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Twenty First IEEE/CPMT International Electronics Manufacturing Technology Symposium Proceedings 1997 IEMT Symposium最新文献

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Product-oriented BGA manufacturability and reliability study 面向产品的BGA可制造性和可靠性研究
B. Oberlin, T. Chung
Since 1993, many BGA board level manufacturability and reliability related papers have been published. Many of them were based on simple and non-product-oriented test boards. It is believed that a product-oriented BGA test vehicle design, assembled in a production environment, will provide more direct applicable information to BGA package users, and thus improve manufacturability and reliability of products utilizing BGA technology.
自1993年以来,已经发表了许多与BGA板级可制造性和可靠性相关的论文。其中许多都是基于简单且非面向产品的测试板。相信以产品为导向的BGA测试车设计,在生产环境中组装,将为BGA封装用户提供更直接的适用信息,从而提高利用BGA技术的产品的可制造性和可靠性。
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引用次数: 0
Heel cracking induced by the steep conversion of EMC in large QFP 大QFP中电磁兼容陡转引起的足跟开裂
Y.M. Lee, J. Cho, Y. Sun, N. Kim
Bonding wire heel crack observed in large QFP was studied. From the analysis, it was found that this type of open failure was caused by heel crack at stitch bond during molding. The mold simulation was conducted for quantitative analysis. The software considers the polymerization kinetics of EMC since the mold flow depends on thermal excursion. According to simulation, it was proven that the EMC near gate shrinks with very steep gradient of conversion rate. At this moment the chemical shrinkage of EMC results in the fracture of Au wire due to the excessive tension. The mold simulation analysis coincides with experimental results. Both wire bonding and molding parameters were optimized to solve the heel crack problem. The heel crack resistance could be improved by using a capillary which makes large cross-sectional area of stitch bond. The other solution to suppress the heel crack was to use EMC having a smaller chemical shrinkage. Also an additional improvement was obtained by decreasing molding temperature from 175/spl deg/C to 168/spl deg/C. Conclusively, the chemical shrinkage of EMC is an important property and needs to be reduced to minimize the transfer molding failures, especially for the large body size packages.
对大型QFP中焊丝后跟裂纹现象进行了研究。通过分析发现,这种开放性破坏是由成型过程中缝接处的后跟裂纹引起的。进行了模具仿真,进行了定量分析。该软件考虑了EMC的聚合动力学,因为模流取决于热偏移。仿真结果表明,栅极附近电磁兼容随转换率梯度的增大而减小。此时,电磁兼容的化学收缩导致金丝因张力过大而断裂。模具仿真分析与实验结果吻合。通过对焊丝粘接和成型参数的优化设计,解决了焊后跟裂纹问题。采用大截面积的毛细针脚可以提高鞋跟抗裂能力。另一种抑制跟裂的方法是使用化学收缩率较小的EMC。另外,通过将成型温度从175/spl℃降低到168/spl℃,得到了进一步的改进。最后,电磁兼容的化学收缩是一个重要的性能,需要减少,以尽量减少传递成型失败,特别是对于大尺寸封装。
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引用次数: 4
An organic and ceramic laminated BGA package with high thermal and electrical performance characteristics 一种有机和陶瓷层压BGA封装,具有高热学和电学性能
H. Asai, K. Yano, K. Iyogi, N. Iwase, T. Fujiwara
A new structural face-up LSI package has been developed. The package shows low thermal resistance without a heatsink and low inductance, capacitance, and resistance values. The package is thin enough for portable multimedia equipment applications, with a thickness of 0.5 mn (not including ball height). The measured thermal resistance was 11/spl deg/C/W under natural convection without a heatsink. The simulated inductance and capacitance were 6.7 nH and 1.1 pF respectively, and measured resistance was 520 m/spl Omega/ (line length=14.7 mm, width=60 /spl mu/m). The package consists of a resin film and a ceramic substrate. The film is a liquid crystal polymer (LCP) and the substrate is aluminum nitride (AlN). LCP is a suitable material for buried-bump interconnection technology (B2it/sup TM/). AlN has high thermal conductivity and its coefficient of thermal expansion (CTE) is close to that of silicon. Both materials were laminated by an adhesive agent. This material combination provides a thin structure, low thermal resistance, and low LCR which are suitable for portable multimedia electrical equipment. This paper reports the configuration and performance characteristics of this newly developed package.
