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(Invited) Role of Oxidant Gas for Atomic Layer Deposition of HfxZr1−XO2 Thin Films on Ferroelectricity of Metal-Ferroelectric-Metal Capacitors (特邀)氧化剂气体在 HfxZr1-XO2 薄膜原子层沉积过程中对金属-铁电-金属电容器铁电性的影响
Pub Date : 2024-05-17 DOI: 10.1149/11302.0051ecst
Takashi Onaya, Koji Kita
We fabricated 400°C-annealed TiN/HfxZr1−xO2 (HZO)/TiN metal–ferroelectric–metal (MFM) capacitors using H2O and O2 plasma as oxidant gases of thermal (TH) and plasma-enhanced atomic layer deposition (PE-ALD), respectively, for HZO films. The PE-ALD film formed a more ferroelectric orthorhombic phase compared with the TH-ALD case. Therefore, the MFM capacitor with the PE-ALD film showed higher remanent polarization and dielectric constant. For the PE-ALD case, moreover, an oxygen-rich interfacial layer (O-rich-IL) was formed between the HZO film and TiN-bottom electrode during the ALD process. Thus, the MFM capacitor with the PE-ALD film showed less degradation of switching polarization during field cycling compared with the TH-ALD case, because an O-rich-IL should prevent the interface reaction and formation of additional oxygen vacancies in the PE-ALD film during field cycling. Based on these results, it is important to consider the selection of an ALD oxidant gas for the fabrication of HZO-based MFM capacitors.
我们分别使用 H2O 和 O2 等离子体作为热沉积(TH)和等离子体增强原子层沉积(PE-ALD)HZO 薄膜的氧化剂气体,制作了 400°C 退火 TiN/HfxZr1-xO2(HZO)/TiN 金属铁电金属(MFM)电容器。与 TH-ALD 情况相比,PE-ALD 膜形成了更多的铁电正交相。因此,使用 PE-ALD 薄膜的 MFM 电容器显示出更高的剩电极化和介电常数。此外,对于 PE-ALD 情况,在 ALD 过程中,HZO 薄膜和 TiN 底电极之间形成了富氧界面层(O-rich-IL)。因此,与 TH-ALD 情况相比,使用 PE-ALD 薄膜的 MFM 电容器在电场循环过程中的开关极化衰减较小,因为 O-rich-IL 可以防止 PE-ALD 薄膜在电场循环过程中发生界面反应和形成额外的氧空位。基于这些结果,在制造基于 HZO 的 MFM 电容器时考虑选择 ALD 氧化剂气体非常重要。
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引用次数: 0
Selectivity Study of Anodic Seawater Electrolysis Catalysts Using the Rotating Ring-Disc Electrode Method 使用旋转环盘电极法研究阳极海水电解催化剂的选择性
Pub Date : 2024-05-17 DOI: 10.1149/11309.0003ecst
Oliver Horner, Elod Lajos Gyenge, David P. Wilkinson
Seawater Electrolysis is an exciting alternative to freshwater electrolysis; however, it suffers from a multitude of issues that must be resolved before the technology can be scaled. Corrosive hypochlorite forms at the anode of seawater electrolysis and can damage catalysts and electrolyzer components. Hypochlorite is unstable and can decay, particularly when exposed to heat and metal ions, which can lead to erroneously high oxygen evolution reaction (OER) selectivity conclusions, resulting in poor catalyst and electrolyzer component selection. In this study, we use the rotating ring-disc electrode technique to characterize the selectivity of IrO2, NiO, Co3O4, RuO2, Pt and PtRu electrocatalysts in situ at near-neutral pH (8.4) with linear scan voltammetry (LSV), potentiostatic and galvanostatic experiments. Our findings reveal that elevated temperatures are conducive to higher OER selectivity. Furthermore, when we increased the chloride concentration in the electrolyte with an IrO2 catalyst, we observed that although the overall selectivity towards the OER reaction decreased, the OER current independently increased, indicating a synergistic relationship.
