Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597872
P. Ruther, J. Bartholomeyczik, S. Trautmann, M. Wandt, O. Paul, W. Dominicus, R. Roth, K. Seitz, W. Strauss
This paper reports the successful fabrication and characterization of a novel three-axial silicon force sensor based on piezoresistive transducers and its application in dimensional metrology. The innovative sensor design enables a distinct reduction of the critical ratio Sz /Sx of out-of-plane stiffness Sz to in-plane stiffness Sx. In contrast to existing single-chip sensors with Sz/Sx = 30 a ratio of 4 is achieved which improves the detection of inclined surfaces. The sensor consists of a flexible cross-structure realized by deep reactive ion etching. The arms of the cross-structure are connected to a silicon frame and to the central part of the cross-structure through silicon membranes hinges. A stylus with a probing sphere is used as the tactile element. Forces applied to the sphere are transferred into a deflection of the cross-structure. The respective stress values in the membranes are detected using implanted piezoresistors. The sensor element is applied in dimensional metrology of micro components with lateral dimensions larger than 100 mum. The lateral resolution of the sensor element is 10 nm
{"title":"Novel 3D piezoresistive silicon force sensor for dimensional metrology of micro components","authors":"P. Ruther, J. Bartholomeyczik, S. Trautmann, M. Wandt, O. Paul, W. Dominicus, R. Roth, K. Seitz, W. Strauss","doi":"10.1109/ICSENS.2005.1597872","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597872","url":null,"abstract":"This paper reports the successful fabrication and characterization of a novel three-axial silicon force sensor based on piezoresistive transducers and its application in dimensional metrology. The innovative sensor design enables a distinct reduction of the critical ratio Sz /Sx of out-of-plane stiffness Sz to in-plane stiffness Sx. In contrast to existing single-chip sensors with Sz/Sx = 30 a ratio of 4 is achieved which improves the detection of inclined surfaces. The sensor consists of a flexible cross-structure realized by deep reactive ion etching. The arms of the cross-structure are connected to a silicon frame and to the central part of the cross-structure through silicon membranes hinges. A stylus with a probing sphere is used as the tactile element. Forces applied to the sphere are transferred into a deflection of the cross-structure. The respective stress values in the membranes are detected using implanted piezoresistors. The sensor element is applied in dimensional metrology of micro components with lateral dimensions larger than 100 mum. The lateral resolution of the sensor element is 10 nm","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130367544","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597963
Ii Jin Kim, S. Han, Hi Dock Lee, Jin Suk Wang
With the growing attention to environmental problems and the increase of standard of living, there are imperative needs for gas sensors with high sensitivity and excellent selectivity in air quality monitoring. Domestic environmental monitoring is an important aspect nowadays. We have tried to develop a sensor that can help to monitor the presence of harmful gases. An auto ventilation controller has been developed to expel out the toxic gases (CO, NO2, CH4 , HCHO, C3H8, CO2) from the residential rooms/buildings. It is developed to save energy and to clean the environment. For this, microelectronic semiconductor type gas sensor was made by MEMS (microelectromechanical system) technology and a control electronic circuit was designed. The potential of the controller was further systematically studied for its sensing characteristics against various toxic gases. It has been observed that sensor is effective in detecting few gases even up to very small concentration levels. The developed sensor is inexpensive, has small size, sufficient sensitivity and immunity to environmental conditions for applications. The functioning and use of the sensor is very simple and reliable
{"title":"Fabrication and design of an auto ventilation controller using micro gas sensor for the clean room/building environment","authors":"Ii Jin Kim, S. Han, Hi Dock Lee, Jin Suk Wang","doi":"10.1109/ICSENS.2005.1597963","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597963","url":null,"abstract":"With the growing attention to environmental problems and the increase of standard of living, there are imperative needs for gas sensors with high sensitivity and excellent selectivity in air quality monitoring. Domestic environmental monitoring is an important aspect nowadays. We have tried to develop a sensor that can help to monitor the presence of harmful gases. An auto ventilation controller has been developed to expel out the toxic gases (CO, NO2, CH4 , HCHO, C3H8, CO2) from the residential rooms/buildings. It is developed to save energy and to clean the environment. For this, microelectronic semiconductor type gas sensor was made by MEMS (microelectromechanical system) technology and a control electronic circuit was designed. The potential of the controller was further systematically studied for its sensing characteristics against various toxic gases. It has been observed that sensor is effective in detecting few gases even up to very small concentration levels. The developed sensor is inexpensive, has small size, sufficient sensitivity and immunity to environmental conditions for applications. The functioning and use of the sensor is very simple and reliable","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123645526","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597669
