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Visible to Near-Infrared Light Integrated Photonic Components on PECVD and LPCVD SiN Platform 基于 PECVD 和 LPCVD SiN 平台的可见光至近红外集成光子元件
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-24 DOI: 10.1109/JPHOT.2024.3467310
Sen Yang;Zuoqin Ding;Xiao Li;Xiao Luo;Shuhua Zhai;Xiujun Zheng;Bo Wang;He Li;Zhuo Deng;Qianshi Wang;Sarp Kerman;Chang Chen
In this paper, we present our process design kits (PDKs) component performances for different wavelengths in the visible to near-infrared (VIS-NIR) range on Shanghai Industrial μTechnology Research Institute's (SITRI's) 200 mm silicon nitride (SiN) photonics platform. SiN waveguide platform has emerged as a promising technology due to its low optical loss, relatively high refractive index, and transparency across the VIS-NIR spectrum. The industrialization of SiN platforms requires matured PDKs. On SITRI's 200 mm SiN photonics platform, we developed PDKs using both Plasma-Enhanced Chemical Vapor Deposition (PECVD) and Low-Pressure Chemical Vapor Deposition (LPCVD) processes, with SiN layers of 180 nm and 150 nm thicknesses, respectively. The fabricated waveguides exhibit low propagation loss, ranging from 2.5 dB/cm to 0.34 dB/cm from 532 nm to 860 nm. Additionally, we present a low bending loss which is less than 0.06 dB/90° with a radius of 100 μm. Furthermore, the loss of the linear grating coupler (LGC) is less than 2.6 dB at 785 nm. We have also achieved low-loss splitters, including 1 × 2 multimode interference (MMI) coupler, and directional coupler (DC), with a minimum excess loss of 0.03 dB. Additionally, micro ring resonator with high quality (Q) factors of 146,000 has been demonstrated. Our work on developing these PDKs will open new opportunities for researchers and developers to design and fabricate advanced photonic devices on the SiN platform in SITRI's 200 mm fabrication line.
在本文中,我们介绍了上海微技术研究所(SITRI)200 毫米氮化硅(SiN)光子学平台上不同波长的可见光到近红外(VIS-NIR)范围内的工艺设计套件(PDKs)组件性能。氮化硅波导平台因其光损耗低、折射率相对较高以及在整个 VIS-NIR 光谱范围内的透明度而成为一项前景广阔的技术。SiN 平台的产业化需要成熟的 PDK。在 SITRI 的 200 毫米 SiN 光子平台上,我们采用等离子体增强化学气相沉积 (PECVD) 和低压化学气相沉积 (LPCVD) 工艺开发了 PDK,SiN 层厚度分别为 180 nm 和 150 nm。制造出的波导具有较低的传播损耗,从 532 纳米到 860 纳米的传播损耗范围从 2.5 dB/cm 到 0.34 dB/cm。此外,我们还实现了较低的弯曲损耗,半径为 100 μm 时小于 0.06 dB/90°。此外,线性光栅耦合器 (LGC) 在 785 nm 波长处的损耗小于 2.6 dB。我们还实现了低损耗分路器,包括 1 × 2 多模干涉(MMI)耦合器和定向耦合器(DC),其最小过量损耗为 0.03 dB。此外,还展示了质量(Q)系数高达 146,000 的微型环形谐振器。我们开发这些 PDK 的工作将为研究人员和开发人员在 SITRI 200 毫米制造线上的 SiN 平台上设计和制造先进光子器件带来新的机遇。
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引用次数: 0
Efficient Phase Retrieval via Improved Binary Amplitude Modulation Masks 通过改进的二进制调幅掩码实现高效相位检索
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-23 DOI: 10.1109/JPHOT.2024.3466565
Chao Yang;Cheng Xu;Hui Pang;Jun Lan;Lixin Zhao;Song Hu;Wei Yan;Xianchang Zhu
Conventional iterative phase retrieval suffers from an inherent phase ambiguity due to limited measurement intensity. Multimodal amplitude modulation introduces physical constraints to tackle the underdetermination challenge. However, the time overhead caused by mask switching slows down the imaging speed. To increase imaging speed, we report an accelerated coded phase retrieval method by optimizing modulation masks. Compared to existing methods that require at least four patterns as inputs, the proposed method requires only three mask modulations to robustly reconstruct complex objects. The transparent pixels of the two masks partially overlap, constituting a strong constraint on the objective function. An additional random mask increases the difference between diffraction intensity patterns and ensures that the algorithm converges. The proposed method of efficient modulation using pure amplitude elements may open the door to short-wavelength high-speed complex amplitude imaging. Numerical simulations and proof-of-principle experiments have verified the feasibility of this method.
