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2014 14th Annual Non-Volatile Memory Technology Symposium (NVMTS)最新文献

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Adjustable voltage dependent switching characteristics of PRAM for low voltage programming of multi-level resistances 用于多级电阻低电压编程的PRAM可调电压依赖开关特性
Pub Date : 2014-10-01 DOI: 10.1109/NVMTS.2014.7060862
Gwihyun Kim, Sanghyun Lee, Seungwoo Hong, S. Baik, Hideki Hori, D. Ahn
Low voltage programming of multi-level-cell phase change random access memory (MLC PRAM) is important for future low power high density applications of PRAM devices [1]. We have characterized voltage dependent resistance switching characteristics of PRAM devices with various voltage pulses, based on which a dual-pulse programming method is systematically proposed to demonstrate some principles of low voltage MLC programming. A microstructural model is also introduced to provide a comprehensive explanation of resistance swiching for various voltage pulses.
多电平单元相变随机存取存储器(MLC PRAM)的低压编程对于PRAM器件未来的低功耗高密度应用具有重要意义[1]。研究了不同电压脉冲下PRAM器件的电压依赖电阻开关特性,在此基础上系统地提出了一种双脉冲编程方法,以演示低压MLC编程的一些原理。本文还介绍了一个微观结构模型,对各种电压脉冲的电阻切换提供了一个全面的解释。
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引用次数: 1
Effect of nitrogen-doped GST buffer layer on switching characteristics of conductive-bridging RAM 掺氮GST缓冲层对电导桥接RAM开关特性的影响
Pub Date : 2014-10-01 DOI: 10.1109/NVMTS.2014.7060857
Seokjae Lim, Sangheon Lee, J. Woo, Daeseok Lee, Jaesung Park, Jeonghwan Song, Kibong Moon, Jaehyuk Park, A. Prakash, H. Hwang
We demonstrate the device characteristics of W/Cu/N-GST/Al2O3/Pt conductive-bridging RAM, focusing on the nitrogen-doped Ge2Sb2Te5 buffer layer to realize non-volatile memory applications. The on/off ratio of typical Cu/Al2O3-based CBRAM was improved from 102 to 105 with the N-GST buffer layer. The switching uniformity also improved compared to that of a non-buffer layer device. The improved properties that were realized are attributed to the effects of buffer layer such as controlled Cu-ion injection, internal resistor, and Joule heating confinement during the reset process. Furthermore, to verify the effect of nitrogen on the switching properties, we compared the GST and N-GST buffer layers. We believe that doped nitrogen helped to control Cu-ion injection into the resistive switching layer, and to confine the joule heating during the reset process, enabling a high on/off ratio and improved switching uniformity.
我们展示了W/Cu/N-GST/Al2O3/Pt导电桥接RAM的器件特性,重点介绍了氮掺杂的Ge2Sb2Te5缓冲层,以实现非易失性存储应用。N-GST缓冲层使典型Cu/ al2o3基CBRAM的通/关比从102提高到105。与非缓冲层器件相比,开关均匀性也得到了改善。由于缓冲层的作用,如可控的cu离子注入、内部电阻和复位过程中的焦耳加热限制,实现了性能的改善。此外,为了验证氮对开关性能的影响,我们比较了GST和N-GST缓冲层。我们认为,掺杂氮有助于控制cu离子注入到电阻开关层,并限制复位过程中的焦耳加热,从而实现高开/关比和改善开关均匀性。
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引用次数: 1
Ferroelectric Hafnium Oxide A Game Changer to FRAM? 铁电氧化铪:FRAM的颠覆者?
Pub Date : 2014-10-01 DOI: 10.1109/NVMTS.2014.7060838
J. Muller, P. Polakowski, S. Riedel, S. Mueller, E. Yurchuk, T. Mikolajick
In this paper the potential of hafnium oxide as a CMOS-compatible ferroelectric for future memory applications is assessed. The high coercive field strength of ferroelectric hafnium oxide is identified as a key parameter being crucial to device performance. It provides the unique thickness and lateral scaling potential of this novel ferroelectric, while at the same time compromises its endurance properties due to large switching fields. Considering the ambivalent nature of this parameter as well as the emerging trade-off between retention and endurance, voltage controlled operation modes and different device concepts for ferroelectric hafnium oxide are discussed.
