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2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics最新文献

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In situ TEM Study of Electric Field-Induced Phenomena in Ferroelectric Ceramics 铁电陶瓷中电场诱导现象的原位透射电镜研究
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393240
X. Tan, W. Qu, H. He
High electric fields were delivered to specimens during imaging in the transmission electron microscopy (TEM) chamber to reveal details of electric field-induced phenomena in ferroelectric oxides. These include the grain boundary cavitation in a PZT ceramic, the domain wall fracture in a Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT) single crystal, the transformation of incommensurate modulations in Pb0.99Nb0.02[(Zr1-xSnx)1-yTiy]0.98O3 (PZST100x/100y/2) ceramics, and the growth of polar nanodomains in a Sc-modified PMN ceramic.
在透射电子显微镜(TEM)室中,在成像过程中向样品施加高电场,以揭示铁电氧化物中电场诱导现象的细节。其中包括PZT陶瓷的晶界空化、Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN- pt)单晶的畴壁断裂、Pb0.99Nb0.02[(Zr1-xSnx)1-yTiy]0.98O3 (PZST100x/100y/2)陶瓷中不适应调制的转变以及sc修饰PMN陶瓷中极性纳米畴的生长。
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引用次数: 0
Investigation of Crystal Defects in Lead Zirconate Titanate Films by Thermally Stimulated Current Measurement 热激发电流法研究锆钛酸铅薄膜晶体缺陷
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393225
T. Nishida, M. Echizen, T. Takeda, K. Uchiyama, T. Shiosaki
Pb(Zr, Ti)O3 (PZT) ferroelectric thin films have been extensively investigated because of their potential for FeRAM and MEMS device applications. However, realization of high performance devices has not been achieved due to degradation problems for the PZT films, such as fatigue and imprinting. The degradation is caused by crystal defects in the films, however, properties of the defects have not yet been sufficiently clarified. We have therefore attempted to investigate crystal defects in PZT films by thermally stimulated current (TSC) measurements. Current peaks due to the defects were detected in the measurements, and the origin of the observed defects was identified by systematic evaluation. It was revealed that the activation energy of the TSC peaks ranged from 0.75 eV to 0.95 eV, and the peaks were related to PbOx defects at the interface between the electrodes and the PZT layer.
由于Pb(Zr, Ti)O3 (PZT)铁电薄膜具有FeRAM和MEMS器件应用的潜力,因此得到了广泛的研究。然而,由于PZT薄膜的退化问题,如疲劳和印迹,高性能器件的实现尚未实现。这种退化是由薄膜中的晶体缺陷引起的,然而,这些缺陷的性质尚未得到充分的阐明。因此,我们试图通过热刺激电流(TSC)测量来研究PZT薄膜中的晶体缺陷。在测量中检测到由缺陷引起的电流峰值,并通过系统评估确定观察到的缺陷的来源。结果表明,TSC峰的活化能范围在0.75 ~ 0.95 eV之间,这些峰与电极与PZT层界面处的PbOx缺陷有关。
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引用次数: 0
Note on Oxygen Isotope Effect and Ferroelectric Transition in Quantum Paraelectrics 量子准电性中氧同位素效应和铁电跃迁的注解
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393235
E. Matsushita, S. Segawa
By extending the soft-phonon theory, a quantum paraelectric(PE)-ferroelectric(FE) transition in SrTi16O3 (ST016) is studied from the viewpoint of the important role of optical phonons in perovskite-oxides. In spite of intrinsic quantum fluctuation of large zero-point vibration induced from light O-atoms, the FE transition due to the O-isotope exchange 16O1-x 18Ox is explained in a unified picture by combining with the applied pressure (or uniaxial stress) effect. The calculated Tc as the function of x is compared with the experimental data in rather good agreement, and the origin of quantum paraelectricity in STO 16 is discussed in comparison with pressure effect in hydrogen-bonded ferroelectrics KH2PO4 (KDP). As the result, it is suggested that quantum PE-FE transition with the critical exponent 1/2 at Tc=0 where the FE transition will start, must be analyzed by a microscopic theory exceeding soft phonon theory.
