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A novel Earth’s gravity method for accelerometer calibration 一种用于加速度计标定的地球重力新方法
Shengyang Zhou, C. Cai, Ying Wang, Zhihua Liu, Ming Yang
Advanced low frequency vibration calibration is imperative required as the wide applications of low frequency accelerometers. Low frequency calibration is commonly realized by the Earth’s gravity method or the laser interferometry. However, affected by the limited stroke of the standard vibration shaker, the calibration precision of laser interferometry at very low frequency is usually not ideal. Although the Earth’s gravity method can avoid this low calibration precision at very low frequency, its calibration frequency usually <5 Hz due to the influence of rotator centripetal acceleration. In this paper, the Earth’s gravity method mentioned in ISO 16063-16 is improved by using an effective image feature detection method. This method detects the angel between Earth’s gravity field direction and acceleration sensitivity axis direction to improve the Earth’s gravity static calibration accuracy.
随着低频加速度计的广泛应用,先进的低频振动校准势在必行。低频定标常用地球重力法或激光干涉法实现。然而,受标准激振器有限行程的影响,激光干涉测量在极低频时的校准精度通常不理想。虽然地球引力法在极低频率下可以避免这种低校准精度,但由于旋转体向心加速度的影响,其校准频率通常< 5hz。本文采用一种有效的图像特征检测方法,对ISO 16063-16中提到的地球重力法进行了改进。该方法通过检测地球重力场方向与加速度敏感轴方向的夹角,提高了地球重力静态标定精度。
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引用次数: 0
Laser frequency locking system using orthogonally demodulated Pound–Drever–Hall method 激光锁频系统采用正交解调庞德-德雷弗-霍尔方法
Juan Su, Mingxing Jiao, Fei Jiang, Junhong Xing
Based on the principle of orthogonal demodulation, a Pound-Drever-Hall laser frequency locking scheme is developed. In the orthogonal demodulation Pound-Drever-Hall system, three sine signals are generated simultaneously using a direct digital synthesizer. A 0° phase sine signal is used to drive an electro-optic modulator to produce the phase sidebands, and 180° and 270° phase sine signals are used as reference signals for phase demodulation. The phase-modulated laser beam is coupled with a reference Fabry–Pérot cavity, and the reflected beam is sent into a photo-detector, whose output is mixed with two orthogonal reference signals to obtain two orthogonal components of the error signal. Using an analogto- digital converter, the two orthogonal components are processed using orthogonal phase sensitive detection to obtain the error signal on a host computer. The Pound-Drever-Hall laser frequency discrimination and tracking system is established and investigated experimentally using the orthogonal demodulation method. A frequency discrimination curve is obtained, and it is observed that the resonant frequency of the Fabry–Pérot cavity can automatically track laser frequency variation.
基于正交解调原理,提出了一种庞德-德雷弗-霍尔激光锁频方案。在正交解调庞德-德雷弗-霍尔系统中,使用直接数字合成器同时产生三个正弦信号。0°相位正弦信号驱动电光调制器产生相位边带,180°和270°相位正弦信号作为相位解调的参考信号。将相位调制的激光束与参考法布里-帕姆罗腔耦合,将反射光束送入光电探测器,光电探测器的输出与两个正交参考信号混合,得到误差信号的两个正交分量。利用模数转换器,对两个正交分量进行正交相敏检测,在上位机上得到误差信号。采用正交解调方法建立了庞德-德雷弗-霍尔激光频率识别与跟踪系统,并进行了实验研究。得到了频率判别曲线,观察到法布里-帕姆罗特谐振腔的谐振频率能够自动跟踪激光频率的变化。
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引用次数: 1
Establishment of standard device for high rotational speed generation 高转速发电标准装置的建立
Qiao Sun, J. Bai, L. Du, Z. Fan, Hong-Bo Hu
The high rotational speed standard device based on brushless DC coreless micro motor and FPGA technology for highaccuracy rotational speed control was investigated and established, with resolution of 1 r/min in the measurement range of 40000 r/min to 100000 r/min. The expanded calibration uncertainty of this standard device is 1×10-5, k=3 The structure of the device and key technology involved were described.The dual closed-loop control solution was explained. The calibration results were provided.This high rotational speed standard device is used as an important working standard for the feasible traceability of high-precision optical tachometers and rotational speed measuring instruments at measurement range above 40000 r/min.
