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2020 IEEE International Reliability Physics Symposium (IRPS)最新文献

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Substrate Bias Effect on Dynamic Characteristics of a Monolithically Integrated GaN Half-Bridge 衬底偏压对单片集成GaN半桥动态特性的影响
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9128309
Wen Yang, Jiann-Shiun Yuan, Balakrishnan Krishnan, A. Tzou, W. Yeh
his paper investigates the substrate bias effects on a monolithically integrated half-bridge fabricated using lateral GaN-on-Si technology. The dynamic characteristics, including dynamic Ron degradation and gate charge (Qg) shift, are presented for both high- and low-side GaN power devices. Compared to the grounded substrate, significant dynamic Ron degradations and decreased Qg are observed in high-side GaN power devices under negative DC substrate biases. Pulse-mode substrate biasing has also been studied with suppressed degradation by eliminating the cross-talk effect. The trade-off between dynamic Ron degradation and Qg shift has been explored under different switching frequencies for a monolithically integrated GaN half-bridge.
他的论文研究了衬底偏压对采用横向GaN-on-Si技术制造的单片集成半桥的影响。研究了高侧和低侧GaN功率器件的动态特性,包括动态Ron退化和栅极电荷(Qg)移位。与接地衬底相比,在负直流衬底偏置下的高侧GaN功率器件中观察到显著的动态Ron退化和Qg下降。脉冲模式衬底偏置也被研究与抑制退化通过消除串扰效应。研究了单片集成GaN半桥在不同开关频率下动态Ron退化和Qg移位之间的权衡。
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引用次数: 5
Non-Isothermal Simulations to Optimize SiC MOSFETs for Enhanced Short-Circuit Ruggedness 非等温模拟优化SiC mosfet以增强短路稳健性
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9128324
Dongyoung Kim, Adam J. Morgan, Nick Yun, Woongje Sung, A. Agarwal, R. Kaplar
Non-Isothermal simulations to understand Short-Circuit (SC) behavior of SiC MOSFETs were performed. Using the established model, structures to enhance the SC ruggedness were proposed. Thin gate oxide and a narrow JFET region are shown to reduce saturation current enhancing SC ruggedness without increasing Ron,sp. Results indicate thin gate oxide offers moderate improvement in SC capability, at the cost of increased Cgs. In contrast, narrow JFET region provides much improved (2×) SC ruggedness, as well as lower Ron,sp, with no negative impact on Cgs.
对SiC mosfet的短路(SC)行为进行了非等温模拟。利用所建立的模型,提出了提高SC坚固性的结构方案。薄的栅极氧化物和窄的JFET区域可以降低饱和电流,增强SC的坚固性,而不会增加Ron,sp。结果表明,薄栅氧化物提供了适度的改善SC能力,代价是增加Cgs。相比之下,狭窄的JFET区域提供了更好的(2倍)SC坚固性,以及更低的Ron,sp,对Cgs没有负面影响。
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引用次数: 7
Degradation Detection of Power Switches in a Live Three Phase Inverter using SSTDR Signal Embedded PWM Sequence 基于SSTDR信号嵌入PWM序列的三相逆变电源开关退化检测
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9128311
Sourov Roy, A. Hanif, Faisal Khan
This paper proposes a condition monitoring (CM) technique for power semiconductor devices in a live 3-phase power inverter using spread spectrum time domain reflectometry (SSTDR) embedded PWM sequence. Aging-related impedance variation within the device can be successfully characterized using SSTDR. SSTDR has been successfully used for device degradation detection in power converters while running at static condition. However, the rapid variation in impedance throughout the entire live converter circuit caused by the fast switching operation makes condition monitoring more challenging while using SSTDR. Until today, SSTDR based CM technique in a live converter requires a large amount of SSTDR data acquisition for the purpose of error reduction. The proposed method addresses this shortcoming and the experimental results validate that it requires significantly less amount of SSTDR data to successfully characterize the aging in power devices of a live three-phase inverter. Moreover, due to SSTDR’s ability to be embedded in the gate signal, the proposed technique can be integrated with the gate driver module, thus making it intelligent.
