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Wafer-Scale Bi2O2Se-on-Insulator Thin Films for Integrated Electronics 集成电子用晶圆级Bi2O2Se-on-Insulator薄膜
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-23 DOI: 10.1002/aelm.202500829
Xi Chen, Penghao Lv, Xintao Yin, Guizhou Xu, Feng Xu
Quasi-2D semiconducting Bi2O2Se has emerged as a promising candidate for beyond-silicon electronics due to its outstanding transport performances. However, large-area growth of high-quality Bi2O2Se films, which is a critical prerequisite for batch fabrication of electronic devices, remains challenging. Here, we report that wafer-scale growth of Bi2O2Se thin films with controllable thicknesses can be achieved on 2-inch insulating sapphire substrates via quasi-van der Waals epitaxy using magnetron sputtering. The obtained films show good spatial uniformity and crystallinity across the wafer, enabling massive fabrication of top-gated Bi2O2Se/HfO2 thin film transistors (TFTs) with reliable n-type enhancement-mode performances, including positive threshold voltages of ∼1.95 V, field-effect mobilities of ∼7.15 cm2 V−1 s−1, high on/off current ratios of ∼105, and subthreshold swings of 1.4 V/dec. The integrated inverter, NAND, and NOR logic gates show desired functionalities with high voltage gains of ∼24.7. This study represents a significant step toward the real application of Bi2O2Se in TFT display technology and complex integrated electronics in a low-cost, scalable, and industry-compatible manner.
准二维半导体Bi2O2Se由于其出色的传输性能而成为超硅电子领域的有前途的候选者。然而,高质量Bi2O2Se薄膜的大面积生长仍然具有挑战性,这是批量制造电子器件的关键先决条件。在这里,我们报道了在2英寸的绝缘蓝宝石衬底上,通过磁控溅射的准范德华外延,可以实现具有可控厚度的Bi2O2Se薄膜的晶圆级生长。所获得的薄膜在晶圆上表现出良好的空间均匀性和结晶度,使大规模制造具有可靠n型增强模式性能的顶门控Bi2O2Se/HfO2薄膜晶体管(TFTs)成为可能,包括正阈值电压为~ 1.95 V,场效应迁移率为~ 7.15 cm2 V−1 s−1,高开/关电流比为~ 105,亚阈值振荡为1.4 V/dec。集成的逆变器、NAND和NOR逻辑门显示出所需的功能,具有高达24.7的高电压增益。这项研究代表了Bi2O2Se在TFT显示技术和复杂集成电子中以低成本、可扩展和工业兼容的方式真正应用的重要一步。
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引用次数: 0
High Mobility (>200 cm2 V−1 s−1) Transparent Top Gate IGZO TFTs with Oxidized Metal Gate Insulator for Enhanced Conductivity 高迁移率(>200 cm2 V−1 s−1)透明顶栅IGZO tft与氧化金属栅绝缘子增强电导率
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-23 DOI: 10.1002/aelm.202500696
Hyeonjeong Sun, Yeoeun Yun, Kyubin Hwang, Jiyoung Bang, Seungmin Choi, Seungjae Lee, Taeyang Kim, Suhwon Choi, Eunsuk Choi, Jae Kyeong Jeong, Seung-Beck Lee
High-mobility (>200 cm2 V−1 s−1) transparent top gate amorphous InGaZnO (a-IGZO) thin-film transistors (TFTs) are demonstrated using an oxidized Nb capping layer. The Nb capping layer promotes oxygen out-diffusion from the a-IGZO channel, which in turn generates oxygen vacancies that serve as shallow donors. The partial capping structure selectively modulates carrier density, where the oxygen vacancy-rich, low-resistance region strengthens percolation conduction to enhance mobility, while the uncapped region acts as in-channel potential barriers to maintain ultra-low off-current. The top gate architecture with an Al2O3/NbOx gate stack strengthens electrostatic control and suppresses drain-induced barrier lowering (λDIBL = 6 mV V−1). The resulting device achieves a maximum field-effect mobility of 202 cm2 V−1 s−1, a near-zero threshold voltage, and stable operation under bias stress, while maintaining optical transmittance above 87% in the visible range. This approach provides a scalable and process compatible route for integrating high-mobility oxide thin-film transistors into transparent and low-power display backplanes, enabling the potential replacement of low-temperature polycrystalline silicon (LTPS) driving transistors in high-refresh-rate, high-brightness active-matrix organic light-emitting diode (AMOLED) applications.