通过扩展软声子理论,从光学声子在钙钛矿氧化物中的重要作用出发,研究了SrTi16O3 (ST016)的量子准电(PE)-铁电(FE)跃迁。尽管由轻o原子引起的大零点振动存在固有的量子涨落,但由于o同位素交换1601 -x 18Ox引起的FE跃迁与施加的压力(或单轴应力)效应结合在一起,得到了统一的解释。将计算得到的Tc随x的函数与实验数据进行了比较,得到了较好的一致性,并与氢键铁电体KH2PO4 (KDP)的压力效应进行了比较,讨论了STO 16中量子对电的起源。结果表明,在临界指数为1/2的量子PE-FE跃迁开始于Tc=0时,必须用超越软声子理论的微观理论来分析。
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引用次数: 0
Laser Irradiation Effect of Film Thickness on the Properties of Aerosol Deposition-Derived PZT Films on Metal Substrate 激光辐照对金属基板上气溶胶沉积衍生PZT薄膜性能的影响
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393295
S. Baba, H. Tsuda, J. Akedo
Film thickness dependence of ferroelectric and/or piezoelectric properties for PZT films directly deposited onto stainless-steel (SUS) substrates in actuator devices by CO2 laser-assisted aerosol deposition was investigated. Analysis of the optical spectroscopic data and experimental results of laser irradiation revealed that absorption of an CO2 laser wavelength by the film increased with increasing the film thickness. Dielectric constant, remanent polarization, and coercive field values of the film irradiated by the CO2 laser at an annealing temperature of 850degC increased with increasing the film thickness region of 5 to 30 mum. The dielectric constant, remanent polarization, and the coercive field values of the PZT film, which irradiated by the laser, with a thickness of over 25 mum directly deposited onto the SUS substrate were over 800 and 40 muC/cm2 and under 45 kV/cm, respectively. Whereas, a displacement as the piezoelectric property of a SUS-based actuator with the PZT film irradiated by the laser decreased with increasing the film thickness. Finally, the reason and some countermeasure of deterioration of the ferroelectric and/or piezoelectric properties and the displacement for the SUS-based actuators with the PZT film irradiated by the laser are discussed.
研究了CO2激光辅助气溶胶沉积法直接沉积在不锈钢(SUS)衬底上的PZT薄膜的铁电和/或压电性能对薄膜厚度的依赖关系。光谱学数据和激光辐照实验结果分析表明,薄膜对CO2激光波长的吸收随薄膜厚度的增加而增加。在850℃的退火温度下,CO2激光辐照薄膜的介电常数、剩余极化和矫顽场值随着薄膜厚度在5 ~ 30 μ m范围内的增大而增大。直接沉积在SUS衬底上的厚度大于25 μ m的PZT薄膜,其介电常数大于800 μ c /cm2,剩余极化值为40 μ c /cm2,矫顽力场值小于45 kV/cm。而当激光照射PZT薄膜时,位移作为作动器的压电性能随薄膜厚度的增加而减小。最后,讨论了激光照射压电薄膜后,sus_s_基作动器铁电性能和压电性能恶化的原因及对策。
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引用次数: 0
Electric-Field-Induced Dielectric Properties and Depolarization in Pb(Mg1/3Nb2/3)1-xTixO3 and Pb(In1/2Nb1/2)1-xTixO3 Crystals Pb(Mg1/3Nb2/3)1-xTixO3和Pb(In1/2Nb1/2)1-xTixO3晶体的电场诱导介电特性和去极化
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393330
C. Tu, C. Hsieh, C.-T. Tseng, F.-T. Wang, S. Lee, H. Chuang
This work presents electric-field-induced dielectric permittivity and depolarization in (001)-cut relaxor Pb(Mg1/3Nb2/3)0.70Ti0.30O3 (PMNT30%) and Pb(In1/2Nb1/2)0.70Ti0.30O3 (PINT30%) single crystals. The depolarization temperature Tdcong395 K of PINT30% is about 40 K higher than in the rhombohedral PMNT30%. The relaxor-type dielectric dispersion due to polar nanoclusters reappears above Td, and remains evident up to the Burns temperature.