本文评估了氧化铪作为cmos兼容铁电材料在未来存储器应用中的潜力。铁电氧化铪的高矫顽力场强是影响器件性能的关键参数。它提供了这种新型铁电材料的独特厚度和横向结垢潜力,同时由于大开关场而损害了其持久性能。考虑到该参数的矛盾性质,以及在保持和持久之间出现的权衡,讨论了电压控制的工作模式和铁电氧化铪的不同器件概念。
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引用次数: 14
A high-performance solid-state drive by garbage collection overhead suppression 一种采用垃圾回收开销抑制的高性能固态硬盘
Pub Date : 2014-10-01 DOI: 10.1109/NVMTS.2014.7060855
Tomoaki Yamada, Chao Sun, K. Takeuchi
Currently, solid-state drives (SSDs) are replacing hard-disk drives (HDDs) in many applications. However, SSDs write performance is low because of the NAND flash memory's characteristics. Particularly, the garbage collection (GC) page-copy overhead for the valid data greatly degrades the SSD performance. To suppress this overhead with the address remapping technology, a middleware, LBA scrambler, is proposed [3]. We evaluated the effects of the LBA scrambler with the Ext4 file system (FS). From the experimental results, the SSD performance is boosted by 20.0% with the assistance of the LBA scrambler, compared with the conventional system without LBA scrambler. Moreover, the total SSD energy consumption is reduced by 4.33% while its lifetime is enhanced by 3.56%.
目前,在许多应用中,固态硬盘(ssd)正在取代硬盘驱动器(hdd)。然而,由于NAND闪存的特性,ssd的写入性能较低。特别是,有效数据的垃圾收集(GC)页复制开销大大降低了SSD的性能。为了利用地址重映射技术抑制这种开销,提出了一种中间件LBA扰频器[3]。我们用Ext4文件系统(FS)评估了LBA扰频器的效果。实验结果表明,与不加LBA扰频器的传统系统相比,加入LBA扰频器后,SSD的性能提高了20.0%。SSD总能耗降低4.33%,寿命延长3.56%。
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引用次数: 1
Effect of TiOx-based tunnel barrier on non-linearity and switching reliability of resistive random access memory 基于tiox的隧道阻挡层对电阻式随机存取存储器非线性和开关可靠性的影响
Pub Date : 2014-10-01 DOI: 10.1109/NVMTS.2014.7060861
Sangheon Lee, Daeseok Lee, J. Woo, E. Cha, Jeonghwan Song, Jaesung Park, Kibong Moon, Y. Koo, Seokjae Lim, Jaehyuk Park, A. Prakash, H. Hwang
In this paper, the effect of the titanium oxide-based tunnel barrier on the non-linearity and switching uniformity of resistive random access memory has been investigated with the object of achieving excellent device non-linearity and reliability for cross-point array applications. To form the tunnel barrier of titanium oxide, its thickness was engineered using the deposition time. The tunnel barrier effectively controls the current flow in the devices with a tunneling mechanism that modifies the tunnel barrier thickness for non-linearity and switching reliability of devices. The tunnel barrier controls the current behavior of the device because most of the bias is applied to the tunnel barrier owing to its dominant resistance state. In addition, the tunnel barrier can exhibit uniform resistive switching during the set operation with the controlled current flow.
