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2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)最新文献

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The performance of power MOSFET devices encapsulated with green and non-green mold compounds 绿色和非绿色模具化合物封装的功率MOSFET器件的性能
Y. Seng
The green initiative has driven semiconductor manufacturers to eliminate the use of environmentally unfriendly substances such as antimony oxide, flame retardant and halogenated compounds in their microelectronics packages. Nevertheless, there may be concern that the new chemistries in green package may alter the properties of semiconductor devices. We have evaluated the performance of power transistors encapsulated with green and non-green epoxy mold compound (EMC) via autoclave stress. We have proven that green device indeed possesses superior electrical and physical properties than non-green device. Our research result reveals that device with non-green EMC exhibits relatively higher gate-to-source leakage current (IGSS) and drain-to-source on-resistance (RDS[on]) as compared to device with green EMC. The non-steady electrical characteristic of non-green device is attributed to its higher level content of bromide ions released from flame retardant. Under moist environment, bromide ions form electrolytic solutions and trigger the corrosion process. We found that copper ball bonds in non-green device are extremely susceptible to electrolytic corrosion. The corrosion begins from the ball periphery and gradually extends toward the ball base. The corrosive ions accelerate dissolution of aluminum pad underneath copper ball, leading to separation gap formation between intermetallic and bond pad, thus isolating the pad away from the intermetallic layer. Moreover, the gap size is gradually enlarged when the autoclave stress period is extended, resulting in the rise of RDS[on] over time. In contrast, green device is more impervious to corrosion induced bond damage. As a result, green device demonstrates more stable RDS[on] and lesser leakage current of IGSS even operating under high humidity, pressure, and temperature conditions.
绿色倡议促使半导体制造商在其微电子封装中不再使用对环境不友好的物质,如氧化锑、阻燃剂和卤化化合物。然而,人们担心绿色封装中的新化学物质可能会改变半导体器件的性能。采用高压灭菌法对绿色和非绿色环氧模复合材料封装的功率晶体管的性能进行了评价。我们已经证明绿色器件确实比非绿色器件具有更好的电学和物理性能。我们的研究结果表明,与绿色EMC器件相比,非绿色EMC器件具有较高的栅源泄漏电流(IGSS)和漏源导通电阻(RDS)。非绿色器件的不稳定电气特性是由于其阻燃剂释放的溴化物离子含量较高。在潮湿环境下,溴化物离子形成电解溶液,引发腐蚀过程。我们发现非绿色器件中的铜球键极容易受到电解腐蚀。腐蚀从球外围开始,逐渐向球底延伸。腐蚀离子加速铜球下铝垫层的溶解,导致金属间垫层与键合垫层之间形成分离间隙,从而使垫层与金属间层隔离。此外,随着高压灭菌器应力周期的延长,间隙尺寸逐渐增大,导致RDS[on]随时间升高。相比之下,绿色器件更不易受腐蚀引起的粘结损伤。因此,即使在高湿、高压和高温条件下工作,绿色器件也表现出更稳定的RDS[on]和更小的IGSS泄漏电流。
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引用次数: 3
Modified brown oxide treatment as an adhesion promoter for copper lead frame in plastic integrated-circuit packages 改性棕氧化处理作为塑料集成电路封装中铜引线框架的附着力促进剂
L. Chan, Kwan Yiu Fai, Y. C. Ho
Improvement of electronic device packaging reliability, more specifically moisture attack resistance (commonly known as moisture sensitivity level or MSL), has been a hot topic in recent years due to the increase in solder reflow temperature for lead-free solder. In preceding failure mode analysis, delamination between lead frame and encapsulation molding compound (EMC) interface plays an important role. Thus a modified brown oxide treatment was developed and applied onto the copper lead frame surface, which is field proven an effective way to elevate package MSL performance. Comparing with typical brown oxide treatment developed in older days for use in printed circuit board (PCB), this modified treatment was specially for use in copper lead frame so that it not only enhances the adhesion with die-attach epoxy glue and EMC, but also leaving a clean silver plating surface for wire bonding.
