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2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics最新文献

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Misted Deposition of [3D] Trenches for Drams and Frams III. PZT Thin Films and PZT Nanotubes [3D]沟槽的雾状沉积[d] ram和Frams III。PZT薄膜和PZT纳米管
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393160
M. Miyake, J. Scott, X. Lou, F. Morrison, S. Motoyama, T. Tatsuta, O. Tsuji
Pb(Zr,Ti)O3 (PZT) thin films and nanotube were prepared on SiO2/Si substrates by liquid source misted chemical deposition (LSMCD) using Samco MD-6060 apparatus. We report the deposition and characterization of transparent ferroelectric thin films and nanotubes. PZT thin films deposited at ambient conditions and annealing at 700degC exhibit good ferroelectric properties with remanent polarisation of ca. 15 muC/cm2. The step coverage was 59% on the side wall and 79% on the bottom wall.
采用Samco MD-6060型液源雾化沉积(LSMCD)技术,在SiO2/Si衬底上制备了Pb(Zr,Ti)O3 (PZT)薄膜和纳米管。我们报道了透明铁电薄膜和纳米管的沉积和表征。在室温条件下沉积并在700℃下退火的PZT薄膜表现出良好的铁电性能,剩余极化约为15 μ c /cm2。侧壁的台阶覆盖率为59%,底壁覆盖率为79%。
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引用次数: 1
Characteristics of tube-type piezoelectric motor fabricated by aerosol deposition 气溶胶沉积制备管式压电电机的特性研究
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393399
W. Yoon, B. Hahn, J. Ryu, J. Choi, D. Park, H.O. Choi
Tube-type piezoelectric motor having a volume of 2times2times10 mm3 was fabricated by aerosol deposition of PZT powder on the square-shaped titanium alloy tube. With applying two channels driving voltage the stator generates two orthogonal bending vibration modes which makes wobbling motion of the stator at the resonance frequency. At the frequency of 76.4 kHz with 60 Vpp, rotation speed of the stator was about 1900 rpm and the speed of the stator was increased linearly with applying voltage.
将PZT粉末气溶胶沉积在方形钛合金管上,制备了体积为2 × 2 × 10 mm3的管式压电电机。在施加两通道驱动电压的情况下,定子产生两种正交的弯曲振动模式,使定子在谐振频率处进行摆动运动。在76.4 kHz和60 Vpp的频率下,定子的转速约为1900 rpm,定子的转速随电压的增加呈线性增加。
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引用次数: 0
Na0.5Bi0.5TiO3-Based Voltage-Tunable Materials 基于na0.5 bi0.5 tio3的电压可调材料
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393213
M. Spreitzer, J. Konig, B. Jaňcar, D. Suvorov
We have investigated the dielectric tunability of the Na0.5Bi0.5TiO3 relaxor ferroelectric, modified with additions of Li3xLa(2/3)-xTiO3 (0.03lesxges0.167) and NaTaO3. These two additives have characteristics similar to incipient antiferroelectric and ferroelectric materials, respectively. The phase relations in the Na0.5Bi0.5TiO3-Li3xLa(2/3)-xTiO3 system were determined; however, this was made difficult by the slow kinetics and the thermodynamic instability of the compounds from the system. With an additives concentration of close to 10 mol% the material shows a relative dielectric tunability of up to 50%, moderate dielectric losses and a reduced temperature dependence of the dielectric constant, indicating that relaxor ferroelectrics might be promising materials for tunable applications.
