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Electrochemical modification of polyporphyrin films: Looking inside mechanism and possibilities 多卟啉薄膜的电化学改性:机理和可能性
IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Pub Date : 2025-09-23 DOI: 10.1016/j.tsf.2025.140801
Sergey M. Kuzmin, Svetlana A. Chulovskaya, Vladimir I. Parfenyuk
This work demonstrates the preparation and modification of poly-Zn-5,10,15,20-tetrakis (4-hydroxyphenyl) porphyrin films under electrochemical conditions. The modification process was investigated using spectroscopic technique for the films deposited on fluorine-doped tin oxide glass electrodes and using an electrochemical techniques for the films deposited on glassy carbon. Changes in the spectral characteristics of the films at varying potential values are considered in terms of the integral intensity of Soret band components. It has been shown that at potentials of film oxidation or reduction <1.0 V, the spectral changes are reversible. At higher potentials, irreversible changes in the spectral characteristics of the film were observed, which were accompanied by a significant modification of its morphology, a decrease in the ohmic resistance of the film and an increase in the capacity of the double electric layer at the film/solution interface. A model explaining the formation of microrelief of the polyporphyrin film surface is proposed. It has been shown that the electrochemical modification of the film leads to a decrease in the onset potential and an increase in the current densities of the oxygen electroreduction reaction. The results showed that the electrochemical modification of the polyporphyrin films may be used for a sensor and/or catalyst design.
本文研究了在电化学条件下制备和修饰聚锌-5,10,15,20-四(4-羟基苯基)卟啉薄膜。利用光谱技术研究了氟掺杂氧化锡玻璃电极上沉积膜的改性过程,并利用电化学技术研究了玻璃碳上沉积膜的改性过程。在不同的电位值下,薄膜的光谱特性的变化是根据索雷特波段分量的积分强度来考虑的。结果表明,在膜氧化或还原电位<;1.0 V时,光谱变化是可逆的。在高电位下,观察到膜的光谱特性发生了不可逆的变化,这伴随着膜的形态发生了显著的改变,膜的欧姆电阻降低,膜/溶液界面双电层的容量增加。提出了一个解释多卟啉膜表面微起伏形成的模型。结果表明,对膜进行电化学修饰后,氧电还原反应的起始电位降低,电流密度增大。结果表明,对多卟啉薄膜进行电化学改性可用于传感器和/或催化剂的设计。
{"title":"Electrochemical modification of polyporphyrin films: Looking inside mechanism and possibilities","authors":"Sergey M. Kuzmin,&nbsp;Svetlana A. Chulovskaya,&nbsp;Vladimir I. Parfenyuk","doi":"10.1016/j.tsf.2025.140801","DOIUrl":"10.1016/j.tsf.2025.140801","url":null,"abstract":"<div><div>This work demonstrates the preparation and modification of poly-Zn-5,10,15,20-tetrakis (4-hydroxyphenyl) porphyrin films under electrochemical conditions. The modification process was investigated using spectroscopic technique for the films deposited on fluorine-doped tin oxide glass electrodes and using an electrochemical techniques for the films deposited on glassy carbon. Changes in the spectral characteristics of the films at varying potential values are considered in terms of the integral intensity of Soret band components. It has been shown that at potentials of film oxidation or reduction &lt;1.0 V, the spectral changes are reversible. At higher potentials, irreversible changes in the spectral characteristics of the film were observed, which were accompanied by a significant modification of its morphology, a decrease in the ohmic resistance of the film and an increase in the capacity of the double electric layer at the film/solution interface. A model explaining the formation of microrelief of the polyporphyrin film surface is proposed. It has been shown that the electrochemical modification of the film leads to a decrease in the onset potential and an increase in the current densities of the oxygen electroreduction reaction. The results showed that the electrochemical modification of the polyporphyrin films may be used for a sensor and/or catalyst design.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"829 ","pages":"Article 140801"},"PeriodicalIF":2.0,"publicationDate":"2025-09-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145227731","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Influence of silicon dioxide nanoparticles on hydrophobicity and transparency of polydimethylsiloxanes coatings hybridized with silicon dioxide nanoparticles 二氧化硅纳米粒子对二氧化硅纳米粒子杂化聚二甲基硅氧烷涂层疏水性和透明度的影响
IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Pub Date : 2025-09-22 DOI: 10.1016/j.tsf.2025.140800
Jianbo Lu , Mengxia Mei , Chunlei Huang
Dust deposition on outdoor glass and photovoltaic panels presents a significant challenge, often requiring active cleaning methods to maintain daylighting, efficiency, and aesthetics. Therefore, highly transparent and hydrophobic coatings that enable passive self-cleaning of these surfaces are highly desirable. Polydimethylsiloxanes (PDMS) coatings hybridized with silicon dioxide (SiO2) nanoparticles have emerged as a promising solution. However, systematic studies on how hydrophobicity and transparency depend on nanoparticle properties were rarely reported, hindering practical implementation. In this study, we systematically investigated the hydrophobicity and optical transparency of PDMS coatings hybridized with different contents of SiO2 nanoparticles with various diameters. SiO2 nanoparticles with varying diameters were synthesized using the sol-gel method, followed by the development of PDMS coatings hybridized with SiO2 nanoparticles via spin coating technology. It is demonstrated that the PDMS coatings with larger SiO2 nanoparticles exhibited larger contact angles at low nanoparticle contents. At higher contents, the contact angles remained nearly constant, while transmittance decreased significantly owing to light scattering. Additionally, PDMS coatings hybridized with SiO2 nanoparticles exhibited good mechanical stability and self-cleaning properties, indicating their potential in outdoor applications. These findings provide valuable insights into optimizing PDMS-SiO2 hybrid coatings, balancing hydrophobicity and transparency.