开发了一种新型结构的正面集成电路封装。该封装在没有散热器的情况下具有低热阻和低电感、电容和电阻值。封装足够薄,适用于便携式多媒体设备应用,厚度为0.5 mn(不包括球高度)。在无散热器的自然对流条件下,测得的热阻为11/spl度/C/W。模拟电感和电容分别为6.7 nH和1.1 pF,测量电阻为520 m/spl ω /(线长为14.7 mm,宽度为60 /spl mu/m)。该封装由树脂薄膜和陶瓷衬底组成。该薄膜为液晶聚合物(LCP),衬底为氮化铝(AlN)。LCP是一种适用于埋碰互连技术(B2it/sup TM/)的材料。AlN具有高导热性,其热膨胀系数(CTE)接近硅。两种材料都用粘合剂层压。这种材料组合结构薄,热阻低,LCR低,适用于便携式多媒体电气设备。本文报道了这个新开发的包的配置和性能特点。
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引用次数: 1
Addressing environment, health and safety in semiconductor process development 解决半导体工艺开发中的环境、健康和安全问题
L. Mendicino, L. Beu
Motorola has traditionally focused on cost, yield, performance, and logistics as primary drivers for decision-making. In the semiconductor industry, environment, health and safety (EHS) issues have resulted in major modifications of tools and process steps, as well as the addition of environmental controls to the facility, because they are not routinely considered when making process design and manufacturing choices, nor is their impact on cost, yield, and cycle time. Certain business driving forces, such as cost, sustainability of processes/tools, time to market, market access, and market share, are leading Motorola to a cultural change in which EHS impacts must be considered during product and process design; however, design and process engineers have not been able to adequately address these impacts. Motorola's Advanced Process Research and Development Laboratory (APRDL) in the Semiconductor Product Sector (SPS) has recognized this and has established its own environmental group (separate from the site EHS compliance group) to implement a Design for EHS (DFEHS) strategy. The APRDL environmental group works with several project teams to address EHS issues in process development. These teams have been investigating copper metallization, wet cleans processes and tools, and other areas to ensure that the long-term EHS implications are identified and addressed before a process is transferred or a tool set recommended to a manufacturing fab. To empower engineers to consider, on their own, the EHS impacts of their materials and processes at the earliest possible stage, the APRDL environmental group has developed a DFEHS training course. This self-instructed, web-based course targets semiconductor design and process engineers and is available through Motorola University, the corporate training institution. The group has also established a procedure for approving new materials for the development lab in which EHS criteria are included.
摩托罗拉历来将成本、产量、业绩和物流作为决策的主要驱动因素。在半导体行业,环境、健康和安全(EHS)问题导致了对工具和工艺步骤的重大修改,以及对设施的环境控制,因为在进行工艺设计和制造选择时通常不会考虑这些问题,也不会考虑它们对成本、产量和周期时间的影响。某些业务驱动力,如成本、流程/工具的可持续性、上市时间、市场准入和市场份额,正在引导摩托罗拉进行文化变革,在产品和流程设计中必须考虑EHS影响;然而,设计和过程工程师还不能充分地处理这些影响。摩托罗拉半导体产品部门(SPS)的先进工艺研究与开发实验室(APRDL)已经认识到这一点,并建立了自己的环境小组(与现场EHS合规小组分开)来实施EHS设计(DFEHS)战略。APRDL环境小组与多个项目团队合作,解决工艺开发中的EHS问题。这些团队一直在调查铜金属化、湿法清洗工艺和工具,以及其他领域,以确保在工艺转移或向制造工厂推荐工具集之前,确定并解决长期的EHS影响。为了使工程师能够在尽可能早的阶段自行考虑其材料和工艺对EHS的影响,APRDL环境小组开发了DFEHS培训课程。这门自学的网络课程面向半导体设计和工艺工程师,可通过摩托罗拉大学(企业培训机构)获得。该小组还建立了一个程序,用于批准开发实验室的新材料,其中包括EHS标准。
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引用次数: 4
The study of the response of solder pastes under sinusoidal vibration 锡膏在正弦振动下的响应研究
D. He, Nduka Nnamdi (Ndy) Ekere, M. A. Currie
Solder paste is a dense suspension (volume fraction of about 50%) of spherical solder alloy particles in a flux/vehicle system. It is known to exhibit viscoelastic properties and under oscillatory shear, the dynamic viscosity has been shown to decrease as the shear frequency increases. This paper presents experimental results of the effect of sinusoidal vibration on solder paste, and its impact on the performance of the paste printing process. In the first experiment, the solder paste sample was horizontally vibrated inside a cylindrical container. Observations of the sample following vibration showed that a thin liquid rich layer was formed on the surface and at the interface between the container and the paste. In the second experiment the sample was placed on a flat plate and as the plate moved towards a vibration squeegee, the sample was pushed by the squeegee blade to produce a paste roll. In both experiments, the vibration frequency and amplitude were varied to observe their effect.
