Pub Date : 2025-07-22DOI: 10.1109/JMEMS.2025.3580725
Kai Wu;Xinyu Wang;Qingsong Li;Maobo Wang;Yuchao Yang;Xuezhong Wu;Dingbang Xiao
Frequency splitting occurs between the degenerate modes of MEMS ring gyroscopes due to manufacturing errors, which severely restricts their performance. This letter presents a frequency split tuning method based on Joule heating in a fused silica inductive vibrating ring gyroscope. A specially designed wire layout generates a temperature gradient on the resonant structure when current flows through, causing different frequency shifts in the two degenerate modes, thus achieving frequency split tuning. This method successfully enabled mode matching for a gyroscope with an initial frequency split of 1.47 Hz, demonstrating a frequency split tuning capability of 58 Hz/W.[2025-0075]
{"title":"Frequency Split Tuning by Joule Heating in Fused Silica Inductive Vibrating Ring Gyroscopes","authors":"Kai Wu;Xinyu Wang;Qingsong Li;Maobo Wang;Yuchao Yang;Xuezhong Wu;Dingbang Xiao","doi":"10.1109/JMEMS.2025.3580725","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3580725","url":null,"abstract":"Frequency splitting occurs between the degenerate modes of MEMS ring gyroscopes due to manufacturing errors, which severely restricts their performance. This letter presents a frequency split tuning method based on Joule heating in a fused silica inductive vibrating ring gyroscope. A specially designed wire layout generates a temperature gradient on the resonant structure when current flows through, causing different frequency shifts in the two degenerate modes, thus achieving frequency split tuning. This method successfully enabled mode matching for a gyroscope with an initial frequency split of 1.47 Hz, demonstrating a frequency split tuning capability of 58 Hz/W.[2025-0075]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"513-515"},"PeriodicalIF":3.1,"publicationDate":"2025-07-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204561","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Complicated multi-failure mechanisms triggered by distinctive stresses in different harsh environments have become essential yet challenging in reliability research of microelectromechanical systems (MEMS). For this issue, accelerated degradation testing (ADT) is widely used as an efficient strategy to obtain the long-term reliability of MEMS devices in a short amount of time. Therefore, precise and robust monitoring of performance degradation in harsh environments is the foundation of ADTs. However, current electro-mechanical-coupling methods, especially on-chip piezoresistive sensors, exhibit sensitivity shifts and must be calibrated manually at different temperatures, making them costly and restricting the accuracy. Here, we propose a calibration-free, temperature-robust split accelerated degradation testing platform (S-ADTP), which can accurately evaluate the long-term reliability of 2D MEMS micromirrors without any thermal-induced sensitivity shifts. S-ADTP eliminates the error of the FOV detection caused by sensitivity shifts, contributing to higher and more temperature-robust accuracy than electro-mechanical-coupling methods. ADTs with single and multiple stresses are subsequently conducted. Experimental results reveal the distinct failure mechanisms associated with varying environmental conditions, indicating that the crack propagation is the primary failure mode in high-temperature environments, while the demagnetization of permanent magnets becomes dominant in temperature-humidity coupling environments. The work can provide a calibration-free and temperature-robust method without any thermal-induced sensitivity shifts in ADTs for 2D micromirrors, and distinguish the complicated multi-failure mechanisms triggered by distinctive environmental stresses.[2025-0062]
{"title":"Calibration-Free, Split Accelerated Degradation Testing Platform Revealing the Long-Term Reliability of 2-D Micromirrors Without On-Chip Sensors","authors":"Ze-Yu Zhou;Kai-Ming Hu;Er-Qi Tu;Heng Zou;Hui-Yue Lin;Fan Yang;Guang Meng;Wen-Ming Zhang","doi":"10.1109/JMEMS.2025.3587456","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3587456","url":null,"abstract":"Complicated multi-failure mechanisms triggered by distinctive stresses in different harsh environments have become essential yet challenging in reliability research of microelectromechanical systems (MEMS). For this issue, accelerated degradation testing (ADT) is widely used as an efficient strategy to obtain the long-term reliability of MEMS devices in a short amount of time. Therefore, precise and robust