室外玻璃和光伏板上的粉尘沉积是一个重大挑战,通常需要主动清洁方法来保持采光、效率和美观。因此,高度透明和疏水的涂层,使这些表面被动自清洁是非常可取的。聚二甲基硅氧烷(PDMS)涂层与二氧化硅(SiO2)纳米粒子杂交是一种很有前途的解决方案。然而,关于疏水性和透明度如何依赖于纳米颗粒性质的系统研究很少报道,阻碍了实际实施。在这项研究中,我们系统地研究了不同含量、不同直径的SiO2纳米粒子杂化PDMS涂层的疏水性和光学透明度。采用溶胶-凝胶法制备了不同直径的SiO2纳米粒子,并采用自旋涂覆技术制备了与SiO2纳米粒子杂交的PDMS涂层。结果表明,当SiO2纳米颗粒含量较低时,较大SiO2纳米颗粒的PDMS涂层具有较大的接触角。在高含量时,接触角基本保持不变,但由于光散射,透光率显著降低。此外,与SiO2纳米粒子杂交的PDMS涂层表现出良好的机械稳定性和自清洁性能,表明其在户外应用的潜力。这些发现为优化PDMS-SiO2杂化涂层,平衡疏水性和透明度提供了有价值的见解。
{"title":"Influence of silicon dioxide nanoparticles on hydrophobicity and transparency of polydimethylsiloxanes coatings hybridized with silicon dioxide nanoparticles","authors":"Jianbo Lu ,&nbsp;Mengxia Mei ,&nbsp;Chunlei Huang","doi":"10.1016/j.tsf.2025.140800","DOIUrl":"10.1016/j.tsf.2025.140800","url":null,"abstract":"<div><div>Dust deposition on outdoor glass and photovoltaic panels presents a significant challenge, often requiring active cleaning methods to maintain daylighting, efficiency, and aesthetics. Therefore, highly transparent and hydrophobic coatings that enable passive self-cleaning of these surfaces are highly desirable. Polydimethylsiloxanes (PDMS) coatings hybridized with silicon dioxide (SiO2) nanoparticles have emerged as a promising solution. However, systematic studies on how hydrophobicity and transparency depend on nanoparticle properties were rarely reported, hindering practical implementation. In this study, we systematically investigated the hydrophobicity and optical transparency of PDMS coatings hybridized with different contents of SiO2 nanoparticles with various diameters. SiO2 nanoparticles with varying diameters were synthesized using the sol-gel method, followed by the development of PDMS coatings hybridized with SiO2 nanoparticles via spin coating technology. It is demonstrated that the PDMS coatings with larger SiO2 nanoparticles exhibited larger contact angles at low nanoparticle contents. At higher contents, the contact angles remained nearly constant, while transmittance decreased significantly owing to light scattering. Additionally, PDMS coatings hybridized with SiO2 nanoparticles exhibited good mechanical stability and self-cleaning properties, indicating their potential in outdoor applications. These findings provide valuable insights into optimizing PDMS-SiO2 hybrid coatings, balancing hydrophobicity and transparency.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"828 ","pages":"Article 140800"},"PeriodicalIF":2.0,"publicationDate":"2025-09-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145159085","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optimizing Ar:O2 flux ratio for enhanced growth and performance of gallium oxide films on glass substrates and thin film transistors 优化Ar:O2通量比,增强玻璃基板和薄膜晶体管上氧化镓薄膜的生长和性能
IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Pub Date : 2025-09-19 DOI: 10.1016/j.tsf.2025.140799
Lv Zhou , Hua Zheng , Jing-ao Shen , Shenghao Zhang , Huadan Li , Yuanrui Chen , Danmei Wei , Chenchen Wei , Tao Wu , Baohua Jia , Han Lin , Honglong Ning
Gallium oxide (Ga2O3) is an emerging semiconductor with an ultra-wide band gap of 4.8 eV. However, the preparation and property optimization of Ga2O3 thin films still face challenges, especially in terms of cost-effectiveness and process simplicity. This study used RF magnetron sputtering to deposit Ga2O3 films on amorphous glass substrates, showcasing excellent performance with the potential to substitute costlier substrates, while extensively examining their structural, optical, and photovoltaic characteristics. The as-grown Ga2O3 thin films were in an amorphous state while annealing the films in the air at 600 °C led to the formation of monoclinic structures. A systematic investigation was conducted into the impact of the Ar:O2 flux ratio on the properties of the films. Annealing amorphous Ga2O3 films at 500 °C resulted in an expanded band gap and enhanced transmittance in the ultraviolet range while maintaining the same Ar:O2 flux ratio. Although crystalline monoclinic Ga2O3 and amorphous Ga2O3 can be used to fabricate thin-film transistors, amorphous Ga2O3 exhibits superior thermal stability and requires a less demanding growth process. A dual-layer structure comprising indium-zinc-oxide and amorphous Ga2O3 was utilized as an active layer to thoroughly examine the transmission characteristics of thin-film transistors. Experimental results revealed that these transistors exhibit exceptional electrical characteristics, including a notable switching current ratio of approximately 108, a mobility of 32.3 cm²/Vs, and a subthreshold swing of 0.38 V/dec. These results indicate the feasibility of using Ga2O3 thin-film transistors in flat panel displays.
