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Proceedings of the 1988 Bipolar Circuits and Technology Meeting,最新文献

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A novel quasi-dielectrically isolated bipolar transistor using epitaxial lateral overgrowth 一种利用外延横向过生长的新型准介电隔离双极晶体管
Pub Date : 1988-09-12 DOI: 10.1109/BIPOL.1988.51088
S. Duey, G. Neudeck
A new, quasi-dielectrically isolated (QDI) bipolar structure using epitaxial lateral overgrowth (ELO) is presented. A main application for QDI is in power integrated circuits, where isolation of high-power devices and low-power logic is necessary. The ELO-QDI structure uses of combination of dielectric isolation and junction isolation providing better isolation properties than junction isolation, while providing better heat dissipation than dielectric isolation. The ELO silicon was grown at a low-temperature, 950 degrees C, low-pressure, 150 torr, in a RF-heated pancake-type reactor. Fabricated transistors have gains, ideality factors, and leakage currents comparable to those of bulk-devices.<>
提出了一种利用外延横向过度生长(ELO)的准介电隔离(QDI)双极结构。QDI的一个主要应用是在功率集成电路中,其中需要隔离高功率器件和低功率逻辑。ELO-QDI结构采用介电隔离和结隔离的结合,提供比结隔离更好的隔离性能,同时提供比介电隔离更好的散热。ELO硅是在一个rf加热的薄饼式反应器中,在950摄氏度的低温、150托的低压条件下生长的。合成晶体管的增益、理想因数和漏电流与本体器件相当
{"title":"A novel quasi-dielectrically isolated bipolar transistor using epitaxial lateral overgrowth","authors":"S. Duey, G. Neudeck","doi":"10.1109/BIPOL.1988.51088","DOIUrl":"https://doi.org/10.1109/BIPOL.1988.51088","url":null,"abstract":"A new, quasi-dielectrically isolated (QDI) bipolar structure using epitaxial lateral overgrowth (ELO) is presented. A main application for QDI is in power integrated circuits, where isolation of high-power devices and low-power logic is necessary. The ELO-QDI structure uses of combination of dielectric isolation and junction isolation providing better isolation properties than junction isolation, while providing better heat dissipation than dielectric isolation. The ELO silicon was grown at a low-temperature, 950 degrees C, low-pressure, 150 torr, in a RF-heated pancake-type reactor. Fabricated transistors have gains, ideality factors, and leakage currents comparable to those of bulk-devices.<<ETX>>","PeriodicalId":302949,"journal":{"name":"Proceedings of the 1988 Bipolar Circuits and Technology Meeting,","volume":"151 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1988-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128217058","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Switching characteristics of poly bipolar circuits at liquid nitrogen temperature 液氮温度下多极电路的开关特性
Pub Date : 1988-09-12 DOI: 10.1109/BIPOL.1988.51082
H.J. Chen, S. Nawaz, B.D. Urke, H. Vyas
Measured data are presented on performance of current mode logic (CML) ring oscillators at liquid nitrogen temperature. The devices and circuits were fabricated using double-poly bipolar technology. The experimental data are explained using the hybrid- pi model. CML ring oscillators were fabricated using 1.0 mu m design rules. The measured delay at LN/sub 2/ increased by a factor of 2.3 compared to that at room temperature. The increase in delay is explained by the temperature behavior of the base and load resistors.<>
给出了电流模式逻辑(CML)环形振荡器在液氮温度下的性能实测数据。采用双聚双极技术制备器件和电路。用混合pi模型对实验数据进行了解释。采用1.0 μ m设计规则制作CML环形振荡器。在LN/sub 2/处测量到的延迟比室温时增加了2.3倍。延迟的增加可以用基极电阻和负载电阻的温度行为来解释。
{"title":"Switching characteristics of poly bipolar circuits at liquid nitrogen temperature","authors":"H.J. Chen, S. Nawaz, B.D. Urke, H. Vyas","doi":"10.1109/BIPOL.1988.51082","DOIUrl":"https://doi.org/10.1109/BIPOL.1988.51082","url":null,"abstract":"Measured data are presented on performance of current mode logic (CML) ring oscillators at liquid nitrogen temperature. The devices and circuits were fabricated using double-poly bipolar technology. The experimental data are explained using the hybrid- pi model. CML ring oscillators were fabricated using 1.0 mu m design rules. The measured delay at LN/sub 2/ increased by a factor of 2.3 compared to that at room temperature. The increase in delay is explained by the temperature behavior of the base and load resistors.<<ETX>>","PeriodicalId":302949,"journal":{"name":"Proceedings of the 1988 Bipolar Circuits and Technology Meeting,","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1988-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128882389","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
