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Macro and micro-scale material removal mechanisms during ECM/hybrid laser-ECM of a passivating multiphase NbC–Ni cermet 钝化多相 NbC-Ni 金属陶瓷的 ECM/混合激光-ECM 过程中的宏观和微观材料去除机制
IF 14 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2024-06-26 DOI: 10.1016/j.ijmachtools.2024.104182
Muhammad Hazak Arshad , Krishna Kumar Saxena , Shuigen Huang , Dominiek Reynaerts

Electrochemical machining (ECM) is a non-contact and athermal machining process where the material removal is accomplished through controlled anodic dissolution of the workpiece governed by Faraday laws. ECM process has been hybridized with several other processes for improving material processing windows. Hybrid laser electrochemical machining (LECM) synergistically applies electrochemical and laser process energies with added benefits of escalated reaction kinetics leading to enhanced transpassive dissolution, weakening of passivation layer, process localisation and uniform dissolution. The laser energy acts as a localised and controllable heat source thereby offering multi-fold processing benefits. For alloys and cermets, a characteristic surficial fingerprint is the presence of inhomogeneous multiphase dissolution and sporadically distributed passivation layer, necessitating addition of aggressive reagents in electrolytes. LECM has the potential to addresses these challenges while processing in pH neutral electrolytes. Previous works have very limited analysis on the macro and micro removal mechanisms while processing relevant strategic materials and multitude of applications of LECM remain unexploited. Therefore, this work presents in-depth investigations into macro and micro-scale material removal mechanisms of ECM/LECM on sintered niobium carbide with nickel binder (NbC–Ni), which is a potential cobalt-free alternative to tungsten carbide. The results revealed new insights into the removal behaviour of the constituent phases which differed from the first principles and their interaction with the laser. During ECM, the Ni phase dissolved preferentially and influenced the surface pattern and particle breakout which was reduced with laser assistance. The surface evolution characteristics were also analysed based on the ridge-crevice pattern. Additionally, the weakening of passive layer was correlated with the pulse analysis that revealed quantitatively the different process regimes occurring during ECM and LECM. The grain level study revealed that orientation effects still exist during LECM and the grains with higher surface energy (FCC (001) vicinal planes) passivated more and dissolved less. Furthermore, the improvement in surface quality, overcut and reduction in particle breakout with LECM process makes it promising for machining newer recipes of metal carbides.

电化学加工(ECM)是一种非接触、非热加工工艺,通过法拉第定律控制的工件阳极溶解实现材料去除。ECM 工艺已与其他几种工艺混合使用,以改善材料加工窗口。混合激光电化学加工(LECM)可协同应用电化学和激光加工能量,并具有反应动力学升级的额外优势,从而增强透射溶解、减弱钝化层、加工局部化和均匀溶解。激光能量可作为局部可控热源,从而带来多重加工优势。对于合金和金属陶瓷而言,其表面特征是存在不均匀的多相溶解和零星分布的钝化层,因此需要在电解液中添加侵蚀性试剂。LECM 有可能在 pH 值为中性的电解质中处理时解决这些难题。以往的研究对处理相关战略材料时宏观和微观去除机制的分析非常有限,LECM 的多种应用仍未得到开发。因此,本研究对烧结碳化铌与镍粘合剂(NbC-Ni)上的 ECM/LECM 的宏观和微观材料去除机制进行了深入研究,烧结碳化铌与镍粘合剂是碳化钨的潜在无钴替代品。研究结果揭示了与第一原理不同的各组成相的去除行为及其与激光的相互作用。在 ECM 过程中,镍相优先溶解并影响表面形态和颗粒破裂,而在激光辅助下,这种情况有所减少。还根据脊-裂缝模式分析了表面演变特征。此外,被动层的减弱与脉冲分析相关联,脉冲分析定量揭示了 ECM 和 LECM 过程中出现的不同工艺状态。晶粒级研究表明,在 LECM 过程中仍然存在取向效应,表面能量较高的晶粒(FCC (001) 邻接面)钝化程度较高,溶解程度较低。此外,LECM 工艺改善了表面质量、过切和减少了颗粒破损,使其有望用于加工新配方的金属碳化物。
{"title":"Macro and micro-scale material removal mechanisms during ECM/hybrid laser-ECM of a passivating multiphase NbC–Ni cermet","authors":"Muhammad Hazak Arshad ,&nbsp;Krishna Kumar Saxena ,&nbsp;Shuigen Huang ,&nbsp;Dominiek Reynaerts","doi":"10.1016/j.ijmachtools.2024.104182","DOIUrl":"https://doi.org/10.1016/j.ijmachtools.2024.104182","url":null,"abstract":"<div><p>Electrochemical machining (ECM) is a non-contact and athermal machining process where the material removal is accomplished through controlled anodic dissolution of the workpiece governed by Faraday laws. ECM process has been hybridized with several other processes for improving material processing windows. Hybrid laser electrochemical machining (LECM) synergistically applies electrochemical and laser process energies with added benefits of escalated reaction kinetics leading to enhanced transpassive dissolution, weakening of passivation layer, process localisation and uniform dissolution. The laser energy acts as a localised and controllable heat source thereby offering multi-fold processing benefits. For alloys and cermets, a characteristic surficial fingerprint is the presence of inhomogeneous multiphase dissolution and sporadically distributed passivation layer, necessitating addition of aggressive reagents in electrolytes. LECM has the potential to addresses these challenges while processing in pH neutral electrolytes. Previous works have very limited analysis on the macro and micro removal mechanisms while processing relevant strategic materials and multitude of applications of LECM remain unexploited. Therefore, this work presents in-depth investigations into macro and micro-scale material removal mechanisms of ECM/LECM on sintered niobium carbide with nickel binder (NbC–Ni), which is a potential cobalt-free alternative to tungsten carbide. The results revealed new insights into the removal behaviour of the constituent phases which differed from the first principles and their interaction with the laser. During ECM, the Ni phase dissolved preferentially and influenced the surface pattern and particle breakout which was reduced with laser assistance. The surface evolution characteristics were also analysed based on the ridge-crevice pattern. Additionally, the weakening of passive layer was correlated with the pulse analysis that revealed quantitatively the different process regimes occurring during ECM and LECM. The grain level study revealed that orientation effects still exist during LECM and the grains with higher surface energy (FCC (001) vicinal planes) passivated more and dissolved less. Furthermore, the improvement in surface quality, overcut and reduction in particle breakout with LECM process makes it promising for machining newer recipes of metal carbides.</p></div>","PeriodicalId":14011,"journal":{"name":"International Journal of Machine Tools & Manufacture","volume":"200 ","pages":"Article 104182"},"PeriodicalIF":14.0,"publicationDate":"2024-06-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141542804","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dynamics of pore formation and evolution during multi-layer directed energy deposition additive manufacturing via in-situ synchrotron X-ray imaging: A case study on high-entropy Cantor alloy 通过原位同步辐射 X 射线成像研究多层定向能沉积增材制造过程中孔隙形成和演变的动力学:高熵康托合金案例研究
IF 14 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2024-06-25 DOI: 10.1016/j.ijmachtools.2024.104181
Shuya Zhang , Chunxia Yao , Dongsheng Zhang , Wei Liu , Lin He , Dafan Du , Baode Sun , Anping Dong , Bingbing Zhang , Lianghua Xiong