氧化镓(Ga2O3)是一种新兴的半导体材料,具有4.8 eV的超宽带隙。然而,Ga2O3薄膜的制备和性能优化仍然面临挑战,特别是在成本效益和工艺简单性方面。本研究利用射频磁控溅射技术在非晶玻璃衬底上沉积Ga2O3薄膜,展示了优异的性能,具有替代昂贵衬底的潜力,同时广泛研究了其结构、光学和光伏特性。生长后的Ga2O3薄膜呈非晶态,在600℃空气中退火后形成单斜晶结构。系统地研究了Ar:O2通量比对膜性能的影响。无定形Ga2O3薄膜在500℃下退火,在保持相同Ar:O2通量比的情况下,带隙扩大,紫外透射率提高。虽然单斜晶Ga2O3和非晶Ga2O3可以用来制造薄膜晶体管,但非晶Ga2O3表现出更好的热稳定性,并且对生长过程的要求较低。采用由氧化铟锌和非晶Ga2O3组成的双层结构作为有源层,对薄膜晶体管的传输特性进行了深入研究。实验结果表明,这些晶体管具有优异的电学特性,包括显著的开关电流比约为108,迁移率为32.3 cm²/Vs,亚阈值摆幅为0.38 V/dec。这些结果表明在平板显示器中使用Ga2O3薄膜晶体管是可行的。
{"title":"Optimizing Ar:O2 flux ratio for enhanced growth and performance of gallium oxide films on glass substrates and thin film transistors","authors":"Lv Zhou ,&nbsp;Hua Zheng ,&nbsp;Jing-ao Shen ,&nbsp;Shenghao Zhang ,&nbsp;Huadan Li ,&nbsp;Yuanrui Chen ,&nbsp;Danmei Wei ,&nbsp;Chenchen Wei ,&nbsp;Tao Wu ,&nbsp;Baohua Jia ,&nbsp;Han Lin ,&nbsp;Honglong Ning","doi":"10.1016/j.tsf.2025.140799","DOIUrl":"10.1016/j.tsf.2025.140799","url":null,"abstract":"<div><div>Gallium oxide (Ga<sub>2</sub>O<sub>3</sub>) is an emerging semiconductor with an ultra-wide band gap of 4.8 eV. However, the preparation and property optimization of Ga<sub>2</sub>O<sub>3</sub> thin films still face challenges, especially in terms of cost-effectiveness and process simplicity. This study used RF magnetron sputtering to deposit Ga<sub>2</sub>O<sub>3</sub> films on amorphous glass substrates, showcasing excellent performance with the potential to substitute costlier substrates, while extensively examining their structural, optical, and photovoltaic characteristics. The as-grown Ga<sub>2</sub>O<sub>3</sub> thin films were in an amorphous state while annealing the films in the air at 600 °C led to the formation of monoclinic structures. A systematic investigation was conducted into the impact of the Ar:O<sub>2</sub> flux ratio on the properties of the films. Annealing amorphous Ga<sub>2</sub>O<sub>3</sub> films at 500 °C resulted in an expanded band gap and enhanced transmittance in the ultraviolet range while maintaining the same Ar:O<sub>2</sub> flux ratio. Although crystalline monoclinic Ga<sub>2</sub>O<sub>3</sub> and amorphous Ga<sub>2</sub>O<sub>3</sub> can be used to fabricate thin-film transistors, amorphous Ga<sub>2</sub>O<sub>3</sub> exhibits superior thermal stability and requires a less demanding growth process. A dual-layer structure comprising indium-zinc-oxide and amorphous Ga<sub>2</sub>O<sub>3</sub> was utilized as an active layer to thoroughly examine the transmission characteristics of thin-film transistors. Experimental results revealed that these transistors exhibit exceptional electrical characteristics, including a notable switching current ratio of approximately 10<sup>8</sup>, a mobility of 32.3 cm²/Vs, and a subthreshold swing of 0.38 V/dec. These results indicate the feasibility of using Ga<sub>2</sub>O<sub>3</sub> thin-film transistors in flat panel displays.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"828 ","pages":"Article 140799"},"PeriodicalIF":2.0,"publicationDate":"2025-09-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145107798","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Substrate-bias driven sputter deposited β-phase dominated tungsten film for spintronic applications 衬底偏压驱动溅射沉积β相主导钨薄膜用于自旋电子应用
IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Pub Date : 2025-09-17 DOI: 10.1016/j.tsf.2025.140795
Abhay Singh Rajawat , Naim Ahmad , Risvana Nasril , Tasneem Sheikh , Mohammad Muhiuddin , Savita Sahu , Ashwani Gautam , Arvind Kumar , Md. Imteyaz Ahmad , G.A. Basheed , Mohammad R. Rahman , Waseem Akhtar
β-Tungsten (β-W), an A15 cubic phase of tungsten, exhibits a giant spin Hall angle compared to its bcc-phase α-Tungsten (α-W), making high-quality β-W films desirable for spintronic applications. We report the controlled growth of β-W films on SiO2/Si substrates via DC sputtering, where substrate bias serves as a critical factor in stabilizing the β phase by regulating the energy of deposited atoms. This approach enables the formation of β-W films over a wide thickness range. Power spectral density analysis of the atomic force microscopy images revealed that the β-W film grown at a positive substrate bias of +50 V exhibits low surface roughness along with small grain size. Additionally, we studied the spin pumping phenomena in different tungsten phases achieved through substrate bias. Ferromagnetic resonance measurements reveal an enhancement in the magnetic damping for β-W/Py compared to α-W/Py dominated film. Importantly, the use of substrate bias does not deteriorate the interface quality, underscoring its effectiveness. These findings highlight the potential of substrate bias in thin-film engineering, paving the way for its advanced utilization in spintronic applications.