monitoring of performance degradation in harsh environments is the foundation of ADTs. However, current electro-mechanical-coupling methods, especially on-chip piezoresistive sensors, exhibit sensitivity shifts and must be calibrated manually at different temperatures, making them costly and restricting the accuracy. Here, we propose a calibration-free, temperature-robust split accelerated degradation testing platform (S-ADTP), which can accurately evaluate the long-term reliability of 2D MEMS micromirrors without any thermal-induced sensitivity shifts. S-ADTP eliminates the error of the FOV detection caused by sensitivity shifts, contributing to higher and more temperature-robust accuracy than electro-mechanical-coupling methods. ADTs with single and multiple stresses are subsequently conducted. Experimental results reveal the distinct failure mechanisms associated with varying environmental conditions, indicating that the crack propagation is the primary failure mode in high-temperature environments, while the demagnetization of permanent magnets becomes dominant in temperature-humidity coupling environments. The work can provide a calibration-free and temperature-robust method without any thermal-induced sensitivity shifts in ADTs for 2D micromirrors, and distinguish the complicated multi-failure mechanisms triggered by distinctive environmental stresses.[2025-0062]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"622-630"},"PeriodicalIF":3.1,"publicationDate":"2025-07-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204535","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This work demonstrates an Overmoded Bulk Acoustic Resonator (OBAR) design that incorporates 35% Scandium doped Aluminum Nitride (Sc0.35Al0.65N) as the piezoelectric layer. The ScAlN OBAR presented here is a Bulk Acoustic Wave (BAW) resonator that excites a second overtone within a stack formed by a ScAlN layer and a set of alternating metallic layers. The metal electrodes act simultaneously as the acoustic cavity and as acoustic Bragg mirrors. Individual resonators are connected to each other by thick floating electrodes and top interconnects to form the devices demonstrated herein. The fabricated ScAlN OBAR with best performance exhibits a series resonant frequency of 51.3 GHz, electromechanical coupling ($k_{t}^{2}$ ) of 6.1% and a Quality factor (Q) at series resonance of 108. The measurements of various ScAlN OBAR devices with different geometries show that Q is increasing as the perimeter and area of the individual resonator increases and $k_{t}^{2}$ is increasing as the number of resonators in series increases. Material losses and surface roughness with associated acoustic energy leakage are discussed as possible sources of damping in these mmWave resonators. The investigations trace a path for further technological improvement and show that the ScAlN OBAR is a promising device for mmWave acoustics and filtering applications. [2025-0071]
{"title":"51.3 GHz Overmoded Bulk Acoustic Resonator Using 35% Scandium Doped Aluminum Nitride","authors":"Juhun Baek;Stephan Barth;Tom Schreiber;Hagen Bartzsch;John Duncan;Gianluca Piazza","doi":"10.1109/JMEMS.2025.3587525","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3587525","url":null,"abstract":"This work demonstrates an Overmoded Bulk Acoustic Resonator (OBAR) design that incorporates 35% Scandium doped Aluminum Nitride (Sc<sub>0.35</sub>Al<sub>0.65</sub>N) as the piezoelectric layer. The ScAlN OBAR presented here is a Bulk Acoustic Wave (BAW) resonator that excites a second overtone within a stack formed by a ScAlN layer and a set of alternating metallic layers. The metal electrodes act simultaneously as the acoustic cavity and as acoustic Bragg mirrors. Individual resonators are connected to each other by thick floating electrodes and top interconnects to form the devices demonstrated herein. The fabricated ScAlN OBAR with best performance exhibits a series resonant frequency of 51.3 GHz, electromechanical coupling (<inline-formula> <tex-math>$k_{t}^{2}$ </tex-math></inline-formula>) of 6.1% and a Quality factor (Q) at series resonance of 108. The measurements of various ScAlN OBAR devices with different geometries show that Q is increasing as the perimeter and area of the individual resonator increases and <inline-formula> <tex-math>$k_{t}^{2}$ </tex-math></inline-formula> is increasing as the number of resonators in series increases. Material losses and surface roughness with associated acoustic energy leakage are discussed as possible sources of damping in these mmWave resonators. The investigations trace a path for further technological improvement and show that the ScAlN OBAR is a promising device for mmWave acoustics and filtering applications. [2025-0071]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"538-547"},"PeriodicalIF":3.1,"publicationDate":"2025-07-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204573","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-07-14DOI: 10.1109/JMEMS.2025.3584552
