Pub Date : 2014-04-01DOI: 10.1109/DTIP.2014.7056633
De-Shau Huang, Ming-Tzer Lin, Yi-Sheng Liao, Feng-Chih Hsu, Y. Wang, Fang-Jui kuo
Flat panel displays (FPD) are becoming thinner and lighter, and edge-lit backlight modules are gradually replacing direct-lit devices. The number of LEDs is being reduced and high-power LEDs are increasingly being used for illumination. The effectiveness of free convection in the dissipation of heat generated from LEDs is limited in such constricted spaces, resulting in a loss of luminosity and a reduction in the lifespan of the LED devices. In this study, the experimental measurement and simulation of the 8-Watt edge-lit LED backlight module with 40 LEDs in 740 mm* 425 mm* 12 mm size was conducted. This study investigated heat dissipation using ANSYS simulation software, the results of which were in agreement with the experimental data, with a difference of only 1.6°C in the maximum temperature. The edge-lit LED backlight module with heat dissipation mechanism was estimated by using the proposed model. The result demonstrated that the maximum temperature of the heat sink with fins was lower 3°C than without fins. A design of heat sink with fins is contributed to reducing LED temperature. In addition, Taguchi method was introduced for seeking the optimal configurations of heat sink by using the proposed model. In the study, 4 control factors with 2 degree levels, (A) heat transfer pattern on heat sink surface, (B) the thickness of heat sink, (C) the width of heat sink and (D) fin area, were considered. The results indicated that heat sink area with 2.4 mm thick and 60 mm wide, and heat sink with a fin area of 16682 mm2 provided optimal heat dissipation efficiency under the given convection conditions. This study provides an effective approach with which to evaluate thermal management in edge-lit LED backlight modules, thereby reducing the time required for development.
{"title":"Evaluating heat dissipation in edge-lit LED backlight module using Taguchi method","authors":"De-Shau Huang, Ming-Tzer Lin, Yi-Sheng Liao, Feng-Chih Hsu, Y. Wang, Fang-Jui kuo","doi":"10.1109/DTIP.2014.7056633","DOIUrl":"https://doi.org/10.1109/DTIP.2014.7056633","url":null,"abstract":"Flat panel displays (FPD) are becoming thinner and lighter, and edge-lit backlight modules are gradually replacing direct-lit devices. The number of LEDs is being reduced and high-power LEDs are increasingly being used for illumination. The effectiveness of free convection in the dissipation of heat generated from LEDs is limited in such constricted spaces, resulting in a loss of luminosity and a reduction in the lifespan of the LED devices. In this study, the experimental measurement and simulation of the 8-Watt edge-lit LED backlight module with 40 LEDs in 740 mm* 425 mm* 12 mm size was conducted. This study investigated heat dissipation using ANSYS simulation software, the results of which were in agreement with the experimental data, with a difference of only 1.6°C in the maximum temperature. The edge-lit LED backlight module with heat dissipation mechanism was estimated by using the proposed model. The result demonstrated that the maximum temperature of the heat sink with fins was lower 3°C than without fins. A design of heat sink with fins is contributed to reducing LED temperature. In addition, Taguchi method was introduced for seeking the optimal configurations of heat sink by using the proposed model. In the study, 4 control factors with 2 degree levels, (A) heat transfer pattern on heat sink surface, (B) the thickness of heat sink, (C) the width of heat sink and (D) fin area, were considered. The results indicated that heat sink area with 2.4 mm thick and 60 mm wide, and heat sink with a fin area of 16682 mm2 provided optimal heat dissipation efficiency under the given convection conditions. This study provides an effective approach with which to evaluate thermal management in edge-lit LED backlight modules, thereby reducing the time required for development.","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133472395","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-01DOI: 10.1109/DTIP.2014.7056672
A. Garraud, B. Kozissnik, Camilo Velez, E. G. Yarmola, L. Maldonado-Camargo, Carlos Rinaldi, Kyle D. Allen, Jon Dobson, David P. Arnold
In this paper, the collection of magnetic particles from synovial fluid using Nd-Fe-B micromagnets is quantitatively studied to determine the influence of fluid viscosity and magnet geometry on the velocity distribution and collection rate. Magnetic capture is validated in highly viscous fluids, such as bovine synovial fluid (η~ 1 Pa·s). A first-order theoretical model has been developed to predict the particle motion, as well as a numerical multiphysics model. Both models exhibit good agreement with in vitro experimental magnetic collection results. The velocity of the magnetic particles is shown to be inversely proportional to fluid viscosity, and two magnetic structures are compared in term of collection efficiency: a cylindrical Nd-Fe-B permanent magnet and a laser-machined conical Nd-Fe-B permanent magnet.
