Qian Zhang, Nannan You, Jiayi Wang, Yang Xu, Kuo Zhang, Shengkai Wang
Post-oxidation annealing in oxygen (O2) ambient can improve the quality of the SiO2/SiC stack without introducing foreign atoms. In order to reveal the annealing mechanism at different oxygen partial pressures (P(O2)), this work focuses on the dependence of the annealing effect on P(O2) in a wide range from 0.01 Pa to 101 kPa for SiO2/SiC stack. In order to minimize the C-related defects generated during SiC oxidation, the SiO2/SiC stacks are formed by oxidizing the deposited Si on the SiC epitaxial layer. The electrical characteristics of the annealed samples show that low P(O2) is beneficial to improve the interface quality, and high P(O2) is beneficial to improve the oxide layer quality. In addition, time of flight secondary ion mass spectrometry and X-ray photoelectron spectroscopy analysis shows that the distribution and filling of oxygen vacancies (V[O]) are consistent with the electrical results. Finally, a model describing V[O] filling amount with P(O2) is proposed to quantitatively characterize the dependence of the annealing effect on P(O2), which shows that the filling amount of V[O] is proportional to P(O2)n (n∼0.065). This model provides theoretical support for improving the quality of SiC MOS by O2 annealing.
在氧气(O2)环境中进行氧化后退火可以在不引入外来原子的情况下提高二氧化硅/碳化硅叠层的质量。为了揭示不同氧分压(P(O2))下的退火机理,这项工作重点研究了 SiO2/SiC 堆在 0.01 Pa 到 101 kPa 的宽范围内退火效果对 P(O2) 的依赖性。为了尽量减少碳化硅氧化过程中产生的与 C 有关的缺陷,SiO2/SiC 叠层是通过氧化碳化硅外延层上的沉积硅形成的。退火样品的电气特性表明,低 P(O2) 有利于改善界面质量,而高 P(O2) 则有利于改善氧化层质量。此外,飞行时间二次离子质谱和 X 射线光电子能谱分析表明,氧空位(V[O])的分布和填充与电学结果一致。最后,提出了一个描述 V[O] 填充量与 P(O2) 的模型,以定量表征退火效应对 P(O2) 的依赖性,结果表明 V[O] 的填充量与 P(O2)n 成正比(n∼0.065)。该模型为通过 O2 退火提高 SiC MOS 的质量提供了理论支持。
{"title":"Study on the Oxygen Partial Pressure Dependent Annealing Effect for SiO2/SiC Stack","authors":"Qian Zhang, Nannan You, Jiayi Wang, Yang Xu, Kuo Zhang, Shengkai Wang","doi":"10.1002/aelm.202400040","DOIUrl":"10.1002/aelm.202400040","url":null,"abstract":"<p>Post-oxidation annealing in oxygen (O<sub>2</sub>) ambient can improve the quality of the SiO<sub>2</sub>/SiC stack without introducing foreign atoms. In order to reveal the annealing mechanism at different oxygen partial pressures (P(O<sub>2</sub>)), this work focuses on the dependence of the annealing effect on P(O<sub>2</sub>) in a wide range from 0.01 Pa to 101 kPa for SiO<sub>2</sub>/SiC stack. In order to minimize the C-related defects generated during SiC oxidation, the SiO<sub>2</sub>/SiC stacks are formed by oxidizing the deposited Si on the SiC epitaxial layer. The electrical characteristics of the annealed samples show that low P(O<sub>2</sub>) is beneficial to improve the interface quality, and high P(O<sub>2</sub>) is beneficial to improve the oxide layer quality. In addition, time of flight secondary ion mass spectrometry and X-ray photoelectron spectroscopy analysis shows that the distribution and filling of oxygen vacancies (V[O]) are consistent with the electrical results. Finally, a model describing V[O] filling amount with P(O<sub>2</sub>) is proposed to quantitatively characterize the dependence of the annealing effect on P(O<sub>2</sub>), which shows that the filling amount of V[O] is proportional to <i>P</i>(<i>O</i><sub>2</sub>)<sup><i>n</i></sup> (n∼0.065). This model provides theoretical support for improving the quality of SiC MOS by O<sub>2</sub> annealing.</p>","PeriodicalId":110,"journal":{"name":"Advanced Electronic Materials","volume":"10 10","pages":""},"PeriodicalIF":5.3,"publicationDate":"2024-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/aelm.202400040","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141463520","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M. Reza Ghazanfari, Simon Steinberg, Konrad Siemensmeyer, Johannes C. Vrijmoed, Mirko Tallu, Stefanie Dehnen, Günther Thiele
The novel potassium sulfido cobaltate, K2[Co3S4] is introduced, with 25% vacancies of the cobalt positions within a layered anionic sublattice. The impedance and dielectric investigations indicate a remarkable ionic conductivity of 21.4 mS cm−1 at room temperature, which is in the range of highest ever reported values for potassium-ions, as well as a high electrical permittivity of 2650 at 1 kHz, respectively. Magnetometry results indicate an antiferromagnetic structure with giant intrinsic exchange bias fields of 0.432 and 0.161 T at 3 and 20 K respectively, potentially induced by a combination of the interfacial effect of combined magnetic anionic and nonmagnetic cationic sublattices, as well as partial spin canting. The stability of the exchange bias behavior is confirmed by a training effect of less than 18% upon 10 hysteresis cycles. The semiconductivity of the material is determined, both experimentally and theoretically, with a bandgap energy of 1.68 eV. The findings render this material as a promising candidate for both, active electrode material in potassium-ion batteries, and for spintronic applications.