A bipolar ECL static RAM with polysilicon diode loaded memory cell using single poly technology 一种双极ECL静态RAM,多晶硅二极管负载存储单元采用单聚技术
Pub Date : 1988-09-12 DOI: 10.1109/BIPOL.1988.51038
B. Hwang, J. Kirchgessner, T. Bushey, S. Foertsch, J. Stipanuk, L. Marshbanks, J. Hernandez, E. Herald
A 1 K*1 bipolar emitter coupled logic (ECL) static random access memory (RAM) using a polysilicon diode loaded memory cell is realised in a single poly bipolar process technology. The use of the polysilicon diode as the load element for the memory cell is made possible by the fact that its I-V characteristics exhibit an ideality factor of two. The hold voltage for the memory cell is larger than 240 mV over a wide range of cell currents with the lower bound residing in the sub- mu A range. Results show extremely stable operation against row select sensitivity. A 1.5-ns row address access time has been obtained from the test circuit.<>
采用多晶硅二极管负载存储单元实现了1k *1双极发射极耦合逻辑(ECL)静态随机存取存储器(RAM)。使用多晶硅二极管作为存储单元的负载元件是可能的,因为它的I-V特性表现出两个理想因子。在很宽的电池电流范围内,存储电池的保持电压大于240毫伏,其下限在次a范围内。结果表明,对行选择灵敏度的操作非常稳定。从测试电路中获得了1.5 ns的行地址访问时间。
{"title":"A bipolar ECL static RAM with polysilicon diode loaded memory cell using single poly technology","authors":"B. Hwang, J. Kirchgessner, T. Bushey, S. Foertsch, J. Stipanuk, L. Marshbanks, J. Hernandez, E. Herald","doi":"10.1109/BIPOL.1988.51038","DOIUrl":"https://doi.org/10.1109/BIPOL.1988.51038","url":null,"abstract":"A 1 K*1 bipolar emitter coupled logic (ECL) static random access memory (RAM) using a polysilicon diode loaded memory cell is realised in a single poly bipolar process technology. The use of the polysilicon diode as the load element for the memory cell is made possible by the fact that its I-V characteristics exhibit an ideality factor of two. The hold voltage for the memory cell is larger than 240 mV over a wide range of cell currents with the lower bound residing in the sub- mu A range. Results show extremely stable operation against row select sensitivity. A 1.5-ns row address access time has been obtained from the test circuit.<<ETX>>","PeriodicalId":302949,"journal":{"name":"Proceedings of the 1988 Bipolar Circuits and Technology Meeting,","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1988-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123921190","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A comparison of Si and Si/sub 1-x/Ge/sub x/ based BJTs using numerical simulation Si与Si/sub - 1-x/Ge/sub -x/基BJTs的数值模拟比较
Pub Date : 1988-09-12 DOI: 10.1109/BIPOL.1988.51042
B. Pejcinovic, T. Tang, D. Navon
Static and small signal performances of Si and Si/sub 1-x/Ge/sub x/ based bipolar junction transistors (BJTs) are compared using numerical simulation. Si/sub 1-x/Ge/sub x/ BJT shows reduced turn-on voltage ( Delta V/sub BE/=0.12 V), much higher current gain h/sub fe/, up to two time higher unity current gain frequency f/sub T/, and somewhat higher maximum frequency of oscillation f/sub max/. By using Si/sub 1-x/Ge/sub x/ it is possible to reduce power dissipation in the circuit environment. Small signal current gain, as obtained by using the quasi-static approximation, is shown for the common emitter configuration.<>
采用数值模拟方法比较了Si和Si/sub -x/Ge/sub -x基双极结晶体管(BJTs)的静态和小信号性能。Si/sub 1-x/Ge/sub x/ BJT的导通电压降低(δ V/sub BE/=0.12 V),电流增益h/sub fe/高得多,单位电流增益频率f/sub T/高两倍,振荡最大频率f/sub max/略高。通过使用Si/sub - 1-x/Ge/sub -x/,可以降低电路环境中的功耗。用准静态近似得到的小信号电流增益显示在共发射极配置下。