β-钨(β-W)是钨的A15立方相,与bcc相α-钨(α-W)相比,具有巨大的自旋霍尔角,使高质量的β-W薄膜成为自旋电子应用的理想选择。我们报道了通过直流溅射在SiO2/Si衬底上控制β- w薄膜的生长,其中衬底偏压通过调节沉积原子的能量来稳定β相是关键因素。这种方法可以在很宽的厚度范围内形成β-W薄膜。原子力显微镜图像的功率谱密度分析表明,在+50 V的正衬底偏压下生长的β-W膜具有低表面粗糙度和小晶粒尺寸。此外,我们还研究了通过衬底偏压实现的不同钨相的自旋抽运现象。铁磁共振测量表明,与α-W/Py为主的薄膜相比,β-W/Py的磁阻尼增强。重要的是,使用衬底偏压不会降低界面质量,强调其有效性。这些发现突出了衬底偏压在薄膜工程中的潜力,为其在自旋电子应用中的先进应用铺平了道路。
{"title":"Substrate-bias driven sputter deposited β-phase dominated tungsten film for spintronic applications","authors":"Abhay Singh Rajawat ,&nbsp;Naim Ahmad ,&nbsp;Risvana Nasril ,&nbsp;Tasneem Sheikh ,&nbsp;Mohammad Muhiuddin ,&nbsp;Savita Sahu ,&nbsp;Ashwani Gautam ,&nbsp;Arvind Kumar ,&nbsp;Md. Imteyaz Ahmad ,&nbsp;G.A. Basheed ,&nbsp;Mohammad R. Rahman ,&nbsp;Waseem Akhtar","doi":"10.1016/j.tsf.2025.140795","DOIUrl":"10.1016/j.tsf.2025.140795","url":null,"abstract":"<div><div><span><math><mi>β</mi></math></span>-Tungsten (<span><math><mi>β</mi></math></span>-W), an A15 cubic phase of tungsten, exhibits a giant spin Hall angle compared to its bcc-phase <span><math><mi>α</mi></math></span>-Tungsten (<span><math><mi>α</mi></math></span>-W), making high-quality <span><math><mi>β</mi></math></span>-W films desirable for spintronic applications. We report the controlled growth of <span><math><mi>β</mi></math></span>-W films on SiO<sub>2</sub>/Si substrates via DC sputtering, where substrate bias serves as a critical factor in stabilizing the <span><math><mi>β</mi></math></span> phase by regulating the energy of deposited atoms. This approach enables the formation of <span><math><mi>β</mi></math></span>-W films over a wide thickness range. Power spectral density analysis of the atomic force microscopy images revealed that the <span><math><mi>β</mi></math></span>-W film grown at a positive substrate bias of +50 V exhibits low surface roughness along with small grain size. Additionally, we studied the spin pumping phenomena in different tungsten phases achieved through substrate bias. Ferromagnetic resonance measurements reveal an enhancement in the magnetic damping for <span><math><mi>β</mi></math></span>-W/Py compared to <span><math><mi>α</mi></math></span>-W/Py dominated film. Importantly, the use of substrate bias does not deteriorate the interface quality, underscoring its effectiveness. These findings highlight the potential of substrate bias in thin-film engineering, paving the way for its advanced utilization in spintronic applications.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"828 ","pages":"Article 140795"},"PeriodicalIF":2.0,"publicationDate":"2025-09-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145107799","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Spin-orbit coupling in Zn0.05Cd0.95O/CdO heterostructures grown by spray pyrolysis 喷雾热解制备Zn0.05Cd0.95O/CdO异质结构的自旋轨道耦合
IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Pub Date : 2025-09-12 DOI: 10.1016/j.tsf.2025.140796
L. M. B. Vargas , M. J. da Silva , K. Bolaños , M. L. Peres , M. P. F. de Godoy , S. de Castro
This work studies the structural, morphological and electrical properties of a heterostructure, Zn0.05Cd0.95O/CdO, comparing them with the films that compose it, CdO and Zn0.05Cd0.95O, grown on glass substrate using the spray pyrolysis technique. The heterostructure presented higher crystalline and crystallite size compared to the separate films. The scanning electron microscopy (SEM) images revealed a well-defined interface, thus proving that the heterostructure was formed. In the electrical characterization, both films presented semiconductor-like behavior in resistance in the range of 100K to 1.9K, while the heterostructure presented this behavior up to 3.5K and below this temperature a drop in the resistance was observed. This decrease is attributed to the presence of spin-orbit coupling (SOC) that was confirmed in the magnetoresistance (MR) measurements, with only the heterostructure presenting weak antilocalization (WAL) below 4.2 K. This effect was not observed in the individual films, suggesting that it is an intrinsic property of the interface due to the formation of a two-dimensional electron gas (2DEG). For the analysis of the SOC effect, the Hikami Larkin Nagaoka (HLN) model was used, which was fitted to the MR curve of the heterostructure only for the lowest temperature. The parameters obtained with this model were the phase coherence length Lϕ=(142.8±0.1)nm and the spin-orbit scattering length Lso=(232.2±0.1)nm at T=1.9K, indicating that this heterostructure may have application in the field of spintronics.