新型硫代钴酸钾 K2[Co3S4]在层状阴离子亚晶格中的钴位有 25% 的空位。阻抗和介电研究表明,该物质在室温下的离子电导率高达 21.4 mS cm-1,是迄今所报道的钾离子电导率的最高值,在 1 kHz 时的电导率也高达 2650。磁力测量结果表明,在 3 K 和 20 K 时,钾离子具有反铁磁性结构,其内在交换偏置场分别为 0.432 T 和 0.161 T,这可能是磁性阴离子亚晶格和非磁性阳离子亚晶格的界面效应以及部分自旋悬臂效应共同作用的结果。交换偏压行为的稳定性通过 10 次磁滞循环后小于 18% 的训练效应得到了证实。通过实验和理论测定,该材料的半导体带隙能为 1.68 eV。这些发现使这种材料成为钾离子电池活性电极材料和自旋电子应用的理想候选材料。
{"title":"Insights into a Defective Potassium Sulfido Cobaltate: Giant Magnetic Exchange Bias, Ionic Conductivity, and Electrical Permittivity","authors":"M. Reza Ghazanfari, Simon Steinberg, Konrad Siemensmeyer, Johannes C. Vrijmoed, Mirko Tallu, Stefanie Dehnen, Günther Thiele","doi":"10.1002/aelm.202400038","DOIUrl":"10.1002/aelm.202400038","url":null,"abstract":"<p>The novel potassium sulfido cobaltate, K<sub>2</sub>[Co<sub>3</sub>S<sub>4</sub>] is introduced, with 25% vacancies of the cobalt positions within a layered anionic sublattice. The impedance and dielectric investigations indicate a remarkable ionic conductivity of 21.4 mS cm<sup>−1</sup> at room temperature, which is in the range of highest ever reported values for potassium-ions, as well as a high electrical permittivity of 2650 at 1 kHz, respectively. Magnetometry results indicate an antiferromagnetic structure with giant intrinsic exchange bias fields of 0.432 and 0.161 T at 3 and 20 K respectively, potentially induced by a combination of the interfacial effect of combined magnetic anionic and nonmagnetic cationic sublattices, as well as partial spin canting. The stability of the exchange bias behavior is confirmed by a training effect of less than 18% upon 10 hysteresis cycles. The semiconductivity of the material is determined, both experimentally and theoretically, with a bandgap energy of 1.68 eV. The findings render this material as a promising candidate for both, active electrode material in potassium-ion batteries, and for spintronic applications.</p>","PeriodicalId":110,"journal":{"name":"Advanced Electronic Materials","volume":"10 9","pages":""},"PeriodicalIF":5.3,"publicationDate":"2024-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/aelm.202400038","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141463659","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Silver nanowires (AgNW) are prospective for the fabrication of flexible transparent conductive coatings. The main challenge is to ensure low sheet resistance of AgNW coatings at flexible substrates. Herein, a simple low-temperature post-treatment method is proposed for improving the conductivity and adhesion of AgNW coatings which is based on the deposition of distilled water (DI) with a small amount of dissolved polyvinyl alcohol (PVA). Capillary forces cause a decrease in the sheet resistance of AgNW coatings while the presence of PVA significantly improves the adhesion of nanowires to the flexible polyethylene terephthalate (PET) substrates. As a result, coatings with a transparency of 91% and a sheet resistance of 20 Ω sq‒1 are fabricated. The storage time of coatings in air is increased due to the presence of a thin layer of PVA on AgNW. After 90 days, the sheet resistance of post-treated AgNW coatings is increased by 11 times, while the sheet resistance of untreated coatings is increased by more than 3000 times. The obtained AgNW coatings are utilized as flexible transparent heaters.