Paolo Frigerio;Roberto Carminati;Luca Molinari;Marco Zamprogno;Giacomo Langfelder
This work discloses the implementation of a raster-scanning projection system based on MEMS micromirrors, including predictor-based control and an embedded recalibration feature. The system is designed to target an image of $1280times 720$ pixels. Two separate mirrors are used to steer a single, modulated, laser source across the screen: one, operated at its resonance frequency, performs a sinusoidal horizontal scan, while the second, operated in the quasi-static regime, performs the vertical scan. The maximum frame rate at the target resolution is 60 Hz when bidirectional scanning is exploited. The amplitude and frequency errors of the horizontal scan are 18.5 mdeg and 52 ppm, respectively, while the linearity of the vertical scan is 3.4 mdeg, i.e., 580 ppm of the field-of-view, with a mean frame-to-frame reproducibility of 5.5 mdeg. [2025-0068]
{"title":"Digitally-Assisted Calibration and Control of a Raster-Scanning System Based on MEMS Mirrors","authors":"Paolo Frigerio;Roberto Carminati;Luca Molinari;Marco Zamprogno;Giacomo Langfelder","doi":"10.1109/JMEMS.2025.3584552","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3584552","url":null,"abstract":"This work discloses the implementation of a raster-scanning projection system based on MEMS micromirrors, including predictor-based control and an embedded recalibration feature. The system is designed to target an image of <inline-formula> <tex-math>$1280times 720$ </tex-math></inline-formula> pixels. Two separate mirrors are used to steer a single, modulated, laser source across the screen: one, operated at its resonance frequency, performs a sinusoidal horizontal scan, while the second, operated in the quasi-static regime, performs the vertical scan. The maximum frame rate at the target resolution is 60 Hz when bidirectional scanning is exploited. The amplitude and frequency errors of the horizontal scan are 18.5 mdeg and 52 ppm, respectively, while the linearity of the vertical scan is 3.4 mdeg, i.e., 580 ppm of the field-of-view, with a mean frame-to-frame reproducibility of 5.5 mdeg. [2025-0068]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"636-644"},"PeriodicalIF":3.1,"publicationDate":"2025-07-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11079700","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204574","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-07-10DOI: 10.1109/JMEMS.2025.3583342
Yue Feng;Hao Zhang;Shiyu Li;Weiwei Cui
Miniaturized swimming robots have been widely explored for navigation and precise manipulation in low Reynolds number fluids, showing great potential in biomedical applications. In this work, we propose an asymmetric-pattern Lamb wave resonator (LWR) at an operating frequency of 148 MHz and demonstrate it as a wireless driver for two-dimensional swimming robotics. Experimental results show that the resonator immersed in water could generate strong acoustic streaming with highly directional drag forces even under applied powers of ~100 mW. The LWRs are fabricated with standard semiconductor process, leading to convenient design of the operating frequency and device layout. Both the linear motion with a speed of several mm/s and rotation with a speed of more than $100~^{circ }$ /s have been realized using a four parallelly connected LWR array as the driver. Therefore, by precisely controlling the movement direction and speed of the robot, flexible two-dimensional swimming has been achieved. This work presents a strategy of microscale acoustofluidic principle for the development of miniaturized two-dimensional swimming robots, inspiring the exploration of tiny robots in minimally invasive surgery and drug delivery domains.[2024-0183]