本文研究了异质结构Zn0.05Cd0.95O/CdO的结构、形态和电学性质,并将其与用喷雾热解技术在玻璃基板上生长的由CdO和Zn0.05Cd0.95O组成的薄膜进行了比较。与单独薄膜相比,异质结构具有更高的晶粒和晶粒尺寸。扫描电镜(SEM)图像显示了一个明确的界面,从而证明异质结构的形成。在电学表征中,两种薄膜在100K至1.9K范围内的电阻都表现出类似半导体的行为,而异质结构的电阻在3.5K范围内表现出类似半导体的行为,在此温度以下,电阻下降。这种下降归因于自旋轨道耦合(SOC)的存在,这在磁电阻(MR)测量中得到了证实,只有异质结构在4.2 K以下表现出弱反局域化(WAL)。在单个薄膜中没有观察到这种效应,这表明它是由于二维电子气体(2DEG)的形成而形成的界面的固有特性。对于SOC效应的分析,采用Hikami Larkin Nagaoka (HLN)模型,该模型仅在最低温度下拟合异质结构的MR曲线。该模型在T=1.9K时得到相相干长度Lϕ=(142.8±0.1)nm和自旋轨道散射长度Lso=(232.2±0.1)nm,表明该异质结构在自旋电子学领域具有应用前景。
{"title":"Spin-orbit coupling in Zn0.05Cd0.95O/CdO heterostructures grown by spray pyrolysis","authors":"L. M. B. Vargas ,&nbsp;M. J. da Silva ,&nbsp;K. Bolaños ,&nbsp;M. L. Peres ,&nbsp;M. P. F. de Godoy ,&nbsp;S. de Castro","doi":"10.1016/j.tsf.2025.140796","DOIUrl":"10.1016/j.tsf.2025.140796","url":null,"abstract":"<div><div>This work studies the structural, morphological and electrical properties of a heterostructure, Zn<sub>0.05</sub>Cd<sub>0.95</sub>O/CdO, comparing them with the films that compose it, CdO and Zn<sub>0.05</sub>Cd<sub>0.95</sub>O, grown on glass substrate using the spray pyrolysis technique. The heterostructure presented higher crystalline and crystallite size compared to the separate films. The scanning electron microscopy (SEM) images revealed a well-defined interface, thus proving that the heterostructure was formed. In the electrical characterization, both films presented semiconductor-like behavior in resistance in the range of <span><math><mrow><mn>100</mn><mspace></mspace><mi>K</mi></mrow></math></span> to <span><math><mrow><mn>1.9</mn><mspace></mspace><mi>K</mi></mrow></math></span>, while the heterostructure presented this behavior up to <span><math><mrow><mn>3.5</mn><mspace></mspace><mi>K</mi></mrow></math></span> and below this temperature a drop in the resistance was observed. This decrease is attributed to the presence of spin-orbit coupling (SOC) that was confirmed in the magnetoresistance (MR) measurements, with only the heterostructure presenting weak antilocalization (WAL) below 4.2 K. This effect was not observed in the individual films, suggesting that it is an intrinsic property of the interface due to the formation of a two-dimensional electron gas (2DEG). For the analysis of the SOC effect, the Hikami Larkin Nagaoka (HLN) model was used, which was fitted to the MR curve of the heterostructure only for the lowest temperature. The parameters obtained with this model were the phase coherence length <span><math><mrow><msub><mi>L</mi><mi>ϕ</mi></msub><mo>=</mo><mrow><mo>(</mo><mrow><mn>142.8</mn><mspace></mspace><mo>±</mo><mn>0.1</mn></mrow><mo>)</mo></mrow><mspace></mspace><mi>n</mi><mi>m</mi></mrow></math></span> and the spin-orbit scattering length <span><math><mrow><msub><mi>L</mi><mrow><mi>s</mi><mi>o</mi></mrow></msub><mo>=</mo><mrow><mo>(</mo><mrow><mn>232.2</mn><mspace></mspace><mo>±</mo><mn>0.1</mn></mrow><mo>)</mo></mrow><mspace></mspace><mi>n</mi><mi>m</mi></mrow></math></span> at <span><math><mrow><mi>T</mi><mo>=</mo><mn>1.9</mn><mspace></mspace><mi>K</mi></mrow></math></span>, indicating that this heterostructure may have application in the field of spintronics.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"828 ","pages":"Article 140796"},"PeriodicalIF":2.0,"publicationDate":"2025-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145097639","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optimization of linear and nonlinear optical parameters by silver halides incorporation in selenium-based thin films Se95(AgX)5 硒基薄膜Se95(AgX)5中卤化银掺杂对线性和非线性光学参数的优化
IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Pub Date : 2025-09-12 DOI: 10.1016/j.tsf.2025.140797
Anil Kumar , S.S. Fouad , H. Atiya , Neeraj Mehta
This study investigates the impact of silver-halide salts (AgCl, AgBr, and AgI) on the optical, electrical, and photoelectrical properties of chalcogenide glass-ceramic thin films, replacing selenium content. Transmission and reflectance spectra were analysed to determine optical constants, bandgap (Egopt), and Urbach energy (Eₑ). The optical bandgap slightly decreased (0.1 eV) for AgCl-doped films but remained stable for AgBr and AgI, while the Urbach energy significantly increased. The refractive index (n) was obtained using Swanepoel’s method, and dielectric constants (ε' and ε") were calculated. The infinite dielectric constant (ε) increased from 2.45 (Se) to 3.33 (AgCl), 3.27 (AgBr), and 4.18 (AgI). The films exhibit indirect optical transitions with an optical bandgap of 1.77 to 1.89 eV, analysed using the Sellmeier and Wemple–DiDomenico (WDD) dispersion models. Further, we examined dissipation factor, energy loss functions, conductivities, relaxation time, and non-linear optical properties (n0, χ). The results highlight the potential tunability of AgX-doped chalcogenide thin films for optoelectronic applications.