{"title":"Improvement of Conductivity and Adhesion of AgNW Flexible Transparent Conductive Coatings by the Capillary Forces Effect and Polyvinyl Alcohol","authors":"Marat Kaikanov, Alshyn Abduvalov","doi":"10.1002/aelm.202300876","DOIUrl":"10.1002/aelm.202300876","url":null,"abstract":"<p>Silver nanowires (AgNW) are prospective for the fabrication of flexible transparent conductive coatings. The main challenge is to ensure low sheet resistance of AgNW coatings at flexible substrates. Herein, a simple low-temperature post-treatment method is proposed for improving the conductivity and adhesion of AgNW coatings which is based on the deposition of distilled water (DI) with a small amount of dissolved polyvinyl alcohol (PVA). Capillary forces cause a decrease in the sheet resistance of AgNW coatings while the presence of PVA significantly improves the adhesion of nanowires to the flexible polyethylene terephthalate (PET) substrates. As a result, coatings with a transparency of 91% and a sheet resistance of 20 Ω sq<sup>‒1</sup> are fabricated. The storage time of coatings in air is increased due to the presence of a thin layer of PVA on AgNW. After 90 days, the sheet resistance of post-treated AgNW coatings is increased by 11 times, while the sheet resistance of untreated coatings is increased by more than 3000 times. The obtained AgNW coatings are utilized as flexible transparent heaters.</p>","PeriodicalId":110,"journal":{"name":"Advanced Electronic Materials","volume":"10 10","pages":""},"PeriodicalIF":5.3,"publicationDate":"2024-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/aelm.202300876","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141463560","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Zimeng Zhang, Isaac Craig, Tao Zhou, Martin Holt, Raul Flores, Evan Sheridan, Katherine Inzani, Xiaoxi Huang, Joyeeta Nag, Bhagwati Prasad, Sinéad M. Griffin, Ramamoorthy Ramesh
As a promising candidate for nonvolatile memory devices, the hafnia-based ferroelectric system has recently been a hot research topic. Although significant progress has been made over the past decade, the endurance problem is still an obstacle to its final application. In perovskite-based ferroelectrics, such as the well-studied Pb[ZrxTi1−x]O3 (PZT) family, polarization fatigue has been discussed within the framework of the interaction of charged defects (such as oxygen vacancies) with the moving domains during the switching process, particularly at the electrode-ferroelectric interface. Armed with this background, a hypothesis is set out to test that a similar mechanism can be in play with the hafnia-based ferroelectrics. The conducting perovskite La-Sr-Mn-O is used as the contact electrode to create La0.67Sr0.33MnO3 / Hf0.5Zr0.5O2 (HZO)/ La0.67Sr0.33MnO3 capacitor structures deposited on SrTiO3-Si substrates. Nanoscale X-ray diffraction is performed on single capacitors, and a structural phase transition from polar o-phase toward non-polar m-phase is demonstrated during the bipolar switching process. The energy landscape of multiphase HZO has been calculated at varying oxygen vacancy concentrations. Based on both theoretical and experimental results, it is found that a polar to non-polar phase transformation caused by oxygen vacancy redistribution during electric cycling is a likely explanation for fatigue in HZO.
