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Semiconductor Thermal Measurement and Management IEEE Twenty First Annual IEEE Symposium, 2005.最新文献

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In-situ thickness method of measuring thermo-physical properties of polymer-like thermal interface materials [microelectronics cooling applications] 测量类聚合物热界面材料热物理性能的原位厚度法[微电子冷却应用]
R. A. Smith, R.J. Culharn
A critical property in understanding and accurately predicting the thermal resistance of polymer-like thermal interface joints in micro-electronic cooling applications is the bulk thermal conductivity of thermal interface materials (TIMs). A unique experimental test stand was developed and validated which accurately measures the in-situ thickness of a TIM sample in a vacuum during thermal resistance testing. The system has a resolution capability of /spl plusmn/ 1.0 /spl mu/m and is designed in such a manner as to continuously measure the true relative deflection of a TIM sample taking into account any mechanical and/or thermal deflections of the entire test stand. The data and analysis demonstrate that applying the current American standard test method (ASTM) ASTM D 5470 without accounting for in-situ thickness deviations can result in over estimating the bulk thermal conductivities for these types of materials by as much as 40%. These types of errors in fundamental material properties can cause the over-prediction of thermal heat flux in a system and an under-prediction of the temperatures of the system.
了解和准确预测微电子冷却应用中类聚合物热界面接头热阻的关键性质是热界面材料(TIMs)的体导热系数。开发并验证了一种独特的实验测试台,该测试台在热阻测试过程中可以准确地测量真空中TIM样品的原位厚度。该系统的分辨率为/spl plusmn/ 1.0 /spl mu/m,其设计方式是考虑到整个试验台的任何机械和/或热挠度,连续测量TIM样品的真实相对挠度。数据和分析表明,在不考虑原位厚度偏差的情况下,应用当前的美国标准测试方法(ASTM) ASTM D 5470可能导致对这些类型材料的体热导率的高估高达40%。这些类型的基本材料性质的误差会导致系统中热通量的过度预测和系统温度的不足预测。
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引用次数: 1
Thermal metrology of silicon microstructures using Raman spectroscopy 硅微结构的拉曼光谱热计量
M. R. Abel, T. L. Wright, W. King, S. Graham
The effects of temperature and stress on the Raman shift in single crystal silicon and polycrystalline silicon films were calibrated. Polysilicon films were grown by LPCVD using a range of temperatures to produce amorphous and crystalline materials followed by doping and annealing. The dependencies of the linear coefficients were related to the polysilicon microstructure using AFM surface scans to determine any possible links. Finally, the technique was utilized in measuring the temperature distribution in a thermal MEMS cantilever device with micron spatial resolution.
标定了温度和应力对单晶硅和多晶硅薄膜拉曼位移的影响。利用LPCVD在一定温度下生长多晶硅薄膜,得到非晶和结晶材料,然后掺杂和退火。线性系数的依赖关系与多晶硅微观结构有关,使用AFM表面扫描来确定任何可能的联系。最后,将该技术应用于微米空间分辨率的热MEMS悬臂器件的温度分布测量。
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引用次数: 51
A practical implementation of silicon microchannel coolers for high power chips 大功率芯片用硅微通道冷却器的实际实现
E. G. Colgan, B. Furman, M. Gaynes, W. Graham, N. LaBianca, J. H. Magerlein, R. J. Polastre, M. B. Rothwell, R. J. Bezama, R. Choudhary, K. Marston, H. Toy, J. Wakil, J. Zitz, R. Schmidt, Ibm Poughkeepsie
The paper describes a practical implementation of a single-phase Si microchannel cooler designed for cooling very high power chips such as microprocessors. Through the use of multiple heat exchanger zones and optimized cooler fin designs, a unit thermal resistance of 10.5 C-mm/sup 2//W from the cooler surface to the inlet water was demonstrated with a fluid pressure drop of less than 35 kPa. Further, cooling of a thermal test chip with a microchannel cooler bonded to it packaged in a single chip module was also demonstrated for a chip power density greater than 300 W/cm/sup 2/. Coolers of this design should be able to cool chips with average power densities of 400 W/cm/sup 2/ or more.