Blown-powder directed energy deposition (DED) additive manufacturing is impeded for novel alloys processing by perceivable and detrimental porosity. During multi-layer depositions, however, mechanisms of pore formation and evolution remain elusive for developing pore mitigation strategies. Here, conduction-mode multi-layer DED process of an exemplary high-entropy Cantor alloy have been investigated in-situ by high-energy high-speed synchrotron X-ray imaging. Three new pore formation mechanisms are unveiled when depositing first layer and successive layers: gas pore induced by high-velocity powder injection into melt pool, pore generated from swirl shear of turbulent melt flow, and pore trapped by surface wave. Three pore formation mechanisms are reconfirmed: pore inheritance from feedstock powder, pore generation when laser remelting defect-sensitive locations of existing pore from previous layer or unmelted powder attached on the melt pool surface, and pore formation as cooling of melt pool. A unique mechanism for pore elimination is proposed: a counter-Marangoni melt flow is experimentally found in the stable melt pool and contributes to the prolonged pore lifetime at tens of milliseconds scale; pores are prone to coalesce into larger sizes in laser interaction zone and the adjacent location with circulation zone; coalesced larger pores driven by combined effect of Marangoni and buoyant forces easily get eliminated from melt pool. The results of pore formation and evolution dynamics revealed in Cantor alloy provide quantified experimental data for high-fidelity computational modeling and in-depth insights of porosity control for high-entropy alloy printing down to melt pool scale.

吹塑粉末定向能沉积(DED)增材制造在新型合金加工过程中会出现明显的有害孔隙。然而,在多层沉积过程中,孔隙的形成和演变机制仍然难以确定,因此无法制定孔隙缓解策略。在此,我们利用高能高速同步辐射 X 射线成像技术对一种典型的高熵 Cantor 合金的传导模式多层 DED 过程进行了现场研究。在沉积第一层和连续层时,揭示了三种新的孔隙形成机制:高速粉末注入熔池引起的气孔、湍流熔体流的漩涡剪切产生的孔隙以及表面波捕获的孔隙。再次确认了三种孔隙形成机制:从原料粉末继承孔隙、激光重熔上一层现有孔隙的缺陷敏感位置或熔池表面附着的未熔化粉末时产生孔隙,以及熔池冷却时形成孔隙。本文提出了一种独特的孔隙消除机制:实验发现,在稳定的熔池中存在反马兰戈尼熔体流,这种反马兰戈尼熔体流延长了孔隙在几十毫秒尺度上的寿命;在激光相互作用区以及与循环区相邻的位置,孔隙容易凝聚成较大的孔隙;在马兰戈尼力和浮力的共同作用下,凝聚的较大孔隙很容易从熔池中消除。在 Cantor 合金中揭示的孔隙形成和演变动力学结果为高保真计算建模提供了量化的实验数据,并为高熵合金印刷的孔隙率控制深入到熔池尺度提供了深入的见解。
{"title":"Dynamics of pore formation and evolution during multi-layer directed energy deposition additive manufacturing via in-situ synchrotron X-ray imaging: A case study on high-entropy Cantor alloy","authors":"Shuya Zhang ,&nbsp;Chunxia Yao ,&nbsp;Dongsheng Zhang ,&nbsp;Wei Liu ,&nbsp;Lin He ,&nbsp;Dafan Du ,&nbsp;Baode Sun ,&nbsp;Anping Dong ,&nbsp;Bingbing Zhang ,&nbsp;Lianghua Xiong","doi":"10.1016/j.ijmachtools.2024.104181","DOIUrl":"10.1016/j.ijmachtools.2024.104181","url":null,"abstract":"<div><p>Blown-powder directed energy deposition (DED) additive manufacturing is impeded for novel alloys processing by perceivable and detrimental porosity. During multi-layer depositions, however, mechanisms of pore formation and evolution remain elusive for developing pore mitigation strategies. Here, conduction-mode multi-layer DED process of an exemplary high-entropy Cantor alloy have been investigated in-situ by high-energy high-speed synchrotron X-ray imaging. Three new pore formation mechanisms are unveiled when depositing first layer and successive layers: gas pore induced by high-velocity powder injection into melt pool, pore generated from swirl shear of turbulent melt flow, and pore trapped by surface wave. Three pore formation mechanisms are reconfirmed: pore inheritance from feedstock powder, pore generation when laser remelting defect-sensitive locations of existing pore from previous layer or unmelted powder attached on the melt pool surface, and pore formation as cooling of melt pool. A unique mechanism for pore elimination is proposed: a counter-Marangoni melt flow is experimentally found in the stable melt pool and contributes to the prolonged pore lifetime at tens of milliseconds scale; pores are prone to coalesce into larger sizes in laser interaction zone and the adjacent location with circulation zone; coalesced larger pores driven by combined effect of Marangoni and buoyant forces easily get eliminated from melt pool. The results of pore formation and evolution dynamics revealed in Cantor alloy provide quantified experimental data for high-fidelity computational modeling and in-depth insights of porosity control for high-entropy alloy printing down to melt pool scale.</p></div>","PeriodicalId":14011,"journal":{"name":"International Journal of Machine Tools & Manufacture","volume":"200 ","pages":"Article 104181"},"PeriodicalIF":14.0,"publicationDate":"2024-06-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141464206","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
High-performance functional coatings manufactured by integrated extremely high-speed-rate laser directed energy deposition with interlayer remelting 通过集成极高速率激光定向能沉积和层间重熔技术制造高性能功能涂层
IF 14 1区 工程技术 Q1 Engineering Pub Date : 2024-06-05 DOI: 10.1016/j.ijmachtools.2024.104174
Xiang Xu , Jialong Du , Haifei Lu , YouYu Su , Fei Xing , Kaiyu Luo , Jinzhong Lu

