Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597959
Jee-Hoon Seo, Seung-Joo Kang
In this paper, we confirmed that clogging does not happen in short time and inline type separate efficiency is higher than stagger type. The mechanical micro blood separator can be a good candidate for bio sample separation devices. In future, we will observe the influence of micro structures geometry on clogging and separation performance will be clarified. And we will design micro structures geometry for clogging reduction and separation performance improvement. In this paper, we confirmed that clogging does not happen in short time and inline type separate efficiency is higher than stagger type. The mechanical micro blood separator can be a good candidate for bio sample separation devices. In future, we will observe the influence of micro structures geometry on clogging and separation performance will be clarified. And we will design micro structures geometry for clogging reduction and separation performance improvement
{"title":"Micro/nano scale blood separating using mechanical structures","authors":"Jee-Hoon Seo, Seung-Joo Kang","doi":"10.1109/ICSENS.2005.1597959","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597959","url":null,"abstract":"In this paper, we confirmed that clogging does not happen in short time and inline type separate efficiency is higher than stagger type. The mechanical micro blood separator can be a good candidate for bio sample separation devices. In future, we will observe the influence of micro structures geometry on clogging and separation performance will be clarified. And we will design micro structures geometry for clogging reduction and separation performance improvement. In this paper, we confirmed that clogging does not happen in short time and inline type separate efficiency is higher than stagger type. The mechanical micro blood separator can be a good candidate for bio sample separation devices. In future, we will observe the influence of micro structures geometry on clogging and separation performance will be clarified. And we will design micro structures geometry for clogging reduction and separation performance improvement","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125063831","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597875
E. Llobet, O. Gualdron, J. Brezmes, X. Vilanova, X. Correig
A new procedure for variable selection, which runs in two steps, is introduced. First, an unsupervised and very fast variable selection procedure is applied: a parameter that accounts for the correlation between the features available is computed and, only near 20% of initial variables (those that are less collinear) are retained for further selection. Then, a fine-tuning selection based on a deterministic method (stepwise) coupled to a simple probabilistic neural network is conducted on the variable subset that resulted from the first selection step. The method is demonstrated using a database consisting of vapors of ethanol, acetone and toluene and their binary mixtures (120 variables). Vapors can be simultaneously identified and quantified with a 95.83% success rate and the time needed for the whole process is about 5 minutes in a Pentium 4 PC platform. Being unsupervised, the fast variable selection method applies generally, even in aroma analysis problems where category discovery is an issue. This is illustrated by applying the method to mixture analysis using direct mass spectrometry
{"title":"An unsupervised dimensionality-reduction technique","authors":"E. Llobet, O. Gualdron, J. Brezmes, X. Vilanova, X. Correig","doi":"10.1109/ICSENS.2005.1597875","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597875","url":null,"abstract":"A new procedure for variable selection, which runs in two steps, is introduced. First, an unsupervised and very fast variable selection procedure is applied: a parameter that accounts for the correlation between the features available is computed and, only near 20% of initial variables (those that are less collinear) are retained for further selection. Then, a fine-tuning selection based on a deterministic method (stepwise) coupled to a simple probabilistic neural network is conducted on the variable subset that resulted from the first selection step. The method is demonstrated using a database consisting of vapors of ethanol, acetone and toluene and their binary mixtures (120 variables). Vapors can be simultaneously identified and quantified with a 95.83% success rate and the time needed for the whole process is about 5 minutes in a Pentium 4 PC platform. Being unsupervised, the fast variable selection method applies generally, even in aroma analysis problems where category discovery is an issue. This is illustrated by applying the method to mixture analysis using direct mass spectrometry","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"122 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123485489","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597941
K. Diener, S. Reitz, P. Schneider
Basically, integrated piezoresistive pressure sensors exhibit parasitic effects that have to be suppressed as necessary. To ensure the proper function of integrated sensing elements design-driven modeling and simulations have to be performed. This kind of modeling and simulation is extremely useful for determining operation characteristics and verifying sensor performance before manufacturing. Thus, the need for test iterations decreases. That is why, cost and time-to-market can be reduced significantly