本文介绍了一种单相硅微通道冷却器的实际实现,其设计用于冷却非常高功率的芯片,如微处理器。通过采用多热交换区和优化冷却器翅片设计,在流体压降小于35 kPa的情况下,从冷却器表面到进水的单位热阻为10.5 C-mm/sup 2//W。此外,还演示了在单个芯片模块中封装微通道冷却器的热测试芯片的冷却,其芯片功率密度大于300 W/cm/sup /。这种设计的冷却器应该能够冷却平均功率密度为400 W/cm/sup /或更高的芯片。
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引用次数: 218
Extending the heat flux limit with enhanced microchannels in direct single-phase cooling of computer chips 用增强微通道扩展计算机芯片直接单相冷却的热流极限
S. Kandlikar, H. Upadhye
The high heat transfer coefficients in microchannels are attractive for direct cooling of computer chips requiring high heat-flux removal. However, this is associated with a severe pressure drop penalty. Channel size optimization therefore becomes necessary in selecting an appropriate channel geometry configuration. As the heat flux increases beyond about 2 MW/m/sup 2/, the heat transfer and pressure drop characteristics of the plain channels dictate the use of turbulent flow through the channels, which suffers from an excessive pressure drop penalty. It therefore becomes essential to incorporate enhancement features in the microchannels and multiple passes with shorter flow lengths to provide the desired solution. Results obtained from a theoretical analysis are presented as parametric plots for the heat transfer and pressure drop performance of a 10 mm/spl times/10 mm silicon chip incorporating plain microchannels. Enhanced microchannels with offset strip fins in single-pass and split-flow arrangements are also investigated. The results show that the enhanced structures are capable of dissipating heat fluxes extending beyond 3 MW/m/sup 2/ using water as the coolant in a split-flow arrangement with a core pressure drop of around 35 kPa.
微通道的高传热系数对于需要高热流通量的计算机芯片的直接冷却具有吸引力。然而,这与严重的压降损失有关。因此,在选择适当的通道几何结构时,通道尺寸优化变得必要。当热流密度超过约2 MW/m/sup /时,普通通道的传热和压降特性决定了通过通道的湍流,这将遭受过大的压降惩罚。因此,必须在微通道中加入增强功能,并使用更短的流长度进行多个通道,以提供所需的解决方案。通过理论分析得到的结果以参数图的形式展示了含有普通微通道的10mm /spl次/ 10mm硅片的传热和压降性能。在单通道和分流布置中,还研究了带有偏置带状翅片的增强微通道。结果表明,采用分流布置的水作为冷却剂,增强结构的散热能力超过3mw /m/sup 2/,堆芯压降约为35 kPa。
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引用次数: 109
Thermal transient characterization methodology for single-chip and stacked structures 单片和堆叠结构的热瞬态表征方法
O. Steffens, P. Szabó, M. Lenz, G. Farkas
High-power semiconductor packages typically exhibit a 3D heat flow, resulting in large lateral changes in chip and case surface temperature. For single-chip devices we propose to use an unambiguous definition for the junction-to-case thermal resistance as a key parameter, based on a transient measurement technique with much higher repeatability, also for very low thermal resistances compared to a two-point thermal resistance measurement. The technique is illustrated on thermal transient measurements of power MOSFETs. A comparison between different thermal coupling to the ambient is used to demonstrate the method's capability to reveal even subtle internal details of the package. The concept is extended to multichip and stacked-chip structures, where transfer impedances have to be introduced. Here, the dynamic properties of the package are important and complex impedance mapping is the proper way to characterize the package.