Extremely high-speed-rate laser directed energy deposition has attracted considerable attention for large-scale industrial component manufacturing owing to its outstanding fabrication efficiency. However, interlayer metallurgical defects and thickness fluctuation stacking caused by the previous non-uniform rough surface layer hinder the preparation of customized thicknesses of large-scale components with high performance. Herein, an integrated extremely high-speed-rate additive manufacturing technology, that is, extremely high-speed-rate laser-directed energy deposition accompanied by extremely high-speed-rate laser remelting, is proposed to eliminate porosity and reconstruct the microstructure of multilayer parts. The remelted specimens exhibited uniform roughness and ultrafine grains when defocusing amount was less than zero. The relatively lower temperature gradient G and morphology factor G/R in the remelting process led to more favorable subcooling, which further promoted more nucleation sites and contributed to grain refinement and columnar-to-equiaxed transition. A multilayer 316 L stainless steel material with an interlayer remelting treatment was further prepared, and a typical heterogeneous structure dominated by ultrafine equiaxed grains was obtained. The multilayer specimen characterized by such a special structure exhibited a higher yield strength of 546 MPa, along with a ductility of 49.1 %. This novel integrated manufacturing technology highlights a new strategy that can expand the extremely high-speed-rate additive manufacturing window and achieve simultaneous improvements in the manufacturing efficiency and performance of large-scale components.

极高速率的激光定向能沉积因其出色的制造效率而在大规模工业部件制造中备受关注。然而,以往不均匀的粗糙表层造成的层间冶金缺陷和厚度波动堆叠阻碍了高性能定制厚度大型部件的制备。本文提出了一种集成的极高速率增材制造技术,即在极高速率激光定向能量沉积的同时进行极高速率激光重熔,以消除气孔并重建多层部件的微观结构。当退焦量小于零时,重熔试样表现出均匀的粗糙度和超细晶粒。重熔过程中相对较低的温度梯度 G 和形态因子 G/R 导致了更有利的过冷度,进一步促进了更多的成核点,有助于晶粒细化和柱状到等轴状的转变。进一步制备了经过层间重熔处理的多层 316 L 不锈钢材料,并获得了以超细等轴晶为主的典型异质结构。具有这种特殊结构的多层试样屈服强度高达 546 兆帕,延展性为 49.1%。这种新型集成制造技术凸显了一种新策略,可扩大极高速率增材制造窗口,同时提高大型部件的制造效率和性能。
{"title":"High-performance functional coatings manufactured by integrated extremely high-speed-rate laser directed energy deposition with interlayer remelting","authors":"Xiang Xu ,&nbsp;Jialong Du ,&nbsp;Haifei Lu ,&nbsp;YouYu Su ,&nbsp;Fei Xing ,&nbsp;Kaiyu Luo ,&nbsp;Jinzhong Lu","doi":"10.1016/j.ijmachtools.2024.104174","DOIUrl":"https://doi.org/10.1016/j.ijmachtools.2024.104174","url":null,"abstract":"<div><p>Extremely high-speed-rate laser directed energy deposition has attracted considerable attention for large-scale industrial component manufacturing owing to its outstanding fabrication efficiency. However, interlayer metallurgical defects and thickness fluctuation stacking caused by the previous non-uniform rough surface layer hinder the preparation of customized thicknesses of large-scale components with high performance. Herein, an integrated extremely high-speed-rate additive manufacturing technology, that is, extremely high-speed-rate laser-directed energy deposition accompanied by extremely high-speed-rate laser remelting, is proposed to eliminate porosity and reconstruct the microstructure of multilayer parts. The remelted specimens exhibited uniform roughness and ultrafine grains when defocusing amount was less than zero. The relatively lower temperature gradient G and morphology factor G/R in the remelting process led to more favorable subcooling, which further promoted more nucleation sites and contributed to grain refinement and columnar-to-equiaxed transition. A multilayer 316 L stainless steel material with an interlayer remelting treatment was further prepared, and a typical heterogeneous structure dominated by ultrafine equiaxed grains was obtained. The multilayer specimen characterized by such a special structure exhibited a higher yield strength of 546 MPa, along with a ductility of 49.1 %. This novel integrated manufacturing technology highlights a new strategy that can expand the extremely high-speed-rate additive manufacturing window and achieve simultaneous improvements in the manufacturing efficiency and performance of large-scale components.</p></div>","PeriodicalId":14011,"journal":{"name":"International Journal of Machine Tools & Manufacture","volume":"200 ","pages":"Article 104174"},"PeriodicalIF":14.0,"publicationDate":"2024-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141290165","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An insight into the influence of precipitation phase on the surface quality in diamond turning of an Aluminium alloy 析出相对金刚石车削铝合金表面质量影响的深入研究
IF 14 1区 工程技术 Q1 Engineering Pub Date : 2024-05-09 DOI: 10.1016/j.ijmachtools.2024.104163
Guilin Zhuang , Hanzhong Liu , Zhimin Cao , Zhipeng Cui , Yifu Tang , Wenjun Zong

Diamond turning is an effective technology for processing metal mirrors used in photoelectric communications, radar, and other fields. In diamond turning, the precipitated phase is an essential factor that influences the surface quality of the metal mirrors. However, in previous studies, the precipitation phase has typically been handled as a random variable in a surface morphology model to evaluate its influence on the surface roughness, instead of determining the formation mechanism and proposing suppression solutions. In this study, a new phenomenon is observed in the diamond turning of metal mirrors, that is, the micro diamond tool can reduce the protrusion of the precipitated phase under a small feed rate and improve the surface quality. Investigating the turning process using diamond tools with varying tool nose radii at small feed rates (<1 μm/r), the underlying transformation mechanism of the precipitation phase is determined with the advanced material characterization technologies. The growth of the precipitated phase with an increase in the tool nose radius is explained using the energy gradient theory. The results showed that the increased material strain on the machined surface decreased the activation energy of solute diffusion in the material, causing solute accumulation and precipitate phase growth. With a further increase of tool nose radius to around 1000 μm, the β'' phase breaks and rotates. The representative volume element method shows that when undergoing severe plastic deformation, dislocations and grain boundaries quickly aggregate and slide on the precipitated phase, which will lead to the fracture and rotation of β'' phase. These findings provide a theoretical basis for the development of highly smooth mirrors.