本研究考察了卤化银盐(AgCl、AgBr和AgI)替代硒含量对硫系玻璃陶瓷薄膜光学、电学和光电性能的影响。通过分析透射和反射光谱来确定光学常数、带隙(Egopt)和乌尔巴赫能量(Eₑ)。agcl掺杂薄膜的光学带隙略有减小(0.1 eV),但AgBr和AgI的光学带隙保持稳定,而Urbach能量显著增加。用斯瓦内普尔法得到了折射率n,并计算了介电常数ε'和ε"。无限介电常数(ε∞)从2.45 (Se)增加到3.33 (AgCl)、3.27 (AgBr)和4.18 (AgI)。利用Sellmeier和Wemple-DiDomenico (WDD)色散模型分析,薄膜表现出1.77 ~ 1.89 eV的间接光学跃迁。进一步,我们检查了耗散因子、能量损失函数、电导率、弛豫时间和非线性光学性质(n0, χ)。该结果突出了agx掺杂硫系薄膜在光电应用中的潜在可调性。
{"title":"Optimization of linear and nonlinear optical parameters by silver halides incorporation in selenium-based thin films Se95(AgX)5","authors":"Anil Kumar ,&nbsp;S.S. Fouad ,&nbsp;H. Atiya ,&nbsp;Neeraj Mehta","doi":"10.1016/j.tsf.2025.140797","DOIUrl":"10.1016/j.tsf.2025.140797","url":null,"abstract":"<div><div>This study investigates the impact of silver-halide salts (AgCl, AgBr, and AgI) on the optical, electrical, and photoelectrical properties of chalcogenide glass-ceramic thin films, replacing selenium content. Transmission and reflectance spectra were analysed to determine optical constants, bandgap (<span><math><msubsup><mi>E</mi><mi>g</mi><mrow><mi>o</mi><mi>p</mi><mi>t</mi></mrow></msubsup></math></span>), and Urbach energy (<em>Eₑ</em>). The optical bandgap slightly decreased (0.1 eV) for AgCl-doped films but remained stable for AgBr and AgI, while the Urbach energy significantly increased. The refractive index (<em>n</em>) was obtained using Swanepoel’s method, and dielectric constants (<em>ε'</em> and <em>ε\"</em>) were calculated. The infinite dielectric constant (<em>ε<sub>∞</sub></em>) increased from 2.45 (Se) to 3.33 (AgCl), 3.27 (AgBr), and 4.18 (AgI). The films exhibit indirect optical transitions with an optical bandgap of 1.77 to 1.89 eV, analysed using the Sellmeier and Wemple–DiDomenico (WDD) dispersion models. Further, we examined dissipation factor, energy loss functions, conductivities, relaxation time, and non-linear optical properties (<em>n<sub>0</sub>, χ</em>). The results highlight the potential tunability of AgX-doped chalcogenide thin films for optoelectronic applications.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"828 ","pages":"Article 140797"},"PeriodicalIF":2.0,"publicationDate":"2025-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145097637","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Spin accumulation effects in magnetoresistance of thin platinum films 铂薄膜磁阻中的自旋积累效应
IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Pub Date : 2025-09-11 DOI: 10.1016/j.tsf.2025.140794
Larisa Naumova, Mikhail Milyaev, Roman Zavornitsyn, Ivan Yasyulevich, Nikolay Bebenin, Irina Maksimova, Tatiana Krinitsina, Timofey Novikov, Evgeny Patrakov, Vyacheslav Proglyado, Ivan Kamensky, Vladimir Ustinov
Thin platinum films were prepared by magnetron sputtering. It is found that when the field is along the current or perpendicular to both the current and the film plane, the magnetoresistance is positive while if the field is applied in the film plane perpendicular to the current, the magnetoresistance is negative. The temperature and thickness dependences of the positive and negative magnetoresistance are compared and the contribution due to the Hanle magnetoresistance is found. The thickness dependence of the Hanle magnetoresistance are analyzed within the framework of the theory of size effects in magnetoresistance caused by spin-orbit interaction. The value of the spin Hall angle in platinum is estimated.
采用磁控溅射法制备了铂薄膜。结果表明,当磁场沿电流方向或垂直于电流和薄膜平面时,磁电阻为正,而当磁场作用于垂直于电流的薄膜平面时,磁电阻为负。比较了正磁阻和负磁阻对温度和厚度的依赖性,发现了汉勒磁阻对温度和厚度的贡献。在自旋轨道相互作用引起的磁电阻尺寸效应理论的框架下,分析了汉勒磁电阻的厚度依赖性。估计了铂中自旋霍尔角的值。
{"title":"Spin accumulation effects in magnetoresistance of thin platinum films","authors":"Larisa Naumova,&nbsp;Mikhail Milyaev,&nbsp;Roman Zavornitsyn,&nbsp;Ivan Yasyulevich,&nbsp;Nikolay Bebenin,&nbsp;Irina Maksimova,&nbsp;Tatiana Krinitsina,&nbsp;Timofey Novikov,&nbsp;Evgeny Patrakov,&nbsp;Vyacheslav Proglyado,&nbsp;Ivan Kamensky,&nbsp;Vladimir Ustinov","doi":"10.1016/j.tsf.2025.140794","DOIUrl":"10.1016/j.tsf.2025.140794","url":null,"abstract":"<div><div>Thin platinum films were prepared by magnetron sputtering. It is found that when the field is along the current or perpendicular to both the current and the film plane, the magnetoresistance is positive while if the field is applied in the film plane perpendicular to the current, the magnetoresistance is negative. The temperature and thickness dependences of the positive and negative magnetoresistance are compared and the contribution due to the Hanle magnetoresistance is found. The thickness dependence of the Hanle magnetoresistance are analyzed within the framework of the theory of size effects in magnetoresistance caused by spin-orbit interaction. The value of the spin Hall angle in platinum is estimated.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"828 ","pages":"Article 140794"},"PeriodicalIF":2.0,"publicationDate":"2025-09-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145061379","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Investigation of the interplay of oxygen presence and Mg addition on InZnO:Al and InZnMgO:Al Thin Films 氧存在与Mg加入对InZnO:Al和InZnMgO:Al薄膜相互作用的研究
IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Pub Date : 2025-09-10 DOI: 10.1016/j.tsf.2025.140793
Takumi Yoneda , Dwinanri Egyna , Takayuki Negami , Takashi Minemoto
This study investigated the influence of oxygen content and Mg incorporation on the properties of Al-doped Indium Zinc Oxide (IZO:Al) and Al-doped Indium Zinc Magnesium Oxide (IZMO:Al) thin films deposited by radio-frequency sputtering. Increasing oxygen content during sputtering significantly reduced carrier concentration, leading to a redshift in the absorption edge and a narrowing of the optical band gap, primarily attributed to the dominance of the band gap renormalization effect vs the Burstein-Moss effect. Simultaneously, oxygen incorporation enhanced near-infrared transmittance. Mg incorporation initially improved carrier mobility but further increases led to decreased mobility and increased sheet resistance. These findings highlight the complex interplay between oxygen content and Mg incorporation, significantly influencing the electrical and optical properties of IZO:Al and IZMO:Al films. Optimizing these parameters is crucial for achieving a balance of high transparency, low resistivity, and suitable band alignment, essential for their application as transparent conductive oxides in high-efficiency semiconductor devices such as tandem solar cells.
