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Twenty First IEEE/CPMT International Electronics Manufacturing Technology Symposium Proceedings 1997 IEMT Symposium最新文献

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The impact of tool delivery times on the optimal capacity and value of semiconductor wafer fabs 工具交付时间对半导体晶圆厂最佳产能和价值的影响
S. Wood
The objective of this work is to provide insight into the sources and magnitude of the costs that result from lost market responsiveness due to long capacity lead times. A model has been developed to determine the impact of tool lead times on the expected present value of monolithic fabs and modular a fab over the fab lifetime. The model makes the following assumptions and approximations: Demand follows a random walk characterized by a known drift rate and volatility; Capacity lead times are known in advance longer capacity lead times result in tools being ordered earlier than tools with late lead times; Management has the option of sparsely populating a fab initially and then adding additional tools as needed. This is referred to as a modular fab. Cost parameters representing modern 200 mm wafer fabs are used. Based on the above assumptions optimal capacity expansion schedules are numerically generated. Initial results show that as capacity lead times get shorter, initial fab size is likely to be smaller and future capacity additions are likely to become more frequent. If capacity lead times are short, fab capacities can be more accurately matched to demand, achieving higher expected revenues. The increase in revenues can be used to evaluate the financial value of shorter capacity lead times.
这项工作的目的是深入了解由于产能交付周期长而导致的市场响应能力丧失所导致的成本来源和规模。已经开发了一个模型来确定工具交付时间对单片晶圆厂和模块化晶圆厂在晶圆厂生命周期内预期现值的影响。该模型做了以下假设和近似:需求遵循随机游走,其特征是已知的漂移率和波动率;产能提前期是已知的,较长的产能提前期会导致工具比延迟的工具更早被订购;管理层可以选择最初少量填充晶圆厂,然后根据需要添加其他工具。这被称为模块化晶圆厂。使用代表现代200mm晶圆厂的成本参数。基于上述假设,数值生成了最优扩容计划。初步结果显示,随着产能交付时间的缩短,初始晶圆厂规模可能会变小,未来产能的增加可能会变得更加频繁。如果产能交付时间短,晶圆厂产能可以更准确地匹配需求,实现更高的预期收入。收入的增加可以用来评估缩短产能交货时间的财务价值。
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引用次数: 10
Eutectic solder bump process for ULSI flip chip technology 用于ULSI倒装芯片技术的共晶凸点焊工艺
H. Ezawa, M. Miyata, H. Inoue
A novel eutectic solder bump process, which allows ULSI chips area array pad layout, has been developed. Straight side wall bumps as plated using a new negative-type photoresist and eutectic solder electroplating provide several advantages over conventional mushroom bumps. The novel developed process gives the bump height uniformity as reflowed of less than 10% within the wafer. Composition measurements using ICP spectrometry have been performed to investigate the bump height dependence on solder compositions and the metal content dependence of a plating solution on the solder composition uniformity within the wafer. Experimental results show that the plating solution with the total metal concentration of more than 60 g/l gives a uniformity at eutectic point of less than 3% within wafer. In addition, we have confirmed that the use of a eutectic solder disk anode keeps the composition of a plating solution constant for a long term product run.
提出了一种新的共晶凸焊工艺,可实现ULSI芯片的区域阵列焊盘布局。采用新型负极型光刻胶和共晶焊料电镀的直侧壁凸点与传统的蘑菇凸点相比具有许多优点。该工艺可使圆片内回流时凸点高度均匀性小于10%。利用ICP光谱法进行成分测量,以研究凸起高度对焊料成分的依赖性,以及电镀溶液中金属含量对晶圆片内焊料成分均匀性的依赖性。实验结果表明,总金属浓度大于60 g/l的镀液在晶圆内共晶点均匀度小于3%。此外,我们已经证实,使用共晶焊盘阳极可以使电镀溶液的成分在长期产品运行中保持不变。
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引用次数: 5
Cost issues for chip scale packaging 芯片级封装的成本问题
A. Singer, J.F. Wzorek
The IC industry amounted to $140 billion worldwide in 1996. As the consumer and portable electronics portion of this market grows, so will. The demand for component packaging that meets higher density requirements. Chip scale packaging (CSP) addresses this need, but many technology variations exist, creating confusion among potential users about which technology may suit their application. Comparing alternative packaging technologies is a complex task, involving a prioritization of cost, performance, and business strategy issues. This paper focuses only one portion of the decision-making equation: cost. Using a tool for assessing the manufacturing cost of electronic packaging, IBIS has analyzed the cost outlook for several chip scale packaging technologies, including wafer-scale processing as well as individual component packaging. This paper examines the costs for both implementations, analyzing their cost sensitivity to product design variables (i.e., # of I/Os per IC and lead pitch) and manufacturing conditions (i.e., annual production volume and yield).