{"title":"Programmable Acoustofluidic-Powered Miniaturized Robot for Two-Dimensional Swimming","authors":"Yue Feng;Hao Zhang;Shiyu Li;Weiwei Cui","doi":"10.1109/JMEMS.2025.3583342","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3583342","url":null,"abstract":"Miniaturized swimming robots have been widely explored for navigation and precise manipulation in low Reynolds number fluids, showing great potential in biomedical applications. In this work, we propose an asymmetric-pattern Lamb wave resonator (LWR) at an operating frequency of 148 MHz and demonstrate it as a wireless driver for two-dimensional swimming robotics. Experimental results show that the resonator immersed in water could generate strong acoustic streaming with highly directional drag forces even under applied powers of ~100 mW. The LWRs are fabricated with standard semiconductor process, leading to convenient design of the operating frequency and device layout. Both the linear motion with a speed of several mm/s and rotation with a speed of more than <inline-formula> <tex-math>$100~^{circ }$ </tex-math></inline-formula>/s have been realized using a four parallelly connected LWR array as the driver. Therefore, by precisely controlling the movement direction and speed of the robot, flexible two-dimensional swimming has been achieved. This work presents a strategy of microscale acoustofluidic principle for the development of miniaturized two-dimensional swimming robots, inspiring the exploration of tiny robots in minimally invasive surgery and drug delivery domains.[2024-0183]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"631-635"},"PeriodicalIF":3.1,"publicationDate":"2025-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204539","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-07-04DOI: 10.1109/JMEMS.2025.3583086
Tymon Janisz;Karolina Laszczyk;Rafał Walczak
We present a new approach for in situ actuating of a microscale 3D-printed polymer cantilever utilizing a laser beam. To enable the polymer cantilever deflection, a light-heat converting film consisted of carbon nanotubes (CNT) or nitrocellulose lacquer was applied to the surface of the cantilever. This film causes IR absorption and its efficient conversion into heat that induces local change in the phase of the structural material and, therefore, the cantilever deflection and hence actuation. To our knowledge, this solution has not been previously presented in the literature. The research was conducted on the cantilevers printed using the inkjet technique. The results demonstrated a direct correlation between the laser power supply current and the deflection of the cantilevers tip; with adjusting the current, the beam tip achieved a significant deflection ranging from tens to hundreds of micrometers. Additionally, for 100 cycles, where in one cycle the laser beam was ON-OFF, the cantilever retained its mechanical properties; meanwhile, the film endured. These findings open new possibilities for the practical application of this remote actuation method across various fields of engineering, in micro- and microscale, and beyond, such as 4D printing structuring components and further for advanced actuators and sensors. [2025-0010]
{"title":"In Situ Reversible and Repeatable Actuation of the 3D-Printed Micro-Scale Cantilever Covered With a Light-Heat Converting Film as a New Approach Toward 4D Printing","authors":"Tymon Janisz;Karolina Laszczyk;Rafał Walczak","doi":"10.1109/JMEMS.2025.3583086","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3583086","url":null,"abstract":"We present a new approach for in situ actuating of a microscale 3D-printed polymer cantilever utilizing a laser beam. To enable the polymer cantilever deflection, a light-heat converting film consisted of carbon nanotubes (CNT) or nitrocellulose lacquer was applied to the surface of the cantilever. This film causes IR absorption and its efficient conversion into heat that induces local change in the phase of the structural material and, therefore, the cantilever deflection and hence actuation. To our knowledge, this solution has not been previously presented in the literature. The research was conducted on the cantilevers printed using the inkjet technique. The results demonstrated a direct correlation between the laser power supply current and the deflection of the cantilevers tip; with adjusting the current, the beam tip achieved a significant deflection ranging from tens to hundreds of micrometers. Additionally, for 100 cycles, where in one cycle the laser beam was ON-OFF, the cantilever retained its mechanical properties; meanwhile, the film endured. These findings open new possibilities for the practical application of this remote actuation method across various fields of engineering, in micro- and microscale, and beyond, such as 4D printing structuring components and further for advanced actuators and