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1998 High-Temperature Electronic Materials, Devices and Sensors Conference (Cat. No.98EX132)最新文献

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High power SiC-devices. New result and prospects 大功率sic器件。新成果与展望
A. Lebedev, V. Chelnokov
In this work, theoretical analysis is given of SiC parameters which are important for electronic device production. Also, a comparative description of the different technological methods used for SiC growth is given. For substrate growth, the Lely method and modified Lely method are examined; for n-type epilayer growth, sublimation epitaxy (SE), container free liquid phase epitaxy (CFLPE), and chemical vapour deposition (CVD) are compared; for p-n junction production, SE, CFLPE, CVD, Al implantation (ID) and boron diffusion are compared; and for mesa structure formation, plasma-ion etching is examined.
本文对电子器件生产中重要的SiC参数进行了理论分析。同时,对不同的碳化硅生长工艺方法进行了比较。对于底物生长,研究了Lely法和改进的Lely法;对n型脱皮生长的升华外延(SE)、无容器液相外延(CFLPE)和化学气相沉积(CVD)进行了比较;对于p-n结的制备,比较了SE、CFLPE、CVD、Al注入(ID)和硼扩散;而对于台面结构的形成,等离子体离子蚀刻进行了研究。
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引用次数: 0
Recent advances in SiC materials and device technologies in Sweden 瑞典SiC材料和器件技术的最新进展
M. Ostling
In Sweden, silicon carbide technology is regarded as one of the prime research areas in microelectronics. The main driving force has been the power generation and power distribution industry and the need for low power loss systems. These needs are expected in part to be covered by replacing Si with SiC devices to utilize blocking voltages of 20 kV, higher temperature operation (300-400/spl deg/C), lower device losses and higher switching frequencies. The establishment of a state-of-the-art SiC device processing facility in Kista-Stockholm, Sweden by ABB further manifests the thrust towards SiC technology. This paper presents examples of the advances in materials growth technology, characterization, device fabrication results, device modeling and new application areas such as high temperature sensors.
在瑞典,碳化硅技术被认为是微电子领域的主要研究领域之一。主要驱动力是发电和配电行业以及对低功耗系统的需求。这些需求预计将部分通过用SiC器件取代Si器件来满足,以利用20kv的阻断电压、更高的温度工作(300-400/压升度/C)、更低的器件损耗和更高的开关频率。ABB在瑞典斯德哥尔摩Kista-Stockholm建立了最先进的SiC器件加工工厂,进一步体现了对SiC技术的推动。本文介绍了材料生长技术、表征、器件制造结果、器件建模和高温传感器等新应用领域的进展。
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引用次数: 1
Diamond based metal-semiconductor contacts for elevated temperatures 高温用金刚石基金属半导体触点
H. Fecht, C. Ettl, M. Werner
Microsystems technology allows the integration of several functions within one product. The tendency towards continous miniaturization and the corresponding increase in integration density is a further challenge to the materials in use, in particular at elevated temperatures. For high temperature applications, wide bandgap semiconductors, such as diamond, are used. Several materials related properties are discussed, in particular for the manufacture of stable contacts.
