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Parametric Optimization of PEDOT:PSS Aerosol Jet Printing for Enhanced Line Morphology in Flexible Electronics PEDOT:PSS气溶胶喷射打印在柔性电子中增强线形态的参数优化
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-22 DOI: 10.1002/aelm.202500535
Md Shariful Islam, Christian A. Zorman, Changyong (Chase) Cao
Aerosol Jet Printing (AJP) is an advanced, maskless fabrication technique for flexible electronics, enabling precise patterning of functional materials on diverse substrates. In this study, we systematically optimize AJP parameters to achieve superior line morphology and printing fidelity of PEDOT:PSS conductive polymer on flexible Kapton substrates. Key printing parameters—including carrier gas flow rate (CGF), sheath gas flow rate (SGF), printing speed, and ink formulation (PEDOT:PSS/DMSO ratio)—are varied to elucidate their effects primarily on line uniformity, edge definition, thickness, and defect minimization. Through comprehensive experimental analysis, we identify optimal conditions consisting of a CGF of 15–18 sccm, a SGF of 60 sccm, a printing speed of 2 mm/s, and a DMSO concentration of 10%, resulting in continuous, uniform, and defect‐free printed lines with well‐defined morphology and minimal overspray. These findings provide clear quantitative guidelines for reliably achieving high‐quality PEDOT:PSS lines, laying a critical foundation for scalable manufacturing of flexible electronics, energy devices, and other related applications.
气溶胶喷射打印(AJP)是一种先进的、无掩模的柔性电子制造技术,可以在不同的基材上精确地绘制功能材料的图案。在这项研究中,我们系统地优化了AJP参数,以实现PEDOT:PSS导电聚合物在柔性卡普顿衬底上的优越线条形态和打印保真度。关键的印刷参数——包括载气流速(CGF)、鞘气流速(SGF)、印刷速度和油墨配方(PEDOT:PSS/DMSO比)——是不同的,以阐明它们对线条均匀性、边缘清晰度、厚度和缺陷最小化的主要影响。通过综合实验分析,我们确定了最佳条件,包括CGF为15-18 sccm, SGF为60 sccm,印刷速度为2 mm/s, DMSO浓度为10%,从而获得连续,均匀,无缺陷的印刷线,具有良好的形态定义和最小的过度喷涂。这些发现为可靠地实现高质量的PEDOT:PSS线提供了明确的定量指导,为柔性电子产品、能源设备和其他相关应用的可扩展制造奠定了重要基础。
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引用次数: 0
Ferroelectric HZO Thin Films for FEFETs: Crystal Structure-Device Performance Relationship 用于fefet的铁电HZO薄膜:晶体结构-器件性能关系
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-19 DOI: 10.1002/aelm.202500402
Harsha Ragini Aturi, Ramana Murthy Gajula, Deepshikha Rathore

The rapid development of hafnium zirconium oxide (HZO) thin films has established ferroelectric field-effect transistors (FeFETs) as strong candidates for future non-volatile memory and logic-in-memory (LiM) technologies. While earlier reviews mainly offered broad overviews, this work introduces a conceptual framework connecting deposition methods, phase stability, and device performance. This work categorizes fabrication techniques (ALD, CVD, PVD, CSD) based on their influence on phase stabilization and transformation, supported by comparative tables and schematic diagrams illustrating their impact on FeFET operation. A dedicated section discusses reliability challenges (wake-up, fatigue, imprint, retention loss), contrasting ferroelectric capacitors (FeCAPs) with FeFETs to highlight device-level complexities. Additionally, a comparative performance table of reported FeFET stacks summarizes key metrics such as remanent polarization, threshold voltage control, retention, and endurance. By combining thorough comparison with conceptual categorization, this review provides both a structured perspective and practical insights into integrating HZO-based FeFETs into future computing systems.

