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2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)最新文献

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Physics-Informed Graph Neural Network for Circuit Compact Model Development 用于电路紧凑模型开发的物理知情图神经网络
Pub Date : 2020-09-23 DOI: 10.23919/SISPAD49475.2020.9241634
Xujiao Gao, Andy Huang, Nathaniel Trask, Shahed Reza
We present a Physics-Informed Graph Neural Network (pigNN) methodology for rapid and automated compact model development. It brings together the inherent strengths of data-driven machine learning, high-fidelity physics in TCAD simulations, and knowledge contained in existing compact models. In this work, we focus on developing a neural network (NN) based compact model for a non-ideal PN diode that represents one nonlinear edge in a pigNN graph. This model accurately captures the smooth transition between the exponential and quasi-linear response regions. By learning voltage dependent non-ideality factor using NN and employing an inverse response function in the NN loss function, the model also accurately captures the voltage dependent recombination effect. This NN compact model serves as basis model for a PN diode that can be a single device or represent an isolated diode in a complex device determined by topological data analysis (TDA) methods. The pigNN methodology is also applicable to derive reduced order models in other engineering areas.
我们提出了一种物理信息图神经网络(pigNN)方法,用于快速和自动化的紧凑模型开发。它汇集了数据驱动机器学习的固有优势、TCAD仿真中的高保真物理以及现有紧凑模型中包含的知识。在这项工作中,我们专注于为非理想PN二极管开发一个基于神经网络(NN)的紧凑模型,该模型表示pigNN图中的一个非线性边。该模型准确地捕捉了指数和准线性响应区之间的平滑过渡。通过神经网络学习电压相关的非理想因子,并在神经网络损失函数中加入逆响应函数,该模型还能准确捕捉电压相关的复合效应。该神经网络紧凑模型可作为PN二极管的基础模型,PN二极管可以是单个器件,也可以表示由拓扑数据分析(TDA)方法确定的复杂器件中的隔离二极管。pigNN方法也适用于其他工程领域的降阶模型的推导。
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引用次数: 10
MOS-like approach for compact modeling of High-Electron-Mobility Transistor 高电子迁移率晶体管紧凑建模的类mos方法
Pub Date : 2020-09-23 DOI: 10.23919/SISPAD49475.2020.9241679
A. Vaysset, S. Martinie, F. Triozon, O. Rozeau, M. Jaud, R. Escoffier, T. Poiroux
High-Electron-Mobility Transistor (HEMT) with Al- GaN/GaN gate stack is a promising candidate for high-speed and high-power applications. Recent HEMT compact modeling works have proposed threshold-based [1] and surface-potential-based models [2]. In the latter approach, inversion charge is calculated from the quantum expression of a 2-dimensional electron gas (2DEG). Here, we investigate the possibility to model HEMTs with a MOSFET-like approach whereby quantum confinement is included as an effective bandgap widening in the surface potential equation. We evidence that such a MOSFET-like approach leads to a more accurate description over the whole polarization range, especially in the moderate inversion regime. This analytical model is validated by Poisson-Schrödinger numerical simulations. Furthermore, to address a specific feature of HEMT devices, a field plate model is also presented.
具有Al- GaN/GaN栅极堆栈的高电子迁移率晶体管(HEMT)是高速和高功率应用的有前途的候选者。最近的HEMT紧凑建模工作提出了基于阈值的[1]和基于表面电位的模型[2]。在后一种方法中,从二维电子气体(2DEG)的量子表达式计算反转电荷。在这里,我们研究了用类似mosfet的方法来模拟hemt的可能性,在这种方法中,量子约束作为有效的带隙加宽包含在表面势方程中。我们证明了这种类似mosfet的方法可以在整个极化范围内更准确地描述,特别是在中等反转区域。通过Poisson-Schrödinger数值模拟验证了该分析模型的正确性。此外,为了解决HEMT器件的具体特点,还提出了场极板模型。
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引用次数: 0
A Study of Wiggling AA modeling and Its Impact on the Device Performance in Advanced DRAM 高级DRAM中摆动AA建模及其对器件性能影响的研究
Pub Date : 2020-09-23 DOI: 10.23919/SISPAD49475.2020.9241640
Qingpeng Wang, Yu De Chen, Jacky Huang, Ervin Joseph
In this paper, a wiggling active area (fin) in an advanced 1x DRAM process was analyzed and modeled using the pattern-dependent etch simulation capabilities of the SEMulator3D® semiconductor modeling software. Nonuniformity in sidewall passivation caused by hard mask pattern density loading was identified as the root cause of the wiggling profile. The calibrated model mimicked these phenomena, giving nearly the same output AA shape as the real fabrication process. The wiggling profile’s impact on device performance was assessed using the built-in drift-diffusion solver of SEMulator3D. Our analysis confirmed that the wiggling profile, induced by micro-loading during a pattern-dependent etch, has a large impact on overall electrical performance in the device. This was especially apparent with the off-state leakage, primarily due to a worse drain-induced barrier lowering effect in a fatter fin.