1996年,全球集成电路产业规模达1400亿美元。随着消费电子产品和便携式电子产品市场的增长,这一市场也将增长。满足更高密度要求的组件封装需求。芯片级封装(CSP)解决了这一需求,但存在许多技术变体,使潜在用户对哪种技术适合其应用产生困惑。比较不同的包装技术是一项复杂的任务,涉及成本、性能和业务战略问题的优先级。本文只关注决策方程的一部分:成本。利用评估电子封装制造成本的工具,IBIS分析了几种芯片级封装技术的成本前景,包括晶圆级加工以及单个组件封装。本文考察了两种实现的成本,分析了它们对产品设计变量(即每个IC的I/ o数量和导通间距)和制造条件(即年产量和良率)的成本敏感性。
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引用次数: 5
A realtime process control system for solder paste stencil printing 锡膏模板印刷实时过程控制系统
S. Venkateswaran, K. Srihari, J. Adriance, G. Westby
The goal of stencil printing solder paste in surface mount printed circuit board (PCB) assembly is to apply an accurate and repeatable volume of solder paste at precise locations. The causes for a substantial proportion of the problems associated with PCB assembly can be traced back to the solder paste printing process. Control of the stencil printing process has become significantly more important over the years due to the introduction of ultra fine pitch technologies. Three important issues have to be considered in the stencil printing process to obtain a good yield. They are: (i) setting up the process in an efficient way, (ii) monitoring and controlling the process when necessary and (iii) troubleshooting the process when a defect occurs. This research focused on the design and development of software systems that could perform the above-mentioned functions. Three systems were developed in the research discussed in this paper. They are the process advisor, the intelligent control system (or the ICS) and the diagnosis system. The process advisor (the first system) provides for the setup of the stencil printing process. It helps the user to set up a new as well as an existing application. The process advisor also helps the user in estimating the volume of solder paste that would be deposited for a given stencil thickness and aperture dimensions. The ICS (the second system) was developed to control the stencil printing process in real-time. The diagnosis system (the third system) is used to troubleshoot the process, if needed.
在表面贴装印刷电路板(PCB)组装中,模板印刷锡膏的目标是在精确的位置上应用精确和可重复的锡膏体积。与PCB组装相关的大部分问题的原因可以追溯到锡膏印刷过程。多年来,由于超细间距技术的引入,网版印刷过程的控制变得更加重要。在模板印刷过程中,要获得良好的良率,必须考虑三个重要问题。它们是:(i)以有效的方式建立过程,(ii)在必要时监视和控制过程,(iii)在出现缺陷时对过程进行故障排除。本研究的重点是设计和开发能够实现上述功能的软件系统。在本文的研究中开发了三个系统。它们是过程顾问、智能控制系统(或ICS)和诊断系统。过程顾问(第一个系统)提供了模板打印过程的设置。它帮助用户设置新的和现有的应用程序。工艺顾问还可以帮助用户估计在给定的模板厚度和孔径尺寸下沉积的锡膏体积。ICS(第二个系统)是为了实时控制模板印刷过程而开发的。诊断系统(第三个系统)用于在需要时对过程进行故障排除。
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引用次数: 10
Cost considerations for integrating flip chip and chip on board technologies into high volume manufacturing areas 将倒装芯片和板上芯片技术集成到大批量制造领域的成本考虑
R. Roney
As die mount assembly begins to enter the high volume surface mount assembly mainstream and electronics designers and engineers begin serious discussions about converting surface mount designs to die mount assembly designs for the purposes of miniaturization or improved electrical performance, it is desirable to have a cost model which can be used to understand the cost implications. The cost for die mount assembly is impacted in three major categories: materials, assembly, and repair. In this paper, a cost model, addressing the assembly portion of the cost, is developed and partially verified. The cost model is based on a current surface mount assembly cost model and is intended to be used as a guideline for comparing the assembly cost of surface mount assemblies to the assembly cost for die mount assemblies.
随着模具安装组装开始进入高容量表面安装组装主流,电子设计师和工程师开始认真讨论将表面安装设计转换为模具安装组装设计,以实现小型化或提高电气性能,希望有一个成本模型可以用来理解成本影响。模具安装的成本主要受三个方面的影响:材料、装配和维修。本文建立了一个考虑装配部分成本的成本模型,并进行了部分验证。成本模型是基于当前的表面安装装配成本模型,旨在作为比较表面安装装配成本和模具安装装配成本的指导方针。
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引用次数: 0
Moisture absorption and autoclave performance optimization of glob top ball grid array 球顶球栅阵列的吸湿性能及高压灭菌性能优化
T. Thompson
The glob top BGA has been pursued by multiple companies to reduce package cost and cycle time. This report discusses material and process improvements that can be made to enhance the packages' performance to a JEDEC Level 3. The material evaluations included in this report tested different liquid encapsulants, die attach epoxies and solder resist materials. Process improvements targeted using different cure profiles for the encapsulants, cleaning processes and location of special cleaning in the assembly process. Flag designs that reduce Cu surface area on the substrate for possible better die attach adhesion are also discussed. These results are benchmarked with the overmolded plastic ball grid area (PBGA) performance which is a JEDEC Level 5. The reliability test response was C-SAM to inspect for delamination at various package interfaces and weight gain to determine package moisture absorption and deabsorption rates.
