We propose a simple, and selective optical method for biological detection, using reflection or absorption of light upon transmission through a homogeneous/inhomogeneous thin film surface. In this experimental study, a wavelength band is sought as an optical signature to identify biological sample immobilized on an ultrathin film. We have used variable angle spectroscopic ellipsometry, a technique generally used in the semiconductor industry, to identify proteins. For immobilizing the proteins, 1-octadecanethiol (C-18) coated to gold (Au) substrate has been used because of its low surface energy. In order to characterize 1-octadecanethiol and evaluate its re-usability, fourier transform infrared spectroscopy (FTIR) was employed. Experimental results illustrate that proteins are sensitive to optical investigation in visible and near infrared region of the electromagnetic spectrum.
{"title":"Reversible Protein Detection Method Based on Self-Assembled Monolayers Using Ellipsometry","authors":"K. J. Gill, K. Isaacson, S. Dew, D. Kwok","doi":"10.1109/ICMENS.2004.128","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.128","url":null,"abstract":"We propose a simple, and selective optical method for biological detection, using reflection or absorption of light upon transmission through a homogeneous/inhomogeneous thin film surface. In this experimental study, a wavelength band is sought as an optical signature to identify biological sample immobilized on an ultrathin film. We have used variable angle spectroscopic ellipsometry, a technique generally used in the semiconductor industry, to identify proteins. For immobilizing the proteins, 1-octadecanethiol (C-18) coated to gold (Au) substrate has been used because of its low surface energy. In order to characterize 1-octadecanethiol and evaluate its re-usability, fourier transform infrared spectroscopy (FTIR) was employed. Experimental results illustrate that proteins are sensitive to optical investigation in visible and near infrared region of the electromagnetic spectrum.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124411932","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
K. Gilbertson, W. Finlay, C. Lange, M. Brett, D. Vick
The ability to produce high aspect ratio particle aerosols (airborne fibres) is required in order to develop a thorough understanding of the parameters that affect the deposition of fibres in the mouth and throat. Such an ability is currently being developed. In this work, we produce monodisperse fibres from porous thin films by releasing small structures from a substrate. The development of a means to assay for these fibres is also discussed.
{"title":"Nanofabrication of High Aspect Ratio Aerosol Particles for Deposition Studies in a Model Human Airway","authors":"K. Gilbertson, W. Finlay, C. Lange, M. Brett, D. Vick","doi":"10.1109/ICMENS.2004.107","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.107","url":null,"abstract":"The ability to produce high aspect ratio particle aerosols (airborne fibres) is required in order to develop a thorough understanding of the parameters that affect the deposition of fibres in the mouth and throat. Such an ability is currently being developed. In this work, we produce monodisperse fibres from porous thin films by releasing small structures from a substrate. The development of a means to assay for these fibres is also discussed.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"196 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123274919","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In this paper, several designs of an Electrohydrodynamic (EHD) Ion-Drag Micropump will be investigated. The goal is to determine the effect of several design parameters on the pressure-voltage relationship. The overall dimensions of the micropump channel are 500 µm x 480µm x 60µm. Four designs were tested in simulation with different combinations of the gap between the electrodes (S) and the gap between the electrode pairs (D) to examine their impact on the pumping performance. The design with small gap (S) and large gap (D) was found to have the best pumping performance.
本文将研究几种电流体动力(EHD)离子拖动微泵的设计。目的是确定几个设计参数对压力-电压关系的影响。微泵通道的整体尺寸为500 μ m x 480 μ m x 60 μ m。在模拟中测试了四种设计，其中电极之间的间隙(S)和电极对之间的间隙(D)的不同组合，以检查它们对泵送性能的影响。小间隙(S)和大间隙(D)的设计具有最佳的泵送性能。
{"title":"On the Design of an Electrohydrodynamic Ion-Drag Micropump","authors":"M. Badran, M. Moussa","doi":"10.1109/ICMENS.2004.119","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.119","url":null,"abstract":"In this paper, several designs of an Electrohydrodynamic (EHD) Ion-Drag Micropump will be investigated. The goal is to determine the effect of several design parameters on the pressure-voltage relationship. The overall dimensions of the micropump channel are 500 µm x 480µm x 60µm. Four designs were tested in simulation with different combinations of the gap between the electrodes (S) and the gap between the electrode pairs (D) to examine their impact on the pumping performance. The design with small gap (S) and large gap (D) was found to have the best pumping performance.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125691751","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
As one goes down the length scale to nanoworld, the properties of objects and phenomena swerve from those described by the conventional, macroscopic laws governing the behavior of continuous media and materials. The functional features of nanostructures manifest on length scale from one to hundreds nanometers and time scale up to microseconds and more, but all stem from microscopic properties of the atoms and chemical groups they are built of. Explicit molecular modeling of such nanosystems involving millions of molecules is by far not feasible with ab initio methods and molecular simulations, and requires multiple-scale approaches. Statistical-mechanical theory of molecular liquids and other disordered systems successfully describes the molecular structure and thermodynamics of nanosystems, with proper account of their chemical functionalities.¹-⁴ It operates with spatial/temporal distributions of species averaged over the statistical ensemble rather than with trajectories of individual molecules. This coarse-graining, however, keeps the short-range detail of the solvation structure of chemical specificities, such as the hydrophobic effects, hydrogen bonding, and other association effects. Below discussed are two illustrative examples, self-assembly of organic nanotubes in electrolyte solution and electrochemical devices with nanoporous electrodes.