{"title":"System Level Modeling of Piezo-Resistive Pressure Sensors Including Technology Data and Parasitic Effects","authors":"K. Diener, S. Reitz, P. Schneider","doi":"10.1109/ICSENS.2005.1597941","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597941","url":null,"abstract":"Basically, integrated piezoresistive pressure sensors exhibit parasitic effects that have to be suppressed as necessary. To ensure the proper function of integrated sensing elements design-driven modeling and simulations have to be performed. This kind of modeling and simulation is extremely useful for determining operation characteristics and verifying sensor performance before manufacturing. Thus, the need for test iterations decreases. That is why, cost and time-to-market can be reduced significantly","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123782528","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597949
M. Tabib-Azar, YanXie
Self-aligned and self-welded multi-walled carbon nanotubes were grown for the first time using a metal-catalyzed chemical vapor deposition technique between 18 mum-high silicon posts with 2-6 mum gaps with excellent ohmic electrical contacts and mechanical bonding strengths in excess of 0.1 muN/CNT. The electrical conductivity of 5-10 MWCNTs spanning the gap between adjacent silicon posts changed drastically upon exposure to ammonia and hydrochloric gases at room temperature. In devices reported here the electrical contact between both sides of the MWCNTs and the silicon posts are intimately formed during the growth process. Thus, the gas sensitivity of these self-welded MWCNT devices are less affected by the contact barrier changes. Moreover, since the MWCNTs are self- aligned and self-welded during the growth, the only post processing steps that are needed are dicing and wire-bonding to a chip carrier (package), making these devices inherently more reliable and cost effective
{"title":"Sensitive NH3OH and HCl Gas Sensors Using Self-Aligned and Self-Welded Multi-Walled Carbon Nanotubes","authors":"M. Tabib-Azar, YanXie","doi":"10.1109/ICSENS.2005.1597949","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597949","url":null,"abstract":"Self-aligned and self-welded multi-walled carbon nanotubes were grown for the first time using a metal-catalyzed chemical vapor deposition technique between 18 mum-high silicon posts with 2-6 mum gaps with excellent ohmic electrical contacts and mechanical bonding strengths in excess of 0.1 muN/CNT. The electrical conductivity of 5-10 MWCNTs spanning the gap between adjacent silicon posts changed drastically upon exposure to ammonia and hydrochloric gases at room temperature. In devices reported here the electrical contact between both sides of the MWCNTs and the silicon posts are intimately formed during the growth process. Thus, the gas sensitivity of these self-welded MWCNT devices are less affected by the contact barrier changes. Moreover, since the MWCNTs are self- aligned and self-welded during the growth, the only post processing steps that are needed are dicing and wire-bonding to a chip carrier (package), making these devices inherently more reliable and cost effective","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"179 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116062108","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597934
T. George, ViaLogy, K. –. A. Son, R. A. Powers, L. Y. D. Castillo, R. Okojie
Although tremendous progress has been made in recent years in the development of microtechnologies for use in harsh environments, these technologies are mostly in the research domain. Space exploration missions provide a rich application area for these technologies, given the diversity of interesting planetary exploration targets identified by NASA. Also, miniaturization is very important for NASA missions and many terrestrial applications because of the tremendous savings in mass, size and power consumption. Terrestrial applications abound in the aeronautical, automotive, petrochemical, nuclear and medical fields. This paper presents an overview of some of the key requirements for harsh environment applications as well as a brief description of promising developments in SOI, SiC and III-Nitride technologies
{"title":"Harsh environment microtechnologies for NASA and terrestrial applications","authors":"T. George, ViaLogy, K. –. A. Son, R. A. Powers, L. Y. D. Castillo, R. Okojie","doi":"10.1109/ICSENS.2005.1597934","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597934","url":null,"abstract":"Although tremendous progress has been made in recent years in the development of microtechnologies for use in harsh environments, these technologies are mostly in the research domain. Space exploration missions provide a rich application area for these technologies, given the diversity of interesting planetary exploration targets identified by NASA. Also, miniaturization is very important for NASA missions and many terrestrial applications because of the tremendous savings in mass, size and power consumption. Terrestrial applications abound in the aeronautical, automotive, petrochemical, nuclear and medical fields. This paper presents an overview of some of the key requirements for harsh environment applications as well as a brief description of promising developments in SOI, SiC and III-Nitride technologies","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"137 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122286745","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597692
N. Chaimanonart, M. Suster, W. Ko, D. Young