作为非易失性存储器件的一种有前途的候选材料,基于哈夫纳的铁电系统最近一直是一个热门研究课题。尽管在过去十年中取得了重大进展,但耐久性问题仍然是其最终应用的障碍。在基于包晶石的铁电系统中,如研究得很透彻的 Pb[ZrxTi1-x]O3 (PZT) 系列,极化疲劳问题已在带电缺陷(如氧空位)与开关过程中移动畴的相互作用框架内进行了讨论,特别是在电-铁电界面。有了这一背景,我们提出了一个假设,以检验类似的机制是否也能在基于霞石的铁电体中发挥作用。导电过氧化物 La-Sr-Mn-O 被用作接触电极,以创建沉积在 SrTiO3-Si 基底上的 La0.67Sr0.33MnO3 / Hf0.5Zr0.5O2 (HZO)/ La0.67Sr0.33MnO3 电容器结构。对单个电容器进行了纳米级 X 射线衍射,结果表明,在双极开关过程中,结构相位从极性 o 相转变为非极性 m 相。计算了不同氧空位浓度下多相 HZO 的能量分布。根据理论和实验结果,我们发现在电循环过程中,氧空位重新分布所引起的极性到非极性相变很可能是 HZO 产生疲劳的原因。
{"title":"Phase Transformation Driven by Oxygen Vacancy Redistribution as the Mechanism of Ferroelectric Hf0.5Zr0.5O2 Fatigue","authors":"Zimeng Zhang, Isaac Craig, Tao Zhou, Martin Holt, Raul Flores, Evan Sheridan, Katherine Inzani, Xiaoxi Huang, Joyeeta Nag, Bhagwati Prasad, Sinéad M. Griffin, Ramamoorthy Ramesh","doi":"10.1002/aelm.202300877","DOIUrl":"10.1002/aelm.202300877","url":null,"abstract":"<p>As a promising candidate for nonvolatile memory devices, the hafnia-based ferroelectric system has recently been a hot research topic. Although significant progress has been made over the past decade, the endurance problem is still an obstacle to its final application. In perovskite-based ferroelectrics, such as the well-studied Pb[Zr<sub>x</sub>Ti<sub>1−x</sub>]O<sub>3</sub> (PZT) family, polarization fatigue has been discussed within the framework of the interaction of charged defects (such as oxygen vacancies) with the moving domains during the switching process, particularly at the electrode-ferroelectric interface. Armed with this background, a hypothesis is set out to test that a similar mechanism can be in play with the hafnia-based ferroelectrics. The conducting perovskite La-Sr-Mn-O is used as the contact electrode to create La<sub>0.67</sub>Sr<sub>0.33</sub>MnO<sub>3</sub> / Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2 </sub>(HZO)/ La<sub>0.67</sub>Sr<sub>0.33</sub>MnO<sub>3</sub> capacitor structures deposited on SrTiO<sub>3</sub>-Si substrates. Nanoscale X-ray diffraction is performed on single capacitors, and a structural phase transition from polar o-phase toward non-polar m-phase is demonstrated during the bipolar switching process. The energy landscape of multiphase HZO has been calculated at varying oxygen vacancy concentrations. Based on both theoretical and experimental results, it is found that a polar to non-polar phase transformation caused by oxygen vacancy redistribution during electric cycling is a likely explanation for fatigue in HZO.</p>","PeriodicalId":110,"journal":{"name":"Advanced Electronic Materials","volume":"10 9","pages":""},"PeriodicalIF":5.3,"publicationDate":"2024-06-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/aelm.202300877","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141463692","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Transient electronics have emerged as a new category of devices that can degrade after their functional lifetime, offering tremendous potential as disposable sensors, actuators, wearables, and implants. Additive manufacturing methods represent a promising approach for patterning transient materials, yet examples of fully printed bioelectronic devices are scarce. This study introduces a fully digital 3D printing approach enabling the prototyping and customization of soft bioelectronics made of transient materials. The direct ink writing of poly(octamethylene maleate (anhydride) citrate) (POMaC) as an elastomeric matrix and of a shellac-carbon ink as a conductor is investigated. Precise and repeatable deposition of both structural and conductive features is achieved by optimizing printing parameters, i.e., the dispense gap, printing speed, and inlet pressure. Multi-material 3D printing enables the fabrication of functional transient devices. Notably, pressure and strain sensors are shown to operate in ranges relevant to implanted biomechanical monitoring. 3D-printed transient electrodes are demonstrated to be comparable to state-of-the-art devices in terms of impedance behavior. Finally, physical degradation of the materials is confirmed at physiological conditions. These fully digital additive manufacturing processes enable the monolithic fabrication of customizable transient bioelectronics with adaptable functions and geometries.