近年来,由于无铅焊料的焊料回流温度的提高,提高电子器件封装的可靠性,更具体地说是抗湿气侵蚀性(通常称为湿气敏感等级或MSL),已成为一个热门话题。在前面的失效模式分析中,引线框架和封装成型化合物(EMC)接口之间的分层是一个重要的问题。因此,开发了一种改性棕氧化物处理方法,并将其应用于铜引线框架表面,是提高封装MSL性能的有效途径。与以往用于印刷电路板(PCB)的典型棕氧化处理相比,这种改进处理特别适用于铜引线框架,不仅增强了与模贴环氧胶和EMC的附着力,而且还留下了清洁的镀银表面,用于导线粘合。
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引用次数: 2
Effects of in addition on solidus and liquidus temperatures, microhardness, and wettability of Sn-0.3Ag-0.7Cu solder alloy 添加量对Sn-0.3Ag-0.7Cu钎料合金固液温度、显微硬度和润湿性的影响
K. Kanlayasiri
This research was aimed to study effects of indium (In) addition on solidus and liquidus temperatures, wetting time, wetting force, and microhardness of Sn-0.3Ag-0.7Cu lead-free solder alloy. It was found that In had a strong influence on these properties of Sn-0.3Ag-0.7Cu. Solidus and liquidus temperatures of the solder alloys was lowered as the In content was increased. However, In addition increased the melting range between solidus and liquidus temperatures. Wetting time of the solder alloy was reduced by the addition of In while the wetting force was increased with the increase of In content. Microhardness of Sn-0.3Ag-0.7Cu was increased by adding In into the solder alloy. With the addition of In, the Sn-rich phase was smaller in size, and the intermetallic compounds were more uniformly distributed.
本研究旨在研究添加铟(In)对Sn-0.3Ag-0.7Cu无铅钎料合金的固液温度、润湿时间、润湿力和显微硬度的影响。结果表明,In对Sn-0.3Ag-0.7Cu的这些性能影响较大。随着In含量的增加,钎料合金的固相温度和液相温度均降低。此外,还增加了固液温度之间的熔化范围。In的加入使钎料合金的润湿时间缩短,而润湿力随着In含量的增加而增大。在钎料合金中加入In可提高Sn-0.3Ag-0.7Cu的显微硬度。随着In的加入,富sn相尺寸变小,金属间化合物分布更加均匀。
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引用次数: 0
Mechanics of Sn-4Ag-0.5Cu solder joints in a ball grid array assembly during reflow and temperature cycles 球栅阵列中Sn-4Ag-0.5Cu焊点在回流和温度循环中的力学特性
Lai Zheng Bo, N. Kamsah, L. W. Keat, M. Tamin
A thorough understanding of the mechanics of lead-free solder joint in a ball grid array (BGA) assembly under expected operating conditions is essential in developing reliable life prediction models. In this respect, accurate deformation response of Sn-4Ag-0.5Cu (SAC405) solder under varying temperature cycles and straining rates is established using unified inelastic strain theory. The mechanics of the solder joint is then quantified through finite element modeling of a typical BGA assembly. The 3D quarter-model of the test assembly consists of silicon die, FR-4 substrate and printed circuit board (PCB), copper traces, intermetallics layer (IMC) and SAC405 solder joints in an area array. Reflow temperature profile consists of cooling from the assumed stress-free temperature of 220 to 25°C. Temperature cycles in the range between 125 and -40°C with dwell time at peak temperature levels are simulated. Results show that residual von Mises stress of 48.7 MPa and the corresponding inelastic strain of 0.031 are predicted in the critical solder joint at 25°C following solder reflow cooling. Additional inelastic strains accumulates continuously in the solder throughout the temperature cycles. Solder stress relaxation with accompanying inelastic strain occurs during dwell-time periods at both -40 and 125°C due viscoplastic and creep effects, respectively. In the critical solder joint, both high stress and strain gradients are localized in a small edge region at the solder-IMC interface near the component (SMD) side of the assembly. A new fatigue life model with unified inelastic strain theory defined for SAC405 solder joints is proposed based on accumulated inelastic strains and plastic work density of the critical solder joint.
