Yayong Wang, Shujie Liu, Shixin Zhang, Yu-Bin Huang, K. Fan
Atmospheric disturbance influence the measurement accuracy greatly in laser precision measurement of long distance. A real-time filtering algorithm based on time series analysis theory is proposed in this paper. Firstly, ARMA (Auto-Regressive and Moving Average) model of sample data is set up based on the theory of time series analysis, then the mathematical expectation is obtained according to the model as the filtering result, finally, it is integrated into the laboratory laser beam drift measurement system for real-time filtering measurement. It is evident from the simulation results that high accuracy can be obtained after filtering. The experimental results show that the stability of the filtered drift increases by about 20%.
{"title":"A filter algorithm based on ARMA model to suppress the influence of atmospheric disturbance in laser straightness measurement","authors":"Yayong Wang, Shujie Liu, Shixin Zhang, Yu-Bin Huang, K. Fan","doi":"10.1117/12.2511948","DOIUrl":"https://doi.org/10.1117/12.2511948","url":null,"abstract":"Atmospheric disturbance influence the measurement accuracy greatly in laser precision measurement of long distance. A real-time filtering algorithm based on time series analysis theory is proposed in this paper. Firstly, ARMA (Auto-Regressive and Moving Average) model of sample data is set up based on the theory of time series analysis, then the mathematical expectation is obtained according to the model as the filtering result, finally, it is integrated into the laboratory laser beam drift measurement system for real-time filtering measurement. It is evident from the simulation results that high accuracy can be obtained after filtering. The experimental results show that the stability of the filtered drift increases by about 20%.","PeriodicalId":115119,"journal":{"name":"International Symposium on Precision Engineering Measurement and Instrumentation","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123590250","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jingzhi Huang, Huixin Zheng, Lin Jiang, Xiangzhang Chao, Xiangshuai Ding
In order to solve boundary effect for non-closed circular profile with conventional Gaussian filter, two modified Gaussian filters based on odd and even functions are put forward. By extending original profile data on the boundary effect area, the sampling information on the boundary effect area of non-closed circular profile can be used fully, and then open-loop Gaussian filter is used for filtering. The validity of two designed filters was tested by numerical simulation and experiment. The results demonstrate that the modified Gaussian filter based on even function is more effective to reduce boundary effect than that based on odd function.
{"title":"Design of Gaussian filters based on odd and even functions used for non-closed circular profile","authors":"Jingzhi Huang, Huixin Zheng, Lin Jiang, Xiangzhang Chao, Xiangshuai Ding","doi":"10.1117/12.2513586","DOIUrl":"https://doi.org/10.1117/12.2513586","url":null,"abstract":"In order to solve boundary effect for non-closed circular profile with conventional Gaussian filter, two modified Gaussian filters based on odd and even functions are put forward. By extending original profile data on the boundary effect area, the sampling information on the boundary effect area of non-closed circular profile can be used fully, and then open-loop Gaussian filter is used for filtering. The validity of two designed filters was tested by numerical simulation and experiment. The results demonstrate that the modified Gaussian filter based on even function is more effective to reduce boundary effect than that based on odd function.","PeriodicalId":115119,"journal":{"name":"International Symposium on Precision Engineering Measurement and Instrumentation","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123819737","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pingping Jia, Hong Zhao, Yuwei Qin, Meiqi Fang, Xiaopeng Guo
A high speed swept source optical coherence tomography (SS-OCT) system has been proposed for tomographic map of spatial light modulator. In the optical arrangement, a swept-source with 100 kHz axial-scanning rate and a compact Michelson interferometer was applied. The implemented SS-OCT system has an axial resolution of 15μm and penetration depth of 12mm. The two-dimensional tomographic grayscale maps of the sample can be obtained in real time. As a result, the thickness of glass substrate, liquid crystal layer and the silicon substrate could be obtained simultaneously. Compared with the traditional detection methods, The SS-OCT system has the characteristics of fast imaging speed, stable repeatability of measurement with high-resolution and non-destructive.