金刚石车削是加工光电通信、雷达和其他领域所用金属镜面的有效技术。在金刚石车削过程中,析出相是影响金属镜面表面质量的重要因素。然而,在以往的研究中,析出相通常被作为表面形态模型中的随机变量来处理,以评估其对表面粗糙度的影响,而不是确定其形成机制并提出抑制方案。本研究在金刚石车削金属镜面的过程中观察到了一种新现象,即微型金刚石刀具可以在较小的进给量下减少析出相的突起,提高表面质量。利用先进的材料表征技术,在小进给量(<1 μm/r)下使用不同刀头半径的金刚石刀具对车削过程进行研究,确定了析出相的基本转变机制。利用能量梯度理论解释了析出相随刀尖半径增大而增长的现象。结果表明,加工表面材料应变的增加降低了材料中溶质扩散的活化能,导致溶质积累和析出相的生长。随着刀头半径进一步增大到 1000 μm 左右,β''相断裂并旋转。代表性体积元素法表明,在发生严重塑性变形时,位错和晶界会迅速聚集并在析出相上滑动,从而导致β''相断裂和旋转。这些发现为开发高光滑度镜面提供了理论依据。
{"title":"An insight into the influence of precipitation phase on the surface quality in diamond turning of an Aluminium alloy","authors":"Guilin Zhuang ,&nbsp;Hanzhong Liu ,&nbsp;Zhimin Cao ,&nbsp;Zhipeng Cui ,&nbsp;Yifu Tang ,&nbsp;Wenjun Zong","doi":"10.1016/j.ijmachtools.2024.104163","DOIUrl":"https://doi.org/10.1016/j.ijmachtools.2024.104163","url":null,"abstract":"<div><p>Diamond turning is an effective technology for processing metal mirrors used in photoelectric communications, radar, and other fields. In diamond turning, the precipitated phase is an essential factor that influences the surface quality of the metal mirrors. However, in previous studies, the precipitation phase has typically been handled as a random variable in a surface morphology model to evaluate its influence on the surface roughness, instead of determining the formation mechanism and proposing suppression solutions. In this study, a new phenomenon is observed in the diamond turning of metal mirrors, that is, the micro diamond tool can reduce the protrusion of the precipitated phase under a small feed rate and improve the surface quality. Investigating the turning process using diamond tools with varying tool nose radii at small feed rates (&lt;1 μm/r), the underlying transformation mechanism of the precipitation phase is determined with the advanced material characterization technologies. The growth of the precipitated phase with an increase in the tool nose radius is explained using the energy gradient theory. The results showed that the increased material strain on the machined surface decreased the activation energy of solute diffusion in the material, causing solute accumulation and precipitate phase growth. With a further increase of tool nose radius to around 1000 μm, the β'' phase breaks and rotates. The representative volume element method shows that when undergoing severe plastic deformation, dislocations and grain boundaries quickly aggregate and slide on the precipitated phase, which will lead to the fracture and rotation of β'' phase. These findings provide a theoretical basis for the development of highly smooth mirrors.</p></div>","PeriodicalId":14011,"journal":{"name":"International Journal of Machine Tools & Manufacture","volume":"199 ","pages":"Article 104163"},"PeriodicalIF":14.0,"publicationDate":"2024-05-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140914159","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Area selective deposition for bottom-up atomic-scale manufacturing 用于自下而上原子级制造的区域选择性沉积技术
IF 14 1区 工程技术 Q1 Engineering Pub Date : 2024-05-09 DOI: 10.1016/j.ijmachtools.2024.104173
Rong Chen, Eryan Gu, Kun Cao, Jingming Zhang

Area selective deposition, which streamlines fabrication steps by enhancing precision and reliability, represents a cutting-edge, bottom-up atomic and close-to-atomic scale manufacturing processing. This perspective delves into the essence of area selective atomic layer deposition, exploring the critical mechanisms and additional strategies that enhance the effectiveness of area selective deposition processes. A pivotal emphasis is placed on the thermodynamic and kinetic principles driving nucleation and film growth, coupled with a thorough examination of these underlying processes. Several assisted techniques aiming at improving selectivity and enlarging the selective process window, including surface passivation, activation, deactivation, and defect elimination have been summarized. The introduction of a comprehensive area selective deposition nucleation model illuminates the complex dynamics of area selective deposition, laying a theoretical groundwork for refining deposition processes. The technical and scientific challenges associated with area selective deposition, along with the prospects for its future development and industrial application, form a key part of this perspective. By enabling atomic-level accuracy, area selective deposition paves the way for the fabrication of complex nanostructures, promising significant advancements across the semiconductor industry and a broad spectrum of technological applications, unlocking unparalleled possibilities in precision manufacturing, setting the stage for breakthroughs that will redefine the landscape of modern technology.