{"title":"A comparison of Si and Si/sub 1-x/Ge/sub x/ based BJTs using numerical simulation","authors":"B. Pejcinovic, T. Tang, D. Navon","doi":"10.1109/BIPOL.1988.51042","DOIUrl":"https://doi.org/10.1109/BIPOL.1988.51042","url":null,"abstract":"Static and small signal performances of Si and Si/sub 1-x/Ge/sub x/ based bipolar junction transistors (BJTs) are compared using numerical simulation. Si/sub 1-x/Ge/sub x/ BJT shows reduced turn-on voltage ( Delta V/sub BE/=0.12 V), much higher current gain h/sub fe/, up to two time higher unity current gain frequency f/sub T/, and somewhat higher maximum frequency of oscillation f/sub max/. By using Si/sub 1-x/Ge/sub x/ it is possible to reduce power dissipation in the circuit environment. Small signal current gain, as obtained by using the quasi-static approximation, is shown for the common emitter configuration.<<ETX>>","PeriodicalId":302949,"journal":{"name":"Proceedings of the 1988 Bipolar Circuits and Technology Meeting,","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1988-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127270165","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
High frequency characterization of small geometry bipolar transistors 小几何双极晶体管的高频特性
Pub Date : 1988-09-12 DOI: 10.1109/BIPOL.1988.51053
P. van Wijnen, L. Smith
Small-signal high-frequency measurements of small bipolar transistors, carried out 'on wafer' up to a frequency of 18 GHz, are presented. Current gain, transconductance, and maximum power gain characteristics as a function of frequency and DC bias conditions have been obtained with accurate calibration and correction techniques. The figures of merit, f/sub t/f/sub y/, and f/sub max/, associated with these characteristics have been discussed, and a simplified analysis of the relevant time constants has been given. Simulation results with a modified Gummel/Poon model show that good high-frequency modeling can be achieved by taking into account the current dependence of the base resistance and the base transit time, and the modeling of excess phase shift. Finally the importance of modeling the distributed base-collector capacitance, which is accomplished in the Gummel/Poon model with the parameter x/sub cjc/, has been emphasized. It is very important even for frequencies well below the cutoff frequency.<>
提出了对小型双极晶体管进行频率高达18 GHz的“晶圆上”小信号高频测量。通过精确的校准和校正技术,获得了电流增益、跨导和最大功率增益特性作为频率和直流偏置条件的函数。讨论了与这些特性有关的优值f/下标t/f/下标y/和f/下标max/,并给出了有关时间常数的简化分析。基于改进的Gummel/Poon模型的仿真结果表明,通过考虑基极电阻和基极传输时间的电流依赖性以及多余相移的建模,可以获得良好的高频建模效果。最后强调了分布式基极-集电极电容建模的重要性,该建模是在Gummel/Poon模型中完成的,参数为x/sub cjc/。即使对于远低于截止频率的频率,这也是非常重要的
{"title":"High frequency characterization of small geometry bipolar transistors","authors":"P. van Wijnen, L. Smith","doi":"10.1109/BIPOL.1988.51053","DOIUrl":"https://doi.org/10.1109/BIPOL.1988.51053","url":null,"abstract":"Small-signal high-frequency measurements of small bipolar transistors, carried out 'on wafer' up to a frequency of 18 GHz, are presented. Current gain, transconductance, and maximum power gain characteristics as a function of frequency and DC bias conditions have been obtained with accurate calibration and correction techniques. The figures of merit, f/sub t/f/sub y/, and f/sub max/, associated with these characteristics have been discussed, and a simplified analysis of the relevant time constants has been given. Simulation results with a modified Gummel/Poon model show that good high-frequency modeling can be achieved by taking into account the current dependence of the base resistance and the base transit time, and the modeling of excess phase shift. Finally the importance of modeling the distributed base-collector capacitance, which is accomplished in the Gummel/Poon model with the parameter x/sub cjc/, has been emphasized. It is very important even for frequencies well below the cutoff frequency.<<ETX>>","PeriodicalId":302949,"journal":{"name":"Proceedings of the 1988 Bipolar Circuits and Technology Meeting,","volume":"81 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1988-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122704560","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
