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Experimental study of a DMD based compressive line sensing imaging system in the turbulence environment 湍流环境下基于DMD压缩线传感成像系统的实验研究
Pub Date : 2016-03-15 DOI: 10.1117/12.2212426
B. Ouyang, W. Hou, C. Gong, F. Caimi, F. Dalgleish, A. Vuorenkoski, X. Xiao, D. Voelz
The Compressive Line Sensing (CLS) active imaging system has been demonstrated to be effective in scattering mediums, such as coastal turbid water, fog and mist, through simulations and test tank experiments. The CLS prototype hardware consists of a CW laser, a DMD, a photomultiplier tube, and a data acquisition instrument. CLS employs whiskbroom imaging formation that is compatible with traditional survey platforms. The sensing model adopts the distributed compressive sensing theoretical framework that exploits both intra-signal sparsity and highly correlated nature of adjacent areas in a natural scene. During sensing operation, the laser illuminates the spatial light modulator DMD to generate a series of 1D binary sensing pattern from a codebook to “encode” current target line segment. A single element detector PMT acquires target reflections as encoder output. The target can then be recovered using the encoder output and a predicted on-target codebook that reflects the environmental interference of original codebook entries. In this work, we investigated the effectiveness of the CLS imaging system in a turbulence environment. Turbulence poses challenges in many atmospheric and underwater surveillance applications. A series of experiments were conducted in the Naval Research Lab’s optical turbulence test facility with the imaging path subjected to various turbulence intensities. The total-variation minimization sparsifying basis was used in imaging reconstruction. The preliminary experimental results showed that the current imaging system was able to recover target information under various turbulence strengths. The challenges of acquiring data through strong turbulence environment and future enhancements of the system will be discussed.
压缩线传感(CLS)主动成像系统在沿海混浊水、雾和薄雾等散射介质中具有良好的成像效果。CLS原型硬件包括一个连续波激光器、一个DMD、一个光电倍增管和一个数据采集仪器。CLS采用与传统测量平台兼容的快速成像技术。感知模型采用分布式压缩感知理论框架,利用自然场景中信号内稀疏性和相邻区域的高度相关性。传感工作时,激光照射空间光调制器DMD,从码本中产生一系列一维二进制传感图案,对当前目标线段进行“编码”。单元素检测器PMT获取目标反射作为编码器输出。然后可以使用编码器输出和反映原始码本条目的环境干扰的预测的目标上码本来恢复目标。在这项工作中,我们研究了CLS成像系统在湍流环境中的有效性。湍流在许多大气和水下监测应用中提出了挑战。在海军研究实验室的光学湍流测试设备上进行了一系列实验,对成像路径进行了不同湍流强度的测试。利用总变差最小化稀疏化基础进行成像重建。初步实验结果表明,该成像系统能够在不同湍流强度下恢复目标信息。本文将讨论在强湍流环境中获取数据所面临的挑战以及未来系统的改进。
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引用次数: 1
The next generation of maskless lithography 下一代无掩模光刻技术
Pub Date : 2016-03-15 DOI: 10.1117/12.2211052
S. Diez
The essential goal for fast prototyping of microstructures is to reduce the cycle time. Conventional methods up to now consist of creating designs with a CAD software, then fabricating or purchasing a Photomask and finally using a mask aligner to transfer the pattern to the photoresist. The new Maskless Aligner (MLA) enables to expose the pattern directly without fabricating a mask, which results in a significantly shorter prototyping cycle. To achieve this short prototyping cycle, the MLA has been improved in many aspects compared to other direct write lithography solutions: exposure speed, user interface, ease of operation and flexibility.
