Pub Date : 2023-07-10DOI: 10.1109/IVNC57695.2023.10188886
Lan Jin, Yang Zhou, P. Zhang
We analyze the emission of density-modulated electron beams of different temporal shapes under the excitation of a combined radio frequency (RF) field and a continuous wave or pulsed laser field, using an exact quantum model for photo-/field-emission.
{"title":"Modulated Electron Beam Emission Under RF and Laser Fields","authors":"Lan Jin, Yang Zhou, P. Zhang","doi":"10.1109/IVNC57695.2023.10188886","DOIUrl":"https://doi.org/10.1109/IVNC57695.2023.10188886","url":null,"abstract":"We analyze the emission of density-modulated electron beams of different temporal shapes under the excitation of a combined radio frequency (RF) field and a continuous wave or pulsed laser field, using an exact quantum model for photo-/field-emission.","PeriodicalId":346266,"journal":{"name":"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131314506","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-07-10DOI: 10.1109/IVNC57695.2023.10188878
P. Buchner, M. Hausladen, A. Schels, F. Herdl, S. Edler, M. Bachmann, R. Schreiner
Silicon nanowire field emission arrays (50 × 50 pillars) were fabricated on a silicon glass hybrid wafer. The glass acts both as the support for the whole structure and insulator between cathode and extraction grid. The extraction grid matches the emitter structures and is optically aligned and adhered to the emitter chip by a vacuum compatible epoxide adhesive. These chips exhibit an emission current of about 600 $mu{mathrm{A}}$ at an extraction voltage of 300 V. The electron transmission through the grid is above 80 %. 58-hour longtime measurements were conducted showing low degradation of the emission current and high stability of electron transmission.
{"title":"An Integrated Silicon Nanowire Field Emission Electron Source on a Chip with High Electron Transmission","authors":"P. Buchner, M. Hausladen, A. Schels, F. Herdl, S. Edler, M. Bachmann, R. Schreiner","doi":"10.1109/IVNC57695.2023.10188878","DOIUrl":"https://doi.org/10.1109/IVNC57695.2023.10188878","url":null,"abstract