本文研究了氧化钛基隧道势垒对电阻式随机存取存储器非线性和开关均匀性的影响,目的是在交叉点阵列应用中实现优异的器件非线性和可靠性。利用沉积时间对氧化钛的厚度进行设计,形成隧道屏障。隧道势垒通过改变隧道势垒厚度的隧穿机制,有效地控制了器件中的电流,提高了器件的非线性和开关可靠性。隧道势垒控制着器件的电流行为,因为由于隧道势垒的主导电阻状态,大部分偏置都施加在隧道势垒上。此外,在控制电流的情况下,隧道势垒在设定的操作过程中可以表现出均匀的电阻开关。
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引用次数: 1
A fast dry etching of magnetic tunnel junction using a new plasma source 用一种新的等离子体源快速干蚀刻磁性隧道结
Pub Date : 2014-10-01 DOI: 10.1109/NVMTS.2014.7060848
K. Whang, H. Cheong, J. W. Kim
We have developed a new plasma reactor which can generate high density plasma at low neutral gas pressure. The ion current density in the new plasma reactor is more than ten times higher than that in the conventional inductively coupled plasma (ICP) reactor at neutral gas pressure lower than 1mTorr. It is remarkable that 25nm-thick magnetic tunnel junction (MTJ) stack can be etched and a 26nm-depth oxide recess can be formed within 40 seconds with the newly designed plasma reactor.
我们研制了一种新型等离子体反应器,可以在低中性气压力下产生高密度等离子体。在中性气压力低于1mTorr的情况下,新型等离子体反应器中的离子电流密度比传统电感耦合等离子体(ICP)反应器高10倍以上。结果表明,该等离子体反应器可在40秒内刻蚀出厚度为25nm的磁隧道结(MTJ)层,并形成厚度为26nm的氧化凹槽。
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引用次数: 0
Charge trap length dependence and transconductance characteristics of a 2T SONOS cell 2T SONOS电池的电荷阱长度依赖性和跨导特性
Pub Date : 2014-10-01 DOI: 10.1109/NVMTS.2014.7060859
Tae-Ho Lee, Young-Jun Kwon, Jae-Gwan Kim, Sung-Kun Park, I. Cho, K. Yoo, Ji-Song Lim, Da-Som Kim, W. Choi, G. Yoon
In this paper, the program and erase characteristics of a two-transistor (2T) SONOS nonvolatile memory (NVM) cell have been described by using one-shot simulations and device simulations. In addition, a mismatched charge distribution between electrons and holes has been verified through measurements and device simulations. The program and erase (P/E) operations are performed through channel hot electron injection (CHEI) and band to band tunneling induced hot hole injection (BTBT-HHI), respectively. Because a complete erase operation can't be achieved with longer control gate (CG) lengths, the optimized CG length is a key factor in the 2T SONOS device. The proposed cell uses the whole channel to achieve good reliability during the program and erase operations. Nevertheless, it is strongly suspected that excess electrons might gradually build up in the nitride layer toward the source junction because of spatial mismatches of the injected electrons and holes during P/E cycles. This phenomenon of electron build-up has been confirmed through both device simulations and real measurements of the gate length dependence of the program and erase speeds. As a result of gradual accumulation of electrons, the cell transconductance (Gm) continues to become reduced. The degraded Gm value is also observed to be noticeably improved after a process of bake retention.
本文采用单次模拟和器件模拟的方法,描述了双晶体管(2T) SONOS非易失性存储器(NVM)单元的编程和擦除特性。此外,通过测量和设备模拟验证了电子和空穴之间不匹配的电荷分布。程序和擦除(P/E)操作分别通过通道热电子注入(CHEI)和带间隧道诱导热孔注入(BTBT-HHI)进行。由于较长的控制栅极(CG)长度无法实现完整的擦除操作,因此优化的CG长度是2T SONOS器件的关键因素。该单元利用整个信道在程序和擦除操作期间实现良好的可靠性。然而,我们强烈怀疑,在P/E循环过程中,由于注入的电子和空穴的空间不匹配,过量的电子可能逐渐在氮化层中向源结处积聚。通过器件模拟和栅极长度对程序和擦除速度的依赖的实际测量,证实了这种电子积聚现象。由于电子的逐渐积累,电池的跨电导(Gm)继续降低。降解后的Gm值也观察到在烘烤保留过程后显著提高。
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引用次数: 1
8-inch wafer-scale HfOx-based RRAM for 1S-1R cross-point memory applications 8英寸基于hfox的晶圆级RRAM,用于1S-1R交叉点存储应用
Pub Date : 2014-10-01 DOI: 10.1109/NVMTS.2014.7060853
J. Woo, Jeonghwan Song, Kibong Moon, Seokjae Lim, Daeseok Lee, Sangheon Lee, A. Prakash, H. Hwang, J. Baek, K. Kwon
In this paper, a bipolar resistive random access memory (RRAM) device with a fab-friendly materials stack (TiN/Ti/HfO2/TiN) and process in a via-hole substrate with 200 nm cell size was successfully demonstrated on an 8-inch wafer scale. Furthermore, the robust device characteristics with reliable switching uniformity and stability were experimentally confirmed at the wafer level. Finally, from the standpoint of array architecture, the fabricated memory cell was evaluated with various selector devices such as a conventional silicon-based transistor and a newly developed tunneling-based diode device.