sensors. [2025-0010]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"603-610"},"PeriodicalIF":3.1,"publicationDate":"2025-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=11071684","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204575","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper presents a rapid prototyping method for fabricating double-sided tape-based microfluidic chips that address limitations in material flexibility, fabrication complexity, and on-chip functionalities. The approach employs biocompatible, low-cost materials—including medical-grade tapes, rubber, and thermoplastics (PMMA, polycarbonate, polystyrene)—micromachined via femtosecond lasers. Solvent- and heat-free tape-based bonding enables efficient fabrication of optically transparent, UV-sterilizable layers for biomedical applications. The method supports integrated on-chip pumps and active/passive valves, achieving bidirectional and multidirectional flow control with minimal external actuation. These components operate at up to 14 psi actuation pressure and $230~mu $ L/min flow rates, adaptable via chamber dimensions. A dual-pump configuration mimics peristaltic pumping for continuous flow, while a prototype with multidirectional pumps and reservoirs demonstrates dynamic fluid routing and on-demand distribution. The technique offers a versatile, scalable solution for microfluidic applications requiring sterility, optical clarity, and on-chip fluidic control. [2025-0059]
{"title":"Rapid Prototyping of Tape-Based Microfluidic Chips With Versatile On-Chip Fluidic Functions","authors":"Zekun Wu;Guangqun Ma;Allen Wang;Guangyin Zhang;Shuda Zhong;Kehao Zhao;Qirui Wang;Yuqi Li;Kevin P. Chen","doi":"10.1109/JMEMS.2025.3580421","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3580421","url":null,"abstract":"This paper presents a rapid prototyping method for fabricating double-sided tape-based microfluidic chips that address limitations in material flexibility, fabrication complexity, and on-chip functionalities. The approach employs biocompatible, low-cost materials—including medical-grade tapes, rubber, and thermoplastics (PMMA, polycarbonate, polystyrene)—micromachined via femtosecond lasers. Solvent- and heat-free tape-based bonding enables efficient fabrication of optically transparent, UV-sterilizable layers for biomedical applications. The method supports integrated on-chip pumps and active/passive valves, achieving bidirectional and multidirectional flow control with minimal external actuation. These components operate at up to 14 psi actuation pressure and <inline-formula> <tex-math>$230~mu $ </tex-math></inline-formula>L/min flow rates, adaptable via chamber dimensions. A dual-pump configuration mimics peristaltic pumping for continuous flow, while a prototype with multidirectional pumps and reservoirs demonstrates dynamic fluid routing and on-demand distribution. The technique offers a versatile, scalable solution for microfluidic applications requiring sterility, optical clarity, and on-chip fluidic control. [2025-0059]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"594-602"},"PeriodicalIF":3.1,"publicationDate":"2025-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204560","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In response to the critical need for low-voltage devices in advancing miniaturization technology, this study introduces a groundbreaking piezoelectric micro-electro-mechanical-systems (MEMS) scanning micromirror architecture employing a C-beam cantilever structure. This study employs lead zirconate titanate (PZT) thin films with excellent transverse piezoelectric coefficient (d31) and dielectric constant and innovatively designs and fabricates three micromirror devices (reference design, T-beam design, and C-beam design) that maintain equivalent driving areas. This study demonstrates that the C-beam structure exhibits outstanding performance in driving voltage efficiency. Compared to the T-shaped beam design, under identical scanning angle conditions (30°), the driving voltage is reduced from 70 Vpp to 6 Vpp — a 91.42% reduction. Furthermore, after implementing a pre-polarization process (−30 V, 25 min), the C-beam micromirror achieves the optical scanning angle of 87.56° at 24 Vpp driving voltage. This significant improvement highlights the critical role of structural geometry and pre-polarization treatment in MEMS actuator performance. [2025-0061]