本文利用SEMulator3D®半导体建模软件的模式相关蚀刻仿真功能,对先进的1x DRAM工艺中的摆动有源区域(fin)进行了分析和建模。确定了硬掩模密度载荷引起的侧壁钝化不均匀性是产生摆动轮廓的根本原因。校准后的模型模拟了这些现象,输出的AA形状与实际制造过程几乎相同。利用SEMulator3D内置的漂移-扩散求解器评估摆动轮廓对器件性能的影响。我们的分析证实,在模式依赖蚀刻过程中,由微加载引起的摆动轮廓对器件的整体电气性能有很大的影响。这在非状态泄漏中尤为明显,这主要是由于在较厚的鳍中,排水诱导的屏障降低效果较差。
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引用次数: 0
Molecular Dynamics Modeling of the Radial Heat Transfer from Silicon Nanowires 硅纳米线径向传热的分子动力学模拟
Pub Date : 2020-09-23 DOI: 10.23919/SISPAD49475.2020.9241646
I. Bejenari, A. Burenkov, P. Pichler, I. Deretzis, A. La Magna
Thermal transport in radial direction in Si nanowires embedded into amorphous silicon dioxide has been studied using nonequilibrium molecular dynamics simulations. For comparison, we also considered the axial heat transfer. For Si nanowires with a radius of 2.6 nm, both radial and axial thermal conductivities were found to be about independent of the SiO2 thickness ranging from 1 nm to 3 nm. The radial thermal conductivity of the Si core and of the covering SiO2 material are similar and nearly equal to 1 $Wcdot K^{-1}cdot m^{-1}$. Thermal resistances for the heat transfer from uniformly heated nanowires in radial direction are by a factor of 3 to 4 lower than those for the heat transfer in axial direction.
利用非平衡态分子动力学模拟研究了嵌入非晶二氧化硅的硅纳米线径向热输运。为了比较,我们还考虑了轴向传热。对于半径为2.6 nm的Si纳米线,径向导热系数和轴向导热系数与SiO2厚度(1 ~ 3 nm)无关。硅芯的径向导热系数与覆盖SiO2材料的径向导热系数相似,几乎等于1 $Wcdot K^{-1}cdot m^{-1}$。均匀加热的纳米线径向传热的热阻比轴向传热的热阻低3 ~ 4倍。
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引用次数: 2
A First-principles Study on the Strain-induced Localized Electronic Properties of Dumbbell-shape Graphene Nanoribbon for Highly Sensitive Strain Sensors 高灵敏度应变传感器用哑铃形石墨烯纳米带应变诱导局域电子特性的第一性原理研究
Pub Date : 2020-09-23 DOI: 10.23919/SISPAD49475.2020.9241686
Qinqiang Zhang, Ken Suzuki, H. Miura
The electronic properties of graphene nanoribbons (GNRs) have a function of the ribbon width. It can vary from metallic-like ones to semiconductive-like ones when the width of single GNR is changed. Therefore, the novel structure of GNRs called dumbbell-shape GNR (DS-GNR) was proposed to achieve the development of highly sensitive, reliable, and deformable strain sensors. The DS-GNR consists of one long narrow GNR coalesced by two wide segments of GNRs at its both ends. The wide segments of the original DSGNR possess the metallic-like electronic properties and the narrow segment of the original DS-GNR has the semiconductive-like electronic properties. In this study, the strain-induced change of the electronic band structure of DSGNR was analyzed by using the first-principles calculations. The range of the applied uniaxial tensile strain on DS-GNR was from 0% to 10%. When the length of the narrow segment of DSGNR is longer than 4.3 nm, the effective bandgap located in the narrow segment changes obviously with the change of applied strain. The result indicates that the piezoresistive effect appears in the narrow segment of DS-GNR, and thus high strain sensitivity of its resistivity can be applied to strain sensors.