本文研究了(001)切割弛豫剂Pb(Mg1/3Nb2/3)0.70Ti0.30O3 (PMNT30%)和Pb(In1/2Nb1/2)0.70Ti0.30O3 (PINT30%)单晶的电场诱导介电常数和退极化现象。PMNT30%的脱极化温度Tdcong395 K比菱形PMNT30%的脱极化温度高约40 K。由于极性纳米团簇引起的弛豫型介电色散在Td以上再次出现,并且在Burns温度下仍然明显。
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引用次数: 0
Dielectric Characteristics of PZT Films Prepared by Aerosol Deposition in Millimeter Wave Range 气溶胶沉积PZT薄膜在毫米波范围内的介电特性
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393319
M. Nakada, K. Ohashi, H. Tsuda, E. Kawate, J. Akedo
The dielectric properties of lead zirconate titanate [PZT, Pb(Zr0.3Ti0.7)O3] films, prepared by aerosol deposition (AD), were measured in the millimeter wave and THz range. Millimeter wave spectroscopy was applied for measurement in the frequency range from 45 to 80 GHz, and far-infrared Fourier transform measurements from 120 GHz to 20 THz was carried out. Spectroscopic data were analyzed with combination of Debye model with a distribution of Debye relaxation frequencies and harmonic oscillators. We clearly observed that the Debye relaxation took place below several tens GHz for annealed AD films. Combination of millimeter wave and THz spectroscopy was effective measurement technique for dielectric properties of ferroelectric materials at over millimeter wave range.
采用气溶胶沉积(AD)法制备了锆钛酸铅[PZT, Pb(Zr0.3Ti0.7)O3]薄膜,对其在毫米波和太赫兹范围内的介电性能进行了测试。采用毫米波光谱对45 ~ 80 GHz频段进行测量,对120 GHz ~ 20 THz频段进行远红外傅立叶变换测量。结合德拜松弛频率和谐波振子分布的德拜模型对光谱数据进行了分析。我们清楚地观察到退火后的AD薄膜在几十GHz以下发生德拜弛豫。毫米波与太赫兹光谱相结合是测量铁电材料介电性能的有效方法。
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引用次数: 1
Accurate Formula for Quality Factor Q of Thin Film Bulk Acoustic Resonators with Close Series and Parallel Resonance Frequencies 具有紧密串并联共振频率的薄膜体声谐振器质量因子Q的精确公式
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393393
Pei-Yen Chen, Y. Chin, Chi-Yun Chen, Chun-Li Hou
This paper presents improved formula accuracy for quality factor Q of thin film bulk acoustic resonators (FBARs) with close series and parallel resonance frequencies. Traditionally, the series and parallel resonance behaviors are treated independently. The FBAR piezoelectric coupling coefficient is only a few percentages with the series and parallel frequencies close enough to influence each other. The FBARs with two-port configuration are fabricated using silicon bulk micro-machining technology. Including the FBAR transmission lines are analyzed to probe their characteristics using a network analyzer. The signal power loss of the transmission lines is modeled to characterize the FBARs using two-port S parameter measurement data.
本文提出了具有相近串联和并联谐振频率的薄膜体声谐振器(fbar)质量因子Q的改进公式精度。传统上,串联和并联谐振行为是独立处理的。当串联频率和并联频率接近到足以相互影响时,FBAR压电耦合系数仅为几个百分比。采用硅本体微加工技术制备了双端口结构的fbar。利用网络分析仪对FBAR传输线进行分析,探测其特性。利用双端口S参数测量数据,对传输线路的信号功率损耗进行建模,以表征fbar。
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引用次数: 2
Crystalline Structure and Surface Morphology of the AlN films sputtered on 64°-YX LiNbO3 64°-YX LiNbO3溅射AlN薄膜的晶体结构和表面形貌
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393196
F. Chang, Sean Wu, Maw-Shung Lee, Jianwei Yu, Chiaokai Chang, Chengxiong Huang
Highly (002) oriented aluminum nitride (AlN) films were successfully prepared on a 64deg-YX LiNbO3 substrate by r.f. magnetron sputtering. The crystalline structure of the films was determined by grazing incident angle X-ray diffraction (XRD) and the surface microstructure of films was investigated by Scanning electron microscope (SEM). The atom composition ratio (Al/N) of the films was also determined by Energy Dispersive X-ray Spectroscopy (EDS). The results showed the optimal (002) oriented AlN films were prepared at 200 C and 5 m Torr. The atom composition ratio (Al/N) was 0.96 (near 1).