海水电解法是淡水电解法的一种令人兴奋的替代方法;然而,它存在许多问题,必须在该技术规模化之前加以解决。海水电解的阳极会形成腐蚀性次氯酸盐,并可能损坏催化剂和电解槽组件。次氯酸盐不稳定,会发生衰变,尤其是在受热和接触金属离子时,这会导致氧进化反应(OER)选择性结论错误地偏高,从而导致催化剂和电解槽组件选择不当。在本研究中,我们使用旋转环盘电极技术,通过线性扫描伏安法 (LSV)、恒电位和恒电流实验,对 IrO2、NiO、Co3O4、RuO2、Pt 和 PtRu 电催化剂在接近中性 pH 值(8.4)下的选择性进行了原位表征。我们的研究结果表明,温度升高有利于提高 OER 的选择性。此外,当我们用二氧化铱催化剂增加电解液中的氯浓度时,我们观察到虽然对 OER 反应的总体选择性降低了,但 OER 电流却独立地增加了,这表明了一种协同关系。
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引用次数: 0
(Invited) Bulk Traps in Layered 2D Gate Dielectrics (特邀)层状二维栅极电介质中的块状陷阱
Pub Date : 2024-05-17 DOI: 10.1149/11302.0025ecst
Jaemin Shin, Tyafur Pathan, Guanyu Zhou, Christopher L. Hinkle
In this work, we synthesize new 2D layered dielectrics and fabricate metal-insulator-metal (MIM) capacitors to determine their viability for scaled gate dielectrics (ZrNCl, HfNCl, BiOCl, and Mg(OH)2) in transition metal dichalcogenide-based transistors. While successful synthesis and fabrication was demonstrated, the properties of the dielectrics were decidedly underwhelming for device applications. The dielectric constants, in most cases, were only marginally better than SiO2 (k = 4-6), the leakage currents were too high due to poor band offsets, and most importantly, the bulk trap density, as seen previously in III-V devices, was very high. Overall, there still is no viable 2D gate dielectric for scaled field effect transistors.
在这项工作中,我们合成了新的二维层状电介质,并制作了金属-绝缘体-金属(MIM)电容器,以确定它们在基于过渡金属二卤化物的晶体管中作为按比例栅极电介质(ZrNCl、HfNCl、BiOCl 和 Mg(OH)2)的可行性。虽然成功合成和制造了这些电介质,但电介质的特性在器件应用中明显不尽如人意。在大多数情况下,介电常数仅略微优于二氧化硅(k = 4-6);由于带偏移较差,漏电流过高;最重要的是,正如之前在 III-V 器件中看到的那样,体阱密度非常高。总体而言,目前仍没有适用于按比例场效应晶体管的可行二维栅极电介质。
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引用次数: 0
E-Mode AlGaN/GaN HEMTs Using p-NiO Gates 使用 p-NiO 栅极的 E-Mode AlGaN/GaN HEMT
Pub Date : 2024-05-17 DOI: 10.1149/11307.0045ecst
Chao-Ching Chiang, Hsiao-Hsuan Wan, Jian-Sian Li, Fan Ren, T. J. Yoo, Honggyu Kim, S. J. Pearton
Sputtered p-NiO films were used to suppress gate leakage and produce a positive shift in gate voltage of AlGaN/GaN high electron mobility transistors for e-mode operation. A direct comparison with Schottky gate devices fabricated on the same wafer shows the utility of the NiO in increasing the on-off ratio and shifting the threshold voltage from -0.95 V (Schottky gated) to +0.9 V (NiO gated). The breakdown voltage was 780 V for a 40 µm drain-source separation. The sub-threshold swing decreased from 181 mV/dec for Schottky gate HEMTs to 128 mV/dec on NiO-gated devices. The simple fabrication process without any annealing or passivation steps shows the promise of NiO-gates for e-mode AlGaN/GaN HEMT operation.