微结构快速成型的基本目标是缩短周期时间。到目前为止,传统的方法包括使用CAD软件创建设计,然后制造或购买光掩模,最后使用掩模对准器将图案转移到光刻胶上。新的无掩模对准器(MLA)可以直接暴露图案,而无需制造掩模,从而大大缩短了原型制作周期。为了实现如此短的原型周期,与其他直写光刻解决方案相比,MLA在许多方面得到了改进:曝光速度、用户界面、易于操作和灵活性。
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引用次数: 13
Novel multi-aperture approach for miniaturized imaging systems 小型化成像系统的新型多孔径成像方法
Pub Date : 2016-03-15 DOI: 10.1117/12.2211698
F. Wippermann, A. Brückner, A. Oberdörster, A. Reimann
The vast majority of cameras and imaging sensors relies on the identical single aperture optics principle with the human eye as natural antetype. Multi-aperture approaches – in natural systems so called compound eyes and in technology often referred to as array-cameras have advantages in terms of miniaturization, simplicity of the optics and additional features such as depth information and refocusing enabled by the computational manipulation of the system´s raw image data. The proposed imaging principle is based on a multitude of imaging channels transmitting different parts of the entire field of view. Adapted image processing algorithms are employed for the generation of the overall image by the stitching of the images of the different channels. The restriction of the individual channel´s field of view leads to a less complex optical system targeting reduced fabrication cost. Due to a novel, linear morphology of the array camera setup, depth mapping with improved resolution can be achieved. We introduce a novel concept for miniaturized array-cameras with several mega pixel resolution targeting high volume applications in mobile and automotive imaging with improved depth mapping and explain design and fabrication aspects.
绝大多数相机和成像传感器依赖于与人眼相同的单孔径光学原理作为自然原型。在被称为复眼的自然系统和通常被称为阵列相机的技术中,多孔径方法在小型化、光学元件的简单性和诸如深度信息和通过对系统原始图像数据的计算操作实现的重新聚焦等附加功能方面具有优势。所提出的成像原理是基于多个成像通道传输整个视场的不同部分。采用自适应图像处理算法对不同通道的图像进行拼接,生成整体图像。单个通道视场的限制导致光学系统的复杂性降低,降低了制造成本。由于阵列相机设置的新颖线性形态,可以实现具有改进分辨率的深度映射。我们介绍了一种具有数百万像素分辨率的小型化阵列相机的新概念,旨在通过改进的深度映射在移动和汽车成像中大量应用,并解释了设计和制造方面的问题。
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引用次数: 6
Temperature-stable LED-based light source without temperature control 温度稳定的led光源,无需温度控制
Pub Date : 2016-03-15 DOI: 10.1117/12.2211576
M. Bosiljevac, D. Babic, Z. Šipuš
Many medical, environmental, and industrial sensing applications could take advantage of uncooled temperature-stable optical sources that are incoherent and un-polarized as such sources do not produce interference fringes, speckle patterns, or intensity variations due to polarization. For this purpose we propose an optical system for stabilization of light-emitting diodes over temperature exhibiting output power variation below 50 ppm/°C which does not employ any kind of TEC elements or even thermometers. This makes it especially suitable for handheld and battery operated instruments.
许多医疗、环境和工业传感应用可以利用非相干和非偏振的非冷却温度稳定光源,因为这样的光源不会产生干涉条纹、散斑图案或由于偏振而产生的强度变化。为此,我们提出了一种光学系统,用于在温度下稳定发光二极管,显示出低于50 ppm/°C的输出功率变化,该系统不使用任何类型的TEC元件甚至温度计。这使得它特别适合手持式和电池操作的仪器。
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引用次数: 3
VIS Fabry-Pérot-Interferometer with (HL)4 PE-Si3N4/PE-SiO2 reflectors on freestanding LP-Si3N4 membranes for surface enhanced Raman spectroscopy 具有(HL)4 PE-Si3N4/PE-SiO2反射器的VIS fabry - p<s:1>干涉仪在独立LP-Si3N4膜上用于表面增强拉曼光谱