本文提出了一种利用扩频时域反射(SSTDR)内嵌PWM序列对三相电源逆变器中功率半导体器件进行状态监测的技术。使用SSTDR可以成功地表征器件内与老化相关的阻抗变化。SSTDR已成功地用于功率变换器静态运行状态下的器件退化检测。然而,由于快速开关操作导致整个带电变换器电路阻抗的快速变化,使得使用SSTDR进行状态监测更具挑战性。到目前为止,基于SSTDR的CM技术在带电变换器中需要大量的SSTDR数据采集以减少误差。该方法解决了这一缺点,实验结果表明,该方法所需的SSTDR数据量大大减少,可以成功地表征三相逆变器电源器件的老化。此外,由于SSTDR能够嵌入到栅极信号中,因此所提出的技术可以与栅极驱动模块集成,从而使其智能化。
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引用次数: 5
Reliability and Variability of Advanced CMOS Devices at Cryogenic Temperatures 先进CMOS器件在低温下的可靠性和可变性
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9128316
A. Grill, E. Bury, J. Michl, S. Tyaginov, D. Linten, T. Grasser, B. Parvais, B. Kaczer, M. Waltl, I. Radu
In this work, we present time-zero variability and degradation data obtained from a large set of on-chip devices in specifically designed arrays, from room temperature to 4K. We show that the investigated nMOS transistors still suffer from significant PBTI and HC degradation down to the lowest temperatures. We further investigate the contribution of multiple- carrier mechanism versus single-carrier mechanism of Si-H bond dissociation across different temperatures. Finally, we extrapolate the time-to-failure for a large gate and drain bias space and show that HCD after on-state stress and off-state stress show opposite temperature trends with the off-state stress being worse at cryogenic temperatures.
在这项工作中,我们展示了从一组专门设计阵列的片上设备中获得的时间零变异性和退化数据,从室温到4K。我们表明,在所研究的nMOS晶体管在最低温度下仍然遭受明显的PBTI和HC降解。我们进一步研究了不同温度下多载流子机制和单载流子机制对硅氢键解离的贡献。最后,我们推断了一个大栅极和漏极偏置空间的失效时间,并表明在开启状态应力和关闭状态应力后的HCD表现出相反的温度趋势,在低温下关闭状态应力更差。
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引用次数: 27
IRPS 2020 Ad Page IRPS 2020广告页
Pub Date : 2020-04-01 DOI: 10.1109/irps45951.2020.9129545
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引用次数: 0
Hybrid HCI Degradation in Sub-micron NMOSFET due to Mixed Back-end Process Damages 亚微米NMOSFET中混合后端工艺损伤导致的混合HCI退化
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9129336
Kuilong Yu, Xiaojuan Zhu, Rui Fang, Tingting Ma, Kun Han, Zhongyi Xia
This paper presents one hybrid hot carrier injection (HCI) degradation behavior of 3.3 V NMOS transistor. It is noted to remarkably occur when annealing the wafer fully encapsulated by the passivation layer (as enclosed in the red box in Fig. 1). Along with the HCI stress time, the degradation mechanism transits from the drain avalanche hot carrier (DAHC) injection to the channel hot electron (CHE) injection, manifesting as the turn-around behavior of IDsat and VTsat degradation. Electrical stress test results indicate the weak gate oxide interface with silicon substrate. It could be attributed to the combined contribution of the plasma induced damage (PID) in high density plasma (HDP) deposition and the hydrogen species driven to the gate oxide interface by the alloying process. The results in this work can inspire the HCI tuning regarding back-end process steps.
本文研究了3.3 V NMOS晶体管的混合热载流子注入(HCI)降解行为。值得注意的是,当对完全被钝化层封装的晶圆进行退火时(如图1中红框所示),这种现象非常明显。随着HCI应力时间的增加,降解机制从漏极雪崩热载子(DAHC)注入转变为通道热电子(CHE)注入,表现为IDsat和VTsat降解的翻转行为。电应力测试结果表明,硅衬底存在弱栅氧化界面。这可能是高密度等离子体沉积过程中等离子体诱导损伤(PID)和合金化过程中驱动到栅氧化界面的氢的共同作用。这项工作的结果可以启发关于后端流程步骤的HCI调优。
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引用次数: 1
Enhanced Threshold Voltage Stability in ZnO Thin-Film-Transistors by Excess of Oxygen in Atomic Layer Deposited Al2O3 Al2O3原子层中过量氧增强ZnO薄膜晶体管阈值电压稳定性
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9129345
R. Rodriguez-Davila, R. Chapman, M. Catalano, M. Quevedo-López, C. Young
The prolonged bias stress of ZnO TFTs transistors with Al2O3 deposited at 100, 175, and 250°C is presented. Fully patterned bottom gated and top contacted devices serve as the test structures. The reliability study shows increasing threshold voltage shifting of 10.5, 18.6, and 27.2 % with deposition temperature with no significant change in the density of interface states for all the samples. Nevertheless, there is a dependence of the oxide trap states with stress time. The analysis of the transconductance as a function of the threshold voltage shifting indicates that oxide traps states near the interface are the dominant instability mechanism for significant stress times. The Al2O3 deposited at a temperature of 100 °C contains a higher concentration of oxygen compared to the other samples. This present oxygen excess could be filling oxygen vacancies present in the Al2O3, thereby resulting in a smaller ΔVTH.