由于测量强度有限,传统的迭代相位检索存在固有的相位模糊性。多模态振幅调制引入了物理约束来解决相位不确定的难题。然而,掩膜切换造成的时间开销会降低成像速度。为了提高成像速度,我们报告了一种通过优化调制掩码来加速编码相位检索的方法。与需要至少四种模式作为输入的现有方法相比,所提出的方法只需要三种掩模调制,就能稳健地重建复杂物体。两个掩码的透明像素部分重叠,对目标函数构成了强大的约束。额外的随机掩模增加了衍射强度模式之间的差异,确保算法收敛。所提出的使用纯振幅元素进行高效调制的方法可能会为短波长高速复振幅成像打开一扇大门。数值模拟和原理验证实验验证了这种方法的可行性。
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引用次数: 0
Scalability Study of All-Photonics Metro/ Access Network With Simultaneous Reception of Wavelength-Multiplexed Control and Main Signals 同时接收波长多路复用控制信号和主信号的全光子城域网/接入网可扩展性研究
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-19 DOI: 10.1109/JPHOT.2024.3461803
Ryo Igarashi;Shin Kaneko;Yasutaka Kimura;Takuya Kanai;Jun-ichi Kani;Tomoaki Yoshida
Research on the all-photonics metro/access network is active as the next generation communication system. It aims to provide high-throughput, low-latency, low-power-consumption connections via end-to-end optical paths that directly link users without o/e/o conversion. One issue with realizing this network is how to implement the remote-control channel cost-effectively. In this work, we propose a cost-effective control signal transmission system based on auxiliary management and control channel (AMCC) and wavelength division multiplexing (WDM) technology. 25-Gbit/s non-return-to-zero (NRZ) 40 km transmission confirms the feasibility of the proposed system. The experiment comprehensively examines the influence that upstream/downstream control signals and main signals on different paths have on each other's receiver sensitivity. With the appropriate parameters, the penalty on the main signal's receiver sensitivity due to upstream/downstream control signals can be reduced to just 0.5 dB. The proposed method can realize cost-effective control channels in the all-photonics metro/access network with minimal sensitivity degradation.
作为下一代通信系统,全光子城域/接入网的研究十分活跃。其目的是通过端到端光通路提供高吞吐量、低延迟、低功耗的连接,直接连接用户而无需进行o/e/o转换。实现这一网络的一个问题是如何经济高效地实现遥控信道。在这项工作中,我们提出了一种基于辅助管理与控制信道(AMCC)和波分复用(WDM)技术的经济高效的控制信号传输系统。25-Gbit/s 非归零(NRZ)40 公里传输证实了所提系统的可行性。实验全面考察了不同路径上的上行/下行控制信号和主信号对彼此接收灵敏度的影响。在参数适当的情况下,上行/下行控制信号对主信号接收灵敏度的影响可降至 0.5 dB。所提出的方法可以在全光子城域/接入网络中实现具有成本效益的控制信道,同时将灵敏度降低到最低程度。
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引用次数: 0
A Low-Cost Approach to Diode-Pumped Ti:Sapphire Lasers With Watt-Level Output 实现瓦特级输出的二极管泵浦 Ti:Sapphire 激光器的低成本方法
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-18 DOI: 10.1109/JPHOT.2024.3463751
Niall Simpson;Martin Lee;Alan J. Kemp
We report a continuous-wave Ti:sapphire laser with an output power of 1.03 W, achieved with two low-cost single-emitter diode pumps, both of blue wavelength (448 and 468 nm). Using a novel strategy of combining blue-wavelength pumping with a long, low-doping Ti:sapphire crystal, we maximise the available pump power while minimising deleterious effects associated with blue pump wavelengths, demonstrating Watt-level output powers.