F. Cao, D. Greve, I. Oppenheim
Chloride infiltration into concrete structures causes corrosion of steel reinforcing rods and eventual failure. Here we report on a three-electrode electrochemical sensor suitable for monitoring chloride concentrations in concrete. We use voltammetry to characterize the sensor for stability and sensitivity in KCl and NaClO solutions. We also outline a process for fabrication of an integrated microsensor and demonstrate crucial process steps for the formation of electrodes on a CMOS chip
{"title":"Development of microsensors for chloride concentration in concrete","authors":"F. Cao, D. Greve, I. Oppenheim","doi":"10.1109/ICSENS.2005.1597669","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597669","url":null,"abstract":"Chloride infiltration into concrete structures causes corrosion of steel reinforcing rods and eventual failure. Here we report on a three-electrode electrochemical sensor suitable for monitoring chloride concentrations in concrete. We use voltammetry to characterize the sensor for stability and sensitivity in KCl and NaClO solutions. We also outline a process for fabrication of an integrated microsensor and demonstrate crucial process steps for the formation of electrodes on a CMOS chip","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121784477","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597874
J. Engel, J. Chen, N. Chen, S. Pandya, C. Liu
The performance of polyurethane (PU) and polydimethylsiloxane (PDMS) elastomers are compared in a battery of tests showing that the two PU formulations tested compare very favorably with PDMS mechanically and in terms of adhesion, while sacrificing some resistance to solvents and chemicals. PU is then used to form the structure and sensing elements of an all-polymer artificial hair cell. The demonstrated artificial hair cells are composed of a PU cilium on top of force sensitive resistors (FSRs) that detect cilium motion. The FSR is a mixture of carbon nanoparticles and PU, patterned using a newly developed method. Sensitivity of the demonstrated device (245 ppm/mum of tip deflection) is improved by an order of magnitude over previous single-axis polymer AHCs with additional improvements in robustness. Both carbon black and multi-walled nanotubes are tested as conductive fillers, with MWNT providing increased sensitivity
{"title":"Development and characterization of an artificial hair cell based on polyurethane elastomer and force sensitive resistors","authors":"J. Engel, J. Chen, N. Chen, S. Pandya, C. Liu","doi":"10.1109/ICSENS.2005.1597874","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597874","url":null,"abstract":"The performance of polyurethane (PU) and polydimethylsiloxane (PDMS) elastomers are compared in a battery of tests showing that the two PU formulations tested compare very favorably with PDMS mechanically and in terms of adhesion, while sacrificing some resistance to solvents and chemicals. PU is then used to form the structure and sensing elements of an all-polymer artificial hair cell. The demonstrated artificial hair cells are composed of a PU cilium on top of force sensitive resistors (FSRs) that detect cilium motion. The FSR is a mixture of carbon nanoparticles and PU, patterned using a newly developed method. Sensitivity of the demonstrated device (245 ppm/mum of tip deflection) is improved by an order of magnitude over previous single-axis polymer AHCs with additional improvements in robustness. Both carbon black and multi-walled nanotubes are tested as conductive fillers, with MWNT providing increased sensitivity","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"242 7","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114017569","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597855
S. Nakamura
This paper reports MEMS inertial sensor which is based on the principle of a rotational gyroscope can detect both 3-axis acceleration and 2-axis angular rate at a time by electrostatically suspending and rotating rotor in the shape of a ring made from silicon. The device has several advantages: the levitation of the rotor in a vacuum eliminates a mechanical friction resulting in high sensitivity; the position control for the levitation allows to sense accelerations in tri-axis. Latest measurements yield noise level of gyro and that of accelerometer as low as 0.002deg/s/Hzfrac12 and 20 muG/Hzfrac12, with 1.5mm diameter rotor at 74,000rpm
{"title":"MEMS inertial sensor toward higher accuracy & multi-axis sensing","authors":"S. Nakamura","doi":"10.1109/ICSENS.2005.1597855","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597855","url":null,"abstract":"This paper reports MEMS inertial sensor which is based on the principle of a rotational gyroscope can detect both 3-axis acceleration and 2-axis angular rate at a time by electrostatically suspending and rotating rotor in the shape of a ring made from silicon. The device has several advantages: the levitation of the rotor in a vacuum eliminates a mechanical friction resulting in high sensitivity; the position control for the levitation allows to sense accelerations in tri-axis. Latest measurements yield noise level of gyro and that of accelerometer as low as 0.002deg/s/Hzfrac12 and 20 muG/Hzfrac12, with 1.5mm diameter rotor at 74,000rpm","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"196 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124381520","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597955
J. Lozano, J.P. Santos, J. Gutiérrez, M. C. Horrillo