研究了氧含量和Mg掺入量对射频溅射法制备掺铝铟氧化锌(IZO:Al)和掺铝铟锌氧化镁(IZMO:Al)薄膜性能的影响。溅射过程中增加氧含量显著降低载流子浓度,导致吸收边红移和光学带隙缩小,这主要归因于带隙重整化效应占主导地位,而不是Burstein-Moss效应。同时,氧的掺入提高了近红外透过率。Mg的掺入最初改善了载流子的迁移率,但进一步增加导致迁移率降低和片材阻力增加。这些发现强调了氧含量与Mg掺入之间的复杂相互作用,显著影响了IZO:Al和IZMO:Al薄膜的电学和光学性能。优化这些参数对于实现高透明度、低电阻率和合适的带对准的平衡至关重要,这对于它们作为透明导电氧化物在串联太阳能电池等高效半导体器件中的应用至关重要。
{"title":"Investigation of the interplay of oxygen presence and Mg addition on InZnO:Al and InZnMgO:Al Thin Films","authors":"Takumi Yoneda ,&nbsp;Dwinanri Egyna ,&nbsp;Takayuki Negami ,&nbsp;Takashi Minemoto","doi":"10.1016/j.tsf.2025.140793","DOIUrl":"10.1016/j.tsf.2025.140793","url":null,"abstract":"<div><div>This study investigated the influence of oxygen content and Mg incorporation on the properties of Al-doped Indium Zinc Oxide (IZO:Al) and Al-doped Indium Zinc Magnesium Oxide (IZMO:Al) thin films deposited by radio-frequency sputtering. Increasing oxygen content during sputtering significantly reduced carrier concentration, leading to a redshift in the absorption edge and a narrowing of the optical band gap, primarily attributed to the dominance of the band gap renormalization effect vs the Burstein-Moss effect. Simultaneously, oxygen incorporation enhanced near-infrared transmittance. Mg incorporation initially improved carrier mobility but further increases led to decreased mobility and increased sheet resistance. These findings highlight the complex interplay between oxygen content and Mg incorporation, significantly influencing the electrical and optical properties of IZO:Al and IZMO:Al films. Optimizing these parameters is crucial for achieving a balance of high transparency, low resistivity, and suitable band alignment, essential for their application as transparent conductive oxides in high-efficiency semiconductor devices such as tandem solar cells.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"828 ","pages":"Article 140793"},"PeriodicalIF":2.0,"publicationDate":"2025-09-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145061378","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fabrication of organic-inorganic hybrid thin films using sol-gel method to improve scratch resistance and anti-fouling of plastic substrates 溶胶-凝胶法制备有机-无机杂化薄膜,提高塑料基材的抗划伤性和防污性
IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Pub Date : 2025-09-09 DOI: 10.1016/j.tsf.2025.140791
Seung-Won Cho , Soon-Il Kwon , Sun-Woog Kim , Ji-Sun Lee , Sae-Hoon Kim , Jin-Ho Kim
Curved display cover windows are used to protect the display panel from external stimuli, which have gained attention in smart phone, monitor, and automotive industries in recent years. They require properties that can enhance the curved cover window such as scratch resistance, anti-fouling, transparency and so on. Thus, we report a simple method to fabricate an organic-inorganic hybrid coating film that can be applied to curved display cover window by the sol-gel process. This process has several advantages including low cost, low energy consumption, and easy coverage of large areas. The organic-inorganic hybrid coating solution was prepared by adding decyltrimethoxysilane (DTMS) and phenyl-trimethoxysilane (PTMS) to a solution synthesized based on metal alkoxide precursor (tetraethylsilcate (TEOS)) and alkoxy silanes (3-glycidoxypropyltrimethoxysilane (GPTMS)). The organic-inorganic hybrid all thin films fabricated on PMMA substrates by a dip coater showed high optical transparency of 92.0 to 93.3 % at 550 nm. In addition, the measured root mean square (RMS) roughness of the hybrid film was 2.18 nm or less. This indicates a very low surface roughness and confirms the fabrication of smooth films. Notably, the coating film with a TEOS:GPTMS:DTMS molar ratio of 1.0:0.1:0.1 coating film exhibited anti-fouling properties with high hydrophobicity of 95 ° water contact angle and 5H pencil hardness, which is expected to be coating film for application to the wide range of curved display industries.