采用氧化Nb封盖层证明了高迁移率(>200 cm2 V−1 s−1)透明顶栅非晶InGaZnO (a-IGZO)薄膜晶体管(TFTs)。Nb盖层促进氧从a-IGZO通道向外扩散,从而产生氧空位作为浅供体。部分封盖结构选择性地调节载流子密度,其中富氧空位、低电阻区域加强渗透传导,增强迁移率,而未封盖区域作为通道内电位屏障,保持超低的断开电流。采用Al2O3/NbOx栅极堆叠的顶栅极结构加强了静电控制,抑制了漏极引起的势垒降低(λDIBL = 6 mV V−1)。该器件的最大场效应迁移率为202 cm2 V−1 s−1,阈值电压接近于零,并且在偏置应力下稳定工作,同时在可见光范围内保持87%以上的透光率。该方法为将高迁移率氧化物薄膜晶体管集成到透明和低功耗显示背板中提供了可扩展和工艺兼容的途径,使低温多晶硅(LTPS)驱动晶体管在高刷新率,高亮度有源矩阵有机发光二极管(AMOLED)应用中的潜在替代品成为可能。
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引用次数: 0
3D‐Printed Supramolecular Eutectogels—Tunable Conductive Wires for Soft Electric Circuits 用于软电路的3D打印超分子共凝胶可调导线
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-19 DOI: 10.1002/aelm.202500884
Tajmon T. Vadukoote, Nathaniel Craft, Alyssa‐Jennifer Avestro, David K. Smith
Supramolecular eutectogels based on 1,3:2,4‐dibenzylidenesorbitol (DBS) derivatives as low‐molecular‐weight gelators (LMWGs) are 3D‐printed via wet‐spinning. Solubility and assembly kinetics play key roles in LMWG printability in a deep eutectic solvent (DES), a process facilitated by the addition of water. On drying, the printed gels lose some water content, reaching a stable composition for optimal, reproducible electronic properties. The printed supramolecular eutectogels have high conductivities of ca. 5.0 mS/cm, enabling them to be used as soft conductive wires in simple electronic circuits. Furthermore, depending on LMWG structure, they can be selectively reacted with Au(III) and loaded with gold nanoparticles, demonstrating the tunability of this supramolecular approach at the molecular scale. The ability to print functional conductive gels with curved and flexible structures indicates the potential of LMWG eutectogels in the fabrication of soft electronic circuitry with future applications in bionanoelectronics.
以1,3:2,4 -二苄基醚轨道醇(DBS)衍生物为基础的超分子共凝胶作为低分子量凝胶(LMWGs),通过湿纺丝进行3D打印。溶解度和组装动力学对LMWG在深共晶溶剂(DES)中的可打印性起关键作用,这一过程由水的加入促进。在干燥时,打印的凝胶会失去一些水分,从而达到稳定的组成,从而获得最佳的、可重复的电子性能。印刷的超分子共凝胶具有约5.0 mS/cm的高电导率,使其能够用作简单电子电路中的软导线。此外,根据LMWG的结构,它们可以选择性地与Au(III)反应并装载金纳米颗粒,证明了这种超分子方法在分子尺度上的可调性。打印具有弯曲和柔性结构的功能导电凝胶的能力表明了LMWG共凝胶在制造软电子电路方面的潜力,并具有未来在生物纳米电子学中的应用。
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引用次数: 0
Room‐Temperature Antiferroelectricity in Titanite (CaTiSiO 5 ) Thin Films 二氧化钛(catisio5)薄膜的室温反铁电性
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-19 DOI: 10.1002/aelm.202500546
Weirong Yang, Taro Kuwano, Hiroki Taniguchi, Shintaro Yasui
Titanite (CaTiSiO 5 ) has long been considered a promising lead–free antiferroelectric material characterized by the antiparallel displacement of Ti atoms within adjacent 1D oxygen octahedral chains. However, this antiferroelectricity has not been experimentally confirmed in recent decades. In this study, titanite thin films were fabricated on (111)Pt/(100)Si substrates using pulsed laser deposition, achieving applied electric fields up to ∼1200 kV/cm. The antiferroelectric response of the deposited titanite was confirmed through the observation of a double hysteresis loop during polarization–electric field measurements performed at room temperature. Notably, increasing the electric field induced the formation of a ferroelectric phase with a low coercive field (∼20 kV/cm), which was not observed in the bulk titanite. Measurement of the dielectric properties between room temperature and 600 K revealed a Curie temperature of ∼470 K, as indicated by a permittivity anomaly. However, the antiferroelectric response disappeared at ∼440 K, which is below the phase transition temperature. In addition, the titanite thin films demonstrated a modest recoverable energy density (0.3 J/cm 3 at ∼200 kV/cm) high energy storage efficiency (∼89% at ∼200 kV/cm).
