Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050939
Jia Li, Supin Chen, C. Kim
We report a new method to fabricate multilayer interconnections without requiring wet or dry etching or deposition of insulating layers. Three levels of electrical connections are obtained by merely repeating deposition, photolithography, and anodization of a metal layer. Without the need to etch metal layers or deposit and etch insulation layers, the overall process is simple, cheap, safe, and of low temperature. While the utility is general for a wide variety of microdevices and electronics, in this paper we demonstrate one application by developing a low-cost fabrication of a large-array electrowetting-on-dielectric (EWOD) chip that requires three metal layers.
{"title":"A convenient method to fabricate multilayer interconnections for microdevices","authors":"Jia Li, Supin Chen, C. Kim","doi":"10.1109/MEMSYS.2015.7050939","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050939","url":null,"abstract":"We report a new method to fabricate multilayer interconnections without requiring wet or dry etching or deposition of insulating layers. Three levels of electrical connections are obtained by merely repeating deposition, photolithography, and anodization of a metal layer. Without the need to etch metal layers or deposit and etch insulation layers, the overall process is simple, cheap, safe, and of low temperature. While the utility is general for a wide variety of microdevices and electronics, in this paper we demonstrate one application by developing a low-cost fabrication of a large-array electrowetting-on-dielectric (EWOD) chip that requires three metal layers.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127773651","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050926
Jun-kyu Choi, Junghoon Lee
We report a membrane-based chemomechanical transducer for the sensitive detection of surface molecular reaction through a highly reliable common mode rejection (CMR) technique. Chemomechanical transduction, originally based on the micro-cantilever, offers potential benefits: label-free assay, and real-time monitoring of molecular interaction via mechanical deformation [1, 2]. Membrane-based approaches have been proposed to overcome the inherent limitations of the micro-cantilever system, but most results were either inconclusive or far from practical standards. Here we show clear-cut detection of molecular binding using a membrane transducer fabricated with conventional MEMS technology. This goal is achieved through the implementation of CMR that rejects physical effects such as pressure and temperature, leaving only specific chemical binding responsible for resulting signal. We demonstrate highly specific recognition of thrombin protein by using DNA aptamer immobilized on the membrane surface with the limit of detection down to ~3 pM, and the wide dynamic range > 5×104.
{"title":"Membrane-based chemomechanical transducer for the detection of aptamer-protein binding","authors":"Jun-kyu Choi, Junghoon Lee","doi":"10.1109/MEMSYS.2015.7050926","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050926","url":null,"abstract":"We report a membrane-based chemomechanical transducer for the sensitive detection of surface molecular reaction through a highly reliable common mode rejection (CMR) technique. Chemomechanical transduction, originally based on the micro-cantilever, offers potential benefits: label-free assay, and real-time monitoring of molecular interaction via mechanical deformation [1, 2]. Membrane-based approaches have been proposed to overcome the inherent limitations of the micro-cantilever system, but most results were either inconclusive or far from practical standards. Here we show clear-cut detection of molecular binding using a membrane transducer fabricated with conventional MEMS technology. This goal is achieved through the implementation of CMR that rejects physical effects such as pressure and temperature, leaving only specific chemical binding responsible for resulting signal. We demonstrate highly specific recognition of thrombin protein by using DNA aptamer immobilized on the membrane surface with the limit of detection down to ~3 pM, and the wide dynamic range > 5×104.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"78 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126307210","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050992
Yaoping Liu, Lingqian Zhang, Wei Wang, Wengang Wu
This paper reported a simple and effective process of bonding-friendly Parylene C-caulked PDMS (pcPDMS) for low-permeability required microfluidics. Parylene C was deposited into PDMS matrix at an elevated temperature (higher than 135°C) to caulk the permeable sites. The so-prepared pcPDMS can be directly bonded with oxygen plasma treatment just as pristine PDMS. SEM EDAX and Laser scanning confocal microscopy (LSCM) were introduced to characterize the Parylene C caulked status in the PDMS matrix based on the specific Cl element component and the firstly-found temperature-sensitive autofluorescence of Parylene C. The preliminary results indicated that the present bonding-friendly pcPDMS can successfully suppress the diffusion of small molecules into the PDMS matrix.