溅射 p-NiO 薄膜用于抑制栅极漏电,并使 AlGaN/GaN 高电子迁移率晶体管的栅极电压发生正向移动,以实现电子模式操作。通过与在同一晶圆上制造的肖特基栅极器件进行直接比较,可以看出氧化镍在提高导通-关断比和将阈值电压从-0.95 V(肖特基栅极)提高到+0.9 V(氧化镍栅极)方面的作用。漏极-源极间距为 40 µm 时,击穿电压为 780 V。阈下摆动从肖特基栅极 HEMT 的 181 mV/dec 下降到 NiO 栅极器件的 128 mV/dec。无需任何退火或钝化步骤的简单制造工艺表明,NiO 栅极在电子模式 AlGaN/GaN HEMT 工作中大有可为。
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引用次数: 0
Printable MXene Ink Hybridized with ZSM-5 for Gas Sensing and CO2 Capturing 与 ZSM-5 杂交的可印刷 MXene 油墨用于气体传感和二氧化碳捕获
Pub Date : 2024-05-17 DOI: 10.1149/11313.0015ecst
胜辉 夏, Chen Chen, Jinhong Liu, Kyle Leatt, Thomas Thundat, Ajit Khosla
MXene has garnered significant attention as a two-dimensional material with exceptional physicochemical properties for gas sensing development. This study utilized ZSM-5 nanoparticles loaded with MXene to prepare printable inks, aiming to explore novel applications of MXene in the gas sensing field. The morphology of MXene/ZSM-5 was characterized using scanning electron microscopy (SEM) and transmission electron microscopy (TEM), demonstrating the typical layered structure of MXene and particle morphology of composite ZSM-5. X-ray photoelectron spectroscopy (XPS) confirmed no production of TiO2 by providing valence information on elements. Thermogravimetric analysis (TG) revealed excellent thermal stability. To verify functional gas sensing feasibility, various hydrocarbons and common gases underwent adsorption and desorption tests (BET). Results showed that MXene loaded with ZSM-5 exhibited good adsorbability for C4H10, C7H8, SF6, H2O and O2 while having a certain trapping effect on CO2. Through testing and analyzing printing results, it was found that the MXene/ZSM-5 ink overcame dispersion issues present in pure MXene ink.
MXene 作为一种具有特殊物理化学特性的二维材料,在气体传感领域的发展备受关注。本研究利用负载有 MXene 的 ZSM-5 纳米粒子制备可印刷油墨,旨在探索 MXene 在气体传感领域的新型应用。利用扫描电子显微镜(SEM)和透射电子显微镜(TEM)对 MXene/ZSM-5 的形态进行了表征,结果表明 MXene 具有典型的层状结构,而 ZSM-5 则具有复合颗粒形态。X 射线光电子能谱(XPS)通过提供元素的价态信息,证实没有生成 TiO2。热重分析(TG)显示出卓越的热稳定性。为了验证功能气体传感的可行性,对各种碳氢化合物和常见气体进行了吸附和解吸测试(BET)。结果表明,负载 ZSM-5 的 MXene 对 C4H10、C7H8、SF6、H2O 和 O2 具有良好的吸附性,同时对 CO2 有一定的捕集作用。通过测试和分析印刷结果发现,MXene/ZSM-5 油墨克服了纯 MXene 油墨存在的分散问题。
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引用次数: 0
Micropatternable Ink Composed of MAX Phase ZIF-8 for Gas Sensing Applications 用于气体传感应用的 MAX 相 ZIF-8 微图案油墨
Pub Date : 2024-05-17 DOI: 10.1149/11313.0003ecst
Chen Chen, 胜辉 夏, Jinhong Liu, Kyle Leatt, Thomas Thundat, Ajit Khosla
This work provides a detailed introduction to the preparation methods, structural characteristics, and various performance tests of the Ti3C2/ZIF-8 composite material. Initially, the composite material is obtained through the synthesis, mixing, and subsequent processing of MXene solution and ZIF-8 nanoparticles. The coating structure and properties were comprehensively characterized using SEM, TEM, and XRD. These analyses revealed the material's layered structure, high crystallinity, and surface activity. BET analysis of Ti3C2/ZIF-8 also shows excellent gas adsorption-desorption performance, having an especially high-efficiency adsorption capacity for VOCs. TGA further demonstrates the thermal stability and chemical stability of Ti3C2/ZIF-8 and its printability was tested indicating widespread application potential in coating preparation through ultrasonic spray technology. Finally, we show methods to regulate and control coating thickness and roughness for precision manufacturing. These analyses together emphasize the application value of Ti3C2/ZIF-8 in fields such as gas-storage, gas-separation, and environmental monitoring.