全球顶尖的BGA已被多家公司所追求,以减少包装成本和周期时间。本报告讨论了材料和工艺的改进,可以将封装的性能提高到JEDEC 3级。本报告中包含的材料评估测试了不同的液体密封剂,模贴环氧树脂和抗焊料材料。在装配过程中,针对不同的封装剂、清洗工艺和特殊清洗位置进行工艺改进。还讨论了减少基板上Cu表面积的标志设计,以获得更好的模具附着力。这些结果与覆盖塑料球网格面积(PBGA)性能的基准测试是JEDEC 5级。可靠性测试响应是C-SAM,以检查不同包装界面的分层和重量增加,以确定包装吸湿和脱吸率。
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引用次数: 4
Cost analysis of chip scale packaging 芯片级封装的成本分析
L. Su, M. Louis, C. Reber
This paper documents a chip scale package (CSP) cost analysis using SEMATECH's Cost/Resource Model (CRM). The intent of the analysis was to compare costs between CSPs and conventional package technologies such as the thin small outline package (TSOP) and ball grid array (BGA) to determine whether CSP is a viable packaging technology. The analysis includes costs of both package and board assembly components in a high volume, mature production factory. Four representative CSP types (custom lead frame, flex circuit interposer, rigid substrate interposer, and wafer level assembly) and three traditional surface mount package configurations (plastic ball grid array [PBGA], ceramic ball grid array [CBGA], and thin small outline package [TSOP]) were selected to benchmark. By selecting CSPs across many applications and I/O ranges, the goal was to study a cross section of CSPs that were in or near production. Analysis results indicated that CSPs with a low I/O count are cost-competitive with conventional surface mount packages and can be used with the existing printed circuit board (PCB) infrastructure. However, CSPs with a high I/O count are not currently supported by conventional PCB technology and are not cost-competitive with conventional surface mount package technology.
本文使用SEMATECH的成本/资源模型(CRM)对芯片规模封装(CSP)进行成本分析。分析的目的是比较CSP与传统封装技术(如薄小轮廓封装(TSOP)和球栅阵列(BGA))之间的成本,以确定CSP是否是一种可行的封装技术。该分析包括在大批量、成熟的生产工厂中封装和电路板组装组件的成本。四种典型的CSP类型(定制引线框架、柔性电路中间层、刚性衬底中间层和晶圆级组装)和三种传统的表面贴装封装配置(塑料球栅阵列(PBGA)、陶瓷球栅阵列(CBGA)和薄小轮廓封装(TSOP))进行了基准测试。通过在许多应用程序和I/O范围中选择csp,目标是研究处于或接近生产的csp的横截面。分析结果表明,具有低I/O计数的csp与传统的表面贴装封装相比具有成本竞争力,并且可以与现有的印刷电路板(PCB)基础设施一起使用。然而,具有高I/O计数的csp目前不受传统PCB技术的支持,并且与传统表面贴装封装技术相比没有成本竞争力。
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引用次数: 1
Effect of substrate warpage on the second level assembly of advanced plastic ball grid array (PBGA) packages 衬底翘曲对先进塑料球栅阵列(PBGA)封装二级组装的影响
D. Bhogeswara Rao, M. Prakash
Shadow Moire technique was used to study the out-of-plane displacements that represent warpage of advanced Plastic Ball Grid Array (PBGA) packages. Two types of PBGA packages, die-up and cavity-down configurations, were studied. The latter type is usually known as Enhanced Plastic Ball Grid Array (EPBGA) package due to the advantage it offers for thermal dissipation. Shadow Moire studies indicated that cavity-down package substrates warp in a concave configuration. Die-up package substrates warp in a convex configuration. Increase in temperatures up to 240/spl deg/C had an insignificant effect on the warpage of cavity-down substrates, whereas the die-up package substrate warpage improved with increasing temperature. However, the die-up substrates reverted to their original warpage upon cooling. The sum of the warpage and the ball diameter variation account for almost all the non-planarity. The packages with worse coplanarities showed invariably worse warpages. Substrate warpage of 4 mils or less is required for the successful assembly of PBGA packages. Since cavity-down packages do not show any improvement with increasing temperature, package non-planarity should be less than 7 mils by the seating plane method to ensure less than 4 mils of warpage. The assembly processes can tolerate higher levels of coplanarity for die-up packages as warpage improves at reflow temperatures. It is recommended that the coplanarity be measured by the seating plane method.