区域选择性沉积通过提高精度和可靠性来简化制造步骤,是一种尖端的、自下而上的原子级和近原子级制造工艺。本视角深入探讨了区域选择性原子层沉积的本质,探索了提高区域选择性沉积工艺有效性的关键机制和其他策略。重点强调了驱动成核和薄膜生长的热力学和动力学原理,并对这些基本过程进行了深入研究。书中总结了几种旨在提高选择性和扩大选择性工艺窗口的辅助技术,包括表面钝化、活化、失活和缺陷消除。全面的区域选择性沉积成核模型的引入阐明了区域选择性沉积的复杂动态,为完善沉积工艺奠定了理论基础。与区域选择性沉积相关的技术和科学挑战,以及其未来发展和工业应用前景,构成了这一视角的关键部分。通过实现原子级精度,区域选择性沉积为制造复杂的纳米结构铺平了道路,有望在整个半导体行业和广泛的技术应用领域取得重大进展,为精密制造带来无与伦比的可能性,为重新定义现代技术领域的突破奠定基础。
{"title":"Area selective deposition for bottom-up atomic-scale manufacturing","authors":"Rong Chen,&nbsp;Eryan Gu,&nbsp;Kun Cao,&nbsp;Jingming Zhang","doi":"10.1016/j.ijmachtools.2024.104173","DOIUrl":"10.1016/j.ijmachtools.2024.104173","url":null,"abstract":"<div><p>Area selective deposition, which streamlines fabrication steps by enhancing precision and reliability, represents a cutting-edge, bottom-up atomic and close-to-atomic scale manufacturing processing. This perspective delves into the essence of area selective atomic layer deposition, exploring the critical mechanisms and additional strategies that enhance the effectiveness of area selective deposition processes. A pivotal emphasis is placed on the thermodynamic and kinetic principles driving nucleation and film growth, coupled with a thorough examination of these underlying processes. Several assisted techniques aiming at improving selectivity and enlarging the selective process window, including surface passivation, activation, deactivation, and defect elimination have been summarized. The introduction of a comprehensive area selective deposition nucleation model illuminates the complex dynamics of area selective deposition, laying a theoretical groundwork for refining deposition processes. The technical and scientific challenges associated with area selective deposition, along with the prospects for its future development and industrial application, form a key part of this perspective. By enabling atomic-level accuracy, area selective deposition paves the way for the fabrication of complex nanostructures, promising significant advancements across the semiconductor industry and a broad spectrum of technological applications, unlocking unparalleled possibilities in precision manufacturing, setting the stage for breakthroughs that will redefine the landscape of modern technology.</p></div>","PeriodicalId":14011,"journal":{"name":"International Journal of Machine Tools & Manufacture","volume":"199 ","pages":"Article 104173"},"PeriodicalIF":14.0,"publicationDate":"2024-05-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141041217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Additive manufacturing of metallic metamaterials with enhanced mechanical properties enabled by microstructural and structural design 通过微结构和结构设计增材制造具有更强机械性能的金属超材料
IF 14 1区 工程技术 Q1 Engineering Pub Date : 2024-05-09 DOI: 10.1016/j.ijmachtools.2024.104172
Zhuohong Zeng , Shubo Gao , Deepak Kumar Pokkalla , Sheng Zhang , Changjun Han , Feng Liu , Zhongmin Xiao , Sastry Yagnanna Kandukuri , Yong Liu , Kun Zhou

The emergence of additive manufacturing (AM) facilitates the fabrication of lightweight mechanical metamaterials characterized by intricate geometrical features. Here, we focus on the contributions of microstructural and structural design to the significant performance enhancement of metamaterials. Cubic plate-lattices featuring spherical holes were produced using laser powder bed fusion. Different from commonly used optimization of AM parameters to change the thermal histories and the resulting properties, we employ a simple strategy inspired by the crystallographic and AM features—tilting the build orientation. Compared to the normal build orientation, the tilted build orientation converts the printed microstructure of the plate-lattices from (100)-dominated to (111)- and (101)-dominated crystallographic texture and significantly refines the grain size, leading to remarkable 30% and 10% increases in the compressive strength and strain of the printed plate-lattices, respectively. For further tailoring the performance of metamaterials, we integrate a wavy plate topology design to improve the isotropy of properties and increase the impact attenuation. Our work paves the way to optimize additively manufactured metamaterials by combining microstructural and structural designs.

增材制造(AM)的出现促进了具有复杂几何特征的轻质机械超材料的制造。在此,我们重点关注微结构和结构设计对超材料性能显著提升的贡献。我们利用激光粉末床熔融技术制造出了具有球形孔的立方板格。与常用的优化 AM 参数以改变热历史和由此产生的性能不同,我们采用了一种受晶体学和 AM 特征启发的简单策略--倾斜构建方向。与正常构建方向相比,倾斜构建方向将印刷板晶格的微观结构从以(100)为主转换为以(111)和(101)为主的晶体学纹理,并显著细化晶粒尺寸,从而使印刷板晶格的抗压强度和应变分别显著提高 30% 和 10%。为了进一步定制超材料的性能,我们整合了波浪板拓扑设计,以改善性能的各向同性并增加冲击衰减。我们的工作为通过结合微结构和结构设计来优化增材制造超材料铺平了道路。
{"title":"Additive manufacturing of metallic metamaterials with enhanced mechanical properties enabled by microstructural and structural design","authors":"Zhuohong Zeng ,&nbsp;Shubo Gao ,&nbsp;Deepak Kumar Pokkalla ,&nbsp;Sheng Zhang ,&nbsp;Changjun Han ,&nbsp;Feng Liu ,&nbsp;Zhongmin Xiao ,&nbsp;Sastry Yagnanna Kandukuri ,&nbsp;Yong Liu ,&nbsp;Kun Zhou","doi":"10.1016/j.ijmachtools.2024.104172","DOIUrl":"10.1016/j.ijmachtools.2024.104172","url":null,"abstract":"<div><p>The emergence of additive manufacturing (AM) facilitates the fabrication of lightweight mechanical metamaterials characterized by intricate geometrical features. Here, we focus on the contributions of microstructural and structural design to the significant performance enhancement of metamaterials. Cubic plate-lattices featuring spherical holes were produced using laser powder bed fusion. Different from commonly used optimization of AM parameters to change the thermal histories and the resulting properties, we employ a simple strategy inspired by the crystallographic and AM features—tilting the build orientation. Compared to the normal build orientation, the tilted build orientation converts the printed microstructure of the plate-lattices from (100)-dominated to (111)- and (101)-dominated crystallographic texture and significantly refines the grain size, leading to remarkable 30% and 10% increases in the compressive strength and strain of the printed plate-lattices, respectively. For further tailoring the performance of metamaterials, we integrate a wavy plate topology design to improve the isotropy of properties and increase the impact attenuation. Our work paves the way to optimize additively manufactured metamaterials by combining microstructural and structural designs.</p></div>","PeriodicalId":14011,"journal":{"name":"International Journal of Machine Tools & Manufacture","volume":"199 ","pages":"Article 104172"},"PeriodicalIF":14.0,"publicationDate":"2024-05-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141024720","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Laser shock-enabled optical–thermal–mechanical coupled welding method for silver nanowires 用于银纳米线的激光冲击光热机械耦合焊接方法
IF 14 1区 工程技术 Q1 Engineering Pub Date : 2024-04-20 DOI: 10.1016/j.ijmachtools.2024.104162
Yizhong Hu , Xiaohan Zhang , Hongtao Ding , Yaowu Hu