本研究详细介绍了 Ti3C2/ZIF-8 复合材料的制备方法、结构特征和各种性能测试。首先,通过 MXene 溶液和 ZIF-8 纳米粒子的合成、混合和后续加工得到复合材料。利用 SEM、TEM 和 XRD 对涂层结构和性能进行了全面表征。这些分析表明了材料的层状结构、高结晶度和表面活性。此外,Ti3C2/ZIF-8 的 BET 分析表明其具有优异的气体吸附-解吸性能,尤其是对挥发性有机化合物具有高效的吸附能力。TGA 进一步证明了 Ti3C2/ZIF-8 的热稳定性和化学稳定性,其可印刷性测试表明,通过超声波喷涂技术制备涂层具有广泛的应用潜力。最后,我们展示了用于精密制造的涂层厚度和粗糙度的调节和控制方法。这些分析共同强调了 Ti3C2/ZIF-8 在气体储存、气体分离和环境监测等领域的应用价值。
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引用次数: 0
Impact of Oxide Charges on The Minority Carrier Response in MOS(p) Devices With Al2O3/SiO2 Gate Stacks under Strong Inversion Condition 氧化物电荷对强反转条件下具有 Al2O3/SiO2 栅极叠层的 MOS(p)器件中少数载流子响应的影响
Pub Date : 2024-05-17 DOI: 10.1149/11302.0043ecst
Chi-Yi Kao, Tai-Ming Kung, J. Hwu
In this study, a compact model proposed in the previous work (2) was utilized to elucidate an unusual minority carrier response time observed in MOS(p) devices with Al2O3/SiO2 gate stacks. It is supposed that the number of oxide charges increases with SiO2 thickness. The findings confirmed the heightened sensitivity of device alternating current (AC) characteristics to oxide charges in the outer region. Accordingly, we explored the dependencies of oxide thickness and quality on the transition frequency (ωm) of devices.
在本研究中,我们利用之前工作(2)中提出的一个紧凑模型来阐明在采用 Al2O3/SiO2 栅极堆栈的 MOS(p)器件中观察到的不寻常的少数载流子响应时间。据推测,氧化物电荷的数量会随着二氧化硅厚度的增加而增加。研究结果证实,器件的交流电(AC)特性对外部区域的氧化物电荷更加敏感。因此,我们探讨了氧化物厚度和质量对器件过渡频率 (ωm)的影响。
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引用次数: 0
(Invited) CdS/Ti-Si-O Composite Photoanode for Photoelectrochemical Hydrogen Generation (特邀)用于光电化学制氢的 CdS/Ti-Si-O 复合光阳极
Pub Date : 2024-05-17 DOI: 10.1149/11302.0061ecst
Weilong Feng, Dongyan Ding, Zhi Chen
Advancements in clean energy drive socio-economic development and foster a sustainable future by restructuring energy systems and promoting low-carbon development. In this paper, we presented a comprehensive investigation on the design and performance characterization of CdS/Ti-Si-O composite photoanodes for photoelectrochemical (PEC) hydrogen generation. Silicon-doped TiO2 nanotube arrays were fabricated through anodization of Ti-5Si alloy, followed by the deposition of CdS using the SILAR (successive ionic layer adsorption and reaction) process, resulting in nanostructured Ti-Si-O photoanodes modified with CdS. The composite photoanodes were characterized in terms of their composition, microstructure, optical properties and photoelectrochemical hydrogen production performance. The composite photoanodes revealed a notable enhancement in PEC hydrogen generation properties with a photocurrent density of 7.86 mA/cm2,which was 19.15 times and 9.59 times to those of the undoped TiO2 photoanode and Ti-Si-O photoanode, respectively. The Si-doping mechanism of the photoanodes was elucidated through Density Functional Theory (DFT) calculations. The synergistic combination of Si-doping and CdS modification represents a novel and promising approach for the design of efficient nanostructured photoanodes.