我们研究了添加Li3xLa(2/3)-xTiO3 (0.03lesxges0.167)和NaTaO3修饰的Na0.5Bi0.5TiO3弛豫铁电材料的介电可调性。这两种添加剂分别具有类似于早期反铁电材料和铁电材料的特性。测定了Na0.5Bi0.5TiO3-Li3xLa(2/3)-xTiO3体系的相关系;然而,由于系统中化合物的缓慢动力学和热力学不稳定性,这变得困难。当添加剂浓度接近10 mol%时,材料的相对介电可调性高达50%,介电损耗适中,对介电常数的温度依赖性降低,这表明弛豫铁电体可能是有前途的可调材料。
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引用次数: 1
Memorial Lecture for Dr. H. Okino 冲野博士纪念讲座
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393222
T. Yamamoto
Dr. Okino's contributions for piezoelectric application field will be introduced. First of all, by using piezoresponse force microscopy (PFM) and contact-resonance piezoresponse microscopy (CR-PFM), domain structures and domain-related properties of typical piezoelectric single crystal, for example PbTiO3, Pb(Mg1/3Nb2/3)O3 -PbTiO3 single crystals, were successfully observed. Four kinds of domain structures (180 c-c, 180 a-a, 90 a-a and 90 a-c domains) on grown surfaces of PbTiO3 single crystals were imaged successfully using vertical and lateral piezoresponse force microscopy (PFM). Next, the domain-structure images of (001) plates of Pb(Mg1/3Nb2/3)O3 -PbTiO3 (PMN-PT) single crystals were successfully observed in a vacuum using a contact-resonance piezoresponse force microscopy. The domain structures of (001) plates of (l-x) Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT) single crystals were obtained at room temperature after 240 thermal treatment at various cooling rates. PMN -32 % PT and PMN- 34 %PT single crystals undergoes a relaxor-ferroelectric phase transition from Tetragonal phase to the Cubic phase.
介绍了冲野博士在压电应用领域的贡献。首先,利用压电响应力显微镜(PFM)和接触共振压电响应显微镜(CR-PFM),成功地观察了PbTiO3、Pb(Mg1/3Nb2/3)O3 -PbTiO3单晶等典型压电单晶的畴结构和畴相关性质。利用垂直和横向压电响应力显微镜(PFM)成功地对PbTiO3单晶生长表面的四种结构域(180 c-c、180 a-a、90 a-a和90 a-c)进行了成像。接下来,利用接触共振压响应力显微镜成功观察了Pb(Mg1/3Nb2/3)O3 -PbTiO3 (PMN-PT)单晶(001)片的畴结构图像。(001)板(l-x) Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT)单晶经不同冷却速率的240℃热处理后,在室温下获得了畴结构。PMN- 32% PT和PMN- 34% PT单晶经历了从四方相到立方相的弛豫-铁电相变。
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引用次数: 0
Domain Engineering of Silver Lithium Niobate Single Crystals and Their Piezoelectric Properties 铌酸锂银单晶的畴工程及其压电性能
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393266
S. Wada, K. Yokoh, T. Muraishi, T. Hoshina, H. Kakemoto, T. Tsurumi, C. Moriyoshi, Y. Kuroiwa
Silver lithium niobate (Ag1-xLixNbO3 ALN) single crystals with Li contents of 10 and 12.5 mol% were successfully grown by a slow cooling method. The high-energy X-ray diffraction measurement revealed that the crystal structures of both ALN10 and ALN12.5 were assigned to the coexistence between orthorhombic Pc21b and rhombohedral R3m phases. Their piezoelectric properties were investigated as a function of crystallographic direction and Li content.
采用慢冷法制备了Li含量分别为10和12.5 mol%的铌酸锂银(Ag1-xLixNbO3 ALN)单晶。高能x射线衍射测量结果表明,ALN10和ALN12.5的晶体结构均为正交Pc21b与菱形R3m相共存。研究了它们的压电性能与晶体方向和锂含量的关系。
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引用次数: 0
Fabrication and Characterization of Semiconductive Ceramics using BaTiO3-(Bi1/2K1/2)TiO3 System BaTiO3-(Bi1/2K1/2)TiO3体系制备半导体陶瓷及其表征
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393413
H. Harinaka, Hideaki Takeda, Takashi Nishida, Kiyoshi Uchiyama, T. Shiosaki
As a candidate of a lead-free positive temperature coefficient of resistivitiy (PTC) themistor material, barium titanate (BaTiO3) -based solid-solution ceramics, BaTiO3-(Bi1/2K1/2)TiO3 (BBKT100x), have been synthesized by the conventional ceramic fabrication technique. The maximum temperature of the dielectric constant (Tm) of the BBKTIOOx ceramics monotonously increased with the increasing amount of x. The Tm values of the BBKTIOOx ceramics with x>0.0 were higher than that of BaTiO3 (=130degC). The peak temperature (Tp) of the pyroelectric coefficient showed that the ferroelectricity of the BBKT100x ceramics disappeared at Tm. The reduced BBKT5 ceramics show PTC characteristics as well as a semiconductivity.