A dual 4-bit, 1.5 Gs/s analog to digital converter 双4位,1.5 g /s模拟数字转换器
Pub Date : 1988-09-12 DOI: 10.1109/BIPOL.1988.51065
V.E. Garuts, E.O. Traa, Y.-C. S. Yu, T. Yamaguchi
A dual 4-bit analog-to-digital converter with Nyquist operation to 1.5 Gs/s and -29 dBc distortion at 1 GHz is presented. An integral digital-to-analog converter was included to observe the performance of the quantizer front end, and also to let the chip be used in a dual-rank digitizer.<>
提出了一种双4位模数转换器,其奈奎斯特工作速率为1.5 g /s,在1ghz时失真为-29 dBc。为了观察量化器前端的性能,并将该芯片应用于双阶数字化仪>中,设计了一个积分数模转换器
{"title":"A dual 4-bit, 1.5 Gs/s analog to digital converter","authors":"V.E. Garuts, E.O. Traa, Y.-C. S. Yu, T. Yamaguchi","doi":"10.1109/BIPOL.1988.51065","DOIUrl":"https://doi.org/10.1109/BIPOL.1988.51065","url":null,"abstract":"A dual 4-bit analog-to-digital converter with Nyquist operation to 1.5 Gs/s and -29 dBc distortion at 1 GHz is presented. An integral digital-to-analog converter was included to observe the performance of the quantizer front end, and also to let the chip be used in a dual-rank digitizer.<<ETX>>","PeriodicalId":302949,"journal":{"name":"Proceedings of the 1988 Bipolar Circuits and Technology Meeting,","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1988-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130079641","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
A new physical timing model for bipolar NTL circuits 一种新的双极NTL电路物理时序模型
Pub Date : 1988-09-12 DOI: 10.1109/BIPOL.1988.51084
C. Wu, T. Wu
Based on current-domain large-signal equivalent circuits, a new physical timing model for bipolar nonthreshold logic (NTL) circuits is developed. Through extensive comparisons with SPICE simulation results, it is found that the maximum error is 25% for the NTL inverters with different operating currents, capacitance loads, device parameters, and input excitation waveforms not deviating much from characteristic waveforms. Moreover, the consumed CPU time and memory in calculations are much less than those in full transient simulations.<>
基于电流域大信号等效电路,提出了一种新的双极非阈值逻辑电路物理时序模型。通过与SPICE仿真结果的广泛比较,发现在不同的工作电流、电容负载、器件参数和输入激励波形与特征波形偏差不大的情况下,NTL逆变器的最大误差为25%。此外,计算过程中所消耗的CPU时间和内存比完全瞬态模拟时要少得多。
{"title":"A new physical timing model for bipolar NTL circuits","authors":"C. Wu, T. Wu","doi":"10.1109/BIPOL.1988.51084","DOIUrl":"https://doi.org/10.1109/BIPOL.1988.51084","url":null,"abstract":"Based on current-domain large-signal equivalent circuits, a new physical timing model for bipolar nonthreshold logic (NTL) circuits is developed. Through extensive comparisons with SPICE simulation results, it is found that the maximum error is 25% for the NTL inverters with different operating currents, capacitance loads, device parameters, and input excitation waveforms not deviating much from characteristic waveforms. Moreover, the consumed CPU time and memory in calculations are much less than those in full transient simulations.<<ETX>>","PeriodicalId":302949,"journal":{"name":"Proceedings of the 1988 Bipolar Circuits and Technology Meeting,","volume":"55 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1988-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133357272","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A wideband operational amplifier with two selectable input stages 具有两个可选输入级的宽带运算放大器
Pub Date : 1988-09-12 DOI: 10.1109/BIPOL.1988.51048
T. R. Anderson
Circuit design and measured performance are described for an operational amplifier with two selectable input stages, fabricated on an analog array chip. Gain bandwidth product is 2.4 GHz, channel switching time is approximately 5 ns. The circuit was developed for specific hybrid applications and then optimized for general-purpose use as a multiplexer, or virtually any other circuit function that might be implemented with an operational amplifier.<>
本文描述了一种在模拟阵列芯片上制造的具有两个可选输入级的运算放大器的电路设计和测量性能。增益带宽积为2.4 GHz,信道切换时间约为5 ns。该电路是为特定的混合应用而开发的,然后优化为通用用途,如多路复用器,或几乎任何其他可能与运算放大器实现的电路功能