微系统技术允许在一个产品中集成多个功能。不断小型化的趋势和相应的集成密度的增加是对使用中的材料的进一步挑战,特别是在高温下。对于高温应用,使用宽带隙半导体,如金刚石。讨论了几种材料的相关性能,特别是稳定触点的制造。
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引用次数: 0
Advances in InGaN technology for light-emitting diodes and semiconductor lasers 用于发光二极管和半导体激光器的InGaN技术进展
S. Rudaz, R. Fletcher
The past ten years have seen a virtual revolution for the optoelectronics industry dealing with LEDs. With the development of new III-V materials, such as AlGaAs, AlInGaP, and InGaN, and epitaxial structures capable of very efficient visible light generation, a vast new field of applications for LEDs has opened. The most recent development has been the introduction of bright blue and green LEDs based on InGaN. This now makes coverage of the entire color spectrum possible, from red to violet at brightness and efficiency levels exceeding conventional filament light sources. Full-color large screen video displays with excellent color rendition and brightness and even white light LEDs are being produced. Semiconductor lasers have also benefitted from progress with InGaN technology, and have been demonstrated with emission wavelengths around 400 nm. The primary importance of these devices is in the area of CD data storage, where the short wavelength increases storage density by approximately a factor of four over current systems using a red AlInGaP or infrared AlGaAs laser. Despite these advances, we have barely begun to see the possibilities for LEDs. Continuing improvements in materials and device efficiency and light extraction techniques are set to raise performance limits by at least a factor of two for InGaN and AlInGaP devices over the next few years. This presentation focuses on the advances that have been achieved with InGaN materials technology and the types of devices that have been created. Current applications and possible future use for high performance blue LEDs and lasers are also discussed.
在过去的十年里,光电子工业在处理led方面发生了一场实质上的革命。随着新型III-V材料的发展,如AlGaAs, AlInGaP和InGaN,以及能够非常高效地产生可见光的外延结构,为led开辟了广阔的新应用领域。最近的发展是基于InGaN的明亮蓝色和绿色led的引入。这使得覆盖整个光谱成为可能,从红色到紫色的亮度和效率水平超过传统的灯丝光源。具有出色的色彩再现性和亮度的全彩大屏幕视频显示器,甚至白光led正在生产。半导体激光器也受益于InGaN技术的进步,并且已经证明其发射波长约为400nm。这些器件的主要重要性在于CD数据存储领域,其中短波长的存储密度比使用红色AlInGaP或红外AlGaAs激光器的电流系统增加了大约四倍。尽管取得了这些进步,我们才刚刚开始看到led的可能性。材料和器件效率以及光提取技术的持续改进将在未来几年内将InGaN和AlInGaP器件的性能限制提高至少两倍。本演讲重点介绍了InGaN材料技术取得的进步以及已经创建的设备类型。高性能蓝光led和激光器的当前应用和可能的未来用途也进行了讨论。
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引用次数: 0
Advances in electronic packaging technologies to temperatures as high as 500/spl deg/C 电子封装技术进步到温度高达500/spl℃
R. Grzybowski
Advances in SOI IC technology and development of wide band gap semiconductors such as SiC are enabling practical deployment of high temperature electronics. While ICs are key to the realization of complete high temperature electronic systems, passive components, including resistors, capacitors, magnetics and crystals, are also required. Electronic components from all of these categories exist to varying degrees for temperatures up to 500/spl deg/C. However, one of the greatest hindrances to making individual components more reliable is their packaging. Similarly, one of the greatest hindrances to integrating individual components together into a system is the understanding of harsh environment packaging techniques and materials selection. This paper addresses electronics packaging for harsh environment applications for a variety of packaging levels. We begin by looking at common failure mechanisms associated with packaging microcircuits at the IC die level as well as packaging means for individual passive components. With these failure mechanisms identified, we consider alternate materials selections and fabrication approaches that permit electronic systems to be packaged for much higher temperature operating environments than are generally possible with traditional methods. We also examine packaging options at the PWB level, including high temperature substrate materials, interconnect metallization, solders and braze materials.