{"title":"3D Printing of Customizable Transient Bioelectronics and Sensors","authors":"Nicolas Fumeaux, Danick Briand","doi":"10.1002/aelm.202400058","DOIUrl":"10.1002/aelm.202400058","url":null,"abstract":"<p>Transient electronics have emerged as a new category of devices that can degrade after their functional lifetime, offering tremendous potential as disposable sensors, actuators, wearables, and implants. Additive manufacturing methods represent a promising approach for patterning transient materials, yet examples of fully printed bioelectronic devices are scarce. This study introduces a fully digital 3D printing approach enabling the prototyping and customization of soft bioelectronics made of transient materials. The direct ink writing of poly(octamethylene maleate (anhydride) citrate) (POMaC) as an elastomeric matrix and of a shellac-carbon ink as a conductor is investigated. Precise and repeatable deposition of both structural and conductive features is achieved by optimizing printing parameters, i.e., the dispense gap, printing speed, and inlet pressure. Multi-material 3D printing enables the fabrication of functional transient devices. Notably, pressure and strain sensors are shown to operate in ranges relevant to implanted biomechanical monitoring. 3D-printed transient electrodes are demonstrated to be comparable to state-of-the-art devices in terms of impedance behavior. Finally, physical degradation of the materials is confirmed at physiological conditions. These fully digital additive manufacturing processes enable the monolithic fabrication of customizable transient bioelectronics with adaptable functions and geometries.</p>","PeriodicalId":110,"journal":{"name":"Advanced Electronic Materials","volume":"10 10","pages":""},"PeriodicalIF":5.3,"publicationDate":"2024-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/aelm.202400058","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141462094","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Linkui Niu, Peiran Xu, Tiantian Huang, Wanli Yang, Zhimin Chen, Xin Chen, Ning Dai
Tunable optical information storage is crucial in artificial retinal systems for mimicking neurobiological visual characteristics. The perception and storage of light signals rely heavily on the regulation of the conductivity states of memristor materials (e.g., transition metal oxides). Controlling light memristor behavior via defects and polymorphic phases remains underexplored and differs from traditional plasticity training via repeated testing. In this study, defect-driven ultraviolet light perception and memristor storage with phase transitions in vanadium dioxide (VO2) thin films are presented. The effects of oxygen defects and the corresponding polymorphic phases on ultraviolet light memristors are investigated. The dependence of phonon vibrations and insulator–metal transition behavior on defect levels are revealed. Self-doping and polymorphs enable VO2 to exhibit distinct ultraviolet memristor performance. It is anticipated that defect-driven light memristors significantly contribute to the realization of artificial synaptic devices and the implementation of advanced electronic neuron systems.
{"title":"Defect-Driven Light Perception and Memristor Storage with Phase Transition in Vanadium Dioxide","authors":"Linkui Niu, Peiran Xu, Tiantian Huang, Wanli Yang, Zhimin Chen, Xin Chen, Ning Dai","doi":"10.1002/aelm.202400006","DOIUrl":"10.1002/aelm.202400006","url":null,"abstract":"<p>Tunable optical information storage is crucial in artificial retinal systems for mimicking neurobiological visual characteristics. The perception and storage of light signals rely heavily on the regulation of the conductivity states of memristor materials (e.g., transition metal oxides). Controlling light memristor behavior via defects and polymorphic phases remains underexplored and differs from traditional plasticity training via repeated testing. In this study, defect-driven ultraviolet light perception and memristor storage with phase transitions in vanadium dioxide (VO<sub>2</sub>) thin films are presented. The effects of oxygen defects and the corresponding polymorphic phases on ultraviolet light memristors are investigated. The dependence of phonon vibrations and insulator–metal transition behavior on defect levels are revealed. Self-doping and polymorphs enable VO<sub>2</sub> to exhibit distinct ultraviolet memristor performance. It is anticipated that defect-driven light memristors significantly contribute to the realization of artificial synaptic devices and the implementation of advanced electronic neuron systems.</p>","PeriodicalId":110,"journal":{"name":"Advanced Electronic Materials","volume":"10 9","pages":""},"PeriodicalIF":5.3,"publicationDate":"2024-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/aelm.202400006","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141462031","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Prabhat Kumar, Michael Hoffmann, Andy Nonaka, Sayeef Salahuddin, Zhi (Jackie) Yao
HfO2– and ZrO2–based ferroelectric thin films have emerged as promising candidates for the gate oxides of next-generation electronic devices. Recent work has experimentally demonstrated that a tetragonal/orthorhombic (t/o-) phase mixture with partially in-plane polarization can lead to negative capacitance (NC) stabilization. However, there is a discrepancy between experiments and the theoretical understanding of domain formation and domain wall motion in these multi-phase, polycrystalline materials. Furthermore, the effect of anisotropic domain wall coupling on NC has not been studied so far. Here, 3D phase field simulations of HfO2– and ZrO2–based mixed-phase ultra-thin films on silicon are applied to understand the necessary and beneficial conditions for NC stabilization. It is found that smaller ferroelectric grains and a larger angle of the polar axis with respect to the out-of-plane direction enhances the NC effect. Furthermore, it is shown that theoretically predicted negative domain wall coupling even along only one axis prevents NC stabilization. Therefore, it is concluded that topological domain walls play a critical role in experimentally observed NC phenomena in HfO2– and ZrO2–based ferroelectrics.