{"title":"Collection of magnetic particles from synovial fluid using Nd-Fe-B micromagnets","authors":"A. Garraud, B. Kozissnik, Camilo Velez, E. G. Yarmola, L. Maldonado-Camargo, Carlos Rinaldi, Kyle D. Allen, Jon Dobson, David P. Arnold","doi":"10.1109/DTIP.2014.7056672","DOIUrl":"https://doi.org/10.1109/DTIP.2014.7056672","url":null,"abstract":"In this paper, the collection of magnetic particles from synovial fluid using Nd-Fe-B micromagnets is quantitatively studied to determine the influence of fluid viscosity and magnet geometry on the velocity distribution and collection rate. Magnetic capture is validated in highly viscous fluids, such as bovine synovial fluid (η~ 1 Pa·s). A first-order theoretical model has been developed to predict the particle motion, as well as a numerical multiphysics model. Both models exhibit good agreement with in vitro experimental magnetic collection results. The velocity of the magnetic particles is shown to be inversely proportional to fluid viscosity, and two magnetic structures are compared in term of collection efficiency: a cylindrical Nd-Fe-B permanent magnet and a laser-machined conical Nd-Fe-B permanent magnet.","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114898718","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-01DOI: 10.1109/DTIP.2014.7056670
I. Mori, M. Kubota, E. Lebrasseur, Y. Mita
A small autonomous device integrating MEMS, CMOS and photovoltaic (PV) cells has many attractive applications. For such a device, using light as a power source is preferable because power feeding and control signal transmitting can be done at the same time and in a remote manner. We demonstrated the remote power feeding to a MEMS actuator by light using PV cell array. In this article, we first proposed a new dry release method of MEMS structure for a CMOS-MEMS-PV integration. The method does not require vapor HF and thus we can avoid damage to CMOS circuits. We demonstrated the method by releasing MEMS cantilevers. Next, we prepared a PV cell array integrable with CMOS and MEMS. Its open circuit voltage was 58 V and its maximum power was 43.3 μW. We conducted an experiment to drive a MEMS comb drive actuator remotely, irradiating laser light from the distance of 1.5 m. The PV cell array successfully fed power and the actuator moved 1.0 μm, two-thirds of the calculated value.
{"title":"Remote power feed and control of MEMS with 58 V silicon photovoltaic cell made by a CMOS post-process dry release and device isolation method","authors":"I. Mori, M. Kubota, E. Lebrasseur, Y. Mita","doi":"10.1109/DTIP.2014.7056670","DOIUrl":"https://doi.org/10.1109/DTIP.2014.7056670","url":null,"abstract":"A small autonomous device integrating MEMS, CMOS and photovoltaic (PV) cells has many attractive applications. For such a device, using light as a power source is preferable because power feeding and control signal transmitting can be done at the same time and in a remote manner. We demonstrated the remote power feeding to a MEMS actuator by light using PV cell array. In this article, we first proposed a new dry release method of MEMS structure for a CMOS-MEMS-PV integration. The method does not require vapor HF and thus we can avoid damage to CMOS circuits. We demonstrated the method by releasing MEMS cantilevers. Next, we prepared a PV cell array integrable with CMOS and MEMS. Its open circuit voltage was 58 V and its maximum power was 43.3 μW. We conducted an experiment to drive a MEMS comb drive actuator remotely, irradiating laser light from the distance of 1.5 m. The PV cell array successfully fed power and the actuator moved 1.0 μm, two-thirds of the calculated value.","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"222 4","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133204371","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-01DOI: 10.1109/DTIP.2014.7056701
Z. Sárkány, M. Rencz
In this article a method is presented for the calculation of structural and thermal parameters from thermal transient measurement results in order to be used as input data for thermal stress simulation. It is shown how the geometry of the internal structure of the package and the temperature distribution can be approximated from the thermal response function measured after switching on a heating element in the package.
{"title":"Determination of the severity of thermal stress using model data calculated from thermal transient results","authors":"Z. Sárkány, M. Rencz","doi":"10.1109/DTIP.2014.7056701","DOIUrl":"https://doi.org/10.1109/DTIP.2014.7056701","url":null,"abstract":"In this article a method is presented for the calculation of structural and thermal parameters from thermal transient measurement results in order to be used as input data for thermal stress simulation. It is shown how the geometry of the internal structure of the package and the temperature distribution can be approximated from the thermal response function measured after switching on a heating element in the package.","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133273083","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-01DOI: 10.1109/DTIP.2014.7056642
A. Garraud, S. Nadar, A. Giani, P. Combette
We present a characterization study to develop self-polarized, highly pyroelectric lithium tantalate thin films obtained by RF magnetron sputtering. A preliminary work is done on the bottom electrode to reduce short-term variations of the pyroelectric behavior. Then, the influence of pressure and of deposition temperature is studied to determine the best set of parameters as to obtain a large pyroelectric behavior. The crystalline structure modification as well as the influence on the pyroelectric coefficient have been studied in each case. An as-deposited pyroelectric coefficient as high as 32 μC.m-2.K-1 has been obtained for the optimal set of pressure (2 mTorr) and temperature (630 °C).