研究并建立了基于无刷直流无芯微电机和FPGA技术的高精度转速控制高转速标准装置,在40000 ~ 100000 r/min的测量范围内分辨率为1 r/min。该标准装置的扩展校准不确定度为1×10-5, k=3,介绍了该装置的结构及涉及的关键技术。说明了双闭环控制方案。给出了标定结果。该高转速标准装置是高精度光学转速表和转速测量仪表在40000 r/min以上测量范围内可行溯源的重要工作标准。
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引用次数: 0
Strain transfer characteristics of resistance strain-type transducer 电阻应变式传感器的应变传递特性
Zhigang Wang, Chi Xiao, Yinming Zhao, Yongqian Li, Zili Zhou
The strain transfer characteristics of resistance strain-type transducer were theoretically investigated. A resistance straintype transducer was modeled to be a four-layer and two-glue (FLTG) structure model, which comprises successively an elastomer, a ground adhesive, a substrate layer, an upper adhesive, a sensitive grids layer, and a polymer cover. The strain transfer progress in a resistance strain-type transducer was described by the FLTG structure model. The strain transitional zone (STZ) was defined and the strain transfer ratio (STR) of the FLTG structure was formulated. The dependence of the STR and STZ on both the structural sizes and material parameters were calculated. The results indicate that the ground adhesive (including its thickness, and shear modulus) have a greater influence on the strain transitional zone ratio and strain transitional zone. In order to ensure a higher sensitivity of the resistance strain-type transducer, the ground adhesive layer should be as thin as possible, while its shear modulus should be as large as possible. Selecting a ground adhesive with a large elasticity modulus can effectively reduce the influence of the thickness of the ground adhesive on the strain transfer ratio.
从理论上研究了电阻应变式传感器的应变传递特性。将电阻应变式传感器建模为四层双胶(FLTG)结构模型,该模型依次由弹性体、地胶层、基材层、上胶层、敏感栅格层和聚合物覆盖层组成。用FLTG结构模型描述了电阻应变式传感器的应变传递过程。定义了FLTG结构的应变过渡区(STZ),计算了FLTG结构的应变传递比(STR)。计算了STR和STZ对结构尺寸和材料参数的依赖关系。结果表明,地面胶粘剂(包括其厚度和剪切模量)对应变过渡区比和应变过渡区有较大的影响。为了保证电阻应变式传感器具有较高的灵敏度,地面粘接层应尽可能薄,同时其剪切模量应尽可能大。选择弹性模量大的地面胶粘剂可以有效降低地面胶粘剂厚度对应变传递比的影响。
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引用次数: 0
Establishment of measuring coordinate system for large gears measurement by using gauge blocks 大齿轮量块测量坐标系的建立
S. Li, Zhongpeng Zheng, Linyan Wang
In this paper, the establishment of measuring coordinate system for large gears measurement was studied and discussed. The solution based on gauge blocks was proposed and the scheme was devised. The mathematical model for the establishment of measuring coordinate system was deduced. The main factors that influence the establishment precision of measuring coordinate system were studied, such as the alignment error of the initial position of the blocks, the installation eccentricity error of the gauge blocks and the error caused by the tilt of the rotary table and the different working lengths of the gauge blocks. The experiments were carried out on C40 gear measurement center under the condition of constant temperature and humidity. The experimental results showed the establishment precision of R axis of the measuring coordinate system was higher than that of T axis of the measuring coordinate system. When the working lengths of the gauge blocks were within 300mm, the measuring coordinate precisions of R axis and T axis were less than 2.5 μ m and 4 μ m, respectively, which could meet the requirement of the medium precision large gears measurement.
本文对大齿轮测量坐标系的建立进行了研究和探讨。提出了基于量块的解决方案,并设计了方案。推导了测量坐标系建立的数学模型。研究了影响测量坐标系建立精度的主要因素,如量块初始位置对中误差、量块安装偏心误差以及转台倾斜和量块工作长度不同引起的误差。实验在恒温恒湿条件下,在C40齿轮测量中心进行。实验结果表明,测量坐标系R轴的建立精度高于测量坐标系T轴的建立精度。当量块的工作长度在300mm以内时,R轴和T轴的测量坐标精度分别小于2.5 μ m和4 μ m,可以满足中精度大型齿轮的测量要求。
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引用次数: 1
Two-dimensional reflective optical encoder based on point source illuminated grating imaging 基于点源照明光栅成像的二维反射式光学编码器
Hang Chen, Jian Wang, Yue Gao, Cheng-Chih Hsu, Peng Jin, Jie Lin
A novel two-dimensional reflective grating encoder is introduced. The optical encoder is developed by a binary amplitude reflective scale grating and a two-dimensional slit displacement sensor, which is fabricated by MEMS technology. Based on Talbot effort, the proposed method can achieve millimetric measurement with high accuracy, where the displacement difference within 0.1% and 0.2% for 1 mm and 20 mm measurement, respectively. By using the eight-segment data division program, the proposed method can easily distinguish 1 μm displacement measurement. Furthermore, in measurement speed tests, the proposed method can reach the movement speed about 5000 μm/s. The experimental results showed the proposed method can achieve high resolution, high speed and long-range measurement, which is potential in the industries and workshops application.