{"title":"3D Ferroelectric Phase Field Simulations of Polycrystalline Multi-Phase Hafnia and Zirconia Based Ultra-Thin Films","authors":"Prabhat Kumar, Michael Hoffmann, Andy Nonaka, Sayeef Salahuddin, Zhi (Jackie) Yao","doi":"10.1002/aelm.202400085","DOIUrl":"10.1002/aelm.202400085","url":null,"abstract":"<p>HfO<sub>2</sub>– and ZrO<sub>2</sub>–based ferroelectric thin films have emerged as promising candidates for the gate oxides of next-generation electronic devices. Recent work has experimentally demonstrated that a tetragonal/orthorhombic (t/o-) phase mixture with partially in-plane polarization can lead to negative capacitance (NC) stabilization. However, there is a discrepancy between experiments and the theoretical understanding of domain formation and domain wall motion in these multi-phase, polycrystalline materials. Furthermore, the effect of anisotropic domain wall coupling on NC has not been studied so far. Here, 3D phase field simulations of HfO<sub>2</sub>– and ZrO<sub>2</sub>–based mixed-phase ultra-thin films on silicon are applied to understand the necessary and beneficial conditions for NC stabilization. It is found that smaller ferroelectric grains and a larger angle of the polar axis with respect to the out-of-plane direction enhances the NC effect. Furthermore, it is shown that theoretically predicted negative domain wall coupling even along only one axis prevents NC stabilization. Therefore, it is concluded that topological domain walls play a critical role in experimentally observed NC phenomena in HfO<sub>2</sub>– and ZrO<sub>2</sub>–based ferroelectrics.</p>","PeriodicalId":110,"journal":{"name":"Advanced Electronic Materials","volume":"10 10","pages":""},"PeriodicalIF":5.3,"publicationDate":"2024-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/aelm.202400085","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141461767","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ivan Erofeev, Antony Winata Hartanto, Khakimjon Saidov, Zainul Aabdin, Antoine Pacco, Harold Philipsen, Weng Weei Tjiu, Hui Kim Hui, Frank Holsteyns, Utkur Mirsaidov
Recent surge in demand for computational power combined with strict constraints on energy consumption requires persistent increase in the density of transistors and memory cells in integrated circuits. Metal interconnects in their current form struggle to follow the size downscaling due to materials limitations at the nanoscale, causing severe performance losses. Next-generation interconnects need new materials, and molybdenum (Mo) is considered the best choice, offering low resistivity, good scalability, and barrierless integration at a low cost. However, it requires annealing at temperatures far exceeding the currently accepted limit. In this work, the challenges of high-temperature annealing of patterned Mo nanowires are looked into, and a new approach is presented to overcome them. It is demonstrated that while a conventional annealing process improves the average grain size, it can also reduce the cross-section area, thus increasing the resistivity. Using high-resolution transmission electron microscopy (TEM) with in situ heating, the evolution of structural features in real time is directly observed. Using insights from these experiments, a cyclic pulsed annealing method is developed, and it is shown that the desired grain structure is achieved in only a few seconds, without forming the surface grooves. These findings can radically facilitate Mo integration, boosting the efficiency of future integrated circuits.