{"title":"Self-polarized pyroelectric LiTaO3 thin films","authors":"A. Garraud, S. Nadar, A. Giani, P. Combette","doi":"10.1109/DTIP.2014.7056642","DOIUrl":"https://doi.org/10.1109/DTIP.2014.7056642","url":null,"abstract":"We present a characterization study to develop self-polarized, highly pyroelectric lithium tantalate thin films obtained by RF magnetron sputtering. A preliminary work is done on the bottom electrode to reduce short-term variations of the pyroelectric behavior. Then, the influence of pressure and of deposition temperature is studied to determine the best set of parameters as to obtain a large pyroelectric behavior. The crystalline structure modification as well as the influence on the pyroelectric coefficient have been studied in each case. An as-deposited pyroelectric coefficient as high as 32 μC.m-2.K-1 has been obtained for the optimal set of pressure (2 mTorr) and temperature (630 °C).","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124767709","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-01DOI: 10.1109/DTIP.2014.7056643
D. Yamane, T. Matsushima, T. Konishi, H. Toshiyoshi, K. Machida, K. Masu
This paper reports a novel dual-axis MEMS inertial sensor that utilizes multi-layered electroplated gold. All the MEMS structures are made by gold electroplating that is used as post-CMOS process. Due to the high density of gold, the Brownian noise on the proof mass becomes lower than those made of other materials in the same size. The miniaturized MEMS accelerometer can be integrated in an arrayed CMOS-MEMS accelerometer to detect a broad range of acceleration on a single sensor chip.
{"title":"A dual-axis MEMS inertial sensor using multi-layered high-density metal for an arrayed CMOS-MEMS accelerometer","authors":"D. Yamane, T. Matsushima, T. Konishi, H. Toshiyoshi, K. Machida, K. Masu","doi":"10.1109/DTIP.2014.7056643","DOIUrl":"https://doi.org/10.1109/DTIP.2014.7056643","url":null,"abstract":"This paper reports a novel dual-axis MEMS inertial sensor that utilizes multi-layered electroplated gold. All the MEMS structures are made by gold electroplating that is used as post-CMOS process. Due to the high density of gold, the Brownian noise on the proof mass becomes lower than those made of other materials in the same size. The miniaturized MEMS accelerometer can be integrated in an arrayed CMOS-MEMS accelerometer to detect a broad range of acceleration on a single sensor chip.","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127172005","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-01DOI: 10.1109/DTIP.2014.7056690
G. Vidal-Álvarez, F. Torres, N. Barniol, O. Gottlieb
The influence of the parasitic current on the nonlinear electrical response of capacitive sensed cantilever beams is analyzed both theoretically and experimentally. We show that the parasitic current strongly affects the shape of the nonlinear electrical response of the aforementioned devices. Specifically, we demonstrate that in the electrical measurement, the direction of the jumps from the different transitions between branches of stable solutions, depend on the value of the parasitic current and is independent of the direction of the jump in the mechanical domain.
{"title":"The influence of the parasitic current on the nonlinear electrical response of capacitive sensed cantilever beams","authors":"G. Vidal-Álvarez, F. Torres, N. Barniol, O. Gottlieb","doi":"10.1109/DTIP.2014.7056690","DOIUrl":"https://doi.org/10.1109/DTIP.2014.7056690","url":null,"abstract":"The influence of the parasitic current on the nonlinear electrical response of capacitive sensed cantilever beams is analyzed both theoretically and experimentally. We show that the parasitic current strongly affects the shape of the nonlinear electrical response of the aforementioned devices. Specifically, we demonstrate that in the electrical measurement, the direction of the jumps from the different transitions between branches of stable solutions, depend on the value of the parasitic current and is independent of the direction of the jump in the mechanical domain.","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129514781","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-01DOI: 10.1109/DTIP.2014.7056668
P. R. Pudasaini, A. Ayón, Manisha Sharma
Organic/inorganic hybrid Schottky solar cells based on p-type conductive polymer poly(3,4-ethylenedioxythiophene): poly (sty renesulfonate) (PEDOT:PSS) in conjunction with n-type silicon substrates offer the merits of simple fabrication process and potential for lower cost. Here, we report an efficient organic/inorganic hybrid photovoltaic (PV) device based on silicon nanopillar arrays and PEDOT:PSS. The described device was fabricated by spin coating the organic polymer PEDOT:PSS on a silicon nanopillar (SiNP) array textured surface. The fabricated devices were characterized by collecting the current density-voltage and capacitance-voltage measurements. For the optimized geometry of the device, a promising power conversion efficiency (PCE) in excess of 10.50% has been achieved. The described device paves a promising way for developing low-cost, relatively high efficiency PV device in the future.