A comparison among several types of fiber coatings for solid-phase micro-extraction applied to an electronic nose is performed. Four different types of fiber coating have been used: 100 mum polydimethylsiloxane (PDMS), 65 mum polydimethylsiloxane/divinylbenzene (PDMS/DVB), 85 mum polyacrilate and 75 mum carboxen/polydimetilsiloxane (CAR/PDMS). The cell containing a tin dioxide multisensor was mounted inside the chromatograph oven connected to the gas chromatograph injector, by replacing the chromatographic column. Samples of five different wines elaborated with the majority varieties of the origin denomination (O.D.) "Vinos de Madrid" have been used for testing the discrimination capability of the system. Multivariate analyses as principal component analysis (PCA) and artificial neural networks (ANN) have been applied to the data to discriminate among the different wine samples
对几种用于电子鼻固相微萃取的纤维涂层进行了比较。使用了四种不同类型的纤维涂层:100母聚二甲基硅氧烷(PDMS)， 65母聚二甲基硅氧烷/二乙烯苯(PDMS/DVB)， 85母聚丙烯酸酯和75母碳/聚二甲基硅氧烷(CAR/PDMS)。通过更换色谱柱，将含有二氧化锡多传感器的电池安装在与气相色谱仪进样器相连的色谱仪烘箱内。五种不同的葡萄酒样品，以原产地名称(O.D.)的大多数品种精心制作。“Vinos de Madrid”已被用于测试系统的识别能力。采用多元主成分分析(PCA)和人工神经网络(ANN)对数据进行判别
{"title":"Comparison among several fiber coating for a solid phase microextraction (SPME) based electronic nose applied to wine discrimination","authors":"J. Lozano, J.P. Santos, J. Gutiérrez, M. C. Horrillo","doi":"10.1109/ICSENS.2005.1597955","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597955","url":null,"abstract":"A comparison among several types of fiber coatings for solid-phase micro-extraction applied to an electronic nose is performed. Four different types of fiber coating have been used: 100 mum polydimethylsiloxane (PDMS), 65 mum polydimethylsiloxane/divinylbenzene (PDMS/DVB), 85 mum polyacrilate and 75 mum carboxen/polydimetilsiloxane (CAR/PDMS). The cell containing a tin dioxide multisensor was mounted inside the chromatograph oven connected to the gas chromatograph injector, by replacing the chromatographic column. Samples of five different wines elaborated with the majority varieties of the origin denomination (O.D.) \"Vinos de Madrid\" have been used for testing the discrimination capability of the system. Multivariate analyses as principal component analysis (PCA) and artificial neural networks (ANN) have been applied to the data to discriminate among the different wine samples","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"104 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127622817","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597968
J. Castellanos, S. Lesecq, N. Marchand, J. Delamare
A cheap tourism airplane ADAHRS unit is developed by fusing magnetometers, rate gyros and accelerometers (MEMS technology). The rigid body orientation is modeled with quaternion, which eliminates attitude estimation singularities. The real-time implementation is done unifying a quaternion formulation of Wahba's problem with a multiplicative extended Kalman filter. It includes the gyro bias model. A quaternion measurement model is introduced. It avoids the linearization step that induces undesirable effects. Accelerometers detect gravitational acceleration and centrifugal forces, resulting in incorrect attitude estimation (e.g. false horizon and subjective vertical). Therefore, some pressure sensors are added, resulting in a robust solution. The real-time implementation uses a PCMCIA data acquisition card and a TabletPC. Simulated and real data validate the ADAHRS
{"title":"A low-cost air data attitude heading reference system for the tourism airplane applications","authors":"J. Castellanos, S. Lesecq, N. Marchand, J. Delamare","doi":"10.1109/ICSENS.2005.1597968","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597968","url":null,"abstract":"A cheap tourism airplane ADAHRS unit is developed by fusing magnetometers, rate gyros and accelerometers (MEMS technology). The rigid body orientation is modeled with quaternion, which eliminates attitude estimation singularities. The real-time implementation is done unifying a quaternion formulation of Wahba's problem with a multiplicative extended Kalman filter. It includes the gyro bias model. A quaternion measurement model is introduced. It avoids the linearization step that induces undesirable effects. Accelerometers detect gravitational acceleration and centrifugal forces, resulting in incorrect attitude estimation (e.g. false horizon and subjective vertical). Therefore, some pressure sensors are added, resulting in a robust solution. The real-time implementation uses a PCMCIA data acquisition card and a TabletPC. Simulated and real data validate the ADAHRS","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"74 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127670581","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597645
Y. Fang, J.L. Lee, C.H. Wang, C. Chung, J. Ting
Without the well control of bubbles with symmetrical appearance from the ejector, it would lead to skew trajectory, even the shooting failure. From the practical off-shooting inkjet ejector packaged in a commercial cartridge, jetting failure was easily found in this off shooting design. This paper reported a novel method for modifying an off shooting inkjet ejector by using of Simulation software (Ansys) to simulate the designed ring-type heater and by using of thermoscope (IR scope) to verify ring-type heater performance. The interactive relationship among heater shape effect, process of the ring-type heater and electrode, and symmetrical bubble formation was clarified in this paper