{"title":"Non-destructive rapid inspection methods for spatial light modulator using swept source optical coherence tomography","authors":"Pingping Jia, Hong Zhao, Yuwei Qin, Meiqi Fang, Xiaopeng Guo","doi":"10.1117/12.2512097","DOIUrl":"https://doi.org/10.1117/12.2512097","url":null,"abstract":"A high speed swept source optical coherence tomography (SS-OCT) system has been proposed for tomographic map of spatial light modulator. In the optical arrangement, a swept-source with 100 kHz axial-scanning rate and a compact Michelson interferometer was applied. The implemented SS-OCT system has an axial resolution of 15μm and penetration depth of 12mm. The two-dimensional tomographic grayscale maps of the sample can be obtained in real time. As a result, the thickness of glass substrate, liquid crystal layer and the silicon substrate could be obtained simultaneously. Compared with the traditional detection methods, The SS-OCT system has the characteristics of fast imaging speed, stable repeatability of measurement with high-resolution and non-destructive.","PeriodicalId":115119,"journal":{"name":"International Symposium on Precision Engineering Measurement and Instrumentation","volume":"80 4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131929420","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The resolution of optical microscopy fundamentally limited by diffraction is at best 200 nm. Super-resolution structured illumination microscopy (SR-SIM) provides an elegant way of overcoming the diffraction limit in conventional widefield microscope by superimposing a grid pattern generated through interference of diffraction orders on the specimen while capturing images. The use of non-uniform illumination field “shift” high specimen frequencies which are out-ofband into the pass-band of the microscope through spatial frequency mixing with the illumination field. Therefore the effective bandwidth of SR-SIM is approximately twice as conventional microscopy, corresponding to a 2-fold resolution enhancement, if the difference between excitation and emission wavelength is ignored. However, such a wide-field scheme typically can only image optically thin samples and is incompatible with multiphoton processes. In this paper, we propose a Super-resolution scanning scheme with virtually structured illumination, utilizes detection sensitivity modulation on line by programming or off line by numerical processing together with temporally cumulative imaging, the excitation intensity is constant while capturing images. In this case a nondescanned array detector such as CCD camera is needed. When combined with multiphoton excitation, this scheme can image thick samples with threedimensional optical sectioning and much improved resolution.
{"title":"Super-resolution scanning microscopy with virtually structured illumination","authors":"Su Zhang, Jingtao Li, Limin Zou, Xuemei Ding","doi":"10.1117/12.2511907","DOIUrl":"https://doi.org/10.1117/12.2511907","url":null,"abstract":"The resolution of optical microscopy fundamentally limited by diffraction is at best 200 nm. Super-resolution structured illumination microscopy (SR-SIM) provides an elegant way of overcoming the diffraction limit in conventional widefield microscope by superimposing a grid pattern generated through interference of diffraction orders on the specimen while capturing images. The use of non-uniform illumination field “shift” high specimen frequencies which are out-ofband into the pass-band of the microscope through spatial frequency mixing with the illumination field. Therefore the effective bandwidth of SR-SIM is approximately twice as conventional microscopy, corresponding to a 2-fold resolution enhancement, if the difference between excitation and emission wavelength is ignored. However, such a wide-field scheme typically can only image optically thin samples and is incompatible with multiphoton processes. In this paper, we propose a Super-resolution scanning scheme with virtually structured illumination, utilizes detection sensitivity modulation on line by programming or off line by numerical processing together with temporally cumulative imaging, the excitation intensity is constant while capturing images. In this case a nondescanned array detector such as CCD camera is needed. When combined with multiphoton excitation, this scheme can image thick samples with threedimensional optical sectioning and much improved resolution.","PeriodicalId":115119,"journal":{"name":"International Symposium on Precision Engineering Measurement and Instrumentation","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130417753","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The motion measurement based on machine vision has been more and more widely used in robots, object tracking and other fields. However, the relative motion between camera and object often causes images blurred, which decreases the reliability of detection. To improve the detection accuracy of the motion-blurred images edges, a comprehensive method is proposed. By analyzing the grayscale distribution of the object images in different motion directions, we used different methods to enhance the low frequency sub-band images which were obtained by wavelet transform. The subpixel edge detection method based on cubic spline interpolation was applied to detect the edges of the blurred and enhanced images, respectively. Experimental results show that the proposed method avoids the misdetection of the blurred images edges, and obtains higher edge detection accuracy.
{"title":"A high precision edge detection method for the blurred image in motion measurement","authors":"Zhang Ying, C. Cai, Zhihua Liu, Yang Ming","doi":"10.1117/12.2511940","DOIUrl":"https://doi.org/10.1117/12.2511940","url":null,"abstract":"The motion measurement based on machine vision has been more and more widely used in robots, object tracking and other fields. However, the relative motion between camera and object often causes images blurred, which decreases the reliability of detection. To improve the detection accuracy of the motion-blurred images edges, a comprehensive method is proposed. By analyzing the grayscale distribution of the object images in different motion directions, we used different methods to enhance the low frequency sub-band images which were obtained by wavelet transform. The subpixel edge detection method based on cubic spline interpolation was applied to detect the edges of the blurred and enhanced images, respectively. Experimental results show that the proposed method avoids the misdetection of the blurred images edges, and obtains higher edge detection accuracy.","PeriodicalId":115119,"journal":{"name":"International Symposium on Precision Engineering Measurement and Instrumentation","volume":"81 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134148448","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Cellulose nanocrystal (CNC) is an emerging nanomaterial that has drawn increasing attention recently. It is abundant, sustainable, renewable, and biodegradable. They have unique chemical and mechanical characteristics that cannot be met by traditional cellulose-derived materials, such as high aspect ratio, low density, high stiffness, high tensile strength and very low coefficients of thermal expansion. This paper is focused on the formation and characterization of CNC films and the subsequent traceable metrology of CNC film thickness by atomic force microscopy (AFM). The AFM is calibrated by a series of certified reference materials, and thus the measured values can be traceable to the laser wavelength reference (meter definition). Results show that CNC films with negative charges on surface can be formed via physisorption to an amine-terminated thiol layer on gold through spin coating. The CNC film thickness can be controlled by CNC solution concentration. A thorough understanding of CNC metrology is the foundation for further study of CNC chemical and mechanical characteristics and applications.