Pub Date : 2016-03-15 DOI: 10.1117/12.2208567
C. Helke, M. Meinig, M. Seifert, J. Seiler, K. Hiller, S. Kurth, Jörg Martin, T. Gessner
Profound developments of miniaturized spectrometry systems enable new breakthrough applications such as online monitoring systems for specific molecules by Surface Enhanced Raman Spectroscopy (SERS). The spectrometry system is based on SERS active surfaces in-situ generating nanoparticles and miniaturized detectors with tunable Fabry-Pérot- Interferometers (FPI) with very sharp transmission peaks and a FWHM bandwidth below 2 nm. The key part of this online monitoring system is a tunable FPI, which is fabricated with MEMS technology. This contribution presents a 7.5 x 7.5 mm² chip size FPI, consisting of a moveable reflector on a 210 nm thin and up to 5.5 mm in diameter Si3N4 membrane on a silicon carrier, and a fixed reflector on glass. The optical resonator with an aperture of 2 mm diameter is designed for the central wavelength of 570 nm and realized by adhesive SU-8 bonding of the silicon on glass substrate. The moveable Si3N4 membrane is fabricated by combined wet and dry etching of silicon. The dielectric (HL)4 Si3N4/ SiO2 reflector stack with a reflectance of 93 % is deposited by PE-CVD on the LP-CVD-Si3N4 and structured by dry etching on the membrane and the glass. The measured peak transmittance is between 52 % and 74 % with a FWHM bandwidth between 1.3 nm and 2.0 nm. It was shown, that the FPIs are tunable over the spectral range from 555 nm to 585 nm which is relevant for this SERS application with a tuning voltage of 25 V.
小型化光谱系统的深入发展使新的突破性应用成为可能,例如通过表面增强拉曼光谱(SERS)对特定分子进行在线监测系统。该光谱系统基于原位生成纳米粒子的SERS活性表面和小型化探测器,配备可调谐的fabry - p干涉仪(FPI),具有非常尖锐的透射峰和低于2 nm的FWHM带宽。该在线监测系统的关键部分是采用MEMS技术制作的可调谐FPI。这一贡献提出了一个7.5 x 7.5 mm²芯片尺寸的FPI,由210 nm薄且直径高达5.5 mm的硅载体上的可移动反射器和玻璃上的固定反射器组成。在570 nm的中心波长处设计了孔径为2mm的光学谐振腔,利用硅在玻璃衬底上的SU-8粘接实现。采用湿法和干法相结合的方法制备了可移动氮化硅膜。采用PE-CVD方法在LP-CVD-Si3N4上沉积了反射率为93%的介质(HL)4 Si3N4/ SiO2反射器叠层,并在膜和玻璃上进行了干蚀刻。测得的峰值透过率在52% ~ 74%之间,频宽在1.3 ~ 2.0 nm之间。结果表明,fpi可以在555 nm至585 nm的光谱范围内调谐,这与该SERS应用相关,调谐电压为25 V。
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引用次数: 7
Ultra-slim 2D- and depth-imaging camera modules for mobile imaging 超薄的2D和深度成像相机模块,用于移动成像
Pub Date : 2016-03-15 DOI: 10.1117/12.2214062
A. Brückner, A. Oberdörster, J. Dunkel, A. Reimann, Frank Wippermann
In this contribution, a microoptical imaging system is demonstrated that is inspired by the insect compound eye. The array camera module achieves HD resolution with a z-height of 2.0 mm, which is about 50% compared to traditional cameras with comparable parameters. The FOV is segmented by multiple optical channels imaging in parallel. The partial images are stitched together to form a final image of the whole FOV by image processing software. The system is able to acquire depth maps along with the 2D video and it includes light field imaging features such as software refocusing. The microlens arrays are realized by microoptical technologies on wafer-level which are suitable for a potential fabrication in high volume.