氧化铪锆(HZO)薄膜的快速发展使铁电场效应晶体管(fefet)成为未来非易失性存储器和逻辑存储器(LiM)技术的有力候选者。虽然早期的评论主要提供了广泛的概述,但这项工作介绍了连接沉积方法,相稳定性和器件性能的概念框架。本工作根据对相位稳定和相变的影响对制造技术(ALD、CVD、PVD、CSD)进行了分类,并通过比较表和示意图说明了它们对ffet工作的影响。一个专门的章节讨论了可靠性挑战(唤醒、疲劳、印记、保留损失),对比铁电电容器(fecap)和场效应管(fet),以突出器件级的复杂性。此外,报告的ffet堆叠的比较性能表总结了关键指标,如剩余极化,阈值电压控制,保留和耐用性。通过结合彻底的比较和概念分类,本综述为将基于HZO的效应场效应管集成到未来的计算系统中提供了结构化的观点和实用的见解。
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引用次数: 0
Current Advances in i-MAX Phases and their Two Dimensional Derivative i-MXenes: Challenges and Opportunities (Adv. Electron. Mater. 21/2025) i - MAX相及其二维导数i - MXenes的最新进展:挑战与机遇(Adv.电子。板牙。21/2025)
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-18 DOI: 10.1002/aelm.70184
Nisha H. Makani, Binod K. Rai, Bishnu Prasad Bastakoti, Alex Bretana, Bhoj Gautam

i-MAX Phases

The cover art depicts the newly developed i-MAX phases, which can be exfoliated into 2D i-MXenes featuring distinct atomic arrangements and in-plane chemical ordering. These quaternary i-MAX phases exhibit unique structural patterns, such as a Kagome lattice, that impart outstanding magnetic, mechanical, and electronic characteristics. These structural motifs underscore the significant promise of i-MXenes as multifunctional materials for advanced applications. More information can be found in the Review by Bhoj Gautam and co-workers (10.1002/aelm.202500478).

i-MAX相封面艺术描绘了新开发的i-MAX相,它可以剥离成2D的i-MXenes,具有不同的原子排列和面内化学顺序。这些四元i-MAX相具有独特的结构模式,例如Kagome晶格,具有出色的磁性,机械和电子特性。这些结构基序强调了i-MXenes作为先进应用的多功能材料的重要前景。更多信息可以在Bhoj Gautam及其同事的综述中找到(10.1002/aelm.202500478)。
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引用次数: 0
Gel‐Amin for Improving Extracellular Recordings of Cardiomyocytes in a 3D Microphysiological System 凝胶- Amin用于改善三维微生理系统中心肌细胞的细胞外记录
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-18 DOI: 10.1002/aelm.202500623
Dominic Pizzarella, Katelyn Neuman, Nolan Burson, Abigail N. Koppes, Ryan A. Koppes
Microphysiological systems hold great potential for fundamental discovery and accelerating the drug discovery pipeline through simplifying complex tissues to their first principles and enabling real‐time, high‐resolution monitoring. Hydrophilic biomaterials, such as hydrogels, are important for microphysiological system innovations due to their ability to emulate the native extracellular matrix and tunable mechanical properties. Furthermore, hydrogels can be tailored to improve tissue maturity as well as the efficacy of instrumentation. However, many biopolymers are non‐conductive, presenting complications for modeling excitable tissue environments like the heart. In this work, we show that an 8% (w/v) Gelatin Methacryloyl (GelMA) + 3.5% (v/v) Choline Acrylate hydrogel, nicknamed Gel‐Amin, can amplify extracellular voltage recordings from a culture of cardiomyocytes (CMs) from commercial microelectrode arrays. Our laser‐cut and assembly method for manufacturing 3D microphysiological systems allowed direct comparisons of CM contractile activity in Gel‐Amin compared to control GelMA cultures in a single system. This innovative material supported in vitro CM cultures with improved synchronicity and greater signal‐to‐noise ratios (SNRs), suggesting potential improvements over conventional biomaterial limitations. Here, we developed a cost‐effective in vitro cardiac tissue model that allows real‐time electrical activity monitoring.
微生理系统通过简化复杂组织的基本原理和实现实时、高分辨率的监测,在基础发现和加速药物发现方面具有巨大的潜力。亲水生物材料,如水凝胶,对微生理系统创新很重要,因为它们能够模拟天然细胞外基质和可调节的机械性能。此外,水凝胶可以定制,以提高组织成熟度和仪器的功效。然而,许多生物聚合物是不导电的,这给心脏等可兴奋组织环境的建模带来了并发症。在这项工作中,我们展示了8% (w/v)明胶甲基丙烯酰(GelMA) + 3.5% (v/v)胆碱丙烯酸酯水凝胶,绰号Gel‐Amin,可以放大来自商业微电极阵列培养的心肌细胞(CMs)的细胞外电压记录。我们用于制造3D微生理系统的激光切割和组装方法可以直接比较凝胶- Amin中CM的收缩活性,并与单个系统中的对照GelMA培养物进行比较。这种创新材料支持体外CM培养,具有更好的同同性和更高的信噪比(SNRs),表明了传统生物材料局限性的潜在改进。在这里,我们开发了一种具有成本效益的体外心脏组织模型,可以实时监测电活动。
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引用次数: 0
The Evolution of Gas Sensors Into Neuromorphic Systems 气体传感器向神经形态系统的进化
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-18 DOI: 10.1002/aelm.202500639
Kevin Dominguez, Dhananjay D. Kumbhar, Abdul Momin Syed, Regina C. Martin, Nazek El-Atab