{"title":"Synthesis and metrology of cellulose nanocrystal films","authors":"Cong Cao, Dongsheng Zhao, Ying Tang, Tingting Peng","doi":"10.1117/12.2511218","DOIUrl":"https://doi.org/10.1117/12.2511218","url":null,"abstract":"Cellulose nanocrystal (CNC) is an emerging nanomaterial that has drawn increasing attention recently. It is abundant, sustainable, renewable, and biodegradable. They have unique chemical and mechanical characteristics that cannot be met by traditional cellulose-derived materials, such as high aspect ratio, low density, high stiffness, high tensile strength and very low coefficients of thermal expansion. This paper is focused on the formation and characterization of CNC films and the subsequent traceable metrology of CNC film thickness by atomic force microscopy (AFM). The AFM is calibrated by a series of certified reference materials, and thus the measured values can be traceable to the laser wavelength reference (meter definition). Results show that CNC films with negative charges on surface can be formed via physisorption to an amine-terminated thiol layer on gold through spin coating. The CNC film thickness can be controlled by CNC solution concentration. A thorough understanding of CNC metrology is the foundation for further study of CNC chemical and mechanical characteristics and applications.","PeriodicalId":115119,"journal":{"name":"International Symposium on Precision Engineering Measurement and Instrumentation","volume":"37 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134297645","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jin-tao Wang, Jingyue Zhang, Xin-yu Ma, Lin Tong, X. Bao
Due to perfect stability, deionized water is usually used as one important reference material for density and volume calibration. To evaluate suitability of pure water density formulas for deionized water, one measurement system based on Archimedes’s principle was designed, and silicon ring was used for density standard to measure the density of deionized at 20°C. The experimental result shows that The Tanaka equation can be used to calculate the density of deionized water with deviation 5ppm. The uncertainty budget of measurement is analyzed, and the combined relative uncertainty is 4.09ppm (k=2).
{"title":"Measurement of deionized water density based on single silicon sphere","authors":"Jin-tao Wang, Jingyue Zhang, Xin-yu Ma, Lin Tong, X. Bao","doi":"10.1117/12.2512096","DOIUrl":"https://doi.org/10.1117/12.2512096","url":null,"abstract":"Due to perfect stability, deionized water is usually used as one important reference material for density and volume calibration. To evaluate suitability of pure water density formulas for deionized water, one measurement system based on Archimedes’s principle was designed, and silicon ring was used for density standard to measure the density of deionized at 20°C. The experimental result shows that The Tanaka equation can be used to calculate the density of deionized water with deviation 5ppm. The uncertainty budget of measurement is analyzed, and the combined relative uncertainty is 4.09ppm (k=2).","PeriodicalId":115119,"journal":{"name":"International Symposium on Precision Engineering Measurement and Instrumentation","volume":"109 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114242042","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In view of the traditional method of corner extraction, the main idea is to improve the corner extraction algorithm and ignore the imaging process of the calibration image, in this paper, an optimal polarization angle image corner extraction algorithm based on linear polarization feedback is introduced in the process of camera calibration, this method is mainly aimed at the problem of high-light regions which are difficult to detect and eliminate in the multi-position calibration image of space under natural light. The method firstly adopts the linear feedback of Stokes variable through a CCD camera with polarizing plates and obtains the corner image of the optimal angle of the checkerboard lattice in different positions in space, then we use the sub-pixel level detection algorithm and GAUSS's fitting method to precisely locate the corner points in the image and to solve the sub-pixel coordinates of the image corner, at last, the two-dimensional pixel coordinates of the corner points in each checkerboard image are extracted.