{"title":"On the Design of Low Voltage One-Dimensional Piezoelectric MEMS Scanning Micromirror","authors":"Yuanjie Wang;Xiaowei Zhang;Yang Tang;Honghao Wang;Fanjun Zhai;Chenxi Gao;Jianpeng Xing;Chaobo Li;Jing Xie;Dapeng Sun","doi":"10.1109/JMEMS.2025.3578961","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3578961","url":null,"abstract":"In response to the critical need for low-voltage devices in advancing miniaturization technology, this study introduces a groundbreaking piezoelectric micro-electro-mechanical-systems (MEMS) scanning micromirror architecture employing a C-beam cantilever structure. This study employs lead zirconate titanate (PZT) thin films with excellent transverse piezoelectric coefficient (d<sub>31</sub>) and dielectric constant and innovatively designs and fabricates three micromirror devices (reference design, T-beam design, and C-beam design) that maintain equivalent driving areas. This study demonstrates that the C-beam structure exhibits outstanding performance in driving voltage efficiency. Compared to the T-shaped beam design, under identical scanning angle conditions (30°), the driving voltage is reduced from 70 V<sub>pp</sub> to 6 V<sub>pp</sub> — a 91.42% reduction. Furthermore, after implementing a pre-polarization process (−30 V, 25 min), the C-beam micromirror achieves the optical scanning angle of 87.56° at 24 V<sub>pp</sub> driving voltage. This significant improvement highlights the critical role of structural geometry and pre-polarization treatment in MEMS actuator performance. [2025-0061]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"519-528"},"PeriodicalIF":3.1,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204543","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper presents the first experimental demonstration of a novel approach to suppressing spurious modes in high-frequency LiNbO3 A1 Lamb wave resonators through the integration of lithography-defined through-hole arrays. Our fabrication-friendly method effectively mitigates spurious modes without compromising resonator performance or requiring additional fabrication steps, while maintaining scalability. Fabricated on a 296-nm Z-cut LiNbO3 thin film, resonators with well-designed through-holes achieve a resonance frequency exceeding 6 GHz and an electromechanical coupling coefficient of 25%. Spurious modes are significantly suppressed, while the resonators’ total suspension area is reduced by over 50%, enhancing both mechanical and thermal stability. When extended to a $pi $ -type filter with a center frequency of approximately 7.0 GHz and a fractional bandwidth of ~14%, the filter with through-holes demonstrates cleaner passband and improved band edge characteristics. The through-hole design functions as both acoustic scatterers and release channels, offering a unified solution for performance optimization, stability, design flexibility, and manufacturability, thereby establishing Lamb wave resonators with through-holes as a scalable solution for next-generation, multiscale RF systems. [2025-0060]
{"title":"Spurious Mode Suppression in LiNbO3 A1 Resonators and Filters Beyond 6 GHz With Through-Holes","authors":"Shu-Mao Wu;Chen-Bei Hao;Hao Yan;Zhen-Hui Qin;Si-Yuan Yu;Yan-Feng Chen","doi":"10.1109/JMEMS.2025.3581914","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3581914","url":null,"abstract":"This paper presents the first experimental demonstration of a novel approach to suppressing spurious modes in high-frequency LiNbO3 A1 Lamb wave resonators through the integration of lithography-defined through-hole arrays. Our fabrication-friendly method effectively mitigates spurious modes without compromising resonator performance or requiring additional fabrication steps, while maintaining scalability. Fabricated on a 296-nm Z-cut LiNbO3 thin film, resonators with well-designed through-holes achieve a resonance frequency exceeding 6 GHz and an electromechanical coupling coefficient of 25%. Spurious modes are significantly suppressed, while the resonators’ total suspension area is reduced by over 50%, enhancing both mechanical and thermal stability. When extended to a <inline-formula> <tex-math>$pi $ </tex-math></inline-formula>-type filter with a center frequency of approximately 7.0 GHz and a fractional bandwidth of ~14%, the filter with through-holes demonstrates cleaner passband and improved band edge characteristics. The through-hole design functions as both acoustic scatterers and release channels, offering a unified solution for performance optimization, stability, design flexibility, and manufacturability, thereby establishing Lamb wave resonators with through-holes as a scalable solution for next-generation, multiscale RF systems. [2025-0060]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"529-537"},"PeriodicalIF":3.1,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204568","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This