SOI集成电路技术的进步和宽带隙半导体(如SiC)的发展使高温电子器件的实际部署成为可能。虽然集成电路是实现完整的高温电子系统的关键,但也需要无源元件,包括电阻,电容器,磁性和晶体。所有这些类别的电子元件存在不同程度的温度高达500/spl度/C。然而,使单个组件更可靠的最大障碍之一是它们的封装。同样,将单个组件集成到一个系统中的最大障碍之一是对恶劣环境包装技术和材料选择的理解。本文讨论了电子封装在恶劣环境下的应用,适用于各种包装水平。我们首先看看与IC芯片级封装微电路相关的常见故障机制,以及单个无源元件的封装方法。随着这些失效机制的确定,我们考虑替代材料的选择和制造方法,使电子系统能够在比传统方法更高的温度操作环境中进行封装。我们还研究了PWB级别的封装选项,包括高温衬底材料,互连金属化,焊料和钎焊材料。
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引用次数: 18
Recent advances in GaAs devices for use at high temperatures 高温用砷化镓器件的最新进展
J. Wurfl
A review of technologies for GaAs high temperature electronic devices and integrated circuits is presented. Starting with the high temperature related material properties of GaAs and related heterostructures, key issues for GaAs-based high temperature devices are identified and state of the art solutions are discussed. This includes, for example, high temperature stable metallizations, technologies for substrate leakage reduction and other topics. Based on these results, the most important transistor technologies for high temperature applications (MESFETs, HFETs, HEMTs, JFETs and HBTs) are introduced and compared. The paper closes with a short review of analogue and microwave integrated circuits operating at high temperatures.
综述了砷化镓高温电子器件和集成电路的研究进展。从GaAs的高温相关材料特性和相关异质结构开始,确定了GaAs基高温器件的关键问题,并讨论了最新的解决方案。这包括,例如,高温稳定金属化,衬底泄漏减少技术和其他主题。基于这些结果,介绍并比较了用于高温应用的最重要的晶体管技术(mesfet、hfet、hemt、jfet和hbt)。本文最后简要回顾了在高温下工作的模拟和微波集成电路。
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引用次数: 8
High-temperature amorphous-like semiconductors 高温非晶状半导体
O. A. Golikova, M. Kazanin
The experimental results of a study of high-temperature boron-rich semiconductors, such as /spl alpha/- and /spl beta/-AlB/sub 12/, MgAlB/sub 14/, and REB/sub 66/ (where RE are rare earths, e.g. Gd), are reviewed. They were shown to represent a novel class of unique solids, combining physico-chemical properties of refractory crystals with electrical, optical and thermal properties typical for amorphous semiconductors due to specific features of their lattice. These semiconductors are believed to be promising for high-temperature device applications.
综述了高温富硼半导体的实验结果,如/spl α /-和/spl β /- alb /sub 12/、MgAlB/sub 14/和REB/sub 66/(其中RE为稀土,如Gd)。他们被证明是一种新型的独特固体,结合了难熔晶体的物理化学性质和非晶半导体的电学、光学和热学性质,这是由于他们的晶格的特定特征。这些半导体被认为有希望用于高温器件应用。
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引用次数: 0
High temperature stable metallization schemes for SiC-technology operating in air 空气中sic工艺的高温稳定金属化方案
K. Gottfried, J. Kříž, J. Leibelt, C. Kaufmann, T. Gessner
Complete metallization schemes for SiC based high temperature applications were investigated with regard to their physical and chemical stability, and their electrical behaviour under the influence of a high temperature air ambient. Two metal silicides, MoSi/sub 2/ and WSi/sub 2/, were used as contacts to the 6H-SiC substrate. MoSi/sub 2/ and WSi/sub 2/ show ohmic behaviour after thermal contact formation. The specific contact resistances obtained are in the range from 10/sup -4/ to 10/sup -5/ /spl Omega/ cm/sup 2/. To keep the system design simple for these investigations, both silicides were used for on-chip interconnects. The connection to the next wiring level was realized by an 3 /spl mu/m Al cover layer and Al thick wire bonding. All systems show electrically stable behaviour during thermal storage at 400/spl deg/C for more than 1000 hours. No intermixing or degradation within the systems was found by Auger electron spectroscopy depth profile analysis and electrical measurements.