{"title":"A wideband operational amplifier with two selectable input stages","authors":"T. R. Anderson","doi":"10.1109/BIPOL.1988.51048","DOIUrl":"https://doi.org/10.1109/BIPOL.1988.51048","url":null,"abstract":"Circuit design and measured performance are described for an operational amplifier with two selectable input stages, fabricated on an analog array chip. Gain bandwidth product is 2.4 GHz, channel switching time is approximately 5 ns. The circuit was developed for specific hybrid applications and then optimized for general-purpose use as a multiplexer, or virtually any other circuit function that might be implemented with an operational amplifier.<<ETX>>","PeriodicalId":302949,"journal":{"name":"Proceedings of the 1988 Bipolar Circuits and Technology Meeting,","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1988-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133573093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Performance and advantages of BICFETs versus HBTs bicfet与HBTs的性能和优势
Pub Date : 1988-09-12 DOI: 10.1109/BIPOL.1988.51041
G. Taylor, M. Lebby, P. Kiely, P. Cooke, A. Isabelle, T. Chang, B. Tell, D. L. Crawford, K. Brown-Goebeler, J. Simmons
The BICFET, a new form of bipolar transistor that offers superior performance for III-V bipolar integrated circuits and several unique advantages over known approaches for optoelectronic integration, is described. The BICFET does not have a base. Instead, the control (or biasing) charge is confined to the inversion channel at a heterojunction interface which is accessed by a source self-aligned to the emitter. The channel is induced by a charge sheet located in the depleted barrier section of the emitter. The mobility of the channel is high (and thus its resistance R/sub IN/ is low) because the narrow-band semiconductor at the interface is undoped. The BICFET does not have charge storage or recombination in a neutral base, and it has the potential for very high speed due its low input capacitance and the enhanced carrier velocity in the collector. The first operation of the N-channel BICFET is reported here. The base-resistance, current-gain, and input-capacitance characteristics of the BICFET are compared to those of the HBT, and BICFET is found to be an attractive structure for circumventing the problems of charge storage and carrier recombination in the HBT.<>
描述了BICFET,一种新型双极晶体管,它为III-V双极集成电路提供了优越的性能,并且比已知的光电集成方法具有一些独特的优势。BICFET没有基础。相反,控制(或偏置)电荷被限制在异质结界面的反转通道中,该通道由自对准发射极的源访问。该通道由位于发射极的耗尽势垒部分的电荷片诱导。由于接口处的窄带半导体未掺杂,通道的迁移率高(因此其电阻R/sub / IN/低)。BICFET在中性基极中没有电荷存储或重组,并且由于其低输入电容和集电极中增强的载流子速度,它具有非常高的速度潜力。这里报告了n通道BICFET的第一次操作。将BICFET的基电阻、电流增益和输入电容特性与HBT进行了比较,发现BICFET是一种有吸引力的结构,可以解决HBT中的电荷存储和载流子重组问题。
{"title":"Performance and advantages of BICFETs versus HBTs","authors":"G. Taylor, M. Lebby, P. Kiely, P. Cooke, A. Isabelle, T. Chang, B. Tell, D. L. Crawford, K. Brown-Goebeler, J. Simmons","doi":"10.1109/BIPOL.1988.51041","DOIUrl":"https://doi.org/10.1109/BIPOL.1988.51041","url":null,"abstract":"The BICFET, a new form of bipolar transistor that offers superior performance for III-V bipolar integrated circuits and several unique advantages over known approaches for optoelectronic integration, is described. The BICFET does not have a base. Instead, the control (or biasing) charge is confined to the inversion channel at a heterojunction interface which is accessed by a source self-aligned to the emitter. The channel is induced by a charge sheet located in the depleted barrier section of the emitter. The mobility of the channel is high (and thus its resistance R/sub IN/ is low) because the narrow-band semiconductor at the interface is undoped. The BICFET does not have charge storage or recombination in a neutral base, and it has the potential for very high speed due its low input capacitance and the enhanced carrier velocity in the collector. The first operation of the N-channel BICFET is reported here. The base-resistance, current-gain, and input-capacitance characteristics of the BICFET are compared to those of the HBT, and BICFET is found to be an attractive structure for circumventing the problems of charge storage and carrier recombination in the HBT.