A reliable two-channel data telemetry system with remote RF powering capability is developed for high-performance industrial wireless MEMS strain sensing applications. The prototype system is insensitive to mechanical rotation and can simultaneously transmit and receive digital Manchester-coded sensors data at 2.5 Mbps and 50 kbps by employing phase shift keying (PSK) and load shift keying (LSK) modulation schemes, respectively, over the same wireless link used for remotely RF powering the strain sensing microsystem. The remote RF powering system can produce a stable DC voltage of 2.8 V with a 2 mA of current supply capability from a 50 MHz RF operation. The demonstrated performance is adequate for realizing a wireless strain sensing microsystem providing a high resolution (high data rate) strain information together with a low data rate temperature information for real-time calibration and intelligent system control
{"title":"Two-channel data telemetry with remote RF powering for high-performance wireless MEMS strain sensing applications","authors":"N. Chaimanonart, M. Suster, W. Ko, D. Young","doi":"10.1109/ICSENS.2005.1597692","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597692","url":null,"abstract":"A reliable two-channel data telemetry system with remote RF powering capability is developed for high-performance industrial wireless MEMS strain sensing applications. The prototype system is insensitive to mechanical rotation and can simultaneously transmit and receive digital Manchester-coded sensors data at 2.5 Mbps and 50 kbps by employing phase shift keying (PSK) and load shift keying (LSK) modulation schemes, respectively, over the same wireless link used for remotely RF powering the strain sensing microsystem. The remote RF powering system can produce a stable DC voltage of 2.8 V with a 2 mA of current supply capability from a 50 MHz RF operation. The demonstrated performance is adequate for realizing a wireless strain sensing microsystem providing a high resolution (high data rate) strain information together with a low data rate temperature information for real-time calibration and intelligent system control","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122704931","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597745
P. Gouma, K. K. Iyer, P. Jha
We have developed a sensing platform for medical diagnostics based on the incorporation of biomolecules (receptors) in active, gas sensitive matrices. The receptor biomolecules may be enzymes, bacteria, cells that induce biochemical reactions with the analytes of interest, resulting in the release of gases. The gaseous species are detected rapidly by the active matrix compounds, typically chemoselective metal oxides or polymers. In this work, the development of bio-doped transition metal oxide-based detectors for monitoring metabolic products (such as urea) in aqueous media is discussed. The advantage of the proposed sensor technology over existing biosensors lies in it's potential for rapid and selective detection of bio-species by solid state devices using electrical signals. The matrices of choice for this work are selective gas sensing probes utilizing particular polymorphs of the MoO3
{"title":"Novel bio-composites for biosensors based on resistive changes","authors":"P. Gouma, K. K. Iyer, P. Jha","doi":"10.1109/ICSENS.2005.1597745","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597745","url":null,"abstract":"We have developed a sensing platform for medical diagnostics based on the incorporation of biomolecules (receptors) in active, gas sensitive matrices. The receptor biomolecules may be enzymes, bacteria, cells that induce biochemical reactions with the analytes of interest, resulting in the release of gases. The gaseous species are detected rapidly by the active matrix compounds, typically chemoselective metal oxides or polymers. In this work, the development of bio-doped transition metal oxide-based detectors for monitoring metabolic products (such as urea) in aqueous media is discussed. The advantage of the proposed sensor technology over existing biosensors lies in it's potential for rapid and selective detection of bio-species by solid state devices using electrical signals. The matrices of choice for this work are selective gas sensing probes utilizing particular polymorphs of the MoO3","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"254 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122458454","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597932
Yung-Yu Chen, Tsung-Tsong Wu
There are increasing research activities on Love wave devices in biochemical sensing application due to its high sensitivity and low acoustic damping. This paper aims at practical design of Love wave devices for liquid viscosity sensing based on effective permittivity approach and eighth dimension matrix formulation. First, we adopted the effective permittivity approach to calculate and discuss electromechanical coupling coefficient and temperature dependence of the 0th-order Love wave in ZnO/quartz layered structures. Besides, since the measured targets are liquid, reducing wave attenuation and increasing sensitivity become two important issues for the optimum design of a Love wave sensor. To take into account the effect of liquid viscosity on the device sensitivity, we adopted the eighth dimension matrix formulation to calculate phase velocity dispersion and wave attenuation of Love wave devices loaded with water. Finally, we also compared the calculated sensitivity with the existing experimental results. Results show that the proposed approach provided a satisfactory prediction of the device sensitivity of a Love wave liquid sensor