曲面显示盖窗用于保护显示面板免受外界刺激,近年来在智能手机、显示器和汽车行业受到关注。他们要求能够增强曲面盖窗的性能,如抗刮擦、防污、透明度等。因此,我们报告了一种简单的方法,用溶胶-凝胶法制备了一种可以应用于曲面显示盖窗的有机-无机杂化涂层。该工艺具有成本低、能耗低、易于大面积覆盖等优点。以金属烷氧化物前驱体(硅酸四乙酯(TEOS))和烷氧基硅烷(3-甘氧基丙基三甲氧基硅烷(GPTMS))为原料,在溶液中加入癸基三甲氧基硅烷(DTMS)和苯基三甲氧基硅烷(PTMS),制备了有机无机杂化涂层溶液。在PMMA衬底上用浸渍涂布法制备的有机-无机杂化全薄膜在550 nm处具有92.0 ~ 93.3%的高光学透明度。此外,测量的杂化膜的均方根(RMS)粗糙度为2.18 nm或更小。这表明表面粗糙度非常低,并证实了光滑薄膜的制备。值得注意的是,TEOS:GPTMS:DTMS摩尔比为1.0:0.1:0.1的涂膜具有95°水接触角的高疏水性和5H铅笔硬度的防污性能,有望成为广泛应用于曲面显示行业的涂膜。
{"title":"Fabrication of organic-inorganic hybrid thin films using sol-gel method to improve scratch resistance and anti-fouling of plastic substrates","authors":"Seung-Won Cho ,&nbsp;Soon-Il Kwon ,&nbsp;Sun-Woog Kim ,&nbsp;Ji-Sun Lee ,&nbsp;Sae-Hoon Kim ,&nbsp;Jin-Ho Kim","doi":"10.1016/j.tsf.2025.140791","DOIUrl":"10.1016/j.tsf.2025.140791","url":null,"abstract":"<div><div>Curved display cover windows are used to protect the display panel from external stimuli, which have gained attention in smart phone, monitor, and automotive industries in recent years. They require properties that can enhance the curved cover window such as scratch resistance, anti-fouling, transparency and so on. Thus, we report a simple method to fabricate an organic-inorganic hybrid coating film that can be applied to curved display cover window by the sol-gel process. This process has several advantages including low cost, low energy consumption, and easy coverage of large areas. The organic-inorganic hybrid coating solution was prepared by adding decyltrimethoxysilane (DTMS) and phenyl-trimethoxysilane (PTMS) to a solution synthesized based on metal alkoxide precursor (tetraethylsilcate (TEOS)) and alkoxy silanes (3-glycidoxypropyltrimethoxysilane (GPTMS)). The organic-inorganic hybrid all thin films fabricated on PMMA substrates by a dip coater showed high optical transparency of 92.0 to 93.3 % at 550 nm. In addition, the measured root mean square (RMS) roughness of the hybrid film was 2.18 nm or less. This indicates a very low surface roughness and confirms the fabrication of smooth films. Notably, the coating film with a TEOS:GPTMS:DTMS molar ratio of 1.0:0.1:0.1 coating film exhibited anti-fouling properties with high hydrophobicity of 95 <sup>°</sup> water contact angle and 5H pencil hardness, which is expected to be coating film for application to the wide range of curved display industries.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"828 ","pages":"Article 140791"},"PeriodicalIF":2.0,"publicationDate":"2025-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145097638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Phase-coherent dilute ruthenium-enhanced cobalt films with improved thermal stability and breakdown strength for interconnect metallization 相参稀钌增强钴膜与改善热稳定性和击穿强度互连金属化
IF 2 4区 材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Pub Date : 2025-09-09 DOI: 10.1016/j.tsf.2025.140792
Yi-Yen Chen, Jun-Neng Zhan, Jau-Shiung Fang
Cobalt-ruthenium (Co(Ru)) alloy films with trace amount of Ru were synthesized on thermally oxidized silicon substrates via co-sputtering at 400 °C. Structural analyses confirmed the formation of fully miscible solid solutions in both hexagonal close-packed and face-centered cubic phases, with crystallinity significantly improved after annealing. All Co(Ru) films exhibited enhanced electrical reliability compared to pure Co, as evidenced by increased breakdown voltages. While resistivity increased slightly with higher Ru content due to solute-induced lattice distortion, the Co(Ru-1.28 at%) film achieved an optimal balance, exhibiting the lowest resistivity, excellent thermal stability, and a smooth, void-free surface after annealing at 700 °C. These findings indicate the dilute Ru incorporation as an effective strategy to enhance the structural integrity and electrical performance of Co-based thin films, highlighting Co(Ru) as a potential candidate for future interconnect applications in nanoscale semiconductor devices.
采用400℃共溅射的方法,在热氧化硅衬底上合成了含有微量Ru的钴-钌(Co(Ru))合金薄膜。结构分析证实,在六方密排相和面心立方相中均形成了完全混相的固溶体,退火后结晶度显著提高。与纯Co相比,所有Co(Ru)薄膜都表现出更高的电气可靠性,击穿电压增加证明了这一点。由于溶质引起的晶格畸变,随着Ru含量的增加,电阻率略有增加,而Co(Ru-1.28 at%)薄膜达到了最佳平衡,在700℃退火后表现出最低的电阻率、优异的热稳定性和光滑无空洞的表面。这些发现表明,稀释Ru的掺入是提高Co基薄膜结构完整性和电性能的有效策略,突出了Co(Ru)作为未来纳米级半导体器件互连应用的潜在候选者。
{"title":"Phase-coherent dilute ruthenium-enhanced cobalt films with improved thermal stability and breakdown strength for interconnect metallization","authors":"Yi-Yen Chen,&nbsp;Jun-Neng Zhan,&nbsp;Jau-Shiung Fang","doi":"10.1016/j.tsf.2025.140792","DOIUrl":"10.1016/j.tsf.2025.140792","url":null,"abstract":"<div><div>Cobalt-ruthenium (Co(Ru)) alloy films with trace amount of Ru were synthesized on thermally oxidized silicon substrates via co-sputtering at 400 °C. Structural analyses confirmed the formation of fully miscible solid solutions in both hexagonal close-packed and face-centered cubic phases, with crystallinity significantly improved after annealing. All Co(Ru) films exhibited enhanced electrical reliability compared to pure Co, as evidenced by increased breakdown voltages. While resistivity increased slightly with higher Ru content due to solute-induced lattice distortion, the Co(Ru-1.28 at%) film achieved an optimal balance, exhibiting the lowest resistivity, excellent thermal stability, and a smooth, void-free surface after annealing at 700 °C. These findings indicate the dilute Ru incorporation as an effective strategy to enhance the structural integrity and electrical performance of Co-based thin films, highlighting Co(Ru) as a potential candidate for future interconnect applications in nanoscale semiconductor devices.</div></div>","PeriodicalId":23182,"journal":{"name":"Thin Solid Films","volume":"828 ","pages":"Article 140792"},"PeriodicalIF":2.0,"publicationDate":"2025-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145048502","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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Thin Solid Films
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