{"title":"真空技術者資格認定試験の問題解説(8);真空技術者資格認定試験の問題解説(8);Guidance for the Vacuum Engineer Examination (8)","authors":"Kazue Takahashi","doi":"10.3131/JVSJ2.60.507","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.507","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"12 1","pages":"507-510"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89698411","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Gas permeation test equipment was developed to measure the gas permeability through O-ring shape elastomers under actual condition of semiconductor manufacturing such as high vacuum and high temperature. The temperature dependencies of gas permeability on three kinds of elastomers, silicone (VMQ), ‰uoroelastomer (FKM) and per‰uoroelastomer (FFKM), were investigated. Permeation rate for all materials increased as temperature increased. O2 and N2 gas permeation rate through VMQ was much higher than that through the other materials, especially in lower temperature. Moreover, the temperature dependencies of gas permeability with VMQ were completely diŠerent from those of FKM and FFKM. This was coming from diŠerent polymer structure which caused diŠerence of solubility and diŠusivity between silicon and ‰uoroelastomers.
{"title":"Evaluation of Temperature Dependency of Gas Permeability on Various Kinds of Elastomers","authors":"Yasutaka Yamada, S. Sogo","doi":"10.3131/JVSJ2.60.502","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.502","url":null,"abstract":"Gas permeation test equipment was developed to measure the gas permeability through O-ring shape elastomers under actual condition of semiconductor manufacturing such as high vacuum and high temperature. The temperature dependencies of gas permeability on three kinds of elastomers, silicone (VMQ), ‰uoroelastomer (FKM) and per‰uoroelastomer (FFKM), were investigated. Permeation rate for all materials increased as temperature increased. O2 and N2 gas permeation rate through VMQ was much higher than that through the other materials, especially in lower temperature. Moreover, the temperature dependencies of gas permeability with VMQ were completely diŠerent from those of FKM and FFKM. This was coming from diŠerent polymer structure which caused diŠerence of solubility and diŠusivity between silicon and ‰uoroelastomers.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"15 1","pages":"502-506"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79649359","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The ˆrst (Phase-1) commissioning of SuperKEKB, an asymmetric-energy electron-positron collider at KEK, began in February 2016, after more than 5 years of upgrade work on KEKB and successfully ended in June 2016. A major task of the Phase-1 commissioning was the vacuum scrubbing of new beam pipes in anticipation of a su‹ciently long beam lifetime in the next commissioning. The pressure rise per unit beam current decreased steadily with increasing beam dose, as expected. Another important task was to check the stabilities of various new vacuum components at high beam currents of approximately 1 A. The temperature increases of the bellows chambers, gate valves, connection ‰anges, and so on were less than several degrees at 1 A, and no serious problems were found. The eŠectiveness of the antechambers and TiN coating in suppressing the electron-cloud eŠect (ECE) in the positron ring was also conˆrmed. However, the ECE in the Al-alloy bellows chambers was observed where TiN had not been coated. The use of permanent magnets with an axial magnetic ˆeld of approximately 100 G successfully suppressed this eŠect. Pressure bursts accompanying beam losses were also frequently observed in the positron ring. The preparation for the next Phase-2 commissioning, such as the installations of new beam pipes at the collision point and of six more beam collimators, are now in progress.
