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ZnMgO-based UV photodiodes: a comparison of films grown by spray pyrolysis and MBE znmgo基紫外光电二极管:喷雾热解和MBE生长薄膜的比较
Pub Date : 2016-03-15 DOI: 10.1117/12.2213697
A. Hierro, G. Tabares, M. López-Ponce, J. Ulloa, A. Kurtz, E. Muñoz, V. Marín-Borrás, V. Muñoz-Sanjosé, J. Chauveau
Detecting the UV part of the spectrum is fundamental for a wide range of applications where ZnMgO has the potential to play a central role. The shortest achievable wavelength is a function of the Mg content in the films, which in turn is dependent on the growth technique. Moreover, increasing Mg contents lead to an electrical compensation of the films, which directly affects the responsivity of the photodetectors. In addition, the metal-semiconductor interface and the presence of grain boundaries have a direct impact on the responsivity through different gain mechanisms. In this work, we review the development of ZnMgO UV Schottky photodiodes using molecular beam epitaxy and spray pyrolysis, and we analyze and compare the physical mechanisms underlying the photodetector behavior.
检测光谱的紫外部分是广泛应用的基础,其中ZnMgO具有发挥核心作用的潜力。可达到的最短波长是薄膜中Mg含量的函数,而Mg含量又取决于生长技术。此外,Mg含量的增加会导致薄膜的电补偿,直接影响光电探测器的响应性。此外,金属-半导体界面和晶界的存在通过不同的增益机制对响应度有直接影响。在这项工作中,我们回顾了利用分子束外延和喷雾热解制备ZnMgO紫外肖特基光电二极管的进展,并分析和比较了光电探测器行为的物理机制。
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引用次数: 4
Experimental study of silicon ring resonators and ultra-low losses waveguides for efficient silicon optical interposers 高效硅光介面硅环谐振器及超低损耗波导实验研究
Pub Date : 2016-03-15 DOI: 10.1117/12.2212665
V. Reboud, B. Blampey, P. Gindre, O. Dubray, D. Fowler, O. Lemonnier, E. Grellier, M. Fournier, Y. Thonnart, S. Bernabé
We study the optical performances of microring resonator modulators fabricated on 200 mm SOI wafers to select the ring resonator modulators for targeted ONoC and optical interposer applications. Counter-doped ring resonator modulators were fabricated to guarantee the absence of unexpected p-i-n junctions in the ring waveguide due to overlay misalignments inherent to successive fabrication steps. The fabricated add-drop ring resonator modulators showed good DC performances with a VπL at 1.55 V.cm. Finally, ultra-low loss waveguides were realized to allow long distance data transport on photonic chips.
我们研究了在200mm SOI晶圆上制作的微环谐振器调制器的光学性能,以选择适合于ONoC和光中间层应用的环形谐振器。制备了反掺杂环形谐振器调制器,以保证环形波导中由于连续制造步骤所固有的叠加错位而没有意外的p-i-n结。所制备的加降环谐振调制器在1.55 V.cm处具有良好的直流性能。最后,实现了在光子芯片上实现长距离数据传输的超低损耗波导。
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引用次数: 5
Growth of high-quality self-catalyzed core-shell GaAsP nanowires on Si substrates 在Si衬底上生长高质量自催化核壳GaAsP纳米线
Pub Date : 2016-03-15 DOI: 10.1117/12.2210983
Yunyan Zhang, M. Aagesen, A. Sánchez, Jiang Wu, R. Beanland, T. Ward, Dongyoung Kim, P. Jurczak, S. Huo, Huiyun Liu
Self-catalyzed GaAsP nanowires (NWs) have a band gap that is capable of covering the working wavelengths from green to infrared. However, the difficulties in controlling P and the complexities of the growth of ternary NWs make it challenging to fabricate them. In this work, self-catalyzed GaAsP NWs were successfully grown on Si substrates by solid-source molecular beam epitaxy and demonstrated almost stacking fault free zinc blend crystal structure, Growth of high-quality shell has been realized on the core NWs. In the shell, a quasi-3-fold composition symmetry has been observed for the first time. Moreover, these growth techniques have been successfully applied for growth on patterned Si substrates after some creative modifications such as high-temperature substrate cleaning and Ga pre-deposition. These results open up new perspectives for integrating III−V nanowire photovoltaics and visible light emitters on the silicon platform using self-catalyzed GaAsP core−shell nanowires.