Gas sensors are essential in applications ranging from environmental monitoring and industrial safety to healthcare diagnostics and consumer devices, where reliable and selective detection is critical. With growing demands for sensitivity, selectivity, and energy efficiency, sensor technology has evolved significantly. Historically, the field advanced from sentinel organisms and gas lamps to a range of sophisticated mechanisms. Yet, conventional sensors remain limited to passive detection, relying on separate units for memory and processing, which leads to higher power consumption, slower response, and reduced adaptability in dynamic environments. Neuromorphic sensing provides a compelling alternative by integrating sensing, memory, and computation in a single device, enabling compact, energy-efficient, and adaptive gas detection inspired by biological olfactory systems. This review begins with a concise overview of traditional semiconductor metal oxide gas sensors, providing a baseline for introducing memristor-based gas sensors, or “gasistors.” These devices represent a transformative shift, offering improved efficiency, reliability, and versatility in gas sensing electronics. We then highlight the neuromorphic in-memory gas sensing paradigm, with examples including electronic noses, bio-inspired olfactory systems, and spike-based computational frameworks. Finally, we discuss progress in materials, device architectures, and algorithms, and outline opportunities and challenges for realizing the full potential of neuromorphic gas sensing.

气体传感器在从环境监测和工业安全到医疗诊断和消费设备的各种应用中都是必不可少的,在这些应用中,可靠和有选择性的检测至关重要。随着对灵敏度、选择性和能源效率的需求不断增长,传感器技术已经有了显著的发展。从历史上看,该领域从哨兵生物和煤气灯发展到一系列复杂的机制。然而,传统传感器仍然局限于被动检测,依赖于单独的存储和处理单元,这导致更高的功耗,更慢的响应,以及在动态环境中的适应性降低。神经形态传感通过在单个设备中集成传感、记忆和计算,提供了一种引人注目的替代方案,实现了受生物嗅觉系统启发的紧凑、节能和自适应气体检测。本文首先简要概述了传统半导体金属氧化物气体传感器,为介绍基于忆阻器的气体传感器或“气敏器”提供了基础。这些设备代表了一种革命性的转变,为气体传感电子产品提供了更高的效率、可靠性和多功能性。然后,我们重点介绍了记忆中神经形态的气体传感范例,包括电子鼻、生物激发嗅觉系统和基于峰值的计算框架。最后,我们讨论了材料、器件架构和算法方面的进展,并概述了实现神经形态气体传感全部潜力的机遇和挑战。
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引用次数: 0
Unlocking Ferroelectricity in Scalable AlBN Films via Plasma-Enhanced Atomic Layer Deposition 通过等离子体增强原子层沉积解锁可扩展AlBN薄膜中的铁电性
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-17 DOI: 10.1002/aelm.202500643
Jayeong Lee, Jiwon Jeon, Donghwan Jung, Youngjin Lee, Beomkyu Shin, Jae-Hyeon An, Jong-Ryul Jeong, Young-Jun Yu, Hyeyoung Shin, Nari Jeon