全面了解球栅阵列(BGA)组件中无铅焊点在预期工作条件下的机理,对于开发可靠的寿命预测模型至关重要。利用统一的非弹性应变理论,建立了Sn-4Ag-0.5Cu (SAC405)焊料在不同温度循环和应变速率下的精确变形响应。然后通过典型BGA组件的有限元建模来量化焊点的力学。测试组件的3D四分之一模型由硅芯片、FR-4衬底和印刷电路板(PCB)、铜走线、金属间化合物层(IMC)和SAC405焊点组成。回流温度分布包括从假定的无应力温度220°C到25°C的冷却。温度循环在125和-40°C之间的范围内与停留时间在峰值温度水平进行了模拟。结果表明:在回流焊后的临界焊点温度为25℃时,预计残余von Mises应力为48.7 MPa,非弹性应变为0.031;在整个温度循环过程中,附加的非弹性应变在焊料中不断累积。在-40°C和125°C下,由于粘塑性和蠕变效应,焊料应力松弛伴随着非弹性应变发生。在关键焊点,高应力和应变梯度都集中在靠近组件(SMD)一侧的焊料- imc界面的小边缘区域。基于临界焊点的累积非弹性应变和塑性功密度,提出了基于统一非弹性应变理论的SAC405焊点疲劳寿命模型。
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引用次数: 6
Radical breakthrough innovative solution in SHBI PM optimization using TRIZ 使用TRIZ进行SHBI PM优化的突破性创新解决方案
N. Annamalai, Narendra Kumar Patel, Subramaniam Muthukarapan
Preventive maintenance (PM) is a crucial activity to ensure the stability and performance of a tool. It has lead to long hour and tedious activity on SHBI (Self Heat Burn-In). SHBI is a tool used to support the Burn-In process. SHBI carries several long hour PM task which also requires some conversion activities. This has been leading to a total >15% weekly capacity loss. This paper will discuss on how both the unproductive long hour activities have been analyzed through theory of innovative problem solving (TRIZ) methodology.
预防性维护(PM)是确保工具稳定性和性能的一项重要活动。这导致了在SHBI(自热老化)上长时间和繁琐的活动。SHBI是一个用于支持Burn-In过程的工具。SHBI承担了几个长时间的PM任务,这也需要一些转换活动。这导致每周总容量损失超过15%。本文将讨论如何通过创新问题解决理论(TRIZ)方法来分析这两种非生产性长时间活动。
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引用次数: 0
Feasibility study on replacing conventional epoxy dispensing with wafer back coating epoxy for QFN packages for discrete product 离散产品QFN封装用晶圆背涂环氧取代传统环氧点胶的可行性研究
D. Chong, L. Y. Lim
With the advent of ultra portable consumer products, the challenge to attach a die as close to the package size as possible is becoming a major challenge. The current die-attach nozzle dispensing method requires a real estate around the die to be sufficiently large to ensure good epoxy coverage, epoxy fillet height and to prevent the epoxy from overflowing the edges of the DAP. Moreover, a thinner package will require a thinner die which, with epoxy dispensing, could result in die overflowing to the die surface. Such constraints takes time to set-up and a dedicated nozzle will be required to fit every die size combination which would end up with high nozzle inventory and maintenance. A solution is needed at die-attach to meet the new challenge where the die size is almost as big as the DAP and where the die thickness is thinner in order to achieve a lower electrical resistance and package height and, where current epoxy dispensing method is no longer viable. And the alternative now available in the market is highly electrically conductive epoxy wafer back coating. This process does away with epoxy dispensing and is printed directly over the back of the wafer and b-staged cured prior to wafer mounting and sawing. The epoxy thickness is directly controlled by the thickness of the electroformed stencil and mesh. Unlike non-conductive paste or lower electrically conductive epoxies, the epoxy does not “sag” after wafer back coating, hence, roughness of the printed epoxy is through squeegee type and the printing parameters. This study covers the feasibility of assembly from wafer preparation to test by using wafer back coating epoxy, its challenges and issues as well as comparing the electrical performance of the package to that of conventional die attach dispense epoxy.