{"title":"いよいよ運転を開始したSuperKEKBの真空システム;いよいよ運転を開始したSuperKEKBの真空システム;Vacuum System in the First Operation of SuperKEKB","authors":"Yusuke Suetsugu, Kyoko Shibata, Takuya Ishibashi, Mitsuru Shirai, Shinji Terui, Ken-ichi Kanazawa, H. Hisamatsu","doi":"10.3131/JVSJ2.60.123","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.123","url":null,"abstract":"The ˆrst (Phase-1) commissioning of SuperKEKB, an asymmetric-energy electron-positron collider at KEK, began in February 2016, after more than 5 years of upgrade work on KEKB and successfully ended in June 2016. A major task of the Phase-1 commissioning was the vacuum scrubbing of new beam pipes in anticipation of a su‹ciently long beam lifetime in the next commissioning. The pressure rise per unit beam current decreased steadily with increasing beam dose, as expected. Another important task was to check the stabilities of various new vacuum components at high beam currents of approximately 1 A. The temperature increases of the bellows chambers, gate valves, connection ‰anges, and so on were less than several degrees at 1 A, and no serious problems were found. The eŠectiveness of the antechambers and TiN coating in suppressing the electron-cloud eŠect (ECE) in the positron ring was also conˆrmed. However, the ECE in the Al-alloy bellows chambers was observed where TiN had not been coated. The use of permanent magnets with an axial magnetic ˆeld of approximately 100 G successfully suppressed this eŠect. Pressure bursts accompanying beam losses were also frequently observed in the positron ring. The preparation for the next Phase-2 commissioning, such as the installations of new beam pipes at the collision point and of six more beam collimators, are now in progress.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"21 1","pages":"123-130"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82599528","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Chemistry of interstellar H2O is essential for understanding the formation of stars and planetary systems because of the ubiquity of H2O in space. The abundance ratio of nuclear spin isomers (the ortho-to-para ratio, OPR) can be a key for interstellar water chemistry, when assuming that the OPR desorbed from ice is closely related to the ice formation temperature. However, the above assumption has not been experimentally validated. Here, we report that H2O photodesorbed from ice at 10 K shows a statistical OPR of 3, even when the ice is produced in situ by hydrogenation of O2, a known formation process of interstellar H2O. This invalidates the hypothesis for relation between OPR and temperature. Reinterpretation of previous observations is necessary to improve our understanding of interstellar chemistry and the formation of the solar system and comets.
{"title":"10 Kの氷から光脱離する水の核スピン異性体比と宇宙の水の起源について;10 Kの氷から光脱離する水の核スピン異性体比と宇宙の水の起源について;Ortho-to-para Ratio of Water Photodesorbed from Ice at 10 K and the Origin of Interstellar Water","authors":"Tetsuya Hama, Akira Kouchi, Naoki Watanabe","doi":"10.3131/JVSJ2.60.264","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.264","url":null,"abstract":"Chemistry of interstellar H2O is essential for understanding the formation of stars and planetary systems because of the ubiquity of H2O in space. The abundance ratio of nuclear spin isomers (the ortho-to-para ratio, OPR) can be a key for interstellar water chemistry, when assuming that the OPR desorbed from ice is closely related to the ice formation temperature. However, the above assumption has not been experimentally validated. Here, we report that H2O photodesorbed from ice at 10 K shows a statistical OPR of 3, even when the ice is produced in situ by hydrogenation of O2, a known formation process of interstellar H2O. This invalidates the hypothesis for relation between OPR and temperature. Reinterpretation of previous observations is necessary to improve our understanding of interstellar chemistry and the formation of the solar system and comets.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"3 1","pages":"264-274"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83796239","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Diamond Like Carbon (DLC) ˆlms have several unique characteristics, high-hardness, wear resistances, low friction, and good chemical stability. Thus, their applications are widely spread, for example, automotive and mechanical sliding parts, cutting tools, and molding dies. In this paper, we describe their deposition processes, ˆlm structures, characteristics and mechanical properties, and their applications. Finally, we mention some recent developments and possibilities.
{"title":"ダイヤモンド・ライク・カーボン（DLC）膜とその応用展開;ダイヤモンド・ライク・カーボン（DLC）膜とその応用展開;Characteristics and Applications of Diamond Like Carbon (DLC) Films","authors":"Koji Miyake","doi":"10.3131/jvsj2.60.428","DOIUrl":"https://doi.org/10.3131/jvsj2.60.428","url":null,"abstract":"Diamond Like Carbon (DLC) ˆlms have several unique characteristics, high-hardness, wear resistances, low friction, and good chemical stability. Thus, their applications are widely spread, for example, automotive and mechanical sliding parts, cutting tools, and molding dies. In this paper, we describe their deposition processes, ˆlm structures, characteristics and mechanical properties, and their applications. Finally, we mention some recent developments and possibilities.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"40 1","pages":"428-436"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76735430","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Field emitter arrays (FEAs) have been investigated as potential cold cathodes in variety of applications such as ‰atpanel displays and image sensors, microwave and further high frequency vacuum electronic devices. The density modulated electron beam (a train of electron bunches) at high frequency generated directly from the cathodes oŠers opportunities for dramatic improvements in performance of microwave vacuum electronic devices. The paper discusses the emission characteristics and optical response of gated ptype silicon ˆeld emitter arrays under irradiation of laser pulses.