采用阴影云纹技术研究了代表先进塑料球网格阵列(PBGA)封装翘曲的面外位移。研究了两种类型的PBGA封装,即凹腔封装和凹腔封装。后一种类型通常被称为增强型塑料球网格阵列(EPBGA)封装,因为它提供了散热的优势。阴影云纹研究表明,空腔向下封装衬底在凹形结构中翘曲。染色包基材以凸形结构翘曲。当温度升高至240℃时,对空腔式封装衬底翘曲量的影响不显著,而当温度升高时,封装衬底翘曲量有所改善。然而,在冷却后,死基板恢复到原来的翘曲。翘曲量和球径变化的总和几乎可以解释所有的非平面性。具有较差共面性的包装总是表现出较差的翘曲。对于PBGA封装的成功组装,衬底翘曲需要小于等于4密耳。由于空腔封装不会随着温度的升高而出现任何改善,因此封装的非平面度应小于7密尔,以确保小于4密尔的翘曲。在回流温度下,随着翘曲的改善,组装过程可以容忍更高水平的共面性。建议采用座面法测量共平面度。
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引用次数: 15
Statistically calculating reject limits at parametric test 统计计算参数检验的拒绝限度
D. Michelson
Known Good Die (KGD) methodology is a process used in the manufacture of semiconductor chips which determines reject limits for parameters measured at sample probe. The philosophy of KGD is to set reject limits on all sample probe parameters at x~/spl plusmn/4 s, where x~ is the sample average and s is the sample standard deviation, assuming a normal distribution on the parameter. When the distribution of measurements is normal, limits set at /spl plusmn/4 s correspond to a C/sub pk/ of 1.33. If the distribution of measurements is not normal, we examine using a generalized C/sub pk/ formula to find the KGD limits. KGD methods are also used to set limits at circuit probe and final test, after the chip has been packaged.
已知好模(KGD)方法是一种用于半导体芯片制造的工艺,用于确定样品探针测量参数的拒绝限制。KGD的原理是在x~/spl plusmn/4 s处对所有样本探针参数设置拒绝限,其中x~为样本平均值,s为样本标准差,假设参数呈正态分布。当测量分布为正态分布时,/spl plusmn/4 s的限值对应于C/sub pk/ 1.33。如果测量值的分布不是正态分布,我们使用广义的C/sub pk/公式来检查KGD极限。KGD方法还用于在芯片封装后的电路探头和最终测试中设置限制。
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引用次数: 4
An experimental study on organic solderability preservative 有机可焊性防腐剂的实验研究
Yuan Li
Organic solderability preservatives (OSP) are regarded as an excellent pad finish for fine pitch SMT because they can produce a very thin and even coating. However, OSP coatings are more vulnerable to the thermal, humidity and physical effects compared to the HASL coating. In this study, a designed experiment was carried out to systematically study the effects of seven factors on solderability of OSP coated PCBs. These factors included PCB handling, shelf life, prebake atmosphere, dry temperature during cleaning, time delay between cleaning of the first-side misprint and re-print, and hold time between soldering operations. The results of analyzing the experiment data have shown that hold time between soldering operations is the most significant factor; prebake atmosphere when prebake is necessary, bare PCB handling, and dry temperature during cleaning of the first-side misprint are also significant; and within their selected ranges used in the experiment, shelf life, time delay between cleaning of the first-side misprint and re-print, and dry temperature during cleaning after one reflow are not significant. The effect of the water solvent used in the aqueous cleaner on the removal of the OSP coating was also quantified by an additional experiment.
有机可焊性防腐剂(OSP)被认为是一种优良的小间距SMT焊盘处理剂,因为它们可以产生非常薄且均匀的涂层。然而,与HASL涂层相比,OSP涂层更容易受到热、湿度和物理效应的影响。本研究通过设计实验,系统研究了7个因素对OSP涂层pcb可焊性的影响。这些因素包括PCB处理,保质期,预焙气氛,清洁期间的干燥温度,第一面印刷错误和重新印刷的清洗之间的时间延迟,以及焊接操作之间的保持时间。对实验数据的分析结果表明,焊接操作之间的保持时间是影响焊接性能的最重要因素;需要预焙时的预焙气氛、裸PCB处理和第一面印刷错误清洗时的干燥温度也很重要;在实验所用的选择范围内,货架寿命、第一面印错与重印的清洗间隔时间、一次回流后清洗时的干燥温度均不显著。通过附加实验,定量了水溶液清洗剂中所使用的水溶剂对OSP涂层去除的影响。
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引用次数: 4
期刊
Twenty First IEEE/CPMT International Electronics Manufacturing Technology Symposium Proceedings 1997 IEMT Symposium
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