采用射频磁控溅射技术在64度yx LiNbO3衬底上成功制备了高度(002)取向的氮化铝(AlN)薄膜。采用掠射入射角x射线衍射(XRD)测定了膜的晶体结构,并用扫描电镜(SEM)研究了膜的表面微观结构。利用能量色散x射线能谱(EDS)测定了膜的原子组成比(Al/N)。结果表明,在温度为200℃、温度为5 m的温度下制备了最佳的(002)取向AlN薄膜。原子组成比(Al/N)为0.96(接近1)。
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引用次数: 1
Bi-based ferroelectric thin films with enhanced polarization by rare-earth modification 稀土改性增强极化的铋基铁电薄膜
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393194
H. Uchida, K. Nishida, M. Osada, Funakubo, S. Koda
Thin films of Bi-based perovskite ferroelectrics BiFeO3 is recently recognized as strong candidates for alternatives to toxic Pb-based ferroelectrics such as conventional Pb(Zr,Ti)O3. Authors fabricated BiFeO3 thin films with excellent performance of ferroelectric polarization by ion modification based on sol-gel technique. Some rare-earth ions, such as La3+ or Nd3+, could be substituted for Bi3+ ion in BFO crystal in order to reduce ionic defects in crystal lattices. Electrical resistivity of BiFeO3 films were improved by ion modification of rare-earth elements, as well as other Bi-based ferroelectric films like Bi4Ti3O12. Although crystal anisotropy and phase-transition temperature (Curie temperature) of these materials are generally reduced by the ion modification, it yield fully-saturated polarization (P) -electrical field (E) property to produce enhanced remanent polarization of approximately 50 muC/cm comparable or superior to conventional Pb(Zr,Ti)O3 films. We concluded that the ion modification using rare-earth elements could suppress the ionic defects that caused electrical conduction in BiFeO3 films.
铋基钙钛矿铁电体薄膜BiFeO3最近被认为是有毒的铅基铁电体(如传统的Pb(Zr,Ti)O3)的替代品。采用溶胶-凝胶法制备了具有优异铁电极化性能的BiFeO3薄膜。利用稀土离子La3+或Nd3+代替BFO晶体中的Bi3+,可以减少晶格中的离子缺陷。通过稀土元素离子修饰BiFeO3薄膜以及Bi4Ti3O12等其他铋基铁电薄膜,提高了BiFeO3薄膜的电阻率。虽然这些材料的晶体各向异性和相变温度(居里温度)通常通过离子改性降低,但它产生完全饱和的极化(P) -电场(E)性能,产生约50多c /cm的增强剩余极化,与传统的Pb(Zr,Ti)O3薄膜相当或优于。结果表明,稀土离子改性可以抑制BiFeO3薄膜中引起导电的离子缺陷。
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引用次数: 0
First principles study on oxygen vacancies in SrTiO3 SrTiO3中氧空位的第一性原理研究
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393229
Do Doc Cuong, Seungwu Han, Jaichan Leela
Oxygen vacancy in SrTiO3 is studied using the first principles calculation with the correction of onsite Coulomb interaction. In this paper, we performed the calculations on the multi oxygen vacancies in typical perovskite SrTiO3. We found that the oxygen vacancies tend to cluster in a linear way which makes the reduction of electron carrier concentration.
采用第一性原理计算方法对SrTiO3中的氧空位进行了研究,并对现场库仑相互作用进行了修正。本文对典型钙钛矿SrTiO3的多氧空位进行了计算。我们发现氧空位呈线性聚集的趋势,使得载流子浓度降低。
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引用次数: 0
期刊
2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics
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