自催化GaAsP纳米线(NWs)具有能够覆盖从绿色到红外工作波长的带隙。然而,控制P的困难和三元NWs生长的复杂性给它们的制造带来了挑战。本文采用固体源分子束外延的方法,成功地在Si衬底上生长了自催化的GaAsP NWs,并表现出几乎无层错的锌混合晶体结构,在核心NWs上实现了高质量外壳的生长。在壳层中,首次观察到一种准三重组成对称。此外,这些生长技术已经成功地应用于图案硅衬底上的生长,经过一些创造性的修改,如高温衬底清洗和Ga预沉积。这些结果为利用自催化的GaAsP核壳纳米线在硅平台上集成III - V纳米线光伏和可见光发射器开辟了新的前景。
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引用次数: 0
Low power and highly precise closed-loop driving circuits for piezoelectric micromirrors with embedded capacitive position sensors 嵌入式电容式位置传感器压电微镜的低功耗高精度闭环驱动电路
Pub Date : 2016-03-15 DOI: 10.1117/12.2209573
S. Rombach, M. Marx, S. Gu-Stoppel, Y. Manoli
This work presents an integrated closed-loop driving circuit for previously reported PZT resonant micro-mirrors, which is based on embedded capacitive position sensors for minimizing the system footprint. Signals with a high SNR of 84 dB were measured, when the mechanical scan angle of the micro-mirror was 2◦, so that high controlling resolution of 14 bit for the complete motion range of the mirror is enabled. The total power consumption of the closed-loop system is only 0.86mW. Measurement results of the closed-loop driven micromirror system are presented, demonstrating its competitiveness due to the great reliability, high precision and low-power consumption. Additionally, the implementation and performance of a self-resonant loop is discussed. Finally, the fabrication, temperature dependency and performance of embedded capacitive position sensors for single and dual axis PZT resonant micro-mirrors is evaluated and presented.
本工作提出了一种集成闭环驱动电路,用于先前报道的PZT谐振微镜,该电路基于嵌入式电容式位置传感器,以最大限度地减少系统占用空间。当微镜的机械扫描角度为2◦时,测量了84 dB的高信噪比信号,从而使微镜的整个运动范围具有14位的高控制分辨率。闭环系统总功耗仅为0.86mW。给出了闭环驱动微镜系统的测量结果,证明了该系统具有高可靠性、高精度和低功耗的竞争力。此外,还讨论了自谐振回路的实现和性能。最后,对单轴和双轴PZT谐振微镜的嵌入式电容式位置传感器的制作、温度依赖性和性能进行了评价和介绍。
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引用次数: 7
Strip loaded waveguide on lithium niobate thin films 铌酸锂薄膜上的条形加载波导
Pub Date : 2016-03-15 DOI: 10.1117/12.2212286
M. Roussey, P. Karvinen, M. Häyrinen, S. Honkanen, M. Kuittinen
We present the experimental demonstration of a strip loaded waveguide on crystalline lithium niobate thin film. The structure consists in a 1 μm-wide and 200 nm-thick titanium dioxide strip waveguide on a 700 nm lithium niobate slab waveguide. It operates at the telecom wavelength for a TE-polarized light.
本文提出了在铌酸锂晶体薄膜上加载带状波导的实验演示。该结构由1 μm宽、200 nm厚的二氧化钛条波导和700 nm铌酸锂板波导构成。它工作在电信波长的te偏振光。
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引用次数: 2
Shaping non-diffracting beams with a digital micromirror device 用数字微镜装置塑造非衍射光束
Pub Date : 2016-03-15 DOI: 10.1117/12.2208108
Y. Ren, Zhao-Xiang Fang, Rongde Lu
The micromechanical digital micromirror device (DMD) performs as a spatial light modulator to shape the light wavefront. Different from the liquid crystal devices, which use the birefringence to modulate the light wave, the DMD regulates the wavefront through an amplitude modulation with the digitally controlled mirrors switched on and off. The advantages of such device are the fast speed, polarization insensitivity, and the broadband modulation ability. The fast switching ability for the DMD not only enables the shaping of static light mode, but also could dynamically compensate for the wavefront distortion due to scattering medium. We have employed such device to create the higher order modes, including the Laguerre-Gaussian, Hermite-Gaussian, as well as Mathieu modes. There exists another kind of beam with shape-preservation against propagation, and self-healing against obstacles. Representative modes are the Bessel modes, Airy modes, and the Pearcey modes. Since the DMD modulates the light intensity, a series of algorithms are developed to calculate proper amplitude hologram for shaping the light. The quasi-continuous gray scale images could imitate the continuous amplitude hologram, while the binary amplitude modulation is another means to create the modulation pattern for a steady light field. We demonstrate the generation of the non-diffracting beams with the binary amplitude modulation via the DMD, and successfully created the non-diffracting Bessel beam, Airy beam, and the Pearcey beam. We have characterized the non-diffracting modes through propagation measurements as well as the self-healing measurements.