随着超便携消费产品的出现,将芯片贴合到尽可能接近封装尺寸的挑战正在成为一个重大挑战。目前的模附喷嘴点胶方法要求模具周围有足够大的空间,以确保良好的环氧树脂覆盖,环氧树脂圆角高度,并防止环氧树脂溢出DAP的边缘。此外,更薄的封装将需要更薄的模具,与环氧树脂点胶,可能导致模具溢出到模具表面。这样的限制需要时间来设置,并且需要一个专用的喷嘴来适应每种模具尺寸的组合,这最终将导致高喷嘴库存和维护。在贴片过程中,需要一个解决方案来应对新的挑战,其中模具尺寸几乎与DAP一样大,并且模具厚度更薄,以实现更低的电阻和封装高度,并且当前的环氧树脂点胶方法不再可行。而目前市场上可用的替代品是高导电性环氧硅片背涂。该工艺不需要环氧树脂点胶,直接在晶圆背面印刷,并在晶圆安装和锯切之前进行b级固化。环氧树脂的厚度直接由电铸模板和网孔的厚度控制。与不导电的浆料或低导电性环氧树脂不同,环氧树脂在涂覆后不会“凹陷”,因此,印刷环氧树脂的粗糙度是通过胶刮式和印刷参数决定的。本研究涵盖晶圆背面涂覆环氧树脂从晶圆制备到测试组装的可行性、挑战和问题,以及封装与传统模贴式环氧树脂的电性能比较。
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引用次数: 4
Challenges & solutions in the die attach process for micro thin die 微薄模具贴装工艺中的挑战及解决方案
Siew Han Looe, Soon Wei Wang
The drive for package thickness thinning and package size reduction has created new challenges for current wafer fabrication and assembly technology which lias led to the smaller die and thinner wafer thickness trend. Thus, the conventional wafer thickness of 8 mils decreases to 4 mils is more challenging for the new innovation package of Micro Leadless Land Grid Array (μLLGA) with only 0.4 mm package thickness. The uniqueness of μLLGA package construction is that it has no die paddle for die attach and the die backside is exposed to customer view, thus no indentation or sign of ejector pin is allowed visible. The level of difficult also increased by the inclusion of 14×14 mil die size and challenge in pick up the micro thin die without having a concern of die back cracking, and dies rotation. Die back cracking is one of the major quality issues for die attach with major contributor due to improper ejector pin selection (made up of tungsten carbide). The gross die back crack can be detected during in process monitoring but the micro crack die back will be difficult to detect and it usually will only be detected through customer application or reliability stress test. Another aspect this paper will cover is the conventional epoxy dispensing no longer viable for thin die attach as critical control is required in order not to have epoxy overflow with 4 mils die thickness die. In replacing this, a new approach known as epoxy screen print on wafer back is introduced to enable a more robust die attach process. This paper explains in details the challenges and solutions of die attach process for the μthin die into this unique μLLGA package. The challenges include: (i). Micro die size of 14 × 14 mils (near to minimum machine capability of 10 mils in die size) (ii). Thin die of 4 mils thickness with epoxy screen printon wafer back, (iii). μLLGA package construction with expose die back (with no die paddle). Design of Experiments (DOE) were carried out to enablea an optimize die attach process which consists key deliverablea as below: (i). Selection of appropriate ejector needle tip size in order not to induce epoxy on die back from cracking or indentation mark during die pick up. (ii). The optimization of die bond critical input parameter in order to achieve optimized process with no issue on die rotation, die unpick and die crack.