介绍了一种新型的二维反射光栅编码器。采用微机电系统(MEMS)技术,采用二幅反射尺度光栅和二维狭缝位移传感器构成了光学编码器。基于Talbot努力,该方法可以实现高精度的毫米级测量,测量1 mm和20 mm时,位移差值分别在0.1%和0.2%以内。通过八段数据分割程序,该方法可以很容易地分辨出1 μm的位移测量。此外,在测量速度测试中,该方法可达到5000 μm/s左右的移动速度。实验结果表明,该方法可以实现高分辨率、高速度和远程测量,在工业和车间中具有应用潜力。
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引用次数: 1
Using carbon nanotube membrane as counter electrode in voltammetric electronic tongue system 碳纳米管膜作为伏安电子舌系统的对电极
Yazhuo Li, Xiangdong Zhou
Carbon nanotube membrane (CNTM) has been employed as the counter electrode in a two-electrode voltammetric electronic tongue system. Owing to its large surface area, CNTM provides significant double layer capacitance at the solid/solution interface, and offer a constant potential during the electrochemical detection. In order to characterize the analytical possibilities of the electronic tongue system, hydrogen peroxide has been detected. Principal component analysis (PCA) is used for identification. From the PCA plots, the electronic tongue system by using CNTM counter electrode shows much better performance and more promising than the conventional voltammetric two-electrode electronic tongue system by using large surface stainless steel counter electrode.
采用碳纳米管膜(CNTM)作为双电极伏安电子舌系统的对电极。由于其较大的表面积,CNTM在固/液界面提供显著的双层电容,并在电化学检测过程中提供恒定的电位。为了表征电子舌系统的分析可能性,检测了过氧化氢。使用主成分分析(PCA)进行识别。从主成分分析图来看,采用CNTM对电极的电子舌系统比采用大表面不锈钢对电极的传统伏安双电极电子舌系统表现出更好的性能和前景。
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引用次数: 0
Reverse compensation to the angle estimate error using multi-groups sensor 利用多组传感器对角度估计误差进行反向补偿
Shuxian Wang, D. Peng, Zhiyi Wu, Tianheng Zhang, Yangyang Wang
The magnetoresistance(MR) sensor has been successfully demonstrated in rotational speed and position detection, however, the uneven magnetic field or the installation eccentricity are all decrease the signal quality and influence the reliability of measurement. Therefore, this paper presents the theory of time grating in displacement calculation and proposes a reverse compensation method using multi-groups sensor to improve measurement performance. A pair of linear tunnel magnetorsistance (TMR) sensors are spatially displaced by 90° electrical and excited by sin or cos signals. Another pair of sensors is reversed and diametrically apart to the former. A compensated traveling wave is got whose phase is proportional to the displacement of rotation. The angle displacement is measured by counting the time pulses that serve as measurement standards. The effectiveness of the proposed scheme is verified through a prototype permanent magnet motor system. That shows the amplitude of the measurement error from 0.17° to 0.04°, which reduces 75% by the special arrangement of the multi-groups TMR sensor. Even though the magnetic sensor presented here uses TMR sensors, the proposed technique is suited without any modification for Hall and other MR sensors as well.
