学
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-03 DOI: 10.1002/aelm.202500716
Vladislav Kurtash, Ilya Eliseyev, Valery Davydov, Heiko O. Jacobs, Jörg Pezoldt
Layered 2D materials are considered as promising for memristive applications due to their ultimate vertical scalability compared to conventional semiconductor films and pronounced hysteresis properties. Bias-resolved Raman and Photoluminescence mapping is used to quantify strain from phonon shifts and carrier density from the exciton-trion balance while devices operate under electrical stress. Monolayer channels display strong gate control of carrier concentration and low hysteresis. In contrast, bilayer regions exhibit tensile strain with weaker carrier modulation. Twisted bilayers, especially at grain boundaries with monolayer domains, develop compressive strain and a widened excitonic gap that establishes a space-charge region at the <span data-altimg="/cms/asset/638e9868-3a65-403d-bb04-cf2e0920333f/aelm70317-math-0001.png"></span><mjx-container ctxtmenu_counter="605" ctxtmenu_oldtabindex="1" jax="CHTML" role="application" sre-explorer- style="font-size: 103%; position: relative;" tabindex="0"><mjx-math aria-hidden="true" location="graphic/aelm70317-math-0001.png"><mjx-semantics><mjx-msup data-semantic-children="0,1" data-semantic- data-semantic-role="unknown" data-semantic-speech="1 upper L slash 2 upper L Superscript t w i s t" data-semantic-type="superscript"><mjx-mtext data-semantic-annotation="clearspeak:unit" data-semantic-font="normal" data-semantic- data-semantic-parent="2" data-semantic-role="unknown" data-semantic-type="text"><mjx-c></mjx-c><mjx-c></mjx-c><mjx-c></mjx-c><mjx-c></mjx-c><mjx-c></mjx-c></mjx-mtext><mjx-script style="vertical-align: 0.477em;"><mjx-mi data-semantic-font="normal" data-semantic- data-semantic-parent="2" data-semantic-role="unknown" data-semantic-type="identifier" size="s"><mjx-c></mjx-c><mjx-c></mjx-c><mjx-c></mjx-c><mjx-c></mjx-c><mjx-c></mjx-c></mjx-mi></mjx-script></mjx-msup></mjx-semantics></mjx-math><mjx-assistive-mml display="inline" unselectable="on"><math altimg="urn:x-wiley:2199160X:media:aelm70317:aelm70317-math-0001" display="inline" location="graphic/aelm70317-math-0001.png" xmlns="http://www.w3.org/1998/Math/MathML"><semantics><msup data-semantic-="" data-semantic-children="0,1" data-semantic-role="unknown" data-semantic-speech="1 upper L slash 2 upper L Superscript t w i s t" data-semantic-type="superscript"><mtext data-semantic-="" data-semantic-annotation="clearspeak:unit" data-semantic-font="normal" data-semantic-parent="2" data-semantic-role="unknown" data-semantic-type="text">1L/2L</mtext><mi data-semantic-="" data-semantic-font="normal" data-semantic-parent="2" data-semantic-role="unknown" data-semantic-type="identifier">twist</mi></msup>$text{1L/2L}^{mathrm{twist}}$</annotation></semantics></math></mjx-assistive-mml></mjx-container> interface. This interfacial space charge correlates with enhanced electrical hysteresis and with a distinct optoelectronic signature: photocurrent follows <span data-altimg="/cms/asset/475f0f24-babb-4f2c-b52a-aadf6ca5913d/aelm70317-math-0002.png"></span><mjx
与传统半导体薄膜相比,层状二维材料具有垂直可扩展性和明显的迟滞特性,因此被认为是忆阻应用的有前途的材料。偏压分辨拉曼和光致发光映射用于量化器件在电应力下工作时来自声子位移的应变和来自激子-三离子平衡的载流子密度。单层通道具有很强的载流子浓度门控性和低迟滞性。相比之下,双层区域表现出较弱载流子调制的拉伸应变。扭曲双层,特别是在具有单层畴的晶界处,会产生压缩应变和扩大的激子间隙,从而在1L/2Ltwist$text{1L/2L}^{ maththrm {twist}}$界面处形成空间电荷区。这种界面空间电荷与增强的电滞后和明显的光电特征相关:光电流遵循Iph∝P1.53$I_{ mathm {ph}}propto P^{1.53}$,在扭曲域中具有最大的超线性指数,在常规双层中具有亚线性响应,在单层中具有中间行为。结果提供了堆叠无序、局部应变、电荷再分配和器件记忆效应之间的直接联系,并提供了一个实用的偏置解决拉曼和光致发光映射协议和分析工作流,以映射二维场效应管中的应变和掺杂。这些见解能够合理控制迟滞,以实现可靠的逻辑和工程memtransistor的功能。
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引用次数: 0
In Situ Electrostatic Charge-Assisted Wetting for Enhancing Interfacial Strength of Printed Electronics 提高印刷电子元件界面强度的原位静电辅助润湿
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-02 DOI: 10.1002/aelm.202500700
Ao Li, Zhenxiang Xiong, Wenao Ye, Dejin Yan, Xiaoming Chen, Chenglin Yi
The interfacial properties between substrate and ink play a crucial role in the performance of aerosol jet (AJ) printed electronics. This study proposes a simple and effective in situ electrostatic-assisted wetting method, which controls the deposition of negative charges onto the substrate to adjust wettability and optimize interfacial strength. The electrostatic charging-assisted wetting device is integrated into the AJ printing system to achieve in situ negative charge deposition. The results demonstrate significantly improved ink wettability on a negatively charged substrate. The interfacial shear strength (IFSS) of electrostatically treated carbon fiber reinforced polymer and glass fiber reinforced polymer with epoxy acrylate (EA) ink increases by 85.6% and 51.7%. Concurrently, enhancements in IFSS of 19.8% and 15.3% were achieved for the glass/ silver nanoparticle (AgNP) ink and EA ink/AgNP ink, respectively. Molecular dynamics (MD) simulations of EA ink wetting on SiO2 substrate confirm that interfacial enhancement primarily originates from ink penetration into the surface's grooves via electrostatic attraction, establishing a conformal interface. The proposed electrostatic-assisted wetting method is a facile and cost-effective strategy providing effective interfacial enhancement for AJ printed electronics.