Silver nanowires (AgNWs) are recognized as highly promising materials for flexible and transparent electrode applications. However, existing material-processing methods fail to achieve uniform and reliable AgNWs junctions. In this study, we propose a new method using the laser shock effect combined with the laser heating effect, for creating AgNW junctions within thin films. We explored the welding mechanism of AgNWs through optic-thermal welding, laser shock-enabled mechanical welding, and laser-shock-enabled optical-thermal-mechanical (LS-OTM) experiments, as well as numerical simulations, and the results demonstrate that the innovative mechanism of the LS-OTM process lies in its utilization of laser shock to adjust the gap between the nanowire junctions, which in turn achieves a fine control of the thermal effect of the heating laser localised surface plasmon resonance, and the atomic diffusion in the solid state at intermediate temperature under the action of the impact force is the mechanism of the formation of high-quality junctions. We prepared flexible transparent conductive films and studied their transmittance, conductivity, and thermal properties, the results show that the flexible transparent conductive films prepared by LS-OTM welding method have excellent transmittance, conductivity, and thermal properties, this verifies the feasibility and effectiveness of this processing strategy. The LS-OTM method is a viable solution for manufacturing transparent, conductive films from AgNWs for emerging applications such as flexible heated films, flexible displays, and wearable medical devices.

银纳米线(AgNWs)是公认的极具潜力的柔性透明电极应用材料。然而,现有的材料加工方法无法实现均匀可靠的 AgNWs 结。在本研究中,我们提出了一种利用激光冲击效应与激光加热效应相结合的新方法,用于在薄膜内形成 AgNW 结。我们通过光热焊接、激光冲击机械焊接和激光冲击光热机械焊接(LS-OTM)实验以及数值模拟探索了 AgNWs 的焊接机制,结果表明 LS-OTM 过程的创新机制在于利用激光冲击来调整纳米线结之间的间隙、这反过来又实现了对加热激光局部表面等离子体共振的热效应的精细控制,而冲击力作用下的中温固态原子扩散则是高质量结形成的机理。我们制备了柔性透明导电薄膜,并对其透射率、电导率和热性能进行了研究,结果表明 LS-OTM 焊接法制备的柔性透明导电薄膜具有优异的透射率、电导率和热性能,这验证了该加工策略的可行性和有效性。LS-OTM 方法是利用 AgNWs 制备透明导电薄膜的可行方案,可用于柔性加热薄膜、柔性显示器和可穿戴医疗设备等新兴应用领域。
{"title":"Laser shock-enabled optical–thermal–mechanical coupled welding method for silver nanowires","authors":"Yizhong Hu ,&nbsp;Xiaohan Zhang ,&nbsp;Hongtao Ding ,&nbsp;Yaowu Hu","doi":"10.1016/j.ijmachtools.2024.104162","DOIUrl":"https://doi.org/10.1016/j.ijmachtools.2024.104162","url":null,"abstract":"<div><p>Silver nanowires (AgNWs) are recognized as highly promising materials for flexible and transparent electrode applications. However, existing material-processing methods fail to achieve uniform and reliable AgNWs junctions. In this study, we propose a new method using the laser shock effect combined with the laser heating effect, for creating AgNW junctions within thin films. We explored the welding mechanism of AgNWs through optic-thermal welding, laser shock-enabled mechanical welding, and laser-shock-enabled optical-thermal-mechanical (LS-OTM) experiments, as well as numerical simulations, and the results demonstrate that the innovative mechanism of the LS-OTM process lies in its utilization of laser shock to adjust the gap between the nanowire junctions, which in turn achieves a fine control of the thermal effect of the heating laser localised surface plasmon resonance, and the atomic diffusion in the solid state at intermediate temperature under the action of the impact force is the mechanism of the formation of high-quality junctions. We prepared flexible transparent conductive films and studied their transmittance, conductivity, and thermal properties, the results show that the flexible transparent conductive films prepared by LS-OTM welding method have excellent transmittance, conductivity, and thermal properties, this verifies the feasibility and effectiveness of this processing strategy. The LS-OTM method is a viable solution for manufacturing transparent, conductive films from AgNWs for emerging applications such as flexible heated films, flexible displays, and wearable medical devices.</p></div>","PeriodicalId":14011,"journal":{"name":"International Journal of Machine Tools & Manufacture","volume":"199 ","pages":"Article 104162"},"PeriodicalIF":14.0,"publicationDate":"2024-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140641100","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
How does the uncut chip thickness affect the deformation states within the primary shear zone during metal cutting? 在金属切削过程中,未切削的切屑厚度如何影响主剪切区内的变形状态?
IF 14 1区 工程技术 Q1 Engineering Pub Date : 2024-04-20 DOI: 10.1016/j.ijmachtools.2024.104161
Kai Ma , Zhanqiang Liu , Bing Wang , Qinghua Song , Yukui Cai

The deformation states within the primary shear zone (PSZ) significantly affect material removal during machining. Uncut chip thickness (UCT) is an important factor that influences the material deformation states. However, the specific mechanism by which UCT influences the deformation states within PSZ remains unknown. This study aims to investigate the relationship between the deformation states in PSZ and UCTs via in-situ measurement and microscopic characterization techniques. Using the digital image correlation (DIC) technique, strain and strain rate distributions were derived to reveal the discrepant deformation in PSZ with increasing UCT. Furthermore, velocity vector fields and Electron Back-Scattered Diffraction (EBSD) characterizations were employed to examine the heterogeneity of deformation modes. To determine the specific deformation information, a deformation extraction framework based on the deformation gradient tensor theory was developed. Thus, strong and weak shear modes within PSZ were revealed based on the full-field deformation information of compression and extension. As the UCT increased, the transition of deformation states from a strong shear state to a hybrid shear state was determined. This work presents a new understanding of the deformation mechanism within PSZ in a ductile material of pure iron. A critical UCT was proposed to guide the cutting process to avoid inefficient weak shear mode.