磁阻传感器已成功应用于转速和位置检测,但磁场不均匀或安装偏心都会降低信号质量,影响测量的可靠性。因此,本文提出了时间光栅在位移计算中的理论,并提出了一种采用多组传感器的反向补偿方法来提高测量性能。一对线性隧道磁阻(TMR)传感器在空间上被90°电位移并被正弦或余弦信号激励。另一对传感器是相反的,与前者完全分开。得到了相位与旋转位移成正比的补偿行波。通过计算作为测量标准的时间脉冲来测量角位移。通过一个永磁电机样机系统验证了所提方案的有效性。结果表明,测量误差幅度在0.17°~ 0.04°之间,通过多组TMR传感器的特殊布置,测量误差幅度减小了75%。尽管这里提出的磁传感器使用TMR传感器,但所提出的技术适用于霍尔和其他MR传感器,无需任何修改。
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引用次数: 0
Design of flexure hinges in an H-drive precision stage with a large span 大跨度h型传动精密工作台柔性铰链设计
Shaokai Wang, Jinxin Hu, Changqi Li, Jiubin Tan
In order to balance the high translation stiffness and low twist stiffness in an H-drive precision stage with a large span, a design method based on flexure hinges combination is proposed. Firstly, various stiffness requirements in different degrees of freedom (DOF) of an H-drive precision stage with a large span are analyzed. Secondly, half-cartwheel flexure hinges combination is applied to balance these stiffness requirements. Thirdly, based on the Timoshenko beam theory, stiffness matrices of a single flexure hinge and combined hinges are established. Then, various structural parameters of the flexure hinge are determined by analyzing their influence on two performance indicators, including stiffness and motion precision. After that, finite element method is applied to verify these theoretical results. Finally, a stiffness identification experiment and a modal analysis experiment are conducted to test the 2-DOF stiffness of a single half-cartwheel flexure hinge and the natural frequency of the H-drive precision stage. The maximum error of stiffness between theoretical, simulation and experimental results is 13.4%. The natural frequency is up to 176.563 Hz, which could satisfy the control bandwidth requirement of the H-drive precision stage.
为了平衡大跨度h形传动精密工作台的高平移刚度和低扭转刚度,提出了一种基于柔性铰链组合的设计方法。首先,分析了大跨度h传动精密工作台在不同自由度下的刚度要求。其次,采用半侧轮柔性铰链组合来平衡这些刚度要求。第三,基于Timoshenko梁理论,建立了单柔性铰链和组合柔性铰链的刚度矩阵。然后,通过分析柔性铰链各结构参数对刚度和运动精度两项性能指标的影响,确定柔性铰链各结构参数。然后用有限元法对理论结果进行了验证。最后,进行了刚度辨识实验和模态分析实验,测试了单个半车轮柔性铰链的2自由度刚度和h型驱动精密工作台的固有频率。理论、仿真和实验结果的最大误差为13.4%。固有频率高达176.563 Hz,可以满足h级驱动精密工作台的控制带宽要求。
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引用次数: 0
Construction of a compact laser wavemeter with compensation of laser beam drift 具有激光束漂移补偿的紧凑型激光波长计的构造
Yindi Cai, B. Feng, K. Fan
A compact diffracting grating based laser wavemeter is constructed in this paper. Wavelength is the length unit of laser interferometers, it must be very accurate and stable during the length measurement. An air sensor, which is employed to correct the air refractive index through an empirical equation, is essential in laser interferometers. However, the empirical equation is suffered from indirect measurement, the correction accuracy is depended on the measurement accuracy of the air sensor. Slow response is other disadvantages of the empirical equation. Additional, the empirical equation is not applicable to correct the laser diode wavelength. Therefore, a direct measurement method of laser diode wavelength, based on the diffraction principle, is proposed and a compact, low-cost and simple wavemeter is constructed in this paper. Laser beam drift is recognized as one of critical error source in laser measurement. Therefore, a novel laser beam drift active compensation method is thus proposed in this study that integrates the functions of automatic type angle turning and PID controlled fine angle motion. After introducing the principles of wavelength measurement and laser beam drift compensation, the effectiveness of the wavemeter in real-time wavelength measurement is well verified by the experimental results.
本文构造了一种紧凑的衍射光栅激光波长计。波长是激光干涉仪的长度单位,在测量长度时必须非常精确和稳定。空气传感器是激光干涉仪中必不可少的一种传感器,它通过经验方程来校正空气折射率。然而,经验方程是间接测量的,其修正精度取决于空气传感器的测量精度。响应慢是经验方程的另一个缺点。另外,经验方程不适用于激光二极管波长的校正。因此,本文提出了一种基于衍射原理的激光二极管波长直接测量方法,并构造了一种结构紧凑、成本低、结构简单的波长计。激光束漂移是激光测量中公认的重要误差源之一。因此,本研究提出了一种新型的激光光束漂移主动补偿方法,该方法集自动式角度转向和PID控制的精细角度运动功能于一体。在介绍了波长测量和激光束漂移补偿原理的基础上,实验结果验证了该波长计在实时波长测量中的有效性。
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引用次数: 1
期刊
International Symposium on Precision Engineering Measurement and Instrumentation
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