石墨烯纳米带的电子性能与纳米带宽度成函数关系。当单个GNR的宽度改变时,它可以从金属状到半导体状变化。为此,提出了一种新型的GNR结构——哑铃形GNR (DS-GNR),以实现高灵敏度、高可靠性、高变形应变传感器的研制。DS-GNR由一个长而窄的GNR组成,在其两端由两个宽的GNR段合并。原DSGNR的宽段具有类似金属的电子性质,窄段具有类似半导体的电子性质。本研究采用第一性原理计算分析了DSGNR电子能带结构的应变变化。施加在DS-GNR上的单轴拉伸应变范围为0% ~ 10%。当DSGNR窄段长度大于4.3 nm时,窄段内的有效带隙随外加应变的变化变化明显。结果表明,压阻效应出现在DS-GNR的窄段,其电阻率具有较高的应变灵敏度,可应用于应变传感器。
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引用次数: 0
Efficient partitioning of surface Green’s function: toward ab initio contact resistance study. 表面格林函数的有效划分:从头开始接触阻力研究。
Pub Date : 2020-09-23 DOI: 10.23919/SISPAD49475.2020.9241649
G. Gandus, Youseung Lee, D. Passerone, M. Luisier
In this work, we propose an efficient computational scheme for first-principle quantum transport simulations to evaluate the open-boundary conditions. Its partitioning differentiates from conventional methods in that the contact self-energy matrices are constructed on smaller building blocks, principal layers (PL), while conventionally it was restricted to have the same lateral dimensions of the adjoining atoms in a channel region. Here, we obtain the properties of bulk electrodes through non-equilibrium Green’s function (NEGF) approach with significant improvements in the computational efficiency without sacrificing the accuracy of results. To exemplify the merits of the proposed method we investigate the carrier density dependency of contact resistances in silicon nanowire devices connected to bulk metallic contacts.
在这项工作中,我们提出了一种有效的第一原理量子输运模拟计算方案来评估开放边界条件。它的划分与传统方法的不同之处在于,接触自能矩阵是在较小的构建块,主层(PL)上构建的,而传统上,它被限制在通道区域中相邻原子的横向尺寸相同。在此,我们通过非平衡格林函数(NEGF)方法获得体电极的性质,在不牺牲结果准确性的情况下显著提高了计算效率。为了举例说明所提出方法的优点,我们研究了与大块金属触点连接的硅纳米线器件中接触电阻的载流子密度依赖性。
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引用次数: 4
Coupling the Multi Phase-Field Method with an Electro-Thermal Solver to Simulate Phase Change Mechanisms in Ge-rich GST based PCM 耦合多相场法与电热求解器模拟富锗GST基PCM相变机制
Pub Date : 2020-09-23 DOI: 10.23919/SISPAD49475.2020.9241619
R. Bayle, O. Cueto, S. Blonkowski, T. Philippe, H. Henry, M. Plapp
The ternary alloy GeSbTe is widely used as material for phase-change memories. Thanks to an optimized Ge-rich GeSbTe alloy, the crystallizion temperature of the alloy is increased and the stability requirements of high working temperature required for automotive applications are fullfilled, but the crystallization of the Ge-rich alloy proceeds with a composition change and a phase separation. We have developed a multi-phase-field model for the crystallization of the Ge-rich GeSbTe alloy and we have coupled it to an electro-thermal solver. This model is able to capture both the emergence of a two-phase polycristalline structure starting from an initially amorphous material, and the melting and recrystallization during the device operations.
三元合金GeSbTe是一种广泛应用于相变存储器的材料。通过优化后的富ge GeSbTe合金,提高了合金的结晶温度,满足了汽车应用所需的高温稳定性要求,但富ge合金的结晶过程中发生了成分变化和相分离。我们开发了富锗GeSbTe合金结晶的多相场模型,并将其与电热解算器耦合。该模型能够捕捉两相多晶结构的出现,从最初的非晶材料开始,以及设备操作期间的熔化和再结晶。
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引用次数: 0
A Modeling Study on Performance of a CNOT Gate Devices based on Electrode-driven Si DQD Structures 基于电极驱动Si DQD结构的CNOT栅极器件性能建模研究
Pub Date : 2020-09-23 DOI: 10.23919/SISPAD49475.2020.9241633
H. Ryu, J. Kang
Behaviors of quantum bits (qubits) encoded to electron spins in silicon double quantum dot (Si DQD) systems are examined with a multi-scale modeling approach that combines electronic structure simulations and Thoas-Fermi calculations. Covering the full-stack functionality of Si DQD devices from electrode-driven charge controls to logic operations, we investigate the sensitivity of exchange interaction between two initialized qubits and its effect on the fidelity of controlled-NOT gate operations to understand the experimental reported feature. This preliminary work not only presents a theoretical clue for understanding the major control factors for the gate fidelity, but opens the possibility for further exploration of the engineering details of qubit logic gate devices that is hard to be uncovered with experiments due to the time and the expense.