一次剪切区(PSZ)内的变形状态对加工过程中的材料切削有很大影响。未切削切屑厚度(UCT)是影响材料变形状态的一个重要因素。然而,UCT 影响 PSZ 内变形状态的具体机制仍然未知。本研究旨在通过原位测量和显微表征技术研究 PSZ 变形状态与 UCT 之间的关系。利用数字图像相关(DIC)技术,得出了应变和应变率分布,揭示了 PSZ 随 UCT 增加而产生的变形差异。此外,还采用了速度矢量场和电子背散射衍射(EBSD)表征技术来研究变形模式的异质性。为了确定具体的变形信息,我们开发了基于变形梯度张量理论的变形提取框架。因此,根据压缩和拉伸的全场变形信息,揭示了 PSZ 内部的强剪切和弱剪切模式。随着 UCT 的增加,确定了变形状态从强剪切状态向混合剪切状态的转变。这项研究对纯铁韧性材料 PSZ 内部的变形机制有了新的认识。提出了临界 UCT,以指导切削过程避免低效的弱剪切模式。
{"title":"How does the uncut chip thickness affect the deformation states within the primary shear zone during metal cutting?","authors":"Kai Ma ,&nbsp;Zhanqiang Liu ,&nbsp;Bing Wang ,&nbsp;Qinghua Song ,&nbsp;Yukui Cai","doi":"10.1016/j.ijmachtools.2024.104161","DOIUrl":"https://doi.org/10.1016/j.ijmachtools.2024.104161","url":null,"abstract":"<div><p>The deformation states within the primary shear zone (PSZ) significantly affect material removal during machining. Uncut chip thickness (UCT) is an important factor that influences the material deformation states. However, the specific mechanism by which UCT influences the deformation states within PSZ remains unknown. This study aims to investigate the relationship between the deformation states in PSZ and UCTs via in-situ measurement and microscopic characterization techniques. Using the digital image correlation (DIC) technique, strain and strain rate distributions were derived to reveal the discrepant deformation in PSZ with increasing UCT. Furthermore, velocity vector fields and Electron Back-Scattered Diffraction (EBSD) characterizations were employed to examine the heterogeneity of deformation modes. To determine the specific deformation information, a deformation extraction framework based on the deformation gradient tensor theory was developed. Thus, strong and weak shear modes within PSZ were revealed based on the full-field deformation information of compression and extension. As the UCT increased, the transition of deformation states from a strong shear state to a hybrid shear state was determined. This work presents a new understanding of the deformation mechanism within PSZ in a ductile material of pure iron. A critical UCT was proposed to guide the cutting process to avoid inefficient weak shear mode.</p></div>","PeriodicalId":14011,"journal":{"name":"International Journal of Machine Tools & Manufacture","volume":"199 ","pages":"Article 104161"},"PeriodicalIF":14.0,"publicationDate":"2024-04-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140645579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Geometric deviation during incremental sheet forming process: Analytical modeling and experiment 增量板材成形过程中的几何偏差:分析模型和实验
IF 14 1区 工程技术 Q1 Engineering Pub Date : 2024-04-19 DOI: 10.1016/j.ijmachtools.2024.104160
Zhidong Chang , Mei Yang , Jun Chen

Incremental sheet forming (ISF), a promising and flexible forming method, is generally restricted by the unsatisfied geometric deviation for industrial applications; therefore, effective control and accurate prediction of geometric deviation in ISF are essential for quality improvement. However, the geometric deviation in ISF is extremely sensitive to the geometric shape, toolpath, and process parameters, which is challenging to predict and control. In this study, the comprehensive geometric-related mechanisms in ISF were analyzed, including springback after local bending of the bent and contact zones, and the elastic deflection of the inclined wall, particularly the associated deformation in the weak-stiffness region. Through a creative equivalent mapping method for calculating the elastic deflection of complex structures and modeling the bending moment distribution in different zones, an analytical model was developed to accurately and universally predict the geometric deviations of parts by ISF. Based on the results of the experiments and comparative studies using a response surface model, the proposed model provided superior capability for predicting the geometric accuracies of parts made using ISF with different sheet materials, process parameters, and geometric shapes, even for complex parts with non-axisymmetric structures and stepped features. The geometric-related mechanisms, forming characteristics, and influences of crucial parameters in ISF are discussed by adopting an analytical model combined with numerical simulations, demonstrating that the elastic deflection on the inclined wall, particularly the associated deformation in the weak-stiffness region, plays a primary role in the geometric deviation of complex parts compared with other geometric-related mechanisms.

增量式板材成形(ISF)是一种前景广阔的柔性成形方法,但在工业应用中普遍受限于无法满足的几何偏差;因此,有效控制和准确预测 ISF 中的几何偏差对提高质量至关重要。然而,ISF 的几何偏差对几何形状、刀具路径和工艺参数极为敏感,预测和控制难度很大。本研究分析了 ISF 中与几何相关的综合机制,包括弯曲区和接触区局部弯曲后的回弹,以及倾斜壁的弹性变形,尤其是弱刚度区域的相关变形。通过创造性的等效映射法计算复杂结构的弹性挠度,并对不同区域的弯矩分布进行建模,建立了一个分析模型,以准确、普遍地预测 ISF 对零件造成的几何偏差。根据实验结果和使用响应面模型进行的比较研究,所提出的模型在预测使用不同板材材料、工艺参数和几何形状的 ISF 制成的零件的几何精度方面具有卓越的能力,即使是具有非轴对称结构和阶梯特征的复杂零件也不例外。通过采用分析模型并结合数值模拟,讨论了 ISF 中与几何相关的机理、成形特征和关键参数的影响,证明与其他几何相关机理相比,倾斜壁上的弹性变形,特别是弱刚度区域的相关变形,在复杂零件的几何偏差中起着主要作用。
{"title":"Geometric deviation during incremental sheet forming process: Analytical modeling and experiment","authors":"Zhidong Chang ,&nbsp;Mei Yang ,&nbsp;Jun Chen","doi":"10.1016/j.ijmachtools.2024.104160","DOIUrl":"https://doi.org/10.1016/j.ijmachtools.2024.104160","url":null,"abstract":"<div><p>Incremental sheet forming (ISF), a promising and flexible forming method, is generally restricted by the unsatisfied geometric deviation for industrial applications; therefore, effective control and accurate prediction of geometric deviation in ISF are essential for quality improvement. However, the geometric deviation in ISF is extremely sensitive to the geometric shape, toolpath, and process parameters, which is challenging to predict and control. In this study, the comprehensive geometric-related mechanisms in ISF were analyzed, including springback after local bending of the bent and contact zones, and the elastic deflection of the inclined wall, particularly the associated deformation in the weak-stiffness region. Through a creative equivalent mapping method for calculating the elastic deflection of complex structures and modeling the bending moment distribution in different zones, an analytical model was developed to accurately and universally predict the geometric deviations of parts by ISF. Based on the results of the experiments and comparative studies using a response surface model, the proposed model provided superior capability for predicting the geometric accuracies of parts made using ISF with different sheet materials, process parameters, and geometric shapes, even for complex parts with non-axisymmetric structures and stepped features. The geometric-related mechanisms, forming characteristics, and influences of crucial parameters in ISF are discussed by adopting an analytical model combined with numerical simulations, demonstrating that the elastic deflection on the inclined wall, particularly the associated deformation in the weak-stiffness region, plays a primary role in the geometric deviation of complex parts compared with other geometric-related mechanisms.</p></div>","PeriodicalId":14011,"journal":{"name":"International Journal of Machine Tools & Manufacture","volume":"198 ","pages":"Article 104160"},"PeriodicalIF":14.0,"publicationDate":"2024-04-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140646366","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Laser-guided anisotropic etching for precision machining of micro-engineered glass components 激光制导各向异性蚀刻,用于精密加工微型工程玻璃部件
IF 14 1区 工程技术 Q1 Engineering Pub Date : 2024-04-04 DOI: 10.1016/j.ijmachtools.2024.104152
Jun Li , Shuai Zhong , Jiaxu Huang , Pei Qiu , Pu Wang , Hui Li , Chu Qin , Duo Miao , Shaolin Xu