在这篇贡献中,展示了一种受昆虫复眼启发的微光学成像系统。阵列相机模组实现了z高度2.0 mm的高清分辨率,与具有可比参数的传统相机相比,分辨率提高了约50%。视场通过多通道并行成像进行分割。通过图像处理软件将部分图像拼接在一起,形成整个视场的最终图像。该系统能够获取深度图和2D视频,它包括光场成像功能,如软件重新聚焦。微透镜阵列采用晶圆级微光学技术实现,具有大批量生产的潜力。
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引用次数: 4
Deeply-etched micromirror with vertical slit and metallic coating enabling transmission-type optical MEMS filters 具有垂直狭缝和金属涂层的深蚀刻微镜,可实现传输型光学MEMS滤波器
Pub Date : 2016-03-15 DOI: 10.1117/12.2211323
Muhammad A. Othman, Y. Sabry, Mohamed Sadek, I. Nassar, D. Khalil
In this work we report a novel optical MEMS deeply-etched mirror with metallic coating and vertical slot, where the later allows reflection and transmission by the micromirror. The micromirror as well as fiber grooves are fabricated using deep reactive ion etching technology, where the optical axis is in-plane and the components are self-aligned. The etching depth is 150 μm chosen to improve the micromirror optical throughput. The vertical optical structure is Al metal coated using the shadow mask technique. A fiber-coupled Fabry-Pérot filter is successfully realized using the fabricated structure. Experimental measurements were obtained based on a dielectric-coated optical fiber inserted into a fiber groove facing the slotted micromirror. A versatile performance in terms of the free spectral range and 3-dB bandwidth is achieved.
在这项工作中,我们报告了一种新型的光学MEMS深蚀刻反射镜,金属涂层和垂直槽,后者允许微镜反射和传输。微镜和光纤槽采用深度反应离子蚀刻技术制造,其中光轴是平面内的,组件是自对准的。为了提高微镜的光学吞吐量,选择了150 μm的刻蚀深度。垂直光学结构是采用阴影掩膜技术涂覆的铝金属。利用该结构成功地实现了光纤耦合法布里-普氏滤波器。将一根介质涂层光纤插入面对开槽微镜的光纤槽中,得到了实验测量结果。在自由频谱范围和3db带宽方面实现了通用性能。
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引用次数: 5
Photoluminescence blinking and spectral diffusion of single CdSe/ZnS nanocrystals: charge fluctuation effects 单晶CdSe/ZnS的光致发光闪烁和光谱扩散:电荷波动效应
Pub Date : 2016-03-15 DOI: 10.1117/12.2210817
Hiroto Ibuki, T. Ihara, Y. Kanemitsu
We studied time-dependent fluctuations of photoluminescence (PL) spectra of single CdSe/ZnS nanocrystals (NCs), which show PL blinking and spectral diffusion. We observed correlations between PL peak energy, intensity, and linewidth, which are due to the quantum confined Stark effect. We found that a characteristic asymmetric shape appears in the PL peak energy histogram, which can be explained by a simple field-fluctuation model. By comparing the experimental results with theoretical calculations, we evaluate the mean value and standard deviation of the fluctuating electric field. We discuss the experimental data using a model considering a few elementary charges around the NCs, which are the origin of the field fluctuation.
研究了CdSe/ZnS纳米晶体光致发光(PL)光谱随时间波动的变化规律,发现其存在闪烁和光谱扩散现象。我们观察到PL峰能量、强度和线宽之间的相关性,这是由于量子受限Stark效应。我们发现在PL峰能量直方图中出现了一个特征的不对称形状,这可以用一个简单的场涨落模型来解释。通过实验结果与理论计算结果的比较,得出了波动电场的均值和标准差。我们用一个模型讨论了实验数据,该模型考虑了nc周围的一些基本电荷,这些基本电荷是场波动的来源。
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引用次数: 0
Pseudo-circulator implemented as a multimode fiber coupler 作为多模光纤耦合器实现的伪环行器
Pub Date : 2016-03-15 DOI: 10.1117/12.2213378
F. Bulota, P. Bélanger, M. Leduc, C. Boudoux, N. Godbout
We present a linear all-fiber device exhibiting the functionality of a circulator, albeit for multimode fibers. We define a pseudo-circulator as a linear three-port component that transfers most of a multimode light signal from Port 1 to Port 2, and from Port 2 to Port 3. Unlike a traditional circulator which depends on a nonlinear phenomenon to achieve a non-reciprocal behavior, our device is a linear component that seemingly breaks the principle of reciprocity by exploiting the variations of etendue of the multimode fibers in the coupler. The pseudo-circulator is implemented as a 2x2 asymmetric multimode fiber coupler, fabricated using the fusion-tapering technique. The coupler is asymmetric in its transverse fused section. The two multimode fibers differ in area, thus favoring the transfer of light from the smaller to the bigger fiber. The desired difference of area is obtained by tapering one of the fiber before the fusion process. Using this technique, we have successfully fabricated a pseudo-circulator surpassing in efficiency a 50/50 beam-splitter. In all the visible and near-IR spectrum, the transmission ratio exceeds 77% from Port 1 to Port 2, and 80% from Port 2 to Port 3. The excess loss is less than 0.5 dB, regardless of the entry port.