钛酸钡(BaTiO3)基固溶陶瓷BaTiO3-(Bi1/2K1/2)TiO3 (BBKT100x)是一种无铅正电阻率(PTC)电阻材料的候选材料。随着x的增加,BBKTIOOx陶瓷的最高介电常数(Tm)单调增加,当x>0.0时,BBKTIOOx陶瓷的Tm值高于BaTiO3(=130℃)。热释电系数峰值温度(Tp)表明,BBKT100x陶瓷的铁电性在Tm处消失。还原后的BBKT5陶瓷具有PTC特性和半导体特性。
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引用次数: 0
Composition Dependent Piezoelectric Properties of Pb-free (Bi0.o5N0o 5)1-x) BaxTiO3 Ceramics 无铅Bi0的成分依赖性压电特性。o5no05)1-x) BaxTiO3陶瓷
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393373
Y. Sung, J. Cho, T. Song, S. Jeong, J. Song, M. Kim
An optimum composition for maximizing piezoelectric properties of (Bi0.5Na0.5)(1-x)BaxTiO3 ceramics was investigated within the range of x=0-0.1 covering rhombohedral to tetragonal phase regions of the system. A perovskite structure with two different crystal symmetries depending on the Ba content was formed with no impurity phases. A range of morphotropic phase boundary dividing rhombohedral and tetragonal phase regions was found to exist at x=0.05~0.08. As for piezoelectric properties the piezoelectric constant (d33) and the electromechanical coupling factor (Kp) showed a peak value at x=0.065 within the range tested, which was 192 pC/N and 34%, respectively, implying x=0.065 as an optimum composition for piezoelectric (Bi0.5Na0.5)(1-x)BaxTiO3 ceramics.
在x=0-0.1的范围内,研究了一种能使(Bi0.5Na0.5)(1-x)BaxTiO3陶瓷的压电性能最大化的最佳成分,覆盖了体系的菱形到四方相区。在无杂质相的情况下,根据Ba含量形成了两种不同晶体对称性的钙钛矿结构。在x=0.05~0.08范围内,存在一个分菱形和四边形相区范围的相变边界。压电性能方面,在测试范围内,压电常数d33和机电耦合系数Kp在x=0.065处达到峰值,分别为192 pC/N和34%,说明(Bi0.5Na0.5)(1-x)BaxTiO3压电陶瓷的最佳组成为x=0.065。
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引用次数: 0
Colossal Dielectric Permittivity in Tetragonal Pb(Fe1/2Nb1/2)1-xTixO3 Single Crystals 四方Pb(Fe1/2Nb1/2)1-xTixO3单晶的大介电常数
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393334
C.-T. Tseng, C. Tu, F.-T. Wang
It has been a goal to find high dielectric permittivity and Curie temperature in high-strain crystals to enhance piezoelectric coefficient and thermal stability. Dielectric permittivity has been measured as functions of temperature and frequency in (001)-cut Pb(Fe1/2Nb1/2)1-xTixO3 (PFNTx) single crystals with starting composition at x=0.48. The tetragonal PFNT single crystals exhibit giant dielectric permittivity, high Curie (or depolarization) temperature, and low electric resistance, which are sensitive to Fe ion content, measured frequency, and thermal annealing treatment. A first-order-type tetragonalrarrcubic phase transition takes place at TCcong515 K. Ac electric conductivity increases with temperature dramatically, likely due to vacancy hopping and valance reduction of Fe3+ to Fe2+ ions. This study suggests that Fe ion is a promising candidate for dopant to enhance dielectric permittivity and depolarization temperature in Pb(Mg1/3Nb2/3)1-xTixO3 (PMNT) and Pb(Zn1/3Nb2/3)1-xTixO3 (PZNT) crystals.