高功率半导体封装通常表现出3D热流,导致芯片和外壳表面温度的巨大横向变化。对于单芯片器件,我们建议使用结壳热阻的明确定义作为关键参数,该定义基于具有更高可重复性的瞬态测量技术,并且与两点热阻测量相比,也适用于非常低的热阻。以功率mosfet的热瞬态测量为例说明了该技术的应用。不同的热耦合环境之间的比较被用来证明该方法的能力,甚至揭示了微妙的内部细节的封装。这个概念被扩展到多芯片和堆叠芯片结构,在这些结构中必须引入传输阻抗。在这里,封装的动态特性是重要的,复杂的阻抗映射是表征封装的合适方法。
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引用次数: 55
Hierarchically nested channels for fast squeezing interfaces with reduced thermal resistance [IC cooling applications] 分层嵌套通道,用于减少热阻的快速挤压界面[IC冷却应用]
T. Brunschwiler, U. Kloter, R. Linderman, H. Rothuizen, B. Michel
We report a simple method to improve bondline formation kinetics by means of a hierarchical set of channels patterned into one of the surfaces. These channel arrays are used to improve the gap squeezing and cooling of single and multiple flip chip electronic modules with highly viscous fluids and thermal pastes. They allow a fast formation of thin gaps or bond lines by reducing the pressure gradient in the thermal interface material as it moves in and out of the gap. Models describing the dynamics of Newtonian fluids in these "hierarchically nested channel" (HNC) interfaces combine squeeze flow and Hagen-Poiseuille theories. Rapid bond line formation is demonstrated for Newtonian fluids and selected particle-filled pastes. Modeling of particle-laden polymeric pastes includes Bingham and Hershel-Bulkley fluid properties. Bond line formation and thermal resistance is improved particularly for high viscosity-high thermal conductivity interface materials created from higher volumetric particle loadings or for thermal interface materials with smaller filler particle diameters.
我们报告了一种简单的方法,通过一组分层的通道图案进入其中一个表面来改善键线形成动力学。这些通道阵列用于改善具有高粘性流体和热糊状物的单个和多个倒装电子模块的间隙挤压和冷却。通过减少热界面材料进出间隙时的压力梯度,它们可以快速形成薄间隙或键合线。描述这些“分层嵌套通道”(HNC)界面中牛顿流体动力学的模型结合了挤压流动和hagan - poiseuille理论。快速键线形成演示牛顿流体和选定的颗粒填充膏体。颗粒负载聚合物糊状物的建模包括Bingham和hershell - bulkley流体特性。结合线的形成和热阻得到了改善,特别是对于由更高体积颗粒负载产生的高粘度-高导热界面材料或具有较小填充颗粒直径的热界面材料。
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引用次数: 5
Two-resistor compact modeling for multiple die and multi-chip packages 多芯片和多芯片封装的双电阻紧凑建模
E. García, C. Chiu
Compact thermal models have been extremely valuable in the quick and simple analysis of electronic packages because of their simplicity in implementation and minimal computational resource requirement. The recent trends in the market resulted in an increasingly high level of complexity in electronic package design and thus the need for a simplistic approach to routine analysis. The key challenge has always been the derivation of highly accurate compact models. This paper presents detailed analysis of the two-resistance compact models for prediction of the thermal performance of stacked-die chip-scale packages. The compact models are compared to the detailed model under different boundary condition scenarios: still air environment (JESD51-2), ring cold plate test (JESD51-8), the top cold plate test, and a cell phone mock-up environment. Results of the analyses show good correlation between the two-resistance models and the detailed multi-die stacked packages considered. A representative four-resistance model for a two-package stack technology has been demonstrated to provide accurate results in different environments.
紧凑热模型在电子封装的快速和简单分析中非常有价值,因为它们实现简单,计算资源需求最小。最近的市场趋势导致电子封装设计的复杂性越来越高,因此需要一种简单的方法来进行常规分析。关键的挑战一直是推导高度精确的紧凑模型。本文详细分析了用于芯片级封装热性能预测的双电阻紧凑模型。在静空气环境(JESD51-2)、环形冷板测试(JESD51-8)、顶部冷板测试和手机模拟环境等不同边界条件下,将紧凑模型与详细模型进行对比。分析结果表明,双电阻模型与所考虑的详细多晶片堆叠封装具有良好的相关性。双封装堆叠技术的典型四电阻模型已被证明可以在不同环境下提供准确的结果。
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引用次数: 17
High-performance liquid metal cooling loops 高性能液态金属冷却回路
U. Ghoshal, D. Grimm, S. Ibrani, C. Johnston, A. Miner
We present a single-phase liquid cooling technology that exploits the highly conducting nature and superior thermophysical properties of liquid metals to cool high density power sources (>200 Wcm/sup -2/) with very high heat transfer coefficients (/spl sim/20 Wcm/sup -2/K/sup -1/), and pump the liquid metals using power-efficient, non-moving, gravity/orientation independent magnetofluiddynamic (MFD) pumps. We have implemented and characterized this cooling scheme using miniature (<5 cm/sup 3/) pumps operating at 25 kPa maximum pressure head and 10% efficiencies in a variety of computing applications including mobile notebooks, desktops, and servers.