钛矿(catisio5)一直被认为是一种很有前途的无铅反铁电材料,其特点是钛原子在相邻的一维氧八面体链内反平行位移。然而,近几十年来,这种反铁电性还没有得到实验证实。在这项研究中,利用脉冲激光沉积技术在(111)Pt/(100)Si衬底上制备了钛矿薄膜,实现了高达1200 kV/cm的电场。通过在室温下进行的极化电场测量中观察到的双磁滞回线,证实了沉积钛矿的反铁电响应。值得注意的是,增加电场诱导形成具有低矫顽力场(~ 20 kV/cm)的铁电相,这在大块钛中没有观察到。在室温到600 K之间的介电特性测量显示居里温度为~ 470 K,这是由介电常数异常所表明的。然而,反铁电响应在低于相变温度的~ 440 K时消失。此外,钛矿薄膜表现出适度的可回收能量密度(在~ 200 kV/cm时为0.3 J/ cm3)和高能量存储效率(在~ 200 kV/cm时为~ 89%)。
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引用次数: 0
All-Solution-Processed Perovskite Light-Emitting Transistors Enabled by a Fully Organic Architecture 全有机结构实现全溶液处理钙钛矿发光晶体管
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-19 DOI: 10.1002/aelm.202500703
Kelment Zahoaliaj, Alice Fappani, Francesca Pallini, Valentina Bellotti, Nicolò Quaresima, Margherita Bolognesi, Mario Prosa, Luca Beverina, Stefano Toffanin
CsPbBr3 perovskite nanocrystals (Pe-NCs) are promising solution-processable emitters for light-emitting devices due to their high brightness, color purity, and photoluminescence quantum yield. However, their integration into more advanced device architectures such as organic light-emitting transistors (OLETs) remains limited by the lack of fully solution-processable platforms that support uniform and compact Pe-NCs emissive layers (EMLs). In this work, we report fully solution-processed Pe-NCs-based LETs (Pe-LETs) using CsPbBr3 nanocrystals as the emitter. The realization of such a device is enabled by the development of a fully organic LET platform that incorporates: (i) a tailored bilayer gate dielectric of polyvinyl alcohol (PVA) and CyTOP, (ii) a solvent-resistant p-type polymer semiconductor, poly[2,5-(2-octyldodecyl)-3,6-diketopyrrolopyrrole-alt-5,5-(2,5-di(thien-2yl)thieno[3,2-b]thiophene)] (DPP-DTT), and (iii) a nanocomposite EML of Pe-NCs dispersed in a poly(9-vinylcarbazole) and 1,3-bis[2-(4-tert-butylphenyl)1,3,4-oxadiazo-5-yl]benzene (PVK:OXD-7) matrix. Morphological and photophysical characterization, including confocal laser scanning microscopy, drives the optimization of solvent and processing conditions for uniform film formation. Benchmark device substructures are also used to fine-tune the organic platform for effective EML integration. The resulting Pe-LETs exhibit a narrow emission at 509 nm (full width at half maximum, FWHM = 19.2 nm), demonstrating excellent color purity suitable for displays and sensing. A maximum external quantum efficiency of 4.17 × 103 % is achieved, comparable to state-of-the-art values for inorganic-based LETs.