{"title":"Electrical characterization of organic/inorganic hybrid solar cells based on silicon nanopillars-poly(3,4-ethylenedioxythiophene):Poly(styrenesulfonate)","authors":"P. R. Pudasaini, A. Ayón, Manisha Sharma","doi":"10.1109/DTIP.2014.7056668","DOIUrl":"https://doi.org/10.1109/DTIP.2014.7056668","url":null,"abstract":"Organic/inorganic hybrid Schottky solar cells based on p-type conductive polymer poly(3,4-ethylenedioxythiophene): poly (sty renesulfonate) (PEDOT:PSS) in conjunction with n-type silicon substrates offer the merits of simple fabrication process and potential for lower cost. Here, we report an efficient organic/inorganic hybrid photovoltaic (PV) device based on silicon nanopillar arrays and PEDOT:PSS. The described device was fabricated by spin coating the organic polymer PEDOT:PSS on a silicon nanopillar (SiNP) array textured surface. The fabricated devices were characterized by collecting the current density-voltage and capacitance-voltage measurements. For the optimized geometry of the device, a promising power conversion efficiency (PCE) in excess of 10.50% has been achieved. The described device paves a promising way for developing low-cost, relatively high efficiency PV device in the future.","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127848761","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-01DOI: 10.1109/DTIP.2014.7056699
Nina Menant, X. Lafontan, D. Faye, D. Lellouchi, P. Nouet
Cleanrooms are classified by the cleanliness of air and surface. Classification defined by ISO 14644-1 and 14644-9 is given by the number of particle larger than a critical size in a quantity of volume or surface. No reliable data give the correlation between the air and surface particulate contamination. Various environmental parameters and operating factors determine the particle deposition rate in cleanrooms. The particle deposition real-time monitoring is a concern for numerous application fields such as microelectronics, imaging devices, pharmaceutical industries, agribusiness and space where the risk of contamination by sedimentation of particle is critical for sensitive instruments. New developments in the field of particle deposition monitoring devices are necessary to better classify cleanrooms and improve the control of the cleanliness of surfaces.
{"title":"Monitoring of particle deposition in cleanrooms: State-of-the-art","authors":"Nina Menant, X. Lafontan, D. Faye, D. Lellouchi, P. Nouet","doi":"10.1109/DTIP.2014.7056699","DOIUrl":"https://doi.org/10.1109/DTIP.2014.7056699","url":null,"abstract":"Cleanrooms are classified by the cleanliness of air and surface. Classification defined by ISO 14644-1 and 14644-9 is given by the number of particle larger than a critical size in a quantity of volume or surface. No reliable data give the correlation between the air and surface particulate contamination. Various environmental parameters and operating factors determine the particle deposition rate in cleanrooms. The particle deposition real-time monitoring is a concern for numerous application fields such as microelectronics, imaging devices, pharmaceutical industries, agribusiness and space where the risk of contamination by sedimentation of particle is critical for sensitive instruments. New developments in the field of particle deposition monitoring devices are necessary to better classify cleanrooms and improve the control of the cleanliness of surfaces.","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117068449","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2014-04-01DOI: 10.1109/DTIP.2014.7056682
P. Harte, E. Blokhina, O. Feely, D. Galayko
This work presents a review of an electrostatic vibration energy harvester (eVEH) which lends itself to micro-scale implementation using MEMS technology. This is a fundamental system which has two modes of operation, constant-charge or constant-voltage. It is an inherently nonlinear system which displays both classic nonlinear behaviour along with sliding behaviour regardless of mode of operation. The appearance of this behaviour is explained and techniques to study it are introduced. These not only provide fundamental information about eVEHs but also aid MEMS/NEMS designers with future designs of such systems.
{"title":"The nonlinear dynamics of a micro-scale electrostatic vibration energy harvester","authors":"P. Harte, E. Blokhina, O. Feely, D. Galayko","doi":"10.1109/DTIP.2014.7056682","DOIUrl":"https://doi.org/10.1109/DTIP.2014.7056682","url":null,"abstract":"This work presents a review of an electrostatic vibration energy harvester (eVEH) which lends itself to micro-scale implementation using MEMS technology. This is a fundamental system which has two modes of operation, constant-charge or constant-voltage. It is an inherently nonlinear system which displays both classic nonlinear behaviour along with sliding behaviour regardless of mode of operation. The appearance of this behaviour is explained and techniques to study it are introduced. These not only provide fundamental information about eVEHs but also aid MEMS/NEMS designers with future designs of such systems.","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123099177","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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