我们提出了一种单相液体冷却技术,该技术利用液态金属的高导电性和优越的热物理特性来冷却具有极高传热系数(/spl sim/20 Wcm/sup -2/K/sup -1/)的高密度电源(>200 Wcm/sup -2/),并使用节能、不移动、不依赖重力/定向的磁流体动力学(MFD)泵浦液态金属。我们已经在各种计算应用(包括移动笔记本电脑、台式机和服务器)中使用了小型(<5 cm/sup /)泵,最大压头为25 kPa,效率为10%,并实现了这种冷却方案。
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引用次数: 45
Experimental characterization of pressure loss through EMI shields and 1RU card passages in dense electronic enclosures 密集电子外壳中EMI屏蔽和1RU卡通道压力损失的实验表征
C. Akella, A. Ortega
Experimental measurements were made of the overall pressure loss coefficients of individual EMI shield samples and various printed circuit boards in a 1RU channel. The loss coefficients of the boards were highly dependent on electronic component population density. The loss coefficients of the grill samples compared surprisingly well with literature data for perforated plates, despite being taken at much lower Reynolds number than the literature data. Assemblies of printed circuit boards with upstream and downstream grills were predicted well by a 1D flow network model, but it appears that the upstream grill may influence the losses across the downstream board. The individually measured loss coefficients were used in a flow network model of an entire 9RU enclosure, with and without a fan tray present. The 1D predictions were generally adequate, except in the case with a deadlocked fan tray placed in front of the exit grill. This may be because the fan tray has a significant influence on the loss coefficient of the exit grill. The data generally showed that turbulence and flow non-uniformity generated by upstream components may influence the loss coefficients of downstream components. These interactions are generally not captured by standard 1D modeling approaches.
实验测量了单个EMI屏蔽样品和各种印刷电路板在1RU通道中的总压力损失系数。电路板的损耗系数高度依赖于电子元件的密度。尽管采用的是比文献数据低得多的雷诺数,但格栅样品的损失系数与穿孔板的文献数据相比惊人地好。一维流网络模型可以很好地预测带有上游和下游格栅的印刷电路板组件,但上游格栅可能会影响整个下游电路板的损耗。单独测量的损失系数用于整个9RU机箱的流动网络模型,无论是否存在风扇托盘。1D预测总体上是足够的,除了在出口格栅前面放置了一个风扇托盘。这可能是因为风机盘对出口格栅的损失系数有很大的影响。数据普遍表明,上游构件产生的湍流和流动不均匀性会影响下游构件的损失系数。标准的一维建模方法通常无法捕捉到这些相互作用。
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引用次数: 4
Evaluation of high performance thermal greases for CPU package cooling applications CPU封装冷却应用的高性能热润滑脂的评估
M. Stern, V. Gektin, S. Pecavar, D. Kearns, T. Chen
High performance thermal greases have been evaluated in three separate environments: ideal laboratory, in situ laboratory, and system mockup testing to better understand how bulk and interfacial thermal properties, in combination with the test vehicles used, effect the resultant thermal performance. The three methodologies are described and measurements on a baseline material reported.
高性能热润滑脂在三种不同的环境下进行了评估:理想实验室、现场实验室和系统模型测试,以更好地了解总体和界面热性能,以及所使用的测试工具对最终热性能的影响。描述了这三种方法,并报告了基线材料的测量结果。
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引用次数: 5
期刊
Semiconductor Thermal Measurement and Management IEEE Twenty First Annual IEEE Symposium, 2005.
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