焊锡膏是在助焊剂/载药系统中球状焊锡合金颗粒的致密悬浮物(体积分数约为50%)。众所周知,它具有粘弹性,在振荡剪切作用下,动态粘度随着剪切频率的增加而降低。本文介绍了正弦振动对锡膏影响的实验结果,以及正弦振动对锡膏印刷过程性能的影响。在第一个实验中,锡膏样品在圆柱形容器内水平振动。振动后试样的观察表明,在膏体表面和容器与膏体的界面处形成了一层薄薄的富液层。在第二个实验中,将样品放置在一个平板上,当平板向振动胶刮移动时,样品被胶刮刀片推动,产生一个膏卷。在这两个实验中,通过改变振动频率和振幅来观察它们的效果。
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引用次数: 0
Decomposition procedures for global scheduling of complex job shops 复杂作业车间全局调度的分解程序
R. Uzsoy, Cheng-Shuo Wang
We describe a prototype decomposition procedure which uses global information on shop status to develop improved schedules for wafer fabrication facilities. The system studied contains reentrant product flows, multiple products and both unit capacity and batch machines. Preliminary experiments show that the decomposition procedure yields significantly better schedules in reasonable CPU times.
我们描述了一个原型分解程序,该程序使用工厂状态的全局信息来制定改进的晶圆制造设施时间表。所研究的系统包含可重入产品流、多产品流、单位容量机和批量机。初步实验表明,在合理的CPU时间内,分解过程产生了明显更好的调度。
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引用次数: 6
Speeding populated board inspection: a new technology 加速人口板检查:一项新技术
T. Eskridge, M. DeYong, John W. Grace, Jeff E. Newberry
The need for automated populated board inspection stems from the desire to reduce the number of defective board escapes, and to improve the yield of the production line. There are two main goals of populated board inspection: (1) to detect and classify defects, (2) provide process control information. Although at first glance the goals may appear to be independent, they are actually very closely related through the technology used to perform populated board inspection. The current generation of inspection technology typically trades classification accuracy-and hence the ability to provide meaningful process control information-with detection ability and ease of implementation. So while the current generation of technologies may be able to detect a wide range of anomalies on the populated board, detection is not the same as classification. Detection without robust classification will not lead to improved production yields because the information needed to improve the process will not be collected. In this paper we briefly overview the current generation of inspection technology, presenting its weaknesses with respect to the two stated goals. In order to address these goals, a new approach to populated board inspection is described.
对自动填充板检查的需求源于减少有缺陷板逃逸数量的愿望,并提高生产线的产量。填充板检查有两个主要目标:(1)检测和分类缺陷;(2)提供过程控制信息。虽然乍一看,这些目标似乎是独立的,但实际上它们通过用于执行填充板检查的技术密切相关。当前一代的检测技术通常将分类准确性(从而提供有意义的过程控制信息的能力)与检测能力和易于实现相交换。因此,虽然当前一代技术可能能够检测到人口密集的电路板上的各种异常,但检测与分类不同。没有稳健分类的检测不会导致产量的提高,因为改进工艺所需的信息将无法收集。在本文中,我们简要概述了当前一代的检测技术,提出了其相对于两个既定目标的弱点。为了实现这些目标,描述了一种新的填充板检查方法。
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引用次数: 1
Thermo-mechanical deformation of underfilled flip-chip packaging 未填充倒装芯片封装的热机械变形
X. Dai, P. Ho
An experimental technique of in-situ moire interferometry has been applied to investigate the thermo-mechanical deformations induced by to thermal loading in an underfilled flip-chip-on-board packaging. Thermo-mechanical deformations and shear strains generated from CTE mismatch are determined experimentally as a function of thermal loading. Semi-quantitative agreement is established between measured and FEA-simulated deformations. The results show that moire interferometry with in-situ thermal loading capabilities is effective for experimental studies of electronic packaging. Through this study, the role of underfill in reducing shear strains over solder bumps and thus in improving solder shear fatigue reliability is clarified. A methodology is demonstrated to differentiate effects of underfill properties on packaging thermo-mechanical performance.