封装厚度减薄和封装尺寸减小的驱动对当前的晶圆制造和组装技术提出了新的挑战,从而导致了更小的模具和更薄的晶圆厚度的趋势。因此,对于封装厚度仅为0.4 mm的微型无铅栅极阵列(μLLGA)创新封装来说,传统的8 mils晶圆厚度减小到4 mils更具挑战性。μLLGA封装结构的独特之处在于它没有用于模具附加的模片,并且模背面暴露在客户视野中,因此不允许看到压痕或顶针的标志。难度水平也增加了14×14密模尺寸和挑战,在没有模具背面开裂和模具旋转的情况下拾取微薄模具。模具背裂是模具附件的主要质量问题之一,主要原因是顶销选择不当(由碳化钨组成)。在过程监控中可以检测到大模背裂纹,但微模背裂纹很难检测到,通常需要通过客户应用或可靠性应力测试才能检测到。本文将涵盖的另一个方面是,传统的环氧树脂点胶不再适用于薄模具附件,因为需要进行关键控制,以避免环氧树脂溢出4毫米模具厚度的模具。为了取代这一点,引入了一种新的方法,即在晶圆背面环氧丝网印刷,以实现更坚固的模具附加工艺。本文详细阐述了μ薄芯片在独特的μLLGA封装中所面临的挑战和解决方案。挑战包括:(i) 14 × 14密尔的微模尺寸(接近10密尔的最小机器能力);(ii) 4密尔厚度的薄模,环氧丝网印刷晶圆背面;(iii) μLLGA封装结构,暴露模背(没有模片)。进行了实验设计(DOE),以优化模具附着过程,该过程包括以下关键可交付事项:(i)选择适当的顶针针尖尺寸,以避免在取模过程中因开裂或压痕而在模具背面产生环氧树脂。(ii).模具黏合关键输入参数的优化,实现模具旋转、解模、模具开裂等问题的优化工艺。
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引用次数: 2
Unique high density leadframe development for SOT23 为SOT23开发独特的高密度引线框架
Zhang Jingyuan, Ruan Jianhua
With a drive of leading lower cost and higher productivity of Small Outline Surface Mounting (SOSM) packages, high density leadframe introduction was launched in the market since 21st century. But almost all factories use more expensive spot silver (Ag) plated and less than 60mm width leadframe. This paper presents the challenges faced and success in the development of unique high density copper (Cu) plated leadframe at more than 70 mm width and less than 0.11mm thicknesses for SOT23 packages. Due to the unique leadframe design, some considerations and solutions were developed: (1) Thermo-mechanical die stress simulation per package assembly process, reflow and temperature cycling for verifying the leadframe designs; (2) Bonder Equipment and process optimization though DOE experiments for eliminating leadframe oxidation and assuring the copper plated leadframe be workable; (3) Special through-gate design for increasing mold compound usage or yield; (4) Development of modeling and special de-gate tool design for broken the sub-gate to remove the leadframe warpage and coilset; (5) Special air blowing device design which was patented in China to stabilize thinner leadframe for passing through plating cells smoothly without leadframe jamming and damaging. The results show high density copper plated leadframe at more than 70mm width and less than 0.11mm thicknesses are applicable for mass production based on special assembly process design and development. It benefits with lower capital investment, leadframe cost saving, mold compound saving and lower production floor spacing.
随着小轮廓表面贴装(SOSM)封装的低成本和高生产率的推动,高密度引线框架自21世纪开始在市场上推出。但几乎所有的工厂使用更昂贵的点银(Ag)镀和宽度小于60mm引线框架。本文介绍了用于SOT23封装的独特的高密度镀铜引线框架(宽度大于70 mm,厚度小于0.11mm)的开发所面临的挑战和成功。由于引线框架设计独特,本文提出了一些考虑和解决方案:(1)对每个封装组装过程的热机械模具应力进行模拟,回流和温度循环以验证引线框架设计;(2)通过DOE实验优化焊机设备及工艺,消除引线框氧化,保证镀铜引线框的可操作性;(3)特殊的通浇口设计,可提高模具用量或产量;(4)开发模型和专用拆门工具设计,用于拆分门以去除引线框翘曲和线圈;(5)特殊的吹气装置设计,国内专利,稳定更薄的引线架,使引线架顺利通过电镀槽,不卡伤引线架。结果表明,基于特殊装配工艺设计和开发的高密度镀铜引线架宽度大于70mm,厚度小于0.11mm,适用于量产。它具有较低的资本投资,节省引线框架成本,节省模具复合材料和较低的生产车间间距。
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引用次数: 0
Optimization of hot carrier resistance for 0.18µm CMOS technology 0.18µm CMOS热载流子电阻优化
Sim Poh Ching, Yook Hyung Sun, C. Ping
With the further scaling down of CMOS devices, hot carrier induced degradation has become one of the most important reliability concerns. In the hot carrier effect, carriers are accelerated by the channel electric fields and become trapped in the oxide. These trapped charges cause time dependent shifts in measured device parameters. In time, substantial device parameter degradation can occur, resulting in device failure. Studies have been carried out to enhance device hot carrier immunity by reducing and departure the high electrical field from the drain area. The evaluations were focused on the implant energy and dose factors in order to achieve more graded device junction. The substantial result shows 10 times improvement in hot carrier injection (HCI) DC lifetime and reveals a good direction for suppression the hot carrier effects in 0.18 μm CMOS technology.