{"title":"Bonding-friendly pcPDMS: Depositing Parylene C into PDMS matrix at an elevated temperature","authors":"Yaoping Liu, Lingqian Zhang, Wei Wang, Wengang Wu","doi":"10.1109/MEMSYS.2015.7050992","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050992","url":null,"abstract":"This paper reported a simple and effective process of bonding-friendly Parylene C-caulked PDMS (pcPDMS) for low-permeability required microfluidics. Parylene C was deposited into PDMS matrix at an elevated temperature (higher than 135°C) to caulk the permeable sites. The so-prepared pcPDMS can be directly bonded with oxygen plasma treatment just as pristine PDMS. SEM EDAX and Laser scanning confocal microscopy (LSCM) were introduced to characterize the Parylene C caulked status in the PDMS matrix based on the specific Cl element component and the firstly-found temperature-sensitive autofluorescence of Parylene C. The preliminary results indicated that the present bonding-friendly pcPDMS can successfully suppress the diffusion of small molecules into the PDMS matrix.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128177186","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051030
Haitao Yu, Ying Chen, P. Xu, F. Yu, Xinxin Li
This paper reports a new method to ensure resonant micro-sensor long-time resonating in solution for real-time biochemical sensing/analysis. By designing a water-proof `diving-suit' for the cantilever resonator and an anti-leakage narrow `slit' to free the cantilever vibration, only the sensing-region of the cantilever contacts to analyte solution, while the other parts are remained in air to keep free-resonance. With this `μ-diving suit' design, the resonant cantilever with electrothermal driven and piezoresistive frequency readout integrated can achieve a Q factor of 17 in water. With specific sensing-material loaded at the sensing-region, the cantilever sensor experimentally realizes liquid-phase real-time detection to ppb-level organophosphorous pesticide of acephate.
{"title":"Water-proof ‘μ-diving suit’ dressed on resonant biochemical sensor for online detection in solution","authors":"Haitao Yu, Ying Chen, P. Xu, F. Yu, Xinxin Li","doi":"10.1109/MEMSYS.2015.7051030","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051030","url":null,"abstract":"This paper reports a new method to ensure resonant micro-sensor long-time resonating in solution for real-time biochemical sensing/analysis. By designing a water-proof `diving-suit' for the cantilever resonator and an anti-leakage narrow `slit' to free the cantilever vibration, only the sensing-region of the cantilever contacts to analyte solution, while the other parts are remained in air to keep free-resonance. With this `μ-diving suit' design, the resonant cantilever with electrothermal driven and piezoresistive frequency readout integrated can achieve a Q factor of 17 in water. With specific sensing-material loaded at the sensing-region, the cantilever sensor experimentally realizes liquid-phase real-time detection to ppb-level organophosphorous pesticide of acephate.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129988985","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051152
Yu-Chung Chen, K. Song, K. Morimoto, Yuji Suzuki
For the first time, we have realized electret that can be used in the liquid environment toward better performance of electret-based generators and actuators. By using super-lyophobic overhanging pillar surface, stable Cassie-Baxter (C-B) state is sustained even with low-surface-tension hexadecane liquid and with high surface potential. Pillar surface with a SiO2 electret layer has been successfully charged with soft X-ray photoionization we previously developed. The pillar surface significantly suppressed the charge decay, and surface potential as high as 160 V has been maintained after 5-day contact with hexadecane droplet.