CsPbBr3钙钛矿纳米晶体(Pe-NCs)具有高亮度、高色纯度和光致发光量子产率等优点,是一种很有前途的溶液可加工发光材料。然而,由于缺乏支持统一和紧凑的pe - nc发射层(eml)的完全解决方案可处理平台,它们与更先进的器件架构(如有机发光晶体管(olet))的集成仍然受到限制。在这项工作中,我们报告了使用CsPbBr3纳米晶体作为发射器的完全溶液处理的Pe-NCs-based let (Pe-LETs)。这种装置的实现是通过开发一个完全有机的LET平台实现的,该平台包含:(i)聚乙烯醇(PVA)和CyTOP的自定义双层栅极电介质,(ii)耐溶剂p型聚合物半导体,聚[2,5-(2-辛基十二烷基)-3,6-二酮基吡咯-醛-5,5-(2,5-二(噻吩-2)基)噻吩[3,2-b]噻吩](DPP-DTT),以及(iii)分散在聚(9-乙烯基carbazole)和1,3-双[2-(4-叔丁基苯基)1,3,4-恶二氮唑-5-基]苯(PVK:OXD-7)基体中的pe - nc纳米复合EML。形态学和光物理表征,包括共聚焦激光扫描显微镜,驱动溶剂和均匀薄膜形成的加工条件的优化。基准器件子结构也用于微调有机平台,以实现有效的EML集成。所得到的pe - let在509 nm处表现出窄发射(全宽度为最大值的一半,FWHM = 19.2 nm),具有适合显示和传感的优异颜色纯度。最大外量子效率为4.17 × 10−3%,与无机let的最新值相当。
{"title":"All-Solution-Processed Perovskite Light-Emitting Transistors Enabled by a Fully Organic Architecture","authors":"Kelment Zahoaliaj, Alice Fappani, Francesca Pallini, Valentina Bellotti, Nicolò Quaresima, Margherita Bolognesi, Mario Prosa, Luca Beverina, Stefano Toffanin","doi":"10.1002/aelm.202500703","DOIUrl":"https://doi.org/10.1002/aelm.202500703","url":null,"abstract":"CsPbBr<sub>3</sub> perovskite nanocrystals (Pe-NCs) are promising solution-processable emitters for light-emitting devices due to their high brightness, color purity, and photoluminescence quantum yield. However, their integration into more advanced device architectures such as organic light-emitting transistors (OLETs) remains limited by the lack of fully solution-processable platforms that support uniform and compact Pe-NCs emissive layers (EMLs). In this work, we report fully solution-processed Pe-NCs-based LETs (Pe-LETs) using CsPbBr<sub>3</sub> nanocrystals as the emitter. The realization of such a device is enabled by the development of a fully organic LET platform that incorporates: (i) a tailored bilayer gate dielectric of polyvinyl alcohol (PVA) and CyTOP, (ii) a solvent-resistant p-type polymer semiconductor, poly[2,5-(2-octyldodecyl)-3,6-diketopyrrolopyrrole-alt-5,5-(2,5-di(thien-2yl)thieno[3,2-b]thiophene)] (DPP-DTT), and (iii) a nanocomposite EML of Pe-NCs dispersed in a poly(9-vinylcarbazole) and 1,3-bis[2-(4-tert-butylphenyl)1,3,4-oxadiazo-5-yl]benzene (PVK:OXD-7) matrix. Morphological and photophysical characterization, including confocal laser scanning microscopy, drives the optimization of solvent and processing conditions for uniform film formation. Benchmark device substructures are also used to fine-tune the organic platform for effective EML integration. The resulting Pe-LETs exhibit a narrow emission at 509 nm (full width at half maximum, FWHM = 19.2 nm), demonstrating excellent color purity suitable for displays and sensing. A maximum external quantum efficiency of 4.17 × 10<sup>−</sup><sup>3</sup> % is achieved, comparable to state-of-the-art values for inorganic-based LETs.","PeriodicalId":110,"journal":{"name":"Advanced Electronic Materials","volume":"11 1","pages":""},"PeriodicalIF":6.2,"publicationDate":"2026-03-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"147489668","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Solution Processed Polymer Source‐Gated Transistors for Zero‐Power Photosensing 用于零功率光敏的溶液处理聚合物源门控晶体管
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-19 DOI: 10.1002/aelm.202500813