采用结合电子结构模拟和托马斯-费米计算的多尺度建模方法,研究了硅双量子点(Si DQD)系统中编码为电子自旋的量子比特(量子位)的行为。涵盖硅DQD器件从电极驱动电荷控制到逻辑运算的全栈功能,我们研究了两个初始化量子位之间交换相互作用的敏感性及其对控制非门运算保真度的影响,以了解实验报告的特征。这项初步工作不仅为理解门保真度的主要控制因素提供了理论线索,而且为进一步探索由于时间和费用而难以通过实验揭示的量子比特逻辑门器件的工程细节开辟了可能性。
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引用次数: 0
Effect of Shape Deformation by Edge Roughness in Spin-Orbit Torque Magnetoresistive Random-Access Memory 边缘粗糙度对自旋轨道转矩磁阻随机存取存储器形状变形的影响
Pub Date : 2020-09-23 DOI: 10.23919/SISPAD49475.2020.9241675
J. Byun, D. Kang, M. Shin
We present a micromagnetic simulation study of shape deformation and edge roughness effect in the spin orbit torque-magnetic random access memory (SOT-MRAM). The two different write schemes, magnetic field induced SOT write scheme and SOT-spin transfer torque (STT) hybrid write scheme, were studied in the presence of the stray field from the reference layer. We found that for conventional magnetic field induced SOT, shape deformation can cause non-deterministic switching even at a relatively high gilbert damping constant of 0.08. Higher Gilbert damping constant (a) of 0.09 is needed to ensure deterministic switching under the shape deformation effect. The SOT-STT hybrid write scheme showed deterministic switching even at lower damping constant with relatively low device variations due to the constant -z directed torque of the STT. However, with higher damping constant of a 0.1, device variation with the SOT-STT hybrid write scheme increases while the SOT-magnetic field write scheme successfully compensates the most of the variation caused by the edge deformation.
本文对自旋轨道转矩-磁随机存取存储器(SOT-MRAM)的形状变形和边缘粗糙度效应进行了微磁仿真研究。在参考层杂散场存在的情况下,研究了两种不同的写入方案,即磁场诱导的SOT写入方案和SOT-自旋传递扭矩(STT)混合写入方案。我们发现,对于传统的磁场感应SOT,即使在相对较高的吉尔伯特阻尼常数为0.08时,形状变形也会导致不确定性开关。为保证形状变形效应下的确定性切换,需要较高的吉尔伯特阻尼常数(a)为0.09。由于STT的-z定向转矩恒定,即使在较低的阻尼常数和相对较低的器件变化下,SOT-STT混合写入方案也显示出确定性开关。然而,当阻尼常数为0.1时,SOT-STT混合写入方案的器件变化增加,而sot -磁场写入方案成功地补偿了边缘变形引起的大部分变化。
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引用次数: 0
6-3 Benchmarking Charge Trapping Models with NBTI, TDDS and RTN Experiments 6-3基于NBTI、TDDS和RTN实验的基准电荷捕获模型
Pub Date : 2020-09-23 DOI: 10.23919/SISPAD49475.2020.9241593
S. Bhagdikar, S. Mahapatra
A systematic review and comparison of existing charge trapping models in literature is performed. A framework for simulating hole trapping/de-trapping kinetics is established to compute resultant threshold voltage degradation ($Delta mathrm{V}_{mathrm{HT}})$ and capture-emission time constants ($tau_{C}-tau_{E}$). The models are analyzed by using data from Negative Bias Temperature Instability (NBTI), Random Telegraph Noise (RTN) and Time Dependent Defect Spectroscopy (TDDS) experiments.
对文献中已有的电荷捕获模型进行了系统的回顾和比较。建立了一个模拟空穴捕获/去捕获动力学的框架,以计算产生的阈值电压退化($Delta mathrm{V}_{mathrm{HT}})$)和捕获-发射时间常数($tau_{C}-tau_{E}$)。利用负偏置温度不稳定性(NBTI)、随机电报噪声(RTN)和时间相关缺陷谱(TDDS)实验数据对模型进行了分析。
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引用次数: 0
期刊
2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
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