我们报告了一种输出功率为 1.03 W 的连续波 Ti:sapphire 激光器,该激光器采用了两个低成本的单发射极二极管泵浦,波长均为蓝色(448 nm 和 468 nm)。我们采用新颖的策略,将蓝色波长泵浦与低掺杂长钛蓝宝石晶体相结合,最大限度地提高了可用泵浦功率,同时将与蓝色泵浦波长相关的有害效应降至最低,实现了瓦级输出功率。
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引用次数: 0
Plasmonic Mode Interference Effect Based Sensors 基于等离子模式干扰效应的传感器
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-18 DOI: 10.1109/JPHOT.2024.3463008
Neha Ahlawat;Awanish Pandey;Saurabh Mani Tripathi
We propose and theoretically analyze a novel sensor based on plasmonic mode interference in a one-dimensional degenerate n-doped silicon core waveguide. The waveguide supports both, the symmetric- as well as anti-symmetric surface plasmon polaritons (SPPs), with a large propagation constant difference between them, drastically miniaturizing the probe size to $sim$100 $mu$m. Our study reveals that the symmetric plasmonic mode has significant field localization in the sensing region as compared to the anti-symmetric plasmonic mode which has a large field localization in the substrate region. This makes the symmetric SPP considerably more suitable for bio/chemical sensing applications. The core mode projection technique with an optimized transverse offset between the lead-in waveguide and plasmonic waveguide has been used to couple appreciable power into the two SPP modes enhancing the extinction ratio of the transmission spectra. The estimated sensitivity of the sensor is $sim$ 3400 nm/RIU over biologically relevant refractive indices. Our study demonstrates the effectiveness of plasmonic mode interference in designing highly sensitive bio/chemical sensors with miniaturized probe length through careful design considerations. We also discuss the effect of temperature cross-sensitivity on the performance of the sensor and have presented a sensitivity matrix-based approach for the simultaneous detection of two perturbations using a single sensor probe. We have shown that using this sensitivity-matrix approach, the error associated with the estimated variations in the perturbations is of the order of 10$^{-4}$ to 10$^{-3}$, making it a powerful tool to estimate simultaneously varying perturbation parameters by tracking multiple resonances.
我们提出并从理论上分析了一种基于一维退化 n 掺杂硅芯波导中的质子模式干涉的新型传感器。波导既支持对称表面等离子体极化子,也支持反对称表面等离子体极化子(SPPs),它们之间的传播常量相差很大,从而大大缩小了探头尺寸,达到 $sim$100 $mu$m。我们的研究表明,与反对称等离子模式相比,对称等离子模式在传感区域具有显著的场定位,而反对称等离子模式在衬底区域具有较大的场定位。这使得对称 SPP 更适合生物/化学传感应用。在引线波导和等离子波导之间采用优化横向偏移的核心模式投影技术,将可观的功率耦合到两个 SPP 模式中,提高了透射光谱的消光比。在生物相关折射率范围内,传感器的灵敏度估计为 3400 nm/RIU。我们的研究表明,通过仔细的设计考虑,等离子模式干涉在设计探头长度微型化的高灵敏度生物/化学传感器方面非常有效。我们还讨论了温度交叉灵敏度对传感器性能的影响,并提出了一种基于灵敏度矩阵的方法,用于使用单个传感器探头同时检测两种扰动。我们已经证明,使用这种灵敏度矩阵方法,与扰动变化估计值相关的误差在 10$^{-4}$ 到 10$^{-3}$ 之间,这使其成为通过跟踪多个共振来估计同时变化的扰动参数的强大工具。
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引用次数: 0
A Digital Twin Model for Optical Telescope Pointing Systems 光学望远镜指向系统的数字孪生模型
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-18 DOI: 10.1109/JPHOT.2024.3462994
Zhenghao Li;Yahui Zhang;Yan He
Pointing accuracy, as one of the important indexes to measure the performance of optical tele-scope products, is directly related to the observation quality and efficiency of the telescope, but affected by a variety of complex factors, the timeliness problem of pointing correction affects the smooth progress of the work. In this study, this paper focuses on the error modelling of optical telescope pointing system under limited observation conditions. In this paper, we first explore the changing law of each parameter and the unknown system error. On this basis, assuming that the system is in a stable state, a digital twin modelling model applied to the pointing system of an electro-optical telescope is proposed, which significantly improves the accuracy of the local pointing error correction by means of a limited observing condition: one newly captured star, and simulates and evaluates the feasibility of the twin model by using the experimental data from the external field, which provides the conditions for the evaluation of the maintenance status of the equipment.