清洁能源的进步推动了社会经济的发展,并通过重构能源系统和促进低碳发展,打造了一个可持续发展的未来。本文全面研究了用于光电化学(PEC)制氢的 CdS/Ti-Si-O 复合光阳极的设计和性能表征。通过对 Ti-5Si 合金进行阳极氧化处理,制备出掺硅 TiO2 纳米管阵列,然后利用 SILAR(连续离子层吸附和反应)工艺沉积 CdS,最终制备出用 CdS 修饰的纳米结构 Ti-Si-O 光阳极。研究人员对复合光阳极的组成、微观结构、光学特性和光电化学制氢性能进行了表征。复合光阳极显著提高了光致化学产氢性能,其光电流密度为7.86 mA/cm2,分别是未掺杂TiO2光阳极和Ti-Si-O光阳极的19.15倍和9.59倍。密度泛函理论(DFT)计算阐明了光阳极的Si掺杂机理。Si掺杂与CdS修饰的协同结合为设计高效纳米结构光阳极提供了一种新颖而有前景的方法。
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引用次数: 0
High-Frequency Electrochemical Impedance Spectroscopy for Detecting Li Deposition Toward Assessing Thermal Stability in LiBs 用于检测锂沉积的高频电化学阻抗能谱,以评估锂电池的热稳定性
Pub Date : 2024-05-17 DOI: 10.1149/11301.0009ecst
Keisuke Ishikawa, Shogo Komagata, Ryohei Morimoto, Masanori Ishigaki, Hiroki Kondo, Tsuyoshi Sasaki
Li deposition decreases the thermal stability of Li-ion batteries (LiBs), reducing safety. We have developed High-Frequency Electrochemical Impedance Spectroscopy (HF-EIS) to detect Li deposition from the high-frequency real part impedance in the MHz range. The evaluation of the relationship between the onset temperature of thermal runaway and the change in high-frequency impedance demonstrated that HF-EIS is capable of quantitatively evaluating the safety associated with Li deposition. The HF-EIS can be a diagnostic tool for safety quantification and can contribute to the development of battery materials by reducing the cost of destructive testing.
锂沉积会降低锂离子电池(LiBs)的热稳定性,从而降低安全性。我们开发了高频电化学阻抗谱(HF-EIS),从兆赫范围内的高频实部阻抗检测锂沉积。对热失控起始温度与高频阻抗变化之间关系的评估表明,HF-EIS 能够定量评估与锂沉积相关的安全性。高频-EIS 可以作为安全量化的诊断工具,并通过降低破坏性测试的成本促进电池材料的开发。
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引用次数: 0
Design, Construction, and Performance Testing of a Collapsible Parabolic Dish Solar Cooker for Temperature Control 用于温度控制的可折叠抛物面太阳能灶的设计、建造和性能测试
Pub Date : 2024-05-17 DOI: 10.1149/11310.0021ecst
Peter Mwinisin, Douglas Yeboah, Isaac Annin
This paper proposes solar energy as a viable alternative to biomass fuels for cooking, introducing a collapsible parabolic solar cooker designed to regulate heat production. The collector is divided into three sectors, with a specific condition for effective convergence of reflected radiation. The total concentration ratio is 89.4, with the primary sector covering 42%, while sectors 2 and 3 occupy 29% each. In the analysis ASAE protocol was employed. The results obtained from the ASAE S580.1 test revealed a range of cooking power values, with a minimum of 215.5 W and a maximum of 280.9 W. The single measure of performance of the cooker was gauged at 234.17 W. Regarding the Standard Stagnation Temperature, it was observed that a reduction of the collector area by 0.343݉ଶ resulted in a temperature decrease of 59.5℃. The highest recorded SST for the entire solar cooker (when all three sectors were expanded) reached 279℃.
本文介绍了一种可折叠抛物面太阳灶,旨在调节热量的产生。集热器分为三个扇区,并具有有效汇聚反射辐射的特定条件。总集中率为 89.4,其中第一扇区占 42%,第二和第三扇区各占 29%。分析中采用了 ASAE 协议。ASAE S580.1 测试的结果显示了烹饪功率的范围,最小值为 215.5 W,最大值为 280.9 W。关于标准停滞温度,可以看到集热器面积减少 0.343݉ଶ,温度降低 59.5℃。整个太阳能灶(所有三个部分都扩大时)记录到的最高 SST 达到 279℃。
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引用次数: 0
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