Ferroelectric metal nitride thin films, particularly AlScN, have recently emerged as transformative materials for next-generation electronics, owing to their high polarization, tunable coercive fields, exceptional endurance, and thermal stability. In pursuit of device miniaturization, atomic layer deposition (ALD) offers unparalleled advantages by delivering angstrom-level thickness precision and conformality on complex 3D architectures; yet most prior studies have relied on physical vapor deposition of films several hundred nanometers thick. Here, we demonstrate the plasma-enhanced ALD of B-doped AlN (AlBN) thin films, where systematic control of the AlN:BN cycle ratio precisely regulates B concentration, enabling direct elucidation of the interplay between composition, crystallinity, and ferroelectric behavior. Density functional theory provided mechanistic insight into B incorporation pathways, while piezoresponse force microscopy confirmed local polarization switching across all compositions, with the optimized AlBN film exhibiting the most pronounced P–E hysteresis loop. This composition further displayed low leakage current and endurance exceeding 105 switching cycles. Collectively, these findings establish PEALD-grown AlBN as a robust ferroelectric nitride and highlight its promise as a CMOS-compatible, scalable alternative to AlScN for next-generation non-volatile memory technologies.

铁电金属氮化薄膜,特别是AlScN薄膜,由于其高极化、可调矫顽场、优异的耐久性和热稳定性,最近成为下一代电子产品的变革性材料。在追求器件小型化的过程中,原子层沉积(ALD)通过在复杂的3D结构上提供埃级厚度精度和一致性提供了无与伦比的优势;然而,大多数先前的研究都依赖于几百纳米厚的薄膜的物理气相沉积。在这里,我们展示了等离子体增强的B掺杂AlN (AlBN)薄膜的ALD,其中系统控制AlN:BN循环比精确调节B浓度,从而直接阐明了成分,结晶度和铁电行为之间的相互作用。密度泛函理论提供了B结合途径的机理,而压电响应力显微镜证实了所有成分的局部极化开关,优化的AlBN薄膜表现出最明显的P-E滞后环。该组合物进一步显示出低泄漏电流和超过10.5个开关循环的耐久性。总的来说,这些发现证明了ald生长的AlBN是一种强大的铁电氮化物,并突出了其作为CMOS兼容、可扩展的AlScN替代品的前景,可用于下一代非易失性存储技术。
{"title":"Unlocking Ferroelectricity in Scalable AlBN Films via Plasma-Enhanced Atomic Layer Deposition","authors":"Jayeong Lee,&nbsp;Jiwon Jeon,&nbsp;Donghwan Jung,&nbsp;Youngjin Lee,&nbsp;Beomkyu Shin,&nbsp;Jae-Hyeon An,&nbsp;Jong-Ryul Jeong,&nbsp;Young-Jun Yu,&nbsp;Hyeyoung Shin,&nbsp;Nari Jeon","doi":"10.1002/aelm.202500643","DOIUrl":"10.1002/aelm.202500643","url":null,"abstract":"<p>Ferroelectric metal nitride thin films, particularly AlScN, have recently emerged as transformative materials for next-generation electronics, owing to their high polarization, tunable coercive fields, exceptional endurance, and thermal stability. In pursuit of device miniaturization, atomic layer deposition (ALD) offers unparalleled advantages by delivering angstrom-level thickness precision and conformality on complex 3D architectures; yet most prior studies have relied on physical vapor deposition of films several hundred nanometers thick. Here, we demonstrate the plasma-enhanced ALD of B-doped AlN (AlBN) thin films, where systematic control of the AlN:BN cycle ratio precisely regulates B concentration, enabling direct elucidation of the interplay between composition, crystallinity, and ferroelectric behavior. Density functional theory provided mechanistic insight into B incorporation pathways, while piezoresponse force microscopy confirmed local polarization switching across all compositions, with the optimized AlBN film exhibiting the most pronounced P–E hysteresis loop. This composition further displayed low leakage current and endurance exceeding 10<sup>5</sup> switching cycles. Collectively, these findings establish PEALD-grown AlBN as a robust ferroelectric nitride and highlight its promise as a CMOS-compatible, scalable alternative to AlScN for next-generation non-volatile memory technologies.</p>","PeriodicalId":110,"journal":{"name":"Advanced Electronic Materials","volume":"12 2","pages":""},"PeriodicalIF":5.3,"publicationDate":"2025-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://advanced.onlinelibrary.wiley.com/doi/epdf/10.1002/aelm.202500643","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145765086","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Correction to “Mesoporous Carbon Sphere-Enhanced Flexible Pressure Sensor with Superior Linearity and Wide Range for Wearable Health Monitoring” 修正“介孔碳球-增强型柔性压力传感器,具有优越的线性和广泛的可穿戴健康监测范围”
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-17 DOI: 10.1002/aelm.70233