指向精度作为衡量光学远望产品性能的重要指标之一,直接关系到望远镜的观测质量和效率,但受多种复杂因素的影响,指向校正的时效性问题影响着工作的顺利进行。在此研究中,本文主要探讨在有限观测条件下光学望远镜指向系统的误差建模问题。本文首先探讨了各参数和未知系统误差的变化规律。在此基础上,假设系统处于稳定状态,提出了一种应用于电光望远镜指向系统的数字孪生建模模型,通过有限观测条件:一颗新捕获的恒星,显著提高了局部指向误差修正的精度,并利用外场实验数据模拟和评估了孪生模型的可行性,为设备维护状态的评估提供了条件。
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引用次数: 0
Coherent all Optical Reservoir Computing for Equalization of Impairments in Coherent Fiber Optic Communication Systems 用于相干光纤通信系统损耗均衡的相干全光存储计算
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-17 DOI: 10.1109/JPHOT.2024.3462438
Shiva Kumar;Mahmoud M. T. Maghrabi;Mohamed H. Bakr;Toshihiko Hirooka;Masataka Nakazawa
Reservoir computing (RC) is a bio-inspired framework suited for temporal data processing. Here we propose an all optical coherent RC for the equalization of the impairments of fiber optic (FO) system based on coherent detection. We compare the performances of the RC systems based on semiconductor saturable absorber mirror (SESAM) and highly nonlinear waveguide (HNLW). For a dispersion managed long haul FO system in which the nonlinear penalty is dominant, we find that the SESAM outperforms the HNLW due to its larger nonlinear memory. In contrast, for the equalization of dispersive impairments in a short haul FO system such as data center networks, we find that the HNLW has a much superior performance due to its larger linear memory.
存储计算(RC)是一种生物启发框架,适用于时间数据处理。在这里,我们提出了一种基于相干检测的全光相干 RC,用于均衡光纤(FO)系统的损伤。我们比较了基于半导体可饱和吸收镜(SESAM)和高非线性波导(HNLW)的 RC 系统的性能。对于非线性惩罚占主导地位的色散管理长距离 FO 系统,我们发现 SESAM 因其较大的非线性存储器而优于 HNLW。相反,对于数据中心网络等短途光导纤维系统中的色散损伤均衡,我们发现 HNLW 因其较大的线性存储器而具有更优越的性能。
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引用次数: 0
Novel Frame Buffer Pixel Circuits and Silicon Backplane Development for Polarization-Independent LCOS 用于偏振无关 LCOS 的新型帧缓冲器像素电路和硅背板开发
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-17 DOI: 10.1109/JPHOT.2024.3462889
Qirui Zhang;Isaac Zachmann;Lianhua Ji;Chongchang Mao
This project aims to develop novel frame buffer pixel circuit-based silicon backplanes using 180 nm process technology for polarization-independent liquid crystal on silicon (PI-LCOS) phase modulators. Three unique pixel circuits, which exclusively utilize NMOS transistors, have been designed to minimize pixel size and improve production yield. Additionally, the "Voltage Booster” (VBOOST) technique extends the dynamic voltage range, crucial for stable phase modulation and high grayscale. Efforts are also underway to enhance stability against voltage fluctuation by incorporating the auxiliary capacitor or refined active-driving pixel-electrode stage. The prototype silicon backplane features a 64 × 64-pixel matrix with column and row decoders for individual pixel addressing, facilitating optical testing. By employing a two-stage analog dynamic random-access memory (DRAM), the pixel circuit supports sequential data loading row by row throughout the array while simultaneously displaying previously loaded frame data. This ‘frame-at-a-time’ data refresh capability is vital for displaying images with full contrast, which is particularly advantageous for holographic and color sequential display applications. Simulation and experimental assessments on the silicon backplane chips demonstrate that these pixel circuits can support a high-resolution LCOS device with approximately 4.15 um x 4.15 um pixel pitch in the 180 nm process technology, a high voltage holding ratio exceeding 94%, and substantial grayscale modulation depth.