采用原位云纹干涉实验技术研究了欠填充倒装片封装中热载荷引起的热机械变形。热机械变形和剪切应变产生的CTE错配实验确定作为热载荷的函数。在实测变形和有限元模拟变形之间建立了半定量的一致性。结果表明,具有原位热载荷能力的云纹干涉测量法在电子封装实验研究中是有效的。通过这项研究,阐明了下填料在降低焊料凸起处的剪切应变从而提高焊料剪切疲劳可靠性方面的作用。演示了一种方法来区分下填料性能对包装热机械性能的影响。
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引用次数: 24
Recipe generation for large-area meniscus coating using Kalman filter estimation 基于卡尔曼滤波估计的大面积半月板涂层配方生成
A. Krauss, E. Kamen, C. M. Chng, A. C. Thé
Material deposition is one of the repeated, and important, steps in electronics manufacturing. Meniscus coating is a low-waste technique that may be used in applications where spin coating is found. The process exhibits time-varying behavior and thus utilizing feedback control methods to compensate for this behavior is desirable. This paper describes the large-area meniscus coating process, explains modeling techniques used and presents results from closed-loop experiments. Feedback in the form of Kalman filtering and EWMA filtering is contrasted, with Kalman Filter techniques improving performance considerably. These process control techniques require no additional hardware and therefore very little cost is associated with implementation of these feedback algorithms.
材料沉积是电子制造中反复出现的重要步骤之一。半月板涂层是一种低浪费的技术,可用于发现自旋涂层的应用。过程表现出时变行为,因此利用反馈控制方法来补偿这种行为是可取的。本文描述了大面积半月板涂层过程,解释了所使用的建模技术,并给出了闭环实验的结果。对比了卡尔曼滤波和EWMA滤波形式的反馈,卡尔曼滤波技术显著提高了性能。这些过程控制技术不需要额外的硬件,因此与这些反馈算法的实现相关的成本非常低。
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引用次数: 1
Development of an ultra low moisture polymer adhesive for die attach applications 超低水分聚合物粘接模用胶粘剂的研制
M. Nguyen, I. Chien
A new type of die attach material based on a modified olefin thermoset polymer has been developed. Due to its hydrophobic molecular structure, moisture absorption is inherently very low. For example, it absorbs less than 0.05% moisture at 85/spl deg/C/85% RH/168 hrs. Even in HAST test (150/spl deg/C/85% RH/168 hrs.), moisture content is only 0.1%. The olefinic polymer is formulated as a low stress, electrical and thermally conducting paste adhesive. Its other principal features include good processability, less resin bleed and low temperature cure. The new die attach candidates were evaluated using 208 LD PQFP packages with standard epoxy molding compounds. This type of package passed moisture reliability tests at level 3. At JEDEC level 1, there were still package cracks and delaminations at the mold compound interfaces. However, no die attach delamination was observed. These studies clearly demonstrated the need for replacing conventional epoxies with low moisture absorbing polymers for die attachment and encapsulation in order to produce moisture insensitive packages. In summary, the new olefinic thermoset adhesives have shown promise for many die attach applications. These materials will provide important process and reliability improvement for advanced device packaging.
研制了一种基于改性烯烃热固性聚合物的新型模具贴附材料。由于其疏水分子结构,吸湿性本来就很低。例如,在85/spl°/C/85% RH/168小时下,吸湿率小于0.05%。即使在HAST测试(150/spl℃/85% RH/168小时)中,水分含量仅为0.1%。该烯烃聚合物被配制成一种低应力、导电和导热的膏状粘合剂。它的其他主要特点包括良好的加工性,较少的树脂溢出和低温固化。使用208 LD PQFP封装和标准环氧树脂成型化合物对新的模具附件候选件进行了评估。这种包装通过了3级防潮可靠性测试。在JEDEC一级,在模具复合界面处仍然存在封装裂纹和分层。然而,没有观察到模具附着分层。这些研究清楚地表明,需要用低吸湿性聚合物代替传统的环氧树脂,用于模具附着和封装,以生产对水分不敏感的封装。总之,新的烯烃热固性胶粘剂已经显示出许多模具附加应用的希望。这些材料将为先进器件封装提供重要的工艺和可靠性改进。
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引用次数: 3
期刊
Twenty First IEEE/CPMT International Electronics Manufacturing Technology Symposium Proceedings 1997 IEMT Symposium
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