近来对计算能力的需求激增,加上对能耗的严格限制,要求不断提高集成电路中晶体管和存储单元的密度。由于纳米级材料的限制,当前形式的金属互连很难跟上尺寸的缩小,从而造成严重的性能损失。下一代互连器件需要新的材料,而钼(Mo)被认为是最佳选择,因为它具有电阻率低、可扩展性好和无障碍集成等优点,而且成本低廉。然而,它需要在远远超过目前公认极限的温度下进行退火。本研究探讨了图案化钼纳米线高温退火所面临的挑战,并提出了一种新方法来克服这些挑战。研究表明,传统的退火工艺在改善平均晶粒尺寸的同时,也会减小横截面积,从而增加电阻率。利用原位加热的高分辨率透射电子显微镜(TEM),可以直接观察到结构特征的实时演变。利用从这些实验中获得的洞察力,开发了一种循环脉冲退火方法,结果表明,只需几秒钟就能获得所需的晶粒结构,而且不会形成表面沟槽。这些发现可以从根本上促进 Mo 集成,提高未来集成电路的效率。
{"title":"Solving the Annealing of Mo Interconnects for Next-Gen Integrated Circuits","authors":"Ivan Erofeev, Antony Winata Hartanto, Khakimjon Saidov, Zainul Aabdin, Antoine Pacco, Harold Philipsen, Weng Weei Tjiu, Hui Kim Hui, Frank Holsteyns, Utkur Mirsaidov","doi":"10.1002/aelm.202400035","DOIUrl":"10.1002/aelm.202400035","url":null,"abstract":"<p>Recent surge in demand for computational power combined with strict constraints on energy consumption requires persistent increase in the density of transistors and memory cells in integrated circuits. Metal interconnects in their current form struggle to follow the size downscaling due to materials limitations at the nanoscale, causing severe performance losses. Next-generation interconnects need new materials, and molybdenum (Mo) is considered the best choice, offering low resistivity, good scalability, and barrierless integration at a low cost. However, it requires annealing at temperatures far exceeding the currently accepted limit. In this work, the challenges of high-temperature annealing of patterned Mo nanowires are looked into, and a new approach is presented to overcome them. It is demonstrated that while a conventional annealing process improves the average grain size, it can also reduce the cross-section area, thus increasing the resistivity. Using high-resolution transmission electron microscopy (TEM) with in situ heating, the evolution of structural features in real time is directly observed. Using insights from these experiments, a cyclic pulsed annealing method is developed, and it is shown that the desired grain structure is achieved in only a few seconds, without forming the surface grooves. These findings can radically facilitate Mo integration, boosting the efficiency of future integrated circuits.</p>","PeriodicalId":110,"journal":{"name":"Advanced Electronic Materials","volume":"10 9","pages":""},"PeriodicalIF":5.3,"publicationDate":"2024-06-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/aelm.202400035","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141445029","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Wei Wang, Yujun Deng, Shuai Sun, Massimiliano Galluzzi, Yang Jiao, Paul K. Chu, Zeren Li, Jia Li, Jianquan Yao
Visible-blind ultraviolet (VBUV) photodetectors are designed for UV detection without responding to visible light, thus having many applications in communications, flame detection, environment monitoring, and astronomy. Herein, an organic device concept based on the bulk heterojunction (BHJ) photodiode is presented for high-performance VBUV photodetection and imaging. The BHJ, comprised of an organic electron donor, 2,7-dioctyl[1]benzothieno[3,2-b][1]benzothiophene (C8-BTBT), and an electron acceptor, indene-C60 bisadduct (ICBA), shows efficient generation and transport of free charges upon UV irradiation. The organic photodiode (OPD) delivers exceptional VBUV photodetection performance. At a low voltage of −0.5 V, the device exhibits a wide linear dynamic range of 98.15 dB. Furthermore, the OPD can detect ultra-low light intensities down to 0.58 µW cm−2 with a high photoresponsivity of 0.12 A W−1 and specific detectivity of 2.75 × 1012 Jones. More importantly, by integrating the OPD with a readout integrated circuit, the pixel-array organic VBUV imager is demonstrated to have high-quality imaging capability. The results reveal a novel strategy to design VBUV photodetectors and imagers with balanced performance, cost, area, flexibility, and power consumption.