{"title":"Liquid-tolerant electret using super-lyophobic pillar surface","authors":"Yu-Chung Chen, K. Song, K. Morimoto, Yuji Suzuki","doi":"10.1109/MEMSYS.2015.7051152","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051152","url":null,"abstract":"For the first time, we have realized electret that can be used in the liquid environment toward better performance of electret-based generators and actuators. By using super-lyophobic overhanging pillar surface, stable Cassie-Baxter (C-B) state is sustained even with low-surface-tension hexadecane liquid and with high surface potential. Pillar surface with a SiO2 electret layer has been successfully charged with soft X-ray photoionization we previously developed. The pillar surface significantly suppressed the charge decay, and surface potential as high as 160 V has been maintained after 5-day contact with hexadecane droplet.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"72 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130040567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051052
T. Nakahara, H. Shintaku, H. Kotera, R. Yokokawa
This paper describes a method for controlling the velocity of gliding microtubules by light irradiance on a gold-patterned surface. The light was used to control the temperature of the buffer solution by heat transfer from the thin gold film. Microtubule velocity increased approximately 1.8-fold from the initial velocity at the 13.5 W/cm2 on the gold-coated area. The proposed method also allows cyclical control of gliding velocity between 0.53 μm/s and 1.01 μm/s by switching irradiance between 0.7 W/cm2 and 13.7 W/cm2. This is the first demonstration of the control and switching of velocity on a gold-patterned surface.
{"title":"A method for controlling microtubule velocity using light irradiance on a patterned gold surface","authors":"T. Nakahara, H. Shintaku, H. Kotera, R. Yokokawa","doi":"10.1109/MEMSYS.2015.7051052","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051052","url":null,"abstract":"This paper describes a method for controlling the velocity of gliding microtubules by light irradiance on a gold-patterned surface. The light was used to control the temperature of the buffer solution by heat transfer from the thin gold film. Microtubule velocity increased approximately 1.8-fold from the initial velocity at the 13.5 W/cm2 on the gold-coated area. The proposed method also allows cyclical control of gliding velocity between 0.53 μm/s and 1.01 μm/s by switching irradiance between 0.7 W/cm2 and 13.7 W/cm2. This is the first demonstration of the control and switching of velocity on a gold-patterned surface.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134010963","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051124
T. Beyazoglu, T. Rocheleau, A. Grine, K. Grutter, Ming C. Wu, C. Nguyen
A super-regenerative optical receiver detecting on-off key (OOK) modulated light inputs has been demonstrated that harnesses the radiation-pressure gain of a self-sustained electro-opto-mechanical oscillator (EOMO) to render its oscillation amplitude a function of the intensity of light coupled into the oscillator. Unlike previous electronic super-regenerative receivers, this rendition removes the need to periodically quench the oscillation signal, which then simplifies the receiver architecture and increases the attainable receive bit rate. A fully functional receiver with a compact ~90 μm EOMO comprised only of silicon-compatible materials demonstrates successful recovery of a 2 kbps bit stream from an OOK modulated 1550 nm laser input. By removing the need for the expensive III-V compound semiconductor materials often used in conventional optical receivers, this EOMO-based receiver offers a lower cost alternative for sensor network applications.
{"title":"A super-regenerative optical receiver based on an optomechanical oscillator","authors":"T. Beyazoglu, T. Rocheleau, A. Grine, K. Grutter, Ming C. Wu, C. Nguyen","doi":"10.1109/MEMSYS.2015.7051124","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051124","url":null,"abstract":"A super-regenerative optical receiver detecting on-off key (OOK) modulated light inputs has been demonstrated that harnesses the radiation-pressure gain of a self-sustained electro-opto-mechanical oscillator (EOMO) to render its oscillation amplitude a function of the intensity of light coupled into the oscillator. Unlike previous electronic super-regenerative receivers, this rendition removes the need to periodically quench the oscillation signal, which then simplifies the receiver architecture and increases the attainable receive bit rate. A fully functional receiver with a compact ~90 μm EOMO comprised only of silicon-compatible materials demonstrates successful recovery of a 2 kbps bit stream from an OOK modulated 1550 nm laser input. By removing the need for the expensive III-V compound semiconductor materials often used in conventional optical receivers, this EOMO-based receiver offers a lower cost alternative for sensor network applications.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115598211","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050915
N. Thanh-Vinh, Kiyoshi Matsumoto, I. Shimoyama
This paper reports a method to measure viscosity based on the resonant vibration of droplets on a piezoresistive cantilever array. We demonstrate that viscosity of small droplets (3μL) can be estimated from the attenuation rate of the cantilever output during free-decay of the droplet vibration. The estimation for liquid sample with different viscosity using water-glycerol solutions were carried out.