T. Zhu, W. Xu, C. Peng, et al.: Mesoporous Carbon Sphere-Enhanced Flexible Pressure Sensor with Superior Linearity and Wide Range for Wearable Health Monitoring. Adv. Electron. Mater., 11, 2400985, (2025). https://doi.org/10.1002/aelm.202400985

There was a typographical error in the author list. The fourth author's name is “Lan Shi”. The error has also been corrected in the original article.

We apologize for this error.

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引用次数: 0
Thickness-Driven Modulation of Electronic Transport in SnSe2-grown Films by Low-Temperature Atomic Layer Deposition 低温原子层沉积对snse2生长薄膜中电子输运的厚度驱动调制
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-17 DOI: 10.1002/aelm.202500560
Alejandra Ruiz-Clavijo, Amin Bahrami, Jaroslav Charvot, Sebastian Lehmann, Jaakko Julin, Daniel Wolf, Lars Giebeler, Angelika Wrzesińska-Lashkova, Fabian Pieck, Javier Outon, Ralf Tonner-Zech, Filip Bureš, Yana Vaynzof, Eduardo Blanco, Kornelius Nielsch

Low-temperature atomic layer deposition (ALD) is increasingly important for the integration of layered metal dichalcogenides such as tin diselenide (SnSe2) into advanced nanoelectronic devices, where compatibility with temperature-sensitive substrates and precise thickness control are essential. Using a novel and highly reactive selenium precursor, namely, bis(trimethylstannyl)selenide or Se(SnMe3)2, SnSe2 films are deposited at reduced temperatures. As-deposited films are initially amorphous, however, post-deposition annealing at 250°C induces crystallization. Structural analysis reveals a clear evolution in crystallinity: ultrathin films (∼25 nm) exhibit nearly single-crystalline, defect-free domains, while thicker films (∼100 nm) transition to a polycrystalline structure. This controlled variation in crystal quality directly influences the electronic transport properties, demonstrating the potential of low-temperature ALD combined with mild annealing for scalable fabrication of high-performance, thickness-engineered SnSe2-based devices.