study innovatively proposes and demonstrates a monolithic-wafer-based cascade-actuation XYZ-microstage featuring large displacement strokes and low-crosstalk movements, achieved by integrating an in-plane comb-drive XY-microstage with out-of-plane Al/SiO2 bimorph thermoelectric actuators for the first time. A three-level serial kinematic scheme within a monolithic wafer, i.e., a three-level frame-in-frame structural configuration, is employed to mitigate motion crosstalk across the X-, Y-, and Z-axes. In the in-plane comb-drive XY-microstage, which comprises four actuation units, both decoupling-motion structural design and capacitance-coupling crosstalk constraints are implemented to ensure low-crosstalk movements along the ±X- and ±Y-axes. Four sets of out-of-plane Al/SiO2 bimorph actuators independently actuate the comb-drive XY-microstage along the Z-axis. Additionally, mechanical Si-springs are introduced to facilitate electrical interconnections between the XY-microstage and external pads. This design also overcomes the limitation of out-of-plane stroke space in a monolithic wafer, thereby maximizing the actuation potential to achieve significant out-of-plane displacement. A critical step in the microfabrication process involves the successful creation of high-aspect-ratio silicon combs and Al/SiO2 bimorphs by engineering “step” structures in the handle layer of an SOI wafer, enabling subsequent structure release. Finally, the fabricated monolithic-wafer-based XYZ-microstage can provide large displacements of $92.3~mu $ m, $78.3~mu $ m, and $2.0~mu $ m in the X-, Y-, and Z-directions, respectively. Furthermore, the three-dimensional cascade-actuation configuration within a monolithic wafer is adaptable to various actuation-mode combinations, facilitating multi-degree-of-freedom actuations.[2025-0021]
{"title":"Monolithic-Wafer-Based Cascade-Actuation XYZ-Microstage With Large Displacement and Low Crosstalk by Integrating an In-Plane Comb-Drive XY-Microstage With Out-of-Plane Al/SiO2 Bimorph Actuators","authors":"Huanyu Dai;Penghong Shi;Zengyi Wang;Junyang Ding;Bing Li;Gaopeng Xue","doi":"10.1109/JMEMS.2025.3581231","DOIUrl":"https://doi.org/10.1109/JMEMS.2025.3581231","url":null,"abstract":"This study innovatively proposes and demonstrates a monolithic-wafer-based cascade-actuation XYZ-microstage featuring large displacement strokes and low-crosstalk movements, achieved by integrating an in-plane comb-drive XY-microstage with out-of-plane Al/SiO<sub>2</sub> bimorph thermoelectric actuators for the first time. A three-level serial kinematic scheme within a monolithic wafer, i.e., a three-level frame-in-frame structural configuration, is employed to mitigate motion crosstalk across the X-, Y-, and Z-axes. In the in-plane comb-drive XY-microstage, which comprises four actuation units, both decoupling-motion structural design and capacitance-coupling crosstalk constraints are implemented to ensure low-crosstalk movements along the ±X- and ±Y-axes. Four sets of out-of-plane Al/SiO<sub>2</sub> bimorph actuators independently actuate the comb-drive XY-microstage along the Z-axis. Additionally, mechanical Si-springs are introduced to facilitate electrical interconnections between the XY-microstage and external pads. This design also overcomes the limitation of out-of-plane stroke space in a monolithic wafer, thereby maximizing the actuation potential to achieve significant out-of-plane displacement. A critical step in the microfabrication process involves the successful creation of high-aspect-ratio silicon combs and Al/SiO<sub>2</sub> bimorphs by engineering “step” structures in the handle layer of an SOI wafer, enabling subsequent structure release. Finally, the fabricated monolithic-wafer-based XYZ-microstage can provide large displacements of <inline-formula> <tex-math>$92.3~mu $ </tex-math></inline-formula>m, <inline-formula> <tex-math>$78.3~mu $ </tex-math></inline-formula>m, and <inline-formula> <tex-math>$2.0~mu $ </tex-math></inline-formula>m in the X-, Y-, and Z-directions, respectively. Furthermore, the three-dimensional cascade-actuation configuration within a monolithic wafer is adaptable to various actuation-mode combinations, facilitating multi-degree-of-freedom actuations.[2025-0021]","PeriodicalId":16621,"journal":{"name":"Journal of Microelectromechanical Systems","volume":"34 5","pages":"581-593"},"PeriodicalIF":3.1,"publicationDate":"2025-06-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145204577","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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