{"title":"Analysis of the extraction accuracy of the corner point of the camera using polarization imaging","authors":"Zhenmin Zhu, Xinyun Wang, Quanxin Liu, Fumin Zhang","doi":"10.1117/12.2512023","DOIUrl":"https://doi.org/10.1117/12.2512023","url":null,"abstract":"In view of the traditional method of corner extraction, the main idea is to improve the corner extraction algorithm and ignore the imaging process of the calibration image, in this paper, an optimal polarization angle image corner extraction algorithm based on linear polarization feedback is introduced in the process of camera calibration, this method is mainly aimed at the problem of high-light regions which are difficult to detect and eliminate in the multi-position calibration image of space under natural light. The method firstly adopts the linear feedback of Stokes variable through a CCD camera with polarizing plates and obtains the corner image of the optimal angle of the checkerboard lattice in different positions in space, then we use the sub-pixel level detection algorithm and GAUSS's fitting method to precisely locate the corner points in the image and to solve the sub-pixel coordinates of the image corner, at last, the two-dimensional pixel coordinates of the corner points in each checkerboard image are extracted.","PeriodicalId":115119,"journal":{"name":"International Symposium on Precision Engineering Measurement and Instrumentation","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116329147","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Optical fringe is one of important output information from the optical systems. Some important optical or system parameters can be obtained by analyzing the fringe information from optical system such as interferometer system or diffraction setup. The straight fringe is a kind of optical fringes frequently appearing in Young’s double slit interference and single-slit diffraction and other optical structures. For the information extraction of straight fringes, it is often necessary to calculate the fringe spacing parameters. Popular straight fringes analysis methods include the fringe center method and the Fourier transform method. In addition, some image processing methods realized line detection can also be used to analyze this straight fringes image, which include Hough transform and Radon transform. In this paper, four algorithms for fringe analysis are discussed and compared, which focus on method’s principle, algorithm’s simulation and performance when they be applied to detect the fringes spacing. At the same time, the anti-noise performance of two image processing algorithms including Hough transform and Radon transform are analyzed.
{"title":"Comparison of spacing detection algorithms for optical straight fringes images","authors":"Yuexin Wang, F. bai, Xiao-juan Gao, Ying Wang","doi":"10.1117/12.2512071","DOIUrl":"https://doi.org/10.1117/12.2512071","url":null,"abstract":"Optical fringe is one of important output information from the optical systems. Some important optical or system parameters can be obtained by analyzing the fringe information from optical system such as interferometer system or diffraction setup. The straight fringe is a kind of optical fringes frequently appearing in Young’s double slit interference and single-slit diffraction and other optical structures. For the information extraction of straight fringes, it is often necessary to calculate the fringe spacing parameters. Popular straight fringes analysis methods include the fringe center method and the Fourier transform method. In addition, some image processing methods realized line detection can also be used to analyze this straight fringes image, which include Hough transform and Radon transform. In this paper, four algorithms for fringe analysis are discussed and compared, which focus on method’s principle, algorithm’s simulation and performance when they be applied to detect the fringes spacing. At the same time, the anti-noise performance of two image processing algorithms including Hough transform and Radon transform are analyzed.","PeriodicalId":115119,"journal":{"name":"International Symposium on Precision Engineering Measurement and Instrumentation","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131961908","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Zhi-liang Gao, Q. Ji, Jian Chen, Xunbiao Zhang, Wei-hong Zhang, Junge Tan, Chenyan Wang
The traceability of cleanness parameter has received high attention from the metrology industry of light-scattering airborne particle counter. Based on the metrology method of the big particle concentration and the traceability method of airborne particle counter’s counting performance on small particle size by statistical analysis, this paper tries to build a coordinate system of the particles distribution on anodic aluminum oxide (AAO) membrane through the counter, choose the statistical samples by aerodynamics, observe these samples on membrane by field emission scanning electron microscope (FESEM), evaluate the uncertainty of measurement on standard particle statistics, analyze the uncertainty range and the key affecting factor, and put forward a method of improving statistics accuracy in process control. The test results prove that the method has important value on improvement of the theory of the cleanness traceability system based on FESEM and statistical analysis.
{"title":"Statistical measurement method of the standard particles through airborne particle counter based on FESEM","authors":"Zhi-liang Gao, Q. Ji, Jian Chen, Xunbiao Zhang, Wei-hong Zhang, Junge Tan, Chenyan Wang","doi":"10.1117/12.2511658","DOIUrl":"https://doi.org/10.1117/12.2511658","url":null,"abstract":"The traceability of cleanness parameter has received high attention from the metrology industry of light-scattering airborne particle counter. Based on the metrology method of the big particle concentration and the traceability method of airborne particle counter’s counting performance on small particle size by statistical analysis, this paper tries to build a coordinate system of the particles distribution on anodic aluminum oxide (AAO) membrane through the counter, choose the statistical samples by aerodynamics, observe these samples on membrane by field emission scanning electron microscope (FESEM), evaluate the uncertainty of measurement on standard particle statistics, analyze the uncertainty range and the key affecting factor, and put forward a method of improving statistics accuracy in process control. The test results prove that the method has important value on improvement of the theory of the cleanness traceability system based on FESEM and statistical analysis.","PeriodicalId":115119,"journal":{"name":"International Symposium on Precision Engineering Measurement and Instrumentation","volume":"201 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134085581","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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