低温原子层沉积(ALD)对于将层状金属二硫化物(如二硒化锡(SnSe 2))集成到先进的纳米电子器件中越来越重要,其中与温度敏感衬底的兼容性和精确的厚度控制是必不可少的。采用一种新型的高活性硒前驱体,即双(三甲基锡基)硒化物或Se(snme3) 2,在还原温度下沉积了snse2薄膜。沉积薄膜最初是无定形的,然而,在250°C的沉积后退火诱导结晶。结构分析揭示了结晶度的清晰演变:超薄膜(~ 25 nm)表现出几乎单晶、无缺陷的结构域,而较厚的薄膜(~ 100 nm)则转变为多晶结构。这种控制晶体质量的变化直接影响电子输运性质,证明了低温ALD结合温和退火在高性能、厚度工程的SnSe 2基器件的可扩展制造中的潜力。
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引用次数: 0
Tunable Electronic and Optoelectronic Properties of MoS 2 Through Molecular Coverage‐Controlled Polyoxometalate Doping 通过分子覆盖控制的多金属氧酸盐掺杂制备MoS 2的可调谐电子和光电子特性
IF 6.2 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-17 DOI: 10.1002/aelm.202500706
Jean‐Pierre Glauber, Marco Moors, Dmitry A. Ryndyk, Emad Najafidehaghani, Jonas Lorenz, Rahel‐Manuela Maas, Nils Boysen, Harish Parala, Thomas Heine, Anjana Devi, Kirill Monakhov
We investigated the functionalization of pristine and post‐deposition‐annealed atomic layer deposition (ALD)‐grown MoS 2 films on silicon wafers with the polyoxometalate (POM) ( n Bu 4 N) 3 [HV 12 O 32 Cl(DyPc)] (referred to as V 12 ‐ DyPc ) and its impact on the optical and electronic properties of 2D semiconductor layers. Thin‐film analysis confirms the formation of high‐quality, polycrystalline MoS 2 after annealing. The deposition of V 12 ‐ DyPc induces a concentration‐dependent reduction in A exciton emission and the emergence of negatively charged trion (A ) photoluminescence (PL), evidencing systematic charge transfer. Studies on thinner MoS 2 layers grown by metal‐organic chemical vapor deposition (MOCVD) corroborate this effect. Short‐range surface ordering of POMs is detected on pristine, amorphous MoS 2 . Notably, V 12 ‐ DyPc exhibits identical multilevel switching behavior on both amorphous and polycrystalline, annealed MoS 2 . On MoS 2 , V 12 ‐ DyPc shows a significantly reduced lateral electronic density distribution (3 nm compared to 7 nm on highly oriented pyrolytic graphite (HOPG)) and a more positive first reduction potential (3.1 V vs. 2.1 V, respectively). These changes are due to the substantially increased surface roughness of MoS 2 relative to the atomically flat HOPG substrate, and to the impact of a modified chemical environment on MoS 2 . Density functional theory (DFT) and molecular mechanics simulations reveal face‐on bonding geometries, altered redox energetics, and substrate‐dependent shifts in electronic states.
我们研究了用多金属氧酸盐(POM) (n Bu 4 n) 3 [HV 12 O 32 Cl(DyPc)](简称V 12 - DyPc)在硅片上原始和沉积后退火原子层沉积(ALD)生长的MoS 2薄膜的功能化及其对二维半导体层光学和电子性能的影响。薄膜分析证实退火后形成了高质量的多晶MoS 2。v12 - DyPc的沉积诱导了a激子发射的浓度依赖性降低和带负电荷的trion (a -)光致发光(PL)的出现,证明了系统的电荷转移。通过金属有机化学气相沉积(MOCVD)生长的更薄的MoS 2层的研究证实了这一效应。在原始的、非晶的MoS 2上检测到POMs的短程表面有序。值得注意的是,v12‐DyPc在非晶和多晶退火MoS 2上都表现出相同的多电平开关行为。在MoS 2上,V 12‐DyPc显示出显著降低的横向电子密度分布(3 nm,而在高取向热解石墨(HOPG)上为7 nm)和更正的首次还原电位(分别为3.1 V和2.1 V)。这些变化是由于相对于原子平坦的HOPG衬底,MoS 2的表面粗糙度大大增加,以及修饰的化学环境对MoS 2的影响。密度泛函理论(DFT)和分子力学模拟揭示了面朝键的几何形状、氧化还原能量的改变以及电子态的底物依赖位移。
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引用次数: 0
Quantitative Analysis on the Interaction Between Channel Carrier and Remote Trap in HfxZr1-xO2/SiO2 Interface in Ferroelectric Field-Effect-Transistor 铁电场效应晶体管中Hf × Zr 1‐× o2 / sio2界面沟道载流子与远阱相互作用的定量分析
IF 5.3 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2025-12-16 DOI: 10.1002/aelm.202500549
Haneul Lee, Sujong Kim, Changhyeon Han, Haesung Kim, Hyojin Yang, Sejun Park, Sanghyuk Yun, Yoon Jung Lee, Sung-Jin Choi, Dae Hwan Kim, Dong Myong Kim, Daewoong Kwon, Jong-Ho Bae