可见光盲紫外(VBUV)光电探测器设计用于紫外检测,而不对可见光做出反应,因此在通信、火焰检测、环境监测和天文学等领域有着广泛的应用。本文介绍了一种基于体异质结(BHJ)光电二极管的有机器件概念,用于高性能紫外光检测和成像。BHJ 由有机电子供体 2,7-二辛基[1]苯并噻吩并[3,2-b][1]苯并噻吩(C8-BTBT)和电子受体茚-C60 双加合物(ICBA)组成,在紫外线照射下可高效产生和传输自由电荷。有机光电二极管(OPD)具有卓越的紫外光检测性能。在 -0.5 V 的低电压下,该器件具有 98.15 dB 的宽线性动态范围。此外,OPD 还能检测低至 0.58 µW cm-2 的超低光强,具有 0.12 A W-1 的高光致发光率和 2.75 × 1012 Jones 的比检测率。更重要的是,通过将 OPD 与读出集成电路集成,像素阵列有机 VBUV 成像仪被证明具有高质量的成像能力。研究结果揭示了一种设计 VBUV 光电探测器和成像器的新策略,可实现性能、成本、面积、灵活性和功耗之间的平衡。
{"title":"Organic Visible-Blind Ultraviolet Photodiodes and Pixel-Array Imagers Based on [1]Benzothieno[3,2-b]Benzothiophene (BTBT) Derivatives","authors":"Wei Wang, Yujun Deng, Shuai Sun, Massimiliano Galluzzi, Yang Jiao, Paul K. Chu, Zeren Li, Jia Li, Jianquan Yao","doi":"10.1002/aelm.202400128","DOIUrl":"10.1002/aelm.202400128","url":null,"abstract":"<p>Visible-blind ultraviolet (VBUV) photodetectors are designed for UV detection without responding to visible light, thus having many applications in communications, flame detection, environment monitoring, and astronomy. Herein, an organic device concept based on the bulk heterojunction (BHJ) photodiode is presented for high-performance VBUV photodetection and imaging. The BHJ, comprised of an organic electron donor, 2,7-dioctyl[1]benzothieno[3,2-b][1]benzothiophene (C8-BTBT), and an electron acceptor, indene-C<sub>60</sub> bisadduct (ICBA), shows efficient generation and transport of free charges upon UV irradiation. The organic photodiode (OPD) delivers exceptional VBUV photodetection performance. At a low voltage of −0.5 V, the device exhibits a wide linear dynamic range of 98.15 dB. Furthermore, the OPD can detect ultra-low light intensities down to 0.58 µW cm<sup>−2</sup> with a high photoresponsivity of 0.12 A W<sup>−1</sup> and specific detectivity of 2.75 × 10<sup>12</sup> Jones. More importantly, by integrating the OPD with a readout integrated circuit, the pixel-array organic VBUV imager is demonstrated to have high-quality imaging capability. The results reveal a novel strategy to design VBUV photodetectors and imagers with balanced performance, cost, area, flexibility, and power consumption.</p>","PeriodicalId":110,"journal":{"name":"Advanced Electronic Materials","volume":"10 10","pages":""},"PeriodicalIF":5.3,"publicationDate":"2024-06-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/aelm.202400128","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141444974","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Previous work that studied hexagonal boron nitride (h-BN) memristor DC resistive-switching characteristics is extended to include an experimental understanding of their dynamic behavior upon programming or synaptic weight update. The focus is on the temporal resistive switching response to driving stimulus (programming voltage pulses) effecting conductance updates during training in neural network crossbar implementations. Test arrays are fabricated at the wafer level, enabled by the transfer of CVD-grown few-layer (8 layer) or multi-layer (18 layer) h-BN films. A comprehensive study of their temporal response under various conditions–voltage pulse amplitude, edge rate (pulse rise/fall times), and temperature–provides new insights into the resistive switching process toward optimized devices and improvements in their implementation of artificial neural networks. The h-BN memristors can achieve multi-state operation through ultrafast pulsed switching (< 25 ns) with high energy efficiency (≈10 pJ pulse−1).
{"title":"A Study on h-BN Resistive Switching Temporal Response","authors":"Mirembe Musisi-Nkambwe, Sahra Afshari, Jing Xie, Hailey Warner, Ivan Sanchez Esqueda","doi":"10.1002/aelm.202400022","DOIUrl":"10.1002/aelm.202400022","url":null,"abstract":"<p>Previous work that studied hexagonal boron nitride (h-BN) memristor DC resistive-switching characteristics is extended to include an experimental understanding of their dynamic behavior upon programming or synaptic weight update. The focus is on the temporal resistive switching response to driving stimulus (programming voltage pulses) effecting conductance updates during training in neural network crossbar implementations. Test arrays are fabricated at the wafer level, enabled by the transfer of CVD-grown few-layer (8 layer) or multi-layer (18 layer) h-BN films. A comprehensive study of their temporal response under various conditions–voltage pulse amplitude, edge rate (pulse rise/fall times), and temperature–provides new insights into the resistive switching process toward optimized devices and improvements in their implementation of artificial neural networks. The h-BN memristors can achieve multi-state operation through ultrafast pulsed switching (< 25 ns) with high energy efficiency (≈10 pJ pulse<sup>−1</sup>).</p>","PeriodicalId":110,"journal":{"name":"Advanced Electronic Materials","volume":"10 9","pages":""},"PeriodicalIF":5.3,"publicationDate":"2024-06-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://onlinelibrary.wiley.com/doi/epdf/10.1002/aelm.202400022","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141441544","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}