{"title":"Photoassisted Field Emission from Gated Silicon Field Emitter Arrays","authors":"H. Shimawaki","doi":"10.3131/JVSJ2.60.8","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.8","url":null,"abstract":"Field emitter arrays (FEAs) have been investigated as potential cold cathodes in variety of applications such as ‰atpanel displays and image sensors, microwave and further high frequency vacuum electronic devices. The density modulated electron beam (a train of electron bunches) at high frequency generated directly from the cathodes oŠers opportunities for dramatic improvements in performance of microwave vacuum electronic devices. The paper discusses the emission characteristics and optical response of gated ptype silicon ˆeld emitter arrays under irradiation of laser pulses.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"1 1","pages":"8-12"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76122248","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Kazuki Noda, Miyuki. Tanaka, N. Watanabe, T. Kubo, Tetsuo Shimizu
Electron emitting tip is widely used in many research ˆelds such as microfabrication, electron microscopy, surface science and so on. There are mainly three types of electron emitter as thermionic, ˆeld-emission and Schottky electron emitter. Because of the high stability with large emission current, tungsten〈100〉single crystal coated with ZrO2 is widely used as Schottky electron emitter of an electron microscope. In order to develop a new technique for evaluating electron emitter, we thought that it was possible to observe the surface topographic structures of the electron emitting tip with a scanning probe microscope and succeeded in observing the nanostructure of the electron emitting tip in air. In this study, we have tried to observe tip nanostructure using ultra high vacuum scanning tunneling microscope (UHVSTM), because electron emitter is generally used under UHV condition. Using UHVSTM, high resolution STM images which are related to scanning electron microscope images were acquired. This indicated that UHVSTM could be a plausible tool for electron tip characterization.
{"title":"Structural Observation of Electron Emitting Tip Using UHV STM","authors":"Kazuki Noda, Miyuki. Tanaka, N. Watanabe, T. Kubo, Tetsuo Shimizu","doi":"10.3131/JVSJ2.60.437","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.437","url":null,"abstract":"Electron emitting tip is widely used in many research ˆelds such as microfabrication, electron microscopy, surface science and so on. There are mainly three types of electron emitter as thermionic, ˆeld-emission and Schottky electron emitter. Because of the high stability with large emission current, tungsten〈100〉single crystal coated with ZrO2 is widely used as Schottky electron emitter of an electron microscope. In order to develop a new technique for evaluating electron emitter, we thought that it was possible to observe the surface topographic structures of the electron emitting tip with a scanning probe microscope and succeeded in observing the nanostructure of the electron emitting tip in air. In this study, we have tried to observe tip nanostructure using ultra high vacuum scanning tunneling microscope (UHVSTM), because electron emitter is generally used under UHV condition. Using UHVSTM, high resolution STM images which are related to scanning electron microscope images were acquired. This indicated that UHVSTM could be a plausible tool for electron tip characterization.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"106 1","pages":"437-439"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80420195","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Tetsuhide Shimizu, M. Villamayor, J. Kéraudy, D. Lundin, U. Helmersson
346 平成28年11月30日 第57回真空に関する連合講演会で発表 1 首都大学東京大学院システムデザイン研究科知能機械システム 学域(〒1910065 東京都日野市旭が丘 66) 2 リンシェーピン大学 計測・物理学研究科(SE 58183 リン シェーピン,スウェーデン) 3 パリ第11大学 ガス・プラズマ物理研究所(91405 オル セー,フランス) Fig. 1 Cathode voltage and current waveforms measured during HiPIMS of TiAl alloy in Ar/N2 gas mixtures at a constant mean power of 8 kW, a frequency of 1 kHz, a pulse length of 50 ms, and a working pressure of 0.5 Pa.