In this work, the polarization-dependent operating characteristics of TiN/HfxZr1-xO2(HZO)/SiO2/Si ferroelectric FETs (FeFETs) are investigated, and remote HZO/SiO2 interface traps (Dit,FE/DE) are quantitatively separated from Si/SiO2 interface traps (Dit0). X-ray photoelectron spectroscopy (XPS) reveals an oxygen-vacancy (VO)-rich HfSiOx layer at the HZO/SiO2 interface. Based on the transistor operation theory and trap/polarization-switching charge distribution, the difference in the W1 and W0 states is determined by whether the HZO/SiO2 interface traps are filled and emptied, respectively. Subthreshold current method (SCM) shows that SS increases from ∼95 mV/dec (W1 state) to 110 mV/dec (W0 state), yielding effective interface trap density (Dit,eff) values of 4 × 1012 and 7.8 × 1012 cm−2eV−1, respectively; their difference (3.8 × 1012 cm−2eV−1) corresponds to Dit,FE/DE. Methods that exploit the frequency-dependent response of the defect states–Multi-frequency C-V (MFCV) and Terman method (TM)–yield Dit0 and Dit,FE/DE values that match the SCM results. Accounting for the capacitive-projection factor of 2.5, the actual HZO/SiO2 interface trap density (DFE/DE) is ∼1 × 1013 cm−2eV−1, approximately 2.5 times higher than Dit0. The combined SCM-MFCV-TM framework thus furnishes a rapid, purely electrical metric for monitoring HZO/SiO2 quality and guides strategies to suppress remote trap-carrier interaction (RTCI)-driven degradation in FeFET performance.

在这项工作中,研究了TiN/Hf × Zr 1 × o2 (HZO)/ sio2 /Si铁电场效应管(fefet)的极化依赖工作特性,并定量地分离了远端HZO/ sio2界面陷阱(dit,FE/DE)和Si/ sio2界面陷阱(dit0)。X射线光电子能谱(XPS)揭示了HZO/ sio2界面上富氧空位(V O)的hfsiox层。基于晶体管工作理论和陷阱/极化开关电荷分布,W1和W0状态的差异取决于HZO/ sio2界面陷阱是否被填充和排空。亚阈值电流法(SCM)显示,SS从~ 95 mV/dec (W1态)增加到110 mV/dec (W0态),有效界面阱密度(dit,eff)分别为4 × 10 12和7.8 × 10 12 cm−2 eV−1;它们的差值(3.8 × 10 12 cm−2 eV−1)对应于dit,FE/DE。利用缺陷状态的频率相关响应的方法-多频率C - V (MFCV)和Terman方法(TM) -产生与SCM结果匹配的dit0和dit0,FE/DE值。考虑到电容投影因子为2.5,实际的HZO/ sio2界面阱密度(dfe /DE)为~ 1 × 10 13 cm−2 eV−1,约为dit0的2.5倍。因此,组合SCM - MFCV - TM框架为监测HZO/ sio2质量提供了快速、纯电度量,并指导抑制远程陷阱-载流子相互作用(RTCI)驱动的ffet性能下降的策略。
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引用次数: 0
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Advanced Electronic Materials
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