{"title":"Modification of heater and bubble clamping behavior in off-shooting inkjet ejector","authors":"Y. Fang, J.L. Lee, C.H. Wang, C. Chung, J. Ting","doi":"10.1109/ICSENS.2005.1597645","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597645","url":null,"abstract":"Without the well control of bubbles with symmetrical appearance from the ejector, it would lead to skew trajectory, even the shooting failure. From the practical off-shooting inkjet ejector packaged in a commercial cartridge, jetting failure was easily found in this off shooting design. This paper reported a novel method for modifying an off shooting inkjet ejector by using of Simulation software (Ansys) to simulate the designed ring-type heater and by using of thermoscope (IR scope) to verify ring-type heater performance. The interactive relationship among heater shape effect, process of the ring-type heater and electrode, and symmetrical bubble formation was clarified in this paper","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127687083","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597974
R.N. Ohosh, P. Tobias, Hui Hu, M. Koochesfahani
We describe a new technique for characterizing fast solid state planar gas sensors. Using a moving gas outlet, we are able to change the gas around the sensor from one component to the next within one millisecond in a step-like manner. By simultaneously sampling at 10kHz, 100Hz and 1Hz, we can capture the fast component of the sensor response as well as the steady state value in a single experiment. The rate of exchange of the gas around the sensor was quantified using laser induced fluorescence (LIF) imaging. The sensor is characterized under standard industrial sensor operating conditions, including gas pressure and device temperature, while using flows typically found in a research laboratory. Since fast response times from planar gas sensors usually require elevated temperatures, we can heat the device to 630 degC
{"title":"Fast solid state gas sensor characterization technique","authors":"R.N. Ohosh, P. Tobias, Hui Hu, M. Koochesfahani","doi":"10.1109/ICSENS.2005.1597974","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597974","url":null,"abstract":"We describe a new technique for characterizing fast solid state planar gas sensors. Using a moving gas outlet, we are able to change the gas around the sensor from one component to the next within one millisecond in a step-like manner. By simultaneously sampling at 10kHz, 100Hz and 1Hz, we can capture the fast component of the sensor response as well as the steady state value in a single experiment. The rate of exchange of the gas around the sensor was quantified using laser induced fluorescence (LIF) imaging. The sensor is characterized under standard industrial sensor operating conditions, including gas pressure and device temperature, while using flows typically found in a research laboratory. Since fast response times from planar gas sensors usually require elevated temperatures, we can heat the device to 630 degC","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126272393","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597863
M. Tabib-Azar, Xiying Li, J. Mann
A method based on evanescent microwave microscopy (EMM) was developed to spatially resolve small number of electron spin resonant (ESR) transitions in single crystal ruby (Cr3+). The EMM probe operates at a resonance frequency of 3.77 GHz (S-band ESR) in a modulated electromagnetic field in the range of 0.02 to 0.6 Tesla. The current EMM probe with a magnetic dipole loop of around 1 mm radius was capable of resolving 20,000 spin transitions compared to standard ESRs with ~107 detection limit. We are currently improving the spatial resolution of our probe to enable detection of 2000 spin transitions with the goal of reducing it to a few spins by using a microwave probe integrated with an atomic force microscope. Even with its relatively low current resolution, the probe is unique and can be used in microfluidic channels and biological tissues to detect free radicals. We are pursuing applications of the probe in Alzheimer and other tissue studies where mapping the spatial distribution of free radicals may shed some light on the cause and diagnosis of disease
{"title":"Local molecular spectroscopy using the evanescent microwave probe technique: electron spin resonance","authors":"M. Tabib-Azar, Xiying Li, J. Mann","doi":"10.1109/ICSENS.2005.1597863","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597863","url":null,"abstract":"A method based on evanescent microwave microscopy (EMM) was developed to spatially resolve small number of electron spin resonant (ESR) transitions in single crystal ruby (Cr3+). The EMM probe operates at a resonance frequency of 3.77 GHz (S-band ESR) in a modulated electromagnetic field in the range of 0.02 to 0.6 Tesla. The current EMM probe with a magnetic dipole loop of around 1 mm radius was capable of resolving 20,000 spin transitions compared to standard ESRs with ~107 detection limit. We are currently improving the spatial resolution of our probe to enable detection of 2000 spin transitions with the goal of reducing it to a few spins by using a microwave probe integrated with an atomic force microscope. Even with its relatively low current resolution, the probe is unique and can be used in microfluidic channels and biological tissues to detect free radicals. We are pursuing applications of the probe in Alzheimer and other tissue studies where mapping the spatial distribution of free radicals may shed some light on the cause and diagnosis of disease","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115945455","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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