346平成28年11月30日第57届真空相关的联合演讲会上发表1首都东京大学研究生院学科智能机械系统设计系统研究区域(〒19165东京都日野市旭が丘66)2リンシェーピン大学测量、物理学研究科(se 58183林シェーピン,瑞典)3巴黎第11大学气体、等离子物理研究所(91405奥尔セー,法国)fig . 1Cathode voltage and current waveforms measured during HiPIMS of TiAl alloy in Ar/N2 gas mixtures atconstant mean power of 8kw, afrequency of 1khz, apulse length of 50ms，and a工作pressure of 0.5 Pa。
{"title":"Transition Mode Control in Reactive High-Power Impulse Magnetron Sputtering (R-HiPIMS)","authors":"Tetsuhide Shimizu, M. Villamayor, J. Kéraudy, D. Lundin, U. Helmersson","doi":"10.3131/JVSJ2.60.346","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.346","url":null,"abstract":"346 平成28年11月30日 第57回真空に関する連合講演会で発表 1 首都大学東京大学院システムデザイン研究科知能機械システム 学域(〒1910065 東京都日野市旭が丘 66) 2 リンシェーピン大学 計測・物理学研究科(SE 58183 リン シェーピン,スウェーデン) 3 パリ第11大学 ガス・プラズマ物理研究所(91405 オル セー,フランス) Fig. 1 Cathode voltage and current waveforms measured during HiPIMS of TiAl alloy in Ar/N2 gas mixtures at a constant mean power of 8 kW, a frequency of 1 kHz, a pulse length of 50 ms, and a working pressure of 0.5 Pa.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"6 1","pages":"346-351"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74378837","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Report on SSVS 2017, 2017 Joint Symposium of the Surface Science Society of Japan (SSSJ) and the Vacuum Society of Japan (VSJ), Concurrently with SSSJ's 37th Annual Meeting and VSJ's 58th Annual Symposium","authors":"Ken Nakamura","doi":"10.3131/JVSJ2.60.519","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.519","url":null,"abstract":"","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"56 1","pages":"519-522"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82262033","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ion implantation into microspheres and wires may open a new application ˆeld. Therefore, we extended the TRIM (Transport of Ions in Matter) code that simulates ion distributions for substrates to be applicable to spherical and cylindrical targets. Next, we ˆtted simulated proˆles calculated by the TRIM code to the experimental ones to determine adequate parameters of electronic stopping powers. And, we simulated about various combinations to use the extended TRIM code which used parameters. Calculated projected ranges and implantation energies are reduced to modiˆed reduced projected ranges and average reduced energy. Also, we derive the relations between the average reduced energy and the modiˆed reduced projected ranges for spherical and cylindrical targets.
{"title":"コンピュータシミュレーションによる粉体および線材へのイオン注入分布の一般則;コンピュータシミュレーションによる粉体および線材へのイオン注入分布の一般則;Universal Expression of Projected Range Distributions for Spherical and Cylindrical Shape Target by Computer Simulation","authors":"Shotaro Tawara, Yukio Yamamoto, Masakazu Arakawa, Satoshi Saijo, Junsei Horikawa, Tomoaki Yoneda","doi":"10.3131/JVSJ2.60.463","DOIUrl":"https://doi.org/10.3131/JVSJ2.60.463","url":null,"abstract":"Ion implantation into microspheres and wires may open a new application ˆeld. Therefore, we extended the TRIM (Transport of Ions in Matter) code that simulates ion distributions for substrates to be applicable to spherical and cylindrical targets. Next, we ˆtted simulated proˆles calculated by the TRIM code to the experimental ones to determine adequate parameters of electronic stopping powers. And, we simulated about various combinations to use the extended TRIM code which used parameters. Calculated projected ranges and implantation energies are reduced to modiˆed reduced projected ranges and average reduced energy. Also, we derive the relations between the average reduced energy and the modiˆed reduced projected ranges for spherical and cylindrical targets.","PeriodicalId":17344,"journal":{"name":"Journal of The Vacuum Society of Japan","volume":"80 1","pages":"463-466"},"PeriodicalIF":0.0,"publicationDate":"2017-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85358875","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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