本项目旨在利用 180 纳米工艺技术,为偏振无关型硅基液晶(PI-LCOS)相位调制器开发基于新型帧缓冲像素电路的硅背板。该项目设计了三种独特的像素电路,全部采用 NMOS 晶体管,以最大限度地减小像素尺寸并提高产量。此外,"电压增强"(VBOOST)技术扩大了动态电压范围,这对稳定的相位调制和高灰度至关重要。此外,还在努力通过加入辅助电容器或改进的主动驱动像素电极级来提高抗电压波动的稳定性。原型硅背板采用 64 × 64 像素矩阵,带有用于单个像素寻址的列和行解码器,便于进行光学测试。通过采用两级模拟动态随机存取存储器(DRAM),像素电路支持在整个阵列中逐行顺序加载数据,同时显示先前加载的帧数据。这种 "每次显示一帧 "的数据刷新能力对于显示具有充分对比度的图像至关重要,尤其适用于全息和彩色连续显示应用。在硅背板芯片上进行的仿真和实验评估表明,这些像素电路可支持 180 纳米工艺技术中约 4.15 微米 x 4.15 微米像素间距的高分辨率 LCOS 器件、超过 94% 的高电压保持率和相当大的灰度调制深度。
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引用次数: 0
Compact, Energy Efficient Simultaneous Transmission of Analog and Different Digital Signals With a Single Ring Modulator 利用单环调制器同时传输模拟信号和不同数字信号的紧凑型高能效技术
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-13 DOI: 10.1109/JPHOT.2024.3460977
Mohamed I. Hosni;Younus Mandalawi;Janosch Meier;Ahmed H. Elghandour;Linjie Zhou;Thomas Schneider
We present a compact, agnostic transmitter capable of simultaneously transmitting all types of signals (analog and digital with different modulation formats) with a single-ring modulator with a radius of 10 micrometers and a bandwidth of around 18 GHz. To the best of our knowledge, we show for the first time, experimental results for transmitting three different Nyquist BPSK signals with an aggregated baud rate of 24 GBd in such a compact device. Additionally, we show the simultaneous transmission of a 3 GHz analog signal together with normal and Nyquist-shaped 4 GHz BPSK signals. All results were achieved without any power-consuming pre- or postprocessing to adapt the signals to the transfer function of the modulators. The simultaneous transmission of analog and digital signals in a device with a small footprint and low power consumption may be especially advantageous for future access networks.
我们展示了一种结构紧凑、不受环境影响的发射器,它能够利用半径为 10 微米、带宽约为 18 千兆赫的单环调制器同时发射所有类型的信号(采用不同调制格式的模拟和数字信号)。据我们所知,我们首次展示了在如此紧凑的设备中传输三种不同的 Nyquist BPSK 信号的实验结果,其总波特率为 24 GBd。此外,我们还展示了同时传输 3 GHz 模拟信号以及普通和奈奎斯特形 4 GHz BPSK 信号的情况。所有结果都是在不进行任何耗电的预处理或后处理的情况下实现的,以便使信号适应调制器的传递函数。在一个占地面积小、功耗低的设备中同时传输模拟和数字信号,这对未来的接入网络可能特别有利。
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引用次数: 0
Design Method for Laser Target Simulator Illumination System With High Energy Utilization and High Uniformity 高能量利用率和高均匀性激光目标模拟器照明系统的设计方法
IF 2.1 4区 工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Pub Date : 2024-09-12 DOI: 10.1109/JPHOT.2024.3459482
Huibo Shao;Lingyun Wang;Haocong Zhang;Guangxi Li;Yu Chen
In this paper, a novel design of the illumination optical system for a laser target simulator is investigated to determine the optimal relationship between the uniformity of the illumination system and the energy utilization in a laser target simulator. First, the optimal size of the fly-eye lens unit is calculated from the parameters of the DMD to improve the energy utilization of the system; second, the optimal parameters of the TIR prism group are calculated based on the size of the illuminating beam and the optimal deflection angle of the TIR prism group is analyzed, which results in the compact overall structure of the system and improves the uniformity under the premise of ensuring that there is not much change in the energy utilization; and finally, the optimal design of the illumination optics system for laser target simulators is investigated based on the Finally, based on the Scheimpflug principle, the uniformity of the illumination system is further improved by solving the deformation of the image plane caused by the insertion of the TIR prism group. The results show that the simulation results of the system's uniformity reach 96.93%, the simulation results of the energy utilization are 60.05%, and the structure is compact, and the system designed by this method can provide a good design solution to obtain high energy utilization and uniformity.
本文研究了激光目标模拟器照明光学系统的新型设计,以确定照明系统的均匀性与激光目标模拟器能量利用率之间的最佳关系。首先,根据 DMD 的参数计算出飞眼透镜单元的最佳尺寸,以提高系统的能量利用率;其次,根据照明光束的大小计算出 TIR 棱镜组的最佳参数,并分析出 TIR 棱镜组的最佳偏转角度,从而使系统整体结构紧凑,在保证能量利用率变化不大的前提下提高了均匀性;最后,根据 Scheimpflug 原理,通过解决插入 TIR 棱镜组引起的像面变形问题,进一步提高了照明系统的均匀性。结果表明,系统均匀度的仿真结果达到了 96.93%,能量利用率的仿真结果为 60.05%,而且结构紧凑,用这种方法设计的系统可以为获得高能量利用率和均匀度提供良好的设计方案。
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引用次数: 0
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IEEE Photonics Journal
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