{"title":"Molecular Modeling of Biomolecules and Solutions in Nanoporous Materials","authors":"A. Kovalenko","doi":"10.1109/ICMENS.2004.101","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.101","url":null,"abstract":"As one goes down the length scale to nanoworld, the properties of objects and phenomena swerve from those described by the conventional, macroscopic laws governing the behavior of continuous media and materials. The functional features of nanostructures manifest on length scale from one to hundreds nanometers and time scale up to microseconds and more, but all stem from microscopic properties of the atoms and chemical groups they are built of. Explicit molecular modeling of such nanosystems involving millions of molecules is by far not feasible with ab initio methods and molecular simulations, and requires multiple-scale approaches. Statistical-mechanical theory of molecular liquids and other disordered systems successfully describes the molecular structure and thermodynamics of nanosystems, with proper account of their chemical functionalities.¹-⁴ It operates with spatial/temporal distributions of species averaged over the statistical ensemble rather than with trajectories of individual molecules. This coarse-graining, however, keeps the short-range detail of the solvation structure of chemical specificities, such as the hydrophobic effects, hydrogen bonding, and other association effects. Below discussed are two illustrative examples, self-assembly of organic nanotubes in electrolyte solution and electrochemical devices with nanoporous electrodes.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116491107","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The present work reports a new method to improve FBG sensing systems by minimizing dispersion effects. Moreover, a new technique utilizing communication systems’ parameters in assessing the improvement in Fiber Brag Gratings sensors is also reported. WDM techniquees with coded signaling is used. The improvement is mainly achieved by introducing DCF fiber segments to enhance the Q-parameters and Eye diagrams obtained for the system, which can be interpreted as an improvement in the sensing function. Simulations are carried out to illustrate the effect of DCF on the two factors considered.
{"title":"Fiber Bragg Grating Sensing Systems Performance Improvement and Assessment","authors":"A. Al-Lawati, H. Bourdoucen","doi":"10.1109/ICMENS.2004.68","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.68","url":null,"abstract":"The present work reports a new method to improve FBG sensing systems by minimizing dispersion effects. Moreover, a new technique utilizing communication systems’ parameters in assessing the improvement in Fiber Brag Gratings sensors is also reported. WDM techniquees with coded signaling is used. The improvement is mainly achieved by introducing DCF fiber segments to enhance the Q-parameters and Eye diagrams obtained for the system, which can be interpreted as an improvement in the sensing function. Simulations are carried out to illustrate the effect of DCF on the two factors considered.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114079670","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The effect of the electric double layer (EDL) on the bypass transition mechanism in the linear evolution stage is explored through direct numerical simulations. An initial perturbation velocity field consisting of a pair of counter-rotating vortices is introduced in Poiseuille and EDL flows and the time-space evolution of the perturbed field is analysed for short times at half the critical Reynolds numbers (3000 for Poiseuille and 300 for EDL). The wall normal and spanwise perturbation velocities development are both quantitatively and qualitatively similar in macro and micro flows. The streamwise velocity, which is initially zero and set up by the generation of the wall normal vorticity is twice larger under the EDL effect. Both flows develop inclined strong streamwise shear layers. Overall is the close similarity of the disturbance evolution showing that the three dimensional linear mechanism in EDL flow lead to the structures that are at least as strong as in Poiseuille flow.