<<ETX>>","PeriodicalId":302949,"journal":{"name":"Proceedings of the 1988 Bipolar Circuits and Technology Meeting,","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1988-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133843652","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Comparing techniques for fabrication polysilicon contacted emitter bipolar transistors 多晶硅接触发射极双极晶体管的制备技术比较
Pub Date : 1988-09-12 DOI: 10.1109/BIPOL.1988.51046
R. Bagri, G. Neudeck, W. Klaasen, J. Pak, J. Logsdon
Four methods for fabricating polysilicon-contacted BJTs have been investigated. In the first method polysilicon was deposited using low-pressure chemical vapor deposition (LPCVD) at 620 degrees C. In the remaining three methods a-Si was first deposited and then recrystallized to form polysilicon. In the second method a-Si was deposited using LPCVD at 580 degrees C. The third method used plasma-enhanced chemical vapor deposition (PECVD) to deposit a-Si-H. The fourth method involved a plasma etch with argon or hydrogen prior to deposition of a-Si:H using PECVD. The results indicated that using the PECVD method for depositing a-Si-H without any prior plasma-etch step and recrystallizing it to form polysilicon resulted in the highest current gain ( beta ) enhancement of 3.5 and also allowed the reduction of the polysilicon anneal temperature down to 800 degrees C or 900 degrees C from 1000 degrees C. The compactness in the spread of the peak beta values for the devices fabricated using this technique also reflects its ability to reproducible fabrication of polysilicon contacted shallow emitter BJTs.<>
研究了四种制备多晶硅接触bjt的方法。在第一种方法中,使用620℃的低压化学气相沉积(LPCVD)沉积多晶硅。在其余三种方法中,首先沉积a-Si,然后再结晶形成多晶硅。第二种方法是在580℃下用LPCVD沉积a-Si,第三种方法是用等离子体增强化学气相沉积(PECVD)沉积a-Si- h。第四种方法是在使用PECVD沉积a- si:H之前用氩或氢进行等离子体蚀刻。PECVD方法"结果表明,使用沉淀a-Si-H等离子腐蚀步骤之前没有任何和再结晶形成多晶硅导致最高的电流增益(β)增强3.5还允许减少多晶硅退火温度降到800度或900度1000度C的密实度的传播高峰β值设备制造使用这种技术也反映了其可再生制造的能力多晶硅接触浅射极bjt的研究
{"title":"Comparing techniques for fabrication polysilicon contacted emitter bipolar transistors","authors":"R. Bagri, G. Neudeck, W. Klaasen, J. Pak, J. Logsdon","doi":"10.1109/BIPOL.1988.51046","DOIUrl":"https://doi.org/10.1109/BIPOL.1988.51046","url":null,"abstract":"Four methods for fabricating polysilicon-contacted BJTs have been investigated. In the first method polysilicon was deposited using low-pressure chemical vapor deposition (LPCVD) at 620 degrees C. In the remaining three methods a-Si was first deposited and then recrystallized to form polysilicon. In the second method a-Si was deposited using LPCVD at 580 degrees C. The third method used plasma-enhanced chemical vapor deposition (PECVD) to deposit a-Si-H. The fourth method involved a plasma etch with argon or hydrogen prior to deposition of a-Si:H using PECVD. The results indicated that using the PECVD method for depositing a-Si-H without any prior plasma-etch step and recrystallizing it to form polysilicon resulted in the highest current gain ( beta ) enhancement of 3.5 and also allowed the reduction of the polysilicon anneal temperature down to 800 degrees C or 900 degrees C from 1000 degrees C. The compactness in the spread of the peak beta values for the devices fabricated using this technique also reflects its ability to reproducible fabrication of polysilicon contacted shallow emitter BJTs.<<ETX>>","PeriodicalId":302949,"journal":{"name":"Proceedings of the 1988 Bipolar Circuits and Technology Meeting,","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1988-09-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114586462","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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Proceedings of the 1988 Bipolar Circuits and Technology Meeting,
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