本文成功地在8英寸晶圆尺度上展示了一种双极电阻随机存取存储器(RRAM)器件,该器件具有晶圆友好型材料堆栈(TiN/Ti/HfO2/TiN)和200 nm晶圆尺寸的过孔衬底工艺。实验结果表明,该器件具有可靠的开关均匀性和稳定性。最后,从阵列结构的角度出发,采用不同的选择器件,如传统的硅基晶体管和新开发的基于隧道的二极管器件,对制备的存储单元进行了评估。
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引用次数: 0
The temperature dependence of threshold voltage variations due to oblique single grain boundary in 3D NAND unit cells 三维NAND单元电池中斜单晶界阈值电压变化的温度依赖性
Pub Date : 2014-10-01 DOI: 10.1109/NVMTS.2014.7060844
Jungsik Kim, Bo Jin, M. Meyyappan, Hyeongwan Oh, Junyoung Lee, T. Rim, C. Baek, Jeong-Soo Lee
In this work, the oblique single grain boundary (oSGB) in 3D NAND unit cells is simulated with various temperatures to study threshold voltage (Vth) variation due to oSGB in 3D NAND unit cell of poly-Si channel. As the temperature increases, the overall Vth variations with oSGB decrease because of thermionic effect and more free carrier from generation effect. In addition, the difference of Vth variation become larger as the oSGB leans toward source or drain sides in poly-Si channel.
本文在不同温度下模拟了三维NAND单元电池中的斜单晶界(oSGB),研究了多晶硅通道三维NAND单元电池中oSGB引起的阈值电压(Vth)变化。随着温度的升高,由于热离子效应和产生的自由载流子增多,Vth随oSGB的总体变化减小。在多晶硅沟道中,当oSGB向源侧或漏侧倾斜时,Vth变化的差异会变大。
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引用次数: 2
Scaling of oxide-based resistive switching devices 氧化基电阻开关器件的缩放
Pub Date : 2014-10-01 DOI: 10.1109/NVMTS.2014.7060839
D. Ielmini, S. Ambrogio, S. Balatti
Emerging memory technologies are currently under deep investigation as possible replacements of Flash memory and possible new computing memories. Among these novel technologies, resistance switching memory (RRAM) offer fast switching, low voltage operation and low power consumption. On the other hand, important questions about the scaling of RRAM currently remain unanswered. This work addresses RRAM scalability from the viewpoint of switching and read fluctuations due to localized filamentary switching. Switching variability is discussed in terms of few-defect migration, while random current noise is described by bistable defect close to the conductive filament. Models for program/read noise allow to predict the tradeoff between scaling of device size/power and variability.
新兴的存储技术目前正在深入研究,作为闪存的可能替代品和可能的新型计算存储器。在这些新技术中,电阻开关存储器(RRAM)具有快速开关、低电压运行和低功耗的特点。另一方面,关于RRAM扩展的重要问题目前仍未得到解答。本工作从交换和读取波动的角度解决了RRAM的可扩展性,由于局部丝状交换。开关可变性是用少缺陷迁移来讨论的,而随机电流噪声是用靠近导电丝的双稳态缺陷来描述的。程序/读取噪声模型允许预测器件尺寸/功率缩放和可变性之间的权衡。
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引用次数: 3
期刊
2014 14th Annual Non-Volatile Memory Technology Symposium (NVMTS)
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