Eva Bestelink, Ahmed Wafic, Mattia Scagliotti, Dimitar Kutsarov, Imalka Jayawardena, Matteo Rapisarda, Radu A. Sporea
This study demonstrates the first solution‐processed bulk heterojunction organic source‐gated transistors (OSGTs) and photo‐OSGTs fabricated using a poly(N‐alkyl diketopyrrolo‐pyrrole dithienylthieno[3,2‐b]thiophene):[6,6]‐phenyl‐C61‐butyric acid methylester (DPP‐DTT: PCBM) blend. Copper‐electrode OSGTs fabricated alongside reference transistors with Ag contacts are investigated via electrical and optical measurements and further analysed using numerical simulations. OSGTs show uniform enhancement‐mode operation with a nominal threshold voltage of −17.4 V, deep off‐state at zero gate‐source voltage (tens of pA), channel length‐independent current in the on‐state, and low voltage saturation (saturation coefficient γ = 0.22). Cu‐contact photo‐OSGTs achieve a photo‐to‐dark current ratio (PDCR) over 3400 at zero gate‐source voltage 0 V GS , vs. V GS ∼20 V for Ag devices. Simulations show that the primary causes of current nonuniformity and occasional loss of contact control are the inhomogeneity of the source contact barrier and/or thickness of the active layer, and not the channel length. Design optimizations should consider spin‐coating thickness variability, possible Cu‐active interface effects, and leakage induced by the high electric fields present at the source edge. Performance should improve further when channel length is kept short, and contact interlayers or dual work function electrodes are adopted.
本研究展示了第一个溶液处理的体异质结有机源门控晶体管(OSGTs)和光电OSGTs,使用聚(N -烷基二酮基吡罗二噻基噻吩[3,2 - b]):[6,6] -苯基- C61 -丁酸甲基酯(DPP - DTT: PCBM)共混物制备。通过电学和光学测量,研究了与银触点参考晶体管一起制造的铜电极osgs,并使用数值模拟进行了进一步分析。osgt表现出均匀的增强模式工作,标称阈值电压为- 17.4 V,闸源电压为零(数十pA)时的深关闭状态,导通状态下的沟道长度无关电流,低电压饱和(饱和系数γ = 0.22)。铜触点光- osgt在零栅极源电压0 V GS下实现光-暗电流比(PDCR)超过3400,而Ag器件的电压为V GS ~ 20 V。仿真结果表明,电流不均匀性和偶尔失去接触控制的主要原因是源接触势垒和/或有源层厚度的不均匀性,而不是通道长度。设计优化应考虑自旋涂层厚度的可变性,可能的Cu活性界面效应,以及由源边缘存在的高电场引起的泄漏。如果保持通道长度较短,采用接触中间层或双功功能电极,性能将进一步提高。
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引用次数: 0
Synchronization of Analog Neuron Circuits With Digital Memristive Synapses: An Hybrid Approach 模拟神经元电路与数字记忆突触的同步:一种混合方法
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-19 DOI: 10.1002/aelm.202500830
Lamberto Carnazza, Francesco Maria Esposito, Carlo Famoso, Arturo Buscarino
The realization of hybrid (analog/digital) circuits mimicking the nature of interconnected neural units represents a step toward control engineering practical applications of neural networks. In fact, while analog neurons provide complete flexibility and ensure robustness to uncertainty and noise, the implementation of a digital coupling interface guarantees the full reconfigurability of interconnection networks. The hybrid implementation, therefore, ensures control actions reliable in practical scenarios, ranging from robotics to process control. In this paper, the synchronized behavior of a pair of analog circuits designed from the Izhikevich neuron model, coupled through a digitally implemented memristive synapse, is discussed from numerical and experimental perspectives. The results pave the way for the implementation of self-organizing and adaptive control strategies.