随着CMOS器件的进一步缩小,热载流子引起的退化已成为最重要的可靠性问题之一。在热载流子效应中,载流子被通道电场加速并被困在氧化物中。这些被捕获的电荷在测量的器件参数中引起时间相关的位移。随着时间的推移,可能会出现大量的设备参数退化,导致设备故障。为了提高器件的热载流子抗扰度,已经进行了降低和远离漏极区高电场的研究。评估的重点是植入物的能量和剂量因素,以实现更分级的器件连接。实验结果表明,热载子注入(HCI)的直流寿命提高了10倍,为抑制0.18 μm CMOS技术中的热载子效应指明了良好的方向。
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引用次数: 1
Addressing industry knowledge gaps regarding new Pb-free solder alloy alternatives 解决关于新的无铅钎料合金替代品的行业知识差距
G. Henshall, R. Healey, R. Pandher, K. Sweatman, K. Howell, R. Coyle, T. Sack, P. Snugovsky, S. Tisdale, F. Hua, H. Fu
Recently, the industry has seen an increase in the number of Pb-free solder alloy choices beyond the common neareutectic Sn-Ag-Cu (SAC) alloys. The increasing number of Pb-free alloys provides opportunities to address important issues, such as the poor drop/shock performance, alloy cost, copper dissolution, and poor mechanical behavior in bend/flex. Most recently, investigations into new solder paste alloys for mass reflow have begun. At the same time, the increase in choice of alloys presents challenges in managing the supply chain and introduces a variety of risks. Poor solder joint formation when BGAs with low Ag alloy balls are soldered at the low end of the conventional Pb-free process window is one example. The full impact of these new alloys on overall printed circuit assembly (PC A) reliability has yet to be determined. This paper provides the results of an iNEMI study of the present state of industry knowledge on Sn-Ag-Cu alloy "alternatives," including an assessment of existing knowledge and critical gaps. Based on this assessment, focus areas have been identified for closing key gaps. Plans and progress in addressing the gaps are described, including efforts to update industry standards to account for the new alloys and to better manage supply chain complexity and risk.
最近,除了常见的近共晶Sn-Ag-Cu (SAC)合金外,该行业的无铅焊料合金选择数量有所增加。越来越多的无铅合金为解决一些重要问题提供了机会,例如较差的跌落/冲击性能、合金成本、铜溶解以及弯曲/弯曲时较差的机械性能。最近,对大规模回流用新型锡膏合金的研究已经开始。与此同时,合金选择的增加给供应链管理带来了挑战,并带来了各种风险。当低银合金球的BGAs在传统无铅工艺窗口的低端焊接时,焊点形成不良就是一个例子。这些新合金对整个印刷电路组装(pca)可靠性的全面影响尚未确定。本文提供了iNEMI对Sn-Ag-Cu合金“替代品”的行业知识现状的研究结果,包括对现有知识和关键差距的评估。根据这一评估,确定了缩小关键差距的重点领域。介绍了解决差距的计划和进展,包括更新行业标准以考虑新合金和更好地管理供应链复杂性和风险的努力。
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引用次数: 8
期刊
2008 33rd IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)
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