基材与油墨之间的界面特性对气溶胶喷射印刷电子产品的性能起着至关重要的作用。本研究提出了一种简单有效的原位静电辅助润湿方法,通过控制负电荷在衬底上的沉积来调节润湿性,优化界面强度。将静电充电辅助润湿装置集成到AJ打印系统中,实现原位负电荷沉积。结果表明,在带负电荷的衬底上,油墨的润湿性显著提高。环氧丙烯酸酯(EA)油墨对碳纤维增强聚合物和玻璃纤维增强聚合物的界面抗剪强度分别提高了85.6%和51.7%。同时,玻璃/银纳米颗粒(AgNP)油墨和EA油墨/AgNP油墨的IFSS分别提高了19.8%和15.3%。EA油墨在SiO2基板上润湿的分子动力学(MD)模拟证实,界面增强主要是由于油墨通过静电吸引渗透到表面凹槽中,建立了一个保形界面。提出的静电辅助润湿方法是一种简便、经济的策略,为AJ印刷电子产品提供了有效的界面增强。
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引用次数: 0
Improved Molybdenum Dioxide Atomic Layer Deposition Process by Introducing Pre-Reduction Agent 引入预还原剂改进二氧化钼原子层沉积工艺
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-02 DOI: 10.1002/aelm.202500637
Soo Min Yoo, Seungwoo Lee, Chaeyeong Hwang, Woojin Jeon
In this study, the molybdenum dioxide (MoO2) as a promising electrode material for next-generation semiconductor memory devices is investigated. A pre-reduction agent is introduced into the MoO2 atomic layer deposition (ALD) process to prevent surface morphology degradation occurring during crystallization. The chemical changes in MoO2 thin films upon the application of the pre-reduction agent are analyzed, thereby elucidating the role of the pre-reduction agent in MoO2 ALD. With the use of the pre-reduction agent, the Mo6+ corresponding to molybdenum trioxide (MoO3) decreased, while that of Mo5+ corresponding to MoOx (2 < x < 3) increases in the as-deposited state. Accordingly, the MoOx thin film is partially reduced in the as-deposited state, suppressing surface morphology degradation during the annealing process. The improved surface morphology of MoO2, MoO2/TiO2 thin film, enhances the electrical performance of MoO2/TiO2-based metal-insulator-metal (MIM) capacitors. The insights into the role and mechanism of the pre-reduction agent contribute to the development of optimized MoO2/TiO2-based MIM capacitors, providing significant progress toward addressing the challenges and enhancing the performance of next-generation semiconductor memory devices.
本文研究了二氧化钼(MoO2)作为下一代半导体存储器件极材料的应用前景。在MoO2原子层沉积(ALD)过程中引入预还原剂以防止结晶过程中表面形貌的退化。分析了预还原剂应用后MoO2薄膜的化学变化,从而阐明了预还原剂在MoO2 ALD中的作用。随着预还原剂的使用,在沉积态下,三氧化钼(MoO3)对应的Mo6+减少,而MoOx (2 < x < 3)对应的Mo5+增加。因此,MoOx薄膜在沉积状态下部分还原,抑制了退火过程中表面形貌的退化。MoO2/TiO2薄膜表面形貌的改善,提高了MoO2/TiO2基金属-绝缘体-金属(MIM)电容器的电性能。对预还原剂的作用和机制的深入了解有助于优化MoO2/ tio2基MIM电容器的开发,为解决下一代半导体存储器件的挑战和提高性能提供了重大进展。
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引用次数: 0
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Advanced Electronic Materials
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