模拟互联神经单元性质的混合(模拟/数字)电路的实现代表了神经网络在控制工程实际应用中的一步。事实上,虽然模拟神经元提供了完全的灵活性,并确保对不确定性和噪声的鲁棒性,但数字耦合接口的实现保证了互连网络的完全可重构性。因此,混合实现确保了从机器人到过程控制等实际场景中控制动作的可靠性。本文从数值和实验的角度讨论了由Izhikevich神经元模型设计的一对模拟电路通过数字实现的记忆突触耦合的同步行为。研究结果为自组织和自适应控制策略的实现铺平了道路。
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引用次数: 0
Fundamental Challenges, Physical Implementations, and Integration Strategies for Ising Machines in Large-Scale Optimization Tasks 大规模优化任务中伊辛机器的基本挑战、物理实现和集成策略
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-17 DOI: 10.1002/aelm.202500682
Hyunjun Lee, Joon Pyo Kim, Sanghyeon Kim
Ising machines are specialized hardware solvers designed to solve computationally hard combinatorial optimization problems by finding ground states of the Ising model. As von Neumann architecture encounters fundamental bottlenecks in data movement, parallelism, and energy consumption, diverse physical implementations of Ising machines emerge as promising alternatives. This review comprehensively examines state-of-the-art Ising machine implementations across five major categories: digital complementary metal-oxide-semiconductor (CMOS) platforms employing various annealing strategies, analog CMOS architecture based on physical interactions, emerging device-based systems using coupled oscillators and probabilistic bits, coherent Ising machines leveraging photonic processes, and quantum approaches including both annealing and gate-based algorithms. Each platform provides unique advantages rooted in its underlying physics, yet all face core bottlenecks in scaling and connectivity. These limitations exacerbate issues in power efficiency, time-to-solution, stochasticity, and reliability. Building on this cross-platform analysis, monolithic three-dimensional (M3D) integration is introduced as an emerging design paradigm to overcome planar constraints through vertical functional partitioning. This approach outlines how M3D integration could relax scaling and connectivity bottlenecks and may eventually enable Ising machines to reach the scale and complexity required for large-scale real-world optimization problems.
伊辛机是专门的硬件求解器,旨在通过寻找伊辛模型的基态来解决计算困难的组合优化问题。由于冯·诺伊曼架构在数据移动、并行性和能耗方面遇到了基本瓶颈,各种物理实现的Ising机器成为了有希望的替代方案。本综述全面考察了五大类别中最先进的Ising机器实现:采用各种退火策略的数字互补金属氧化物半导体(CMOS)平台,基于物理相互作用的模拟CMOS架构,使用耦合振荡器和概率比特的新兴器件系统,利用光子过程的相干Ising机器,以及包括退火和基于门的算法在内的量子方法。每个平台都提供植根于其底层物理的独特优势,但都面临着扩展和连接方面的核心瓶颈。这些限制加剧了功率效率、解决时间、随机性和可靠性方面的问题。基于这种跨平台分析,单片三维(M3D)集成作为一种新兴的设计范例被引入,通过垂直功能划分来克服平面限制。这种方法概述了M3D集成如何缓解扩展和连接瓶颈,并可能最终使Ising机器达到大规模现实世界优化问题所需的规模和复杂性。
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引用次数: 0
Epitaxial Growth of p ‐Type β ‐Ga 2 O 3 Thin Films and Demonstration of a p–n Diode p型β - ga2o3薄膜的外延生长和p - n二极管的演示
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-14 DOI: 10.1002/aelm.202500719
Chuang Zhang, Hanzhao Song, Chee Keong Tan
β ‐Ga 2 O 3 , with its ultrawide bandgap (∼4.9 eV) and well‐established n‐type conductivity, is a promising semiconductor for next‐generation power electronics. However, the realization of stable p ‐type doping remains a fundamental challenge owing to the deep‐acceptor levels of conventional dopants. Here, a Te–Mg co‐doping strategy is developed via metal–organic chemical vapor deposition (MOCVD) to overcome this limitation. The co‐doped films exhibit a room‐temperature resistivity of 32.4 Ω·cm, a Hall hole concentration of 1.78 × 10 1 7 cm 3 , and mobilities up to 5.29 cm 2 V 1 s 1 at lower carrier concentrations (5.72 × 10 14 cm 3 ). A preliminary p–n diode is successfully demonstrated. Density functional theory (DFT) calculations reveal that Te incorporation introduces an intermediate band near the valence band maximum (VBM), effectively reducing the Mg acceptor ionization energy. Spectroscopic analyses further confirm VBM elevation through Te–Ga orbital hybridization and a Fermi‐level shift toward the valence band, consistent with p‐type behavior. These results establish a viable route for achieving p ‐type β ‐Ga 2 O 3 homoepitaxy and lay the groundwork for future optimization toward sub‐1 Ω·cm resistivity and a deeper understanding of the Te–Mg doping mechanism, paving the way for bipolar device applications in ultrawide‐bandgap electronics.