微机械数字微镜器件(DMD)作为空间光调制器来塑造光波前。与使用双折射来调制光波的液晶器件不同,DMD通过数字控制反射镜开关的幅度调制来调节波前。该器件的优点是速度快、极化不敏感、宽带调制能力强。DMD的快速切换能力不仅可以实现静态光模式的塑造,还可以动态补偿介质散射引起的波前畸变。我们已经利用这种装置创建了高阶模,包括拉盖尔-高斯模、厄米-高斯模和马修模。存在另一种光束,它在传播过程中保持形状,在障碍物中自愈。代表性模态有贝塞尔模态、艾里模态和皮尔斯模态。由于DMD对光强进行调制,因此开发了一系列算法来计算适当幅度的全息图以形成光。准连续灰度图像可以模拟连续振幅全息图,而二值调幅是产生稳定光场调制模式的另一种方法。我们演示了通过DMD产生二元调幅的无衍射光束,并成功地产生了无衍射贝塞尔光束、艾里光束和皮尔斯光束。我们通过传播测量和自愈测量对非衍射模式进行了表征。
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引用次数: 1
Mini and micro spectrometers pave the way to on-field advanced analytics 微型和微型光谱仪为现场高级分析铺平了道路
Pub Date : 2016-03-15 DOI: 10.1117/12.2212384
C. Bouyé, H. Kolb, B. d'Humières
First introduced in the 1990's, miniature optical spectrometers were compact, portable devices brought on the market by the desire to move from time-consuming lab-based analyses to on-field and in situ measurements. This goal of getting spectroscopy into the hands of non-specialists is driving current technical and application developments, the ultimate goal being, in a far future, the integration of a spectrometer into a smartphone or any other smart device (tablet, watch, …). In this article, we present the results of our study on the evolution of the compact spectrometers market towards widespread industrial use and consumer applications. Presently, the main market of compact spectrometers remains academic labs. However, they have been adopted on some industrial applications such as optical source characterization (mainly laser and LEDs). In a near future, manufacturers of compact spectrometers target the following industrial applications: agriculture crop monitoring, food process control or pharmaceuticals quality control. Next steps will be to get closer to the consumer market with point-of-care applications such as glucose detection for diabetics, for example. To reach these objectives, technological breakthroughs will be necessary. Recent progresses have already allowed the release of micro-spectrometers. They take advantage of new micro-technologies such as MEMS (MicroElectroMechanical Systems), MOEMS (Micro-Opto-Electro-Mechanical Systems), micro-mirrors arrays to reduce cost and size while allowing good performance and high volume manufacturability. Integrated photonics is being investigated for future developments. It will also require new business models and new market approaches. Indeed, spreading spectroscopy to more industrial and consumer applications will require spectrometers manufacturers to get closer to the end-users and develop application-oriented products.
微型光谱仪于20世纪90年代首次推出,是一种紧凑的便携式设备,人们希望从耗时的实验室分析转向现场和现场测量,从而将其推向市场。让光谱学进入非专业人士手中的目标正在推动当前的技术和应用发展,最终目标是在遥远的将来,将光谱仪集成到智能手机或任何其他智能设备(平板电脑,手表等)中。在这篇文章中,我们介绍了我们对紧凑型光谱仪市场向广泛的工业应用和消费应用发展的研究结果。目前,紧凑型光谱仪的主要市场仍然是学术实验室。然而,它们已被用于一些工业应用,如光源表征(主要是激光和led)。在不久的将来,紧凑型光谱仪制造商的目标是以下工业应用:农业作物监测,食品过程控制或药品质量控制。接下来的步骤将是通过即时护理应用(如糖尿病患者的血糖检测)更接近消费者市场。要实现这些目标,技术上的突破是必要的。最近的进展已经允许微型光谱仪的发布。他们利用新的微技术,如MEMS(微机电系统),MOEMS(微光电机械系统),微镜阵列,以降低成本和尺寸,同时允许良好的性能和大批量制造。集成光子学正在研究未来的发展。它还需要新的商业模式和新的市场途径。事实上,将光谱学扩展到更多的工业和消费者应用将要求光谱仪制造商更接近最终用户并开发面向应用的产品。
{"title":"Mini and micro spectrometers pave the way to on-field advanced analytics","authors":"C. Bouyé, H. Kolb, B. d'Humières","doi":"10.1117/12.2212384","DOIUrl":"https://doi.org/10.1117/12.2212384","url":null,"abstract":"First introduced in the 1990's, miniature optical spectrometers were compact, portable devices brought on the market by the desire to move from time-consuming lab-based analyses to on-field and in situ measurements. This goal of getting spectroscopy into the hands of non-specialists is driving current technical and application developments, the ultimate goal being, in a far future, the integration of a spectrometer into a smartphone or any other smart device (tablet, watch, …). In this article, we present the results of our study on the evolution of the compact spectrometers market towards widespread industrial use and consumer applications. Presently, the main market of compact spectrometers remains academic labs. However, they have been adopted on some industrial applications such as optical source characterization (mainly laser and LEDs). In a near future, manufacturers of compact spectrometers target the following industrial applications: agriculture crop monitoring, food process control or pharmaceuticals quality control. Next steps will be to get closer to the consumer market with point-of-care applications such as glucose detection for diabetics, for example. To reach these objectives, technological breakthroughs will be necessary. Recent progresses have already allowed the release of micro-spectrometers. They take advantage of new micro-technologies such as MEMS (MicroElectroMechanical Systems), MOEMS (Micro-Opto-Electro-Mechanical Systems), micro-mirrors arrays to reduce cost and size while allowing good performance and high volume manufacturability. Integrated photonics is being investigated for future developments. It will also require new business models and new market approaches. Indeed, spreading spectroscopy to more industrial and consumer applications will require spectrometers manufacturers to get closer to the end-users and develop application-oriented products.","PeriodicalId":122702,"journal":{"name":"SPIE OPTO","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-03-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131678858","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Multimode and single-mode fibers for data center and high-performance computing applications 用于数据中心和高性能计算应用的多模和单模光纤
Pub Date : 2016-03-15 DOI: 10.1117/12.2217882
S. Bickham
Data center (DC) and high performance computing (HPC) applications have traditionally used a combination of copper, multimode fiber and single-mode fiber interconnects with relative percentages that depend on factors such as the line rate, reach and connectivity costs. The balance between these transmission media has increasingly shifted towards optical fiber due to the reach constraints of copper at data rates of 10 Gb/s and higher. The percentage of single-mode fiber deployed in the DC has also grown slightly since 2014, coinciding with the emergence of mega DCs with extended distance needs beyond 100 m. This trend will likely continue in the next few years as DCs expand their capacity from 100G to 400G, increase the physical size of their facilities and begin to utilize silicon-photonics transceiver technology. However there is a still a need for the low-cost and high-density connectivity, and this is sustaining the deployment of multimode fiber for links ≤ 100 m. In this paper, we discuss options for single-mode and multimode fibers in DCs and HPCs and introduce a reduced diameter multimode fiber concept which provides intra-and inter-rack connectivity as well as compatibility with silicon-photonic transceivers operating at 1310 nm. We also discuss the trade-offs between single-mode fiber attributes such as bend-insensitivity, attenuation and mode field diameter and their roles in capacity and connectivity in data centers.
数据中心(DC)和高性能计算(HPC)应用传统上使用铜缆、多模光纤和单模光纤互连的组合,其相对百分比取决于线路速率、覆盖范围和连接成本等因素。由于铜缆在10gb /s或更高的数据速率下的覆盖范围限制,这些传输介质之间的平衡越来越多地转向光纤。自2014年以来,数据中心中部署的单模光纤的百分比也略有增长,与100米以上扩展距离需求的巨型数据中心的出现相吻合。随着数据中心将其容量从100G扩展到400G,增加其设施的物理尺寸并开始利用硅光子收发器技术,这一趋势可能会在未来几年继续下去。然而,仍然需要低成本和高密度的连接,这是维持多模光纤的部署≤100米的链路。在本文中,我们讨论了dc和hpc中单模和多模光纤的选择,并介绍了一种减小直径的多模光纤概念,它提供机架内和机架间的连接,以及与工作在1310nm的硅光子收发器的兼容性。我们还讨论了单模光纤属性(如弯曲不灵敏度、衰减和模场直径)及其在数据中心容量和连接中的作用之间的权衡。
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引用次数: 4
A chip scale optical Tx/Rx based on silicon photonics from views of multi-mode transmission 基于硅光子学的芯片级光学Tx/Rx多模传输
Pub Date : 2016-03-15 DOI: 10.1117/12.2213710
I. Ogura, K. Yashiki, Yasuyuki Suzuki, Y. Hagihara, Takahiro Nakamura, K. Kurata
This paper focuses on latest progress in experimental and theoretical studies on silicon-based carrier-depletion PN-junction phase shifters in terms of high modulation efficiency for energy-efficient photonic networks of high transmission capacity. Modulation efficiency of rib-waveguide phase shifters having various PN-junction configuration are characterized with respect to DC figure of merit defined for phase shifters using carrier-plasma dispersion as the physical principle of refractive-index modulation. In addition, RF drive voltage required for 10-Gb/s on-off keying is characterized for rib-waveguide phase shifters including lateral and vertical PN-junction configurations.