研究了Al2O3在100、175和250°C下沉积ZnO TFTs晶体管的延长偏置应力。全图案化的底部门控和顶部接触器件作为测试结构。可靠性研究表明,随着沉积温度的升高,阈值电压位移分别增加了10.5、18.6%和27.2%,而所有样品的界面态密度没有显著变化。然而,氧化阱的状态与应力时间有关。跨导作为阈值电压位移的函数分析表明,界面附近的氧化陷阱状态是显著应力时间的主要不稳定机制。与其他样品相比,在100℃下沉积的Al2O3含有更高浓度的氧。这种过剩的氧可以填补存在于Al2O3中的氧空位,从而导致更小的ΔVTH。
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引用次数: 0
Radiation Tolerance of 3-D NAND Flash Based Neuromorphic Computing System 基于NAND闪存的三维神经形态计算系统的辐射耐受性
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9128219
M. Hasan, M. Raquibuzzaman, I. Chatterjee, B. Ray
In this paper we show the effectiveness of a multi-level-cell 3-D NAND flash chip as a weight storage device for a neuromorphic computing system under radiation environment. We find that the error-correction codes can be avoided for storing model weights in 3-D NAND for enabling low-power computing applications without sacrificing much accuracy (radiation dose <10k rad). Additionally, radiation induced BER data shows layer-to-layer variations, which can be utilized in favor of improving neural network’s accuracy.
本文展示了一种多层单元三维NAND闪存芯片作为辐射环境下神经形态计算系统的重量存储器件的有效性。我们发现在3d NAND中存储模型权重可以避免纠错码,从而实现低功耗计算应用,而不会牺牲太多精度(辐射剂量<10k rad)。此外,辐射引起的误码率数据显示出层与层之间的变化,这可以用于提高神经网络的准确性。
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引用次数: 5
The Role of RF Operational Life Testing in Evaluating III-V Devices Addressing RF Through Millimeter-wave Applications 射频工作寿命测试在评估通过毫米波应用寻址射频的III-V器件中的作用
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9128321
E. Reese
Reliability assessment of MMICs is primarily addressed through DC stress analysis of individual components available in the process being utilized, throughout the industry. Typically those components include transistors, capacitors, resistors, diodes, metal interconnect lines, etcetera. Component DC accelerated life testing in conjunction with analytic projection to actual operating conditions is the dominant method to projecting operating lifetime of MMICs. During actual operation, stresses on components due to RF signals can dominate the DC stresses well understood and modeled. Sufficient analysis of RF-induced stress of complex circuitry and stimuli is problematic and may omit critical, failure inducing stresses. RF operational testing is a useful method to determine if the circuit function degradation is dominated by unforeseen mechanisms. Relevant mechanisms are discussed and illustrative examples are presented.
mmic的可靠性评估主要是通过对整个行业使用过程中可用的单个组件进行直流应力分析来解决的。这些组件通常包括晶体管、电容器、电阻器、二极管、金属互连线等。元器件直流加速寿命试验结合实际工作条件的解析投影是预测mmic工作寿命的主要方法。在实际工作中,由于射频信号对组件的应力可以支配已被理解和建模的直流应力。对复杂电路和刺激的rf诱导应力的充分分析是有问题的,可能会忽略临界的、导致故障的应力。射频工作测试是确定电路功能退化是否由不可预见的机制主导的有用方法。讨论了相关机理,并给出了实例说明。
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引用次数: 1
Quantum Mechanical Charge Trap Modeling to Explain BTI at Cryogenic Temperatures 量子力学电荷阱模型在低温下解释BTI
Pub Date : 2020-04-01 DOI: 10.1109/IRPS45951.2020.9128349
J. Michl, A. Grill, D. Claes, G. Rzepa, B. Kaczer, D. Linten, I. Radu, T. Grasser, M. Waltl
Electronics operating at cryogenic temperatures is crucial for scaling up single qubits to complex quantum computing systems. There are various studies concentrating on the characterization of advanced CMOS technologies operating at low temperatures, but so far little attention has been paid to reliability issues. Even though classical models predict BTI to freeze out, our measurements clearly reveal a significant threshold voltage degradation down to 4 K. This effect can be consistently explained by considering a quantum mechanical extension for the description of charge transitions in the transistor, which leads to an effective barrier lowering towards cryogenic temperatures. We implement this model in our reliability simulator Comphy and are finally able to fully explain BTI behaviour at temperatures down to 4 K.
在低温下运行的电子设备对于将单个量子比特扩展到复杂的量子计算系统至关重要。有各种各样的研究集中在低温下工作的先进CMOS技术的特性,但到目前为止,很少有人关注可靠性问题。尽管经典模型预测BTI会冻结,但我们的测量结果清楚地显示,阈值电压下降到4 K。这种效应可以通过考虑晶体管中电荷跃迁描述的量子力学扩展来一致地解释,这导致有效的势垒降低到低温。我们在我们的可靠性模拟器Comphy中实现了这个模型,并最终能够完全解释温度低至4 K时BTI的行为。
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引用次数: 4
期刊
2020 IEEE International Reliability Physics Symposium (IRPS)
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