β - ga2o3具有超宽带隙(~ 4.9 eV)和良好的n型导电性,是下一代电力电子器件中有前途的半导体。然而,由于传统掺杂剂的深受体水平,实现稳定的p型掺杂仍然是一个根本性的挑战。本文通过金属有机化学气相沉积(MOCVD)开发了Te-Mg共掺杂策略来克服这一限制。共掺杂薄膜的室温电阻率为32.4 Ω·cm,霍尔空穴浓度为1.78 × 10 17 cm−3,在较低载流子浓度(5.72 × 10 14 cm−3)下,迁移率高达5.29 cm 2 V−1 s−1。成功地演示了一个初步的p-n二极管。密度泛函理论(DFT)计算表明,Te的掺入在价带最大值(VBM)附近引入了一个中间带,有效地降低了Mg受体的电离能。光谱分析通过Te-Ga轨道杂化和费米能级向价带移动进一步证实了VBM的提升,与p型行为一致。这些结果为实现p型β - ga2o3同外延建立了一条可行的途径,并为未来优化低于1 Ω·cm的电阻率和更深入地了解Te-Mg掺杂机制奠定了基础,为双极器件在超宽带隙电子中的应用铺平了道路。
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引用次数: 0
Role of Rare‐Earth Lanthanum Doping on Electrical Performance and Stability of Atomic Layer Deposition Processed Indium Oxide Thin‐Film Transistors 稀土镧掺杂对原子层沉积工艺氧化铟薄膜晶体管电性能和稳定性的影响
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2026-03-14 DOI: 10.1002/aelm.70343
Jinxiu Zhao, Zhiyu Lin, Ziheng Wang, Liankai Zheng, Kai Jiang, Haoran Zhao, Mengwei Si
In this work, lanthanum‐doped indium oxide (InLaO) thin‐film transistors (TFTs) are fabricated by atomic layer deposition (ALD) with different La concentrations. Effects of La concentration on crystallinity, surface chemical information, surface morphology, along with the electrical properties of ALD‐grown InLaO TFTs, are systematically investigated. With increasing La content from 0 to 20.2 at. %, the field‐effect mobility (µ FE ) continuously decreases from 106.3 to 2.3 cm 2 (V·s) −1 . In contrast, the negative bias stability (NBS) is remarkably enhanced, and the threshold voltage (V TH ) shifts from −0.157 to −0.005 V under −2 V bias stress for 1000 s. This trend is attributed to the stronger La─O bonding energy compared to In─O. The stable La─O bonds effectively suppress the generation of oxygen vacancies (V O ) and associated defect states, which explains the superior stability. Concurrently, these bonds also restrain the formation of conduction pathways, leading to the observed mobility degradation. This work demonstrates that La doping is an effective strategy to precisely tune the stability‐mobility balance in oxide TFTs.
在这项工作中,采用不同镧浓度的原子层沉积(ALD)方法制备了掺杂镧氧化铟(InLaO)薄膜晶体管(TFTs)。本文系统地研究了La浓度对ALD生长的tft晶体结晶度、表面化学信息、表面形貌以及电学性能的影响。随着La含量从0增加到20.2 at。%时,场效应迁移率(µFE)从106.3下降到2.3 cm 2 (V·s)−1。相反,负偏置稳定性(NBS)显著增强,阈值电压(V TH)在−2 V偏置应力下持续1000 s从−0.157 V位移到−0.005 V。这种趋势归因于La─O键能比In─O键能强。稳定的La─O键有效地抑制了氧空位(V O)和相关缺陷态的产生,这解释了优越的稳定性。同时,这些键也抑制了传导途径的形成,导致观察到的迁移率下降。这项工作表明,La掺杂是一种有效的策略,可以精确调节氧化物tft的稳定性-迁移率平衡。
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Advanced Electronic Materials
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