本文重点介绍了硅基载流子耗尽型pn结移相器在高调制效率、高传输容量的高能效光子网络中的实验和理论研究的最新进展。利用载波等离子体色散作为折射率调制的物理原理,对具有不同pn结结构的肋波导移相器的调制效率进行了表征。此外,对于肋波导移相器,包括横向和垂直pn结配置,对10gb /s开关键控所需的射频驱动电压进行了表征。
{"title":"A chip scale optical Tx/Rx based on silicon photonics from views of multi-mode transmission","authors":"I. Ogura, K. Yashiki, Yasuyuki Suzuki, Y. Hagihara, Takahiro Nakamura, K. Kurata","doi":"10.1117/12.2213710","DOIUrl":"https://doi.org/10.1117/12.2213710","url":null,"abstract":"This paper focuses on latest progress in experimental and theoretical studies on silicon-based carrier-depletion PN-junction phase shifters in terms of high modulation efficiency for energy-efficient photonic networks of high transmission capacity. Modulation efficiency of rib-waveguide phase shifters having various PN-junction configuration are characterized with respect to DC figure of merit defined for phase shifters using carrier-plasma dispersion as the physical principle of refractive-index modulation. In addition, RF drive voltage required for 10-Gb/s on-off keying is characterized for rib-waveguide phase shifters including lateral and vertical PN-junction configurations.","PeriodicalId":122702,"journal":{"name":"SPIE OPTO","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2016-03-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121253293","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Guided-mode resonance nanophotonics in materially sparse architectures 材料稀疏结构中的导模共振纳米光子学
Pub Date : 2016-03-15 DOI: 10.1117/12.2211687
R. Magnusson, Manoj Niraula, J. Yoon, Y. Ko, K. Lee
The guided-mode resonance (GMR) concept refers to lateral quasi-guided waveguide modes induced in periodic layers. Whereas these effects have been known for a long time, new attributes and innovations continue to appear. Here, we review some recent progress in this field with emphasis on sparse, or minimal, device embodiments. We discuss properties of wideband resonant reflectors designed with gratings in which the grating ridges are matched to an identical material to eliminate local reflections and phase changes. This critical interface therefore possesses zero refractive-index contrast; hence we call them “zero-contrast gratings.” Applying this architecture, we present single-layer, wideband reflectors that are robust under experimentally realistic parametric variations. We introduce a new class of reflectors and polarizers fashioned with dielectric nanowire grids that are mostly empty space. Computed results predict high reflection and attendant polarization extinction for these sparse lattices. Experimental verification with Si nanowire grids yields ~200-nm-wide band of high reflection for one polarization state and free transmission of the orthogonal state. Finally, we present bandpass filters using all-dielectric resonant gratings. We design, fabricate, and test nanostructured single layer filters exhibiting high efficiency and sub-nanometer-wide passbands surrounded by 100-nm-wide stopbands.
导模共振(GMR)的概念是指在周期层中诱导的横向准导波导模式。尽管这些影响早已为人所知,但新的属性和创新仍在不断出现。在这里,我们回顾了该领域的一些最新进展,重点是稀疏或最小的设备实施例。我们讨论了用光栅设计的宽带谐振反射器的特性,其中光栅脊与相同的材料匹配以消除局部反射和相位变化。因此,这个临界界面具有零折射率对比度;因此我们称它们为“零对比度光栅”。应用这种结构,我们提出了在实验实际参数变化下具有鲁棒性的单层宽带反射器。我们介绍了一种新型的反射器和偏振器,这种反射器和偏振器由介质纳米线网格构成,这些网格大部分是空的。计算结果预测了这些稀疏晶格的高反射和伴随的偏振消光。用硅纳米线网格进行实验验证,得到了单偏振态~200 nm宽的高反射带和正交态的自由透射。最后,我们提出了采用全介电谐振光栅的带通滤波器。我们设计,制造和测试了具有高效率和亚纳米宽通带的纳米结构单层滤波器,并被100纳米宽的阻带包围。
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引用次数: 4
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SPIE OPTO
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