{"title":"A viscometer based on vibration of droplets on a piezoresistive cantilever array","authors":"N. Thanh-Vinh, Kiyoshi Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2015.7050915","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050915","url":null,"abstract":"This paper reports a method to measure viscosity based on the resonant vibration of droplets on a piezoresistive cantilever array. We demonstrate that viscosity of small droplets (3μL) can be estimated from the attenuation rate of the cantilever output during free-decay of the droplet vibration. The estimation for liquid sample with different viscosity using water-glycerol solutions were carried out.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114966440","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050980
W. Sung, Chao-Lin Cheng, W. Fang
This study presents a PDMS (Polydimethylsiloxane) fiber integrated with multi devices scheme using stretchable electroplating copper spring. Each device was located on the node and embedded in PDMS-fiber. Thus, devices are mechanically connected by PDMS-fiber and electrically connected by inner stretchable spring. Thus, large-area and flexible applications can be achieved. Advantages of this approach: (1) length magnification by stretchable spring; (2) thicker stretchable spring embedded in PDMS provides well mechanical and electrical characteristics; (3) node acts as a hub for devices implementation and integration; (4) partially stretched spring could reduce the resistance variation by external loads. A 6.2cm PDMS-fiber with sensors and LED is implemented using a 2.4cm node-spring components fabricated on 4-inch wafer. PDMS-fiber longer than 30cm can be achieved using different spring design.
{"title":"Micro devices integration with stretchable spring embedded in long PDMS-fiber for flexible electronics","authors":"W. Sung, Chao-Lin Cheng, W. Fang","doi":"10.1109/MEMSYS.2015.7050980","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050980","url":null,"abstract":"This study presents a PDMS (Polydimethylsiloxane) fiber integrated with multi devices scheme using stretchable electroplating copper spring. Each device was located on the node and embedded in PDMS-fiber. Thus, devices are mechanically connected by PDMS-fiber and electrically connected by inner stretchable spring. Thus, large-area and flexible applications can be achieved. Advantages of this approach: (1) length magnification by stretchable spring; (2) thicker stretchable spring embedded in PDMS provides well mechanical and electrical characteristics; (3) node acts as a hub for devices implementation and integration; (4) partially stretched spring could reduce the resistance variation by external loads. A 6.2cm PDMS-fiber with sensors and LED is implemented using a 2.4cm node-spring components fabricated on 4-inch wafer. PDMS-fiber longer than 30cm can be achieved using different spring design.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116903974","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050996
J. Ito, R. Sekine, D. Yoon, Y. Nakamura, H. Oku, H. Nansai, T. Chikasawa, T. Goto, T. Sekiguchi, N. Takeda, S. Shoji
This paper reports a highly controllable three-dimensional (3D) sheath flow device for fabrication of artificial capillary vessels. Three step sheath injection type 3D flow device which realizes wide core and sheath structure variations by simply flow rate control was applied to fabricate double-layer coaxial Core-Sheath microfibers applicable for long micro capillary vessels by aligning and cultivating vascular endothelial cells. As a result, about a 3-centimeter-long microfiber which has the vascular endothelial cells fused mutually in the center was successfully formed after three days culture.
{"title":"Highly controllable three-dimensional sheath flow device for fabrication of artificial capillary vessels","authors":"J. Ito, R. Sekine, D. Yoon, Y. Nakamura, H. Oku, H. Nansai, T. Chikasawa, T. Goto, T. Sekiguchi, N. Takeda, S. Shoji","doi":"10.1109/MEMSYS.2015.7050996","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050996","url":null,"abstract":"This paper reports a highly controllable three-dimensional (3D) sheath flow device for fabrication of artificial capillary vessels. Three step sheath injection type 3D flow device which realizes wide core and sheath structure variations by simply flow rate control was applied to fabricate double-layer coaxial Core-Sheath microfibers applicable for long micro capillary vessels by aligning and cultivating vascular endothelial cells. As a result, about a 3-centimeter-long microfiber which has the vascular endothelial cells fused mutually in the center was successfully formed after three days culture.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117120303","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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