{"title":"Practical design of Love wave viscosity sensors using the eighth dimensional matrix formulation","authors":"Yung-Yu Chen, Tsung-Tsong Wu","doi":"10.1109/ICSENS.2005.1597932","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597932","url":null,"abstract":"There are increasing research activities on Love wave devices in biochemical sensing application due to its high sensitivity and low acoustic damping. This paper aims at practical design of Love wave devices for liquid viscosity sensing based on effective permittivity approach and eighth dimension matrix formulation. First, we adopted the effective permittivity approach to calculate and discuss electromechanical coupling coefficient and temperature dependence of the 0th-order Love wave in ZnO/quartz layered structures. Besides, since the measured targets are liquid, reducing wave attenuation and increasing sensitivity become two important issues for the optimum design of a Love wave sensor. To take into account the effect of liquid viscosity on the device sensitivity, we adopted the eighth dimension matrix formulation to calculate phase velocity dispersion and wave attenuation of Love wave devices loaded with water. Finally, we also compared the calculated sensitivity with the existing experimental results. Results show that the proposed approach provided a satisfactory prediction of the device sensitivity of a Love wave liquid sensor","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116623612","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597962
J. L. Hall, S. Petropavlovskikh, O. Nilsen, B. Hacioǧlu
Two optical techniques for bio- and chemical sensing were investigated. The methods are based on deviation of the optical properties of polymer transducers due to change in either index of refraction or dimension of the sensing element under molecular impact. The holographic interferometer technology developed at the University of Colorado observes interactions between an analyte and a transducer's surface and bulk. The second approach, a common path interferometer proposed by Dr. John Hall, focuses on surface interactions only. The two techniques complement each other, enabling the separation of surface and bulk interactions. This is critical for accurate description of chemical uptake and release dynamics, and therefore for obtaining parameters necessary for the analyte identification process. Preliminary sensitivity level of the systems is on the order of 10-5 RTU (refractive index units) with possible improvement down to 10-7 RTU
{"title":"Detection and discrimination of low concentration gas contaminants by means of interferometrically-sensed polymers","authors":"J. L. Hall, S. Petropavlovskikh, O. Nilsen, B. Hacioǧlu","doi":"10.1109/ICSENS.2005.1597962","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597962","url":null,"abstract":"Two optical techniques for bio- and chemical sensing were investigated. The methods are based on deviation of the optical properties of polymer transducers due to change in either index of refraction or dimension of the sensing element under molecular impact. The holographic interferometer technology developed at the University of Colorado observes interactions between an analyte and a transducer's surface and bulk. The second approach, a common path interferometer proposed by Dr. John Hall, focuses on surface interactions only. The two techniques complement each other, enabling the separation of surface and bulk interactions. This is critical for accurate description of chemical uptake and release dynamics, and therefore for obtaining parameters necessary for the analyte identification process. Preliminary sensitivity level of the systems is on the order of 10-5 RTU (refractive index units) with possible improvement down to 10-7 RTU","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129846509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597939
A. Zribi, L. Iorio, D. J. Lewis
We report on the design, fabrication and demonstration of a pressure sensor using a magnetic material strain gauge. The gauge consists of a soft magnetic thin foil or ribbon patterned in various geometries. It is attached to machined stainless steel diaphragm by means of an adhesive layer. Upon application of pressure to the diaphragm, strain develops in the magnetic gauge leading to a change in its impedance phase and amplitude, which are measured and correlated to pressure. The sensor demonstrated high sensitivity (4 10-5 degrees/Pa in phase angle and 5.4 10-5 Ohm/Pa in amplitude) and low hysteresis (0.26% in phase angle, 0.03% in amplitude). Compared to piezoresistive strain gauges, the magnetic gauge provides approximately 5times to 9times improvement in strain gauge factor. In addition to higher performance, the magnetic pressure sensor is an attractive alternative to silicon-micromachined sensors for harsh environment high-pressure sensors
{"title":"Oil-free stress impedance pressure sensor for harsh environment","authors":"A. Zribi, L. Iorio, D. J. Lewis","doi":"10.1109/ICSENS.2005.1597939","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597939","url":null,"abstract":"We report on the design, fabrication and demonstration of a pressure sensor using a magnetic material strain gauge. The gauge consists of a soft magnetic thin foil or ribbon patterned in various geometries. It is attached to machined stainless steel diaphragm by means of an adhesive layer. Upon application of pressure to the diaphragm, strain develops in the magnetic gauge leading to a change in its impedance phase and amplitude, which are measured and correlated to pressure. The sensor demonstrated high sensitivity (4 10-5 degrees/Pa in phase angle and 5.4 10-5 Ohm/Pa in amplitude) and low hysteresis (0.26% in phase angle, 0.03% in amplitude). Compared to piezoresistive strain gauges, the magnetic gauge provides approximately 5times to 9times improvement in strain gauge factor. In addition to higher performance, the magnetic pressure sensor is an attractive alternative to silicon-micromachined sensors for harsh environment high-pressure sensors","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"117 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128412523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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