{"title":"By-Pass Transition in Microchannels under EDL Effect","authors":"S. Tardu","doi":"10.1109/ICMENS.2004.40","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.40","url":null,"abstract":"The effect of the electric double layer (EDL) on the bypass transition mechanism in the linear evolution stage is explored through direct numerical simulations. An initial perturbation velocity field consisting of a pair of counter-rotating vortices is introduced in Poiseuille and EDL flows and the time-space evolution of the perturbed field is analysed for short times at half the critical Reynolds numbers (3000 for Poiseuille and 300 for EDL). The wall normal and spanwise perturbation velocities development are both quantitatively and qualitatively similar in macro and micro flows. The streamwise velocity, which is initially zero and set up by the generation of the wall normal vorticity is twice larger under the EDL effect. Both flows develop inclined strong streamwise shear layers. Overall is the close similarity of the disturbance evolution showing that the three dimensional linear mechanism in EDL flow lead to the structures that are at least as strong as in Poiseuille flow.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134416089","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We present a method to assess microchip performance for on-chip electrophoretic separations. The assessment is realized through electrophoretic manipulation of a DNA size standard using specially designed electric voltage programs. Results achieved from the assessment could be used as an indicator of microchip "aging" in terms of lowered resolutions and fluctuations in electro-osmotic flow (EOF).
{"title":"A Rapid Performance Assessment Method for Microfluidic Chips","authors":"Rubin Ma, K. Kaler, C. Backhouse","doi":"10.1109/ICMENS.2004.21","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.21","url":null,"abstract":"We present a method to assess microchip performance for on-chip electrophoretic separations. The assessment is realized through electrophoretic manipulation of a DNA size standard using specially designed electric voltage programs. Results achieved from the assessment could be used as an indicator of microchip \"aging\" in terms of lowered resolutions and fluctuations in electro-osmotic flow (EOF).","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129723693","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Micron-scale electromechanical disk-shaped resonators have exhibited operational frequencies above 1 GHz and quality factors exceeding 1,500 at these frequencies. Additionally, such disk resonators can be potentially realized in current silicon CMOS and BiCMOS integrated circuit processes, making them attractive alternatives to traditional high-Q off-chip components. Accurate modeling of these devices is critical to predicting the mode-shape and, most importantly, the vibration frequency. This paper presents a finite element-based approach to modeling higher-order effects in disk-shaped resonators using ANSYS 7.0. An in-depth study of the mode-shapes for disk resonators of various sizes, and the effects of substrate anchors attached to the disks at various locations, is included. Effects on resonator operation due to metal layers, such as electroless plated copper, deposited on the disks are also simulated. All simulations are performed in a fully coupled electrical-mechanical environment so as to incorporate as many process and excitation variables as possible.
{"title":"Finite Element-Based Analysis of Single-Crystal Si Contour-Mode Electromechanical RF Resonators","authors":"C. Maxey, S. Raman","doi":"10.1109/ICMENS.2004.71","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.71","url":null,"abstract":"Micron-scale electromechanical disk-shaped resonators have exhibited operational frequencies above 1 GHz and quality factors exceeding 1,500 at these frequencies. Additionally, such disk resonators can be potentially realized in current silicon CMOS and BiCMOS integrated circuit processes, making them attractive alternatives to traditional high-Q off-chip components. Accurate modeling of these devices is critical to predicting the mode-shape and, most importantly, the vibration frequency. This paper presents a finite element-based approach to modeling higher-order effects in disk-shaped resonators using ANSYS 7.0. An in-depth study of the mode-shapes for disk resonators of various sizes, and the effects of substrate anchors attached to the disks at various locations, is included. Effects on resonator operation due to metal layers, such as electroless plated copper, deposited on the disks are also simulated. All simulations are performed in a fully coupled electrical-mechanical environment so as to incorporate as many process and excitation variables as possible.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123738978","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pulmonary gene delivery is thought to play an important role in treating genetically related diseases and may induce immunity towards pathogens entering the body via the airways. We present here in vitro and in vivo methods developed at our laboratories to study carrier systems for pulmonary delivery of DNA vaccines.
{"title":"Developing and Testing of Drug Carrier Systems for Pulmonary Drug Delivery","authors":"G. Borchard, M. Bivas-Benita, H. Junginger","doi":"10.1109/ICMENS.2004.51","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.51","url":null,"abstract":"Pulmonary gene delivery is thought to play an important role in treating genetically related diseases and may induce immunity towards pathogens entering the body via the airways. We present here in vitro and in vivo methods developed at our laboratories to study carrier systems for pulmonary delivery of DNA vaccines.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128681613","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a convetional RFIC device. The Inductor achieved a quality factor greater than 9 at 15 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.
{"title":"A Tunable RF MEMS Inductor","authors":"I. Zine-El-Abidine, M. Okoniewski, J. McRory","doi":"10.1109/ICMENS.2004.24","DOIUrl":"https://doi.org/10.1109/ICMENS.2004.24","url":null,"abstract":"This paper reports a single-wafer micromachined radio-frequency (RF) inductor that can be integrated in a convetional RFIC device. The Inductor achieved a quality factor greater than 9 at 15 GHz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.","PeriodicalId":344661,"journal":{"name":"2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2004-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129296351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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