我们提出了一种线性全光纤器件,显示了环路器的功能,尽管是多模光纤。我们将伪环行器定义为一个线性三端口组件,它将大部分多模光信号从端口1传输到端口2,从端口2传输到端口3。与依靠非线性现象实现非互易行为的传统环行器不同,我们的装置是一个线性元件,通过利用耦合器中多模光纤的端部变化,似乎打破了互易原则。伪环行器是一个2x2非对称多模光纤耦合器,采用融合锥形技术制造。该耦合器在其横向熔接部分是不对称的。这两种多模光纤的面积不同,因此有利于光从较小的光纤传输到较大的光纤。通过在熔接过程前将其中一根纤维变细,可以得到所需的面积差。利用这种技术,我们成功地制造了一个伪环行器,其效率超过了50/50分束器。在所有可见和近红外光谱中,端口1到端口2的透射率超过77%,端口2到端口3的透射率超过80%。在任何输入端口下,损耗均小于0.5 dB。
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引用次数: 1
Composite axilens-axicon diffractive optical elements for generation of ring patterns with high focal depth 用于产生高焦深环形图案的复合轴-轴衍射光学元件
Pub Date : 2016-03-15 DOI: 10.1117/12.2213037
Raghu Dharmavarapu, A. Vijayakumar, R. Brunner, S. Bhattacharya
A binary Fresnel Zone Axilens (FZA) is designed for the infinite conjugate mode and the phase profile of a refractive axicon is combined with it to generate a composite Diffractive Optical Element (DOE). The FZA designed for two focal lengths generates a line focus along the propagation direction extending between the two focal planes. The ring pattern generated by the axicon is focused through this distance and the radius of the ring depends on the propagation distance. Hence, the radius of the focused ring pattern can be tuned, during the design process, within the two focal planes. The integration of the two functions was carried out by shifting the location of zones of FZA with respect to the phase profile of the refractive axicon resulting in a binary composite DOE. The FZAs and axicons were designed for different focal depth values and base angles respectively, in order to achieve different ring radii within the focal depth of each element. The elements were simulated using scalar diffraction formula and their focusing characteristics were analyzed. The DOEs were fabricated using electron beam direct writing and evaluated using a fiber coupled diode laser. The tunable ring patterns generated by the DOEs have prospective applications in microdrilling as well as microfabrication of circular diffractive and refractive optical elements.
针对无限共轭模式,设计了双菲涅耳带轴透镜(FZA),并将折射率轴透镜的相位轮廓与之相结合,生成了复合衍射光学元件(DOE)。针对两个焦距设计的FZA在两个焦平面之间沿传播方向产生一条线聚焦。轴突产生的环形图案通过这个距离聚焦,圆环的半径取决于传播距离。因此,在设计过程中,可以在两个焦平面内调谐聚焦环图案的半径。这两个函数的积分是通过改变FZA区域相对于折射率轴的相位分布的位置来实现的,从而得到二元复合DOE。分别针对不同的焦深值和基角设计FZAs和轴轴,以实现每个元素在焦深内的不同环半径。用标量衍射公式对元件进行了数值模拟,分析了元件的聚焦特性。采用电子束直写的方法制备了do,并利用光纤耦合二极管激光器对其进行了评价。由do产生的可调谐环形图案在微钻以及圆形衍射和折射光学元件的微加工中具有广阔的应用前景。
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引用次数: 0
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