在高应变晶体中寻找高介电常数和居里温度是提高压电系数和热稳定性的目标。在起始成分为x=0.48的(001)切割的Pb(Fe1/2Nb1/2)1-xTixO3 (PFNTx)单晶中,测量了介电常数作为温度和频率的函数。方形PFNT单晶具有高介电常数、高居里(或退极化)温度、低电阻等特点,对铁离子含量、被测频率和热退火处理敏感。在tc聪515k发生了一阶四边形非立方相变。交流电导率随着温度的升高而急剧增加,可能是由于空位跳变和Fe3+到Fe2+离子的价降。研究表明,Fe离子是提高Pb(Mg1/3Nb2/3)1-xTixO3 (PMNT)和Pb(Zn1/3Nb2/3)1-xTixO3 (PZNT)晶体介电常数和退极化温度的有希望的掺杂剂。
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引用次数: 0
System LSI Embedded Ferroelectric Memory Technology 系统LSI嵌入式铁电存储器技术
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393152
Y. Nagano, E. Fujii
System LSI embedded ferroelectric memory (FeRAM) operating at a very low voltage has been developed. The key technology of the low-voltage operation is the newly developed stacked ferroelectric capacitors completely encapsulated by hydrogen barriers, which enable us to eliminate hydrogen reduction of the ferroelectric thin film during the integration process. This technology is applied for not only the planer stachked ferroelectric capacitors but also the three-dimensional (3-D) capacitors, which is the most promising for mass production of 0.18-mum low-power system LSI-embedded FeRAM and beyond.
开发了工作在极低电压下的系统LSI嵌入式铁电存储器(FeRAM)。低压运行的关键技术是新开发的完全被氢势垒封装的叠层铁电电容器,使我们能够在集成过程中消除铁电薄膜的氢还原。该技术不仅适用于平面堆叠铁电电容器,也适用于三维(3-D)电容器,是大批量生产0.18 μ m低功耗系统lsi嵌入式FeRAM及以后的最有前景的技术。
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引用次数: 1
High Qm Lead Free Sodium Potassium Niobate Piezoelectric Ceramics and Middle Frequency Resonator 高Qm无铅铌酸钠钾压电陶瓷及中频谐振器
Pub Date : 2007-05-27 DOI: 10.1109/ISAF.2007.4393359
Qiang Chen, Lin Chen, Qishou Li, Xiaoluo Shi, Zhiqiang Liu, Xi Yue, D. Xiao, Jianguo Zhu
Density K4CuNb8O23 modified (Na0.5K0.5)NbO3 (NKN:KCN) ceramics with high mechanical quality factor Qm were synthesized by using conventional mixing oxide process. The maximum value of Qm of NKN:KCN ceramics reaches up to 1150, the planar electromechanical coefficient kp of NKN:KCN ceramics maintains a relative high level, which is about 40%. Moreover, the Curie temperature of NKN:KCN ceramics is above 380 . Based upon this kind of lead-free piezoelectric ceramics, a new type of lead-free middle frequency (455 kHz) ceramic resonators were designed and produced. This kind of lead-free ceramic resonator can be used in the remote controller.
采用常规混合氧化法制备了具有高机械质量因子Qm的密度K4CuNb8O23改性(Na0.5K0.5)NbO3 (NKN:KCN)陶瓷。NKN:KCN陶瓷的Qm最大值可达1150,NKN:KCN陶瓷的平面机电系数kp保持较高的水平,约为40%。此外,NKN:KCN陶瓷的居里温度在380℃以上。基于这种无铅压电陶瓷,设计并制造了一种新型无铅中频(455 kHz)陶瓷谐振器。这种无铅陶瓷谐振器可用于遥控器。
{"title":"High Qm Lead Free Sodium Potassium Niobate Piezoelectric Ceramics and Middle Frequency Resonator","authors":"Qiang Chen, Lin Chen, Qishou Li, Xiaoluo Shi, Zhiqiang Liu, Xi Yue, D. Xiao, Jianguo Zhu","doi":"10.1109/ISAF.2007.4393359","DOIUrl":"https://doi.org/10.1109/ISAF.2007.4393359","url":null,"abstract":"Density K<sub>4</sub>CuNb<sub>8</sub>O<sub>23</sub> modified (Na<sub>0.5</sub>K<sub>0.5</sub>)NbO<sub>3</sub> (NKN:KCN) ceramics with high mechanical quality factor Q<sub>m</sub> were synthesized by using conventional mixing oxide process. The maximum value of Q<sub>m</sub> of NKN:KCN ceramics reaches up to 1150, the planar electromechanical coefficient k<sub>p</sub> of NKN:KCN ceramics maintains a relative high level, which is about 40%. Moreover, the Curie temperature of NKN:KCN ceramics is above 380 . Based upon this kind of lead-free piezoelectric ceramics, a new type of lead-free middle frequency (455 kHz) ceramic resonators were designed and produced. This kind of lead-free ceramic resonator can be used in the remote controller.","PeriodicalId":321007,"journal":{"name":"2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics","volume":"4 1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2007-05-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127471115","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics
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