研究了SiC基高温应用的完整金属化方案在高温空气环境下的物理和化学稳定性以及电学行为。采用MoSi/sub 2/和WSi/sub 2/两种金属硅化物作为6H-SiC衬底的触点。MoSi/sub 2/和WSi/sub 2/在热接触形成后表现出欧姆行为。所获得的具体接触电阻范围为10/sup -4/至10/sup -5/ spl ω / cm/sup 2/。为了使这些研究的系统设计简单,这两种硅化物都用于片上互连。通过3 /spl μ m的铝覆盖层和铝粗线键合实现与下一接线层的连接。在400/spl度/C的温度下,所有系统都表现出超过1000小时的电稳定行为。通过俄歇电子能谱深度剖面分析和电气测量,未发现体系内的混合或降解。
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引用次数: 5
High temperature performance of LDMOSFETs used in RFIC applications 用于RFIC应用的ldmosfet的高温性能
P. Perugupalli, M. Trivedi, K. Shenai, S. K. Leong
This paper presents the high temperature behaviour of RF LDMOSFETs used in wireless applications. Self heating is an important issue in RF power transistors. Self heating could cause thermal runaway in the device if the package has not been optimally designed to dissipate the heat generated in the device. Temperature rise due to self heating is of greater concern in SOI devices because of the presence of the buried oxide layer which has lesser thermal conductivity than bulk Si. In this work, 2D finite element electrothermal simulators were used to investigate the extent of self heating. Thermal models were solved in the MIXEDMODE circuit/device simulator with the package parasitics included, to study the temperature rise in the device due to self heating.
本文介绍了用于无线应用的射频ldmosfet的高温特性。自加热是射频功率晶体管中的一个重要问题。如果封装没有经过优化设计以散热器件中产生的热量,则自加热可能导致器件中的热失控。在SOI器件中,由于埋藏的氧化层的存在,由于自加热引起的温升比体硅的导热性更小,因此引起了更大的关注。在这项工作中,使用二维有限元电热模拟器来研究自加热的程度。在包含封装寄生的MIXEDMODE电路/器件模拟器中求解热模型,研究器件自加热引起的温升。
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引用次数: 3
Reliability concerns in high temperature electronic systems 高温电子系统的可靠性问题
P. Mccluskey, R.R. Grybowski, L. Condra, D. Das, J. Fink, J. Jordan, T. Torri
Small signal commercial electronics have traditionally been designed to operate at temperatures below 125/spl deg/C. This has become a severe constraint in the development of next generation smart power electronic systems, such as remote actuators, point-of-use power supplies, and distributed high power control systems. These systems dissipate considerable heat and can operate in environments where the local ambient temperatures reach 200/spl deg/C. The ability to operate these systems without the need for active cooling is seen as a critical technology for the 21st century. The issues involved in designing silicon-based electronic systems for use at temperatures as high as 200/spl deg/C are presented in this work. The critical limiting components and packaging materials have been identified through design analyses conducted on commercially available aeronautic and automotive control modules. It is found that most standard components and packaging elements can be used up to 200/spl deg/C. However, capacitors, wire bonds, eutectic tin-lead solder joints, and FR-4 boards seriously degrade at temperatures around 200/spl deg/C. For these elements, alternative choices are recommended.
传统上,小信号商业电子产品被设计在低于125/spl度/C的温度下工作。这已经成为下一代智能电力电子系统(如远程执行器、使用点电源和分布式高功率控制系统)发展的严重制约因素。这些系统散发相当大的热量,可以在当地环境温度达到200/spl℃的环境中运行。在不需要主动冷却的情况下运行这些系统的能力被视为21世纪的关键技术。在设计温度高达200/spl度/C使用的硅基电子系统所涉及的问题在这项工作中提出。通过对商用航空和汽车控制模块的设计分析,确定了关键的限制部件和包装材料。研究发现,大多数标准元件和封装元件可使用高达200/spl度/C。然而,电容器、线键、共晶锡铅焊点和FR-4板在200/spl℃左右的温度下会严重退化。对于这些元素,建议使用其他选择。
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引用次数: 13
期刊
1998 High-Temperature Electronic Materials, Devices and Sensors Conference (Cat. No.98EX132)
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