Micro-engineered glass components play a vital role in various domains, but their full potential remains untapped due to the lack of easily accessible high-precision machining methods for customizable microstructure. Our discovery of a new phenomenon, where laser-modified regions break the rule of inherently isotropic glass etching and regulate a directional anisotropic etching along modified tracks, has led to the development of a laser-guided anisotropic etching (LGAE) method. This method enables crafting precision glass microstructures with sharp features, smooth surfaces, and adjustable shapes and sizes. An ultrafast Bessel beam is utilized to create high aspect-ratio line-shaped modification within the glass. With a higher etching rate than pristine glass, the modified line guides directional anisotropic etching along the modified track, facilitating the formation of a V-shape with an angle altered by the etching ratio. These modified lines can further serve as basic building blocks to interconnect to construct a 3D internal modification region and then guide the glass's overall surface morphology etching evolution, enabling the creation of microstructures featuring designable shapes and adjustable feature sizes. To accurately predict and control the shape of the microstructures, we establish a finite difference etching model that incorporates localized etching rate regulation, validating the robustness and controllability of LGAE. This scalable method has successfully fabricated a 50 μm period micro-pyramid array with high uniformity over a centimeter-scale area, demonstrating its suitability for large-scale manufacturing. The showcased micro-engineered glass components encompass V-groove arrays for fiber alignment, blazed gratings for light modulation, and microchannels with customized trajectories for microfluidic chips. These advancements driven by LGAE can significantly contribute to the progress of glass-based research and industries.

微工程玻璃部件在各个领域都发挥着重要作用,但由于缺乏可轻松定制微结构的高精度加工方法,它们的潜力仍未得到充分挖掘。我们发现了一种新现象,即激光改性区域打破了玻璃蚀刻固有的各向同性规则,沿着改性轨迹进行定向各向异性蚀刻。这种方法可以制作出具有锐利特征、光滑表面以及可调形状和尺寸的精密玻璃微结构。利用超快贝塞尔光束在玻璃内形成高纵横比的线形改性。由于蚀刻率高于原始玻璃,改性线可引导沿改性轨道进行定向各向异性蚀刻,促进形成角度随蚀刻率变化的 V 形。这些改性线可进一步作为基本构件,相互连接以构建三维内部改性区域,然后引导玻璃的整体表面形态蚀刻演变,从而创建具有可设计形状和可调节特征尺寸的微结构。为了准确预测和控制微结构的形状,我们建立了一个有限差分蚀刻模型,其中包含局部蚀刻速率调节,验证了 LGAE 的稳健性和可控性。这种可扩展的方法已成功制造出 50 μm 周期的微金字塔阵列,在厘米级的区域内具有高度的均匀性,证明了其适用于大规模制造。展示的微工程玻璃元件包括用于光纤对准的 V 形槽阵列、用于光调制的炽热光栅以及用于微流控芯片的具有定制轨迹的微通道。LGAE 推动的这些进步将极大地促进玻璃研究和工业的发展。
{"title":"Laser-guided anisotropic etching for precision machining of micro-engineered glass components","authors":"Jun Li ,&nbsp;Shuai Zhong ,&nbsp;Jiaxu Huang ,&nbsp;Pei Qiu ,&nbsp;Pu Wang ,&nbsp;Hui Li ,&nbsp;Chu Qin ,&nbsp;Duo Miao ,&nbsp;Shaolin Xu","doi":"10.1016/j.ijmachtools.2024.104152","DOIUrl":"https://doi.org/10.1016/j.ijmachtools.2024.104152","url":null,"abstract":"<div><p>Micro-engineered glass components play a vital role in various domains, but their full potential remains untapped due to the lack of easily accessible high-precision machining methods for customizable microstructure. Our discovery of a new phenomenon, where laser-modified regions break the rule of inherently isotropic glass etching and regulate a directional anisotropic etching along modified tracks, has led to the development of a laser-guided anisotropic etching (LGAE) method. This method enables crafting precision glass microstructures with sharp features, smooth surfaces, and adjustable shapes and sizes. An ultrafast Bessel beam is utilized to create high aspect-ratio line-shaped modification within the glass. With a higher etching rate than pristine glass, the modified line guides directional anisotropic etching along the modified track, facilitating the formation of a V-shape with an angle altered by the etching ratio. These modified lines can further serve as basic building blocks to interconnect to construct a 3D internal modification region and then guide the glass's overall surface morphology etching evolution, enabling the creation of microstructures featuring designable shapes and adjustable feature sizes. To accurately predict and control the shape of the microstructures, we establish a finite difference etching model that incorporates localized etching rate regulation, validating the robustness and controllability of LGAE. This scalable method has successfully fabricated a 50 μm period micro-pyramid array with high uniformity over a centimeter-scale area, demonstrating its suitability for large-scale manufacturing. The showcased micro-engineered glass components encompass V-groove arrays for fiber alignment, blazed gratings for light modulation, and microchannels with customized trajectories for microfluidic chips. These advancements driven by LGAE can significantly contribute to the progress of glass-based research and industries.</p></div>","PeriodicalId":14011,"journal":{"name":"International Journal of Machine Tools & Manufacture","volume":"198 ","pages":"Article 104152"},"PeriodicalIF":14.0,"publicationDate":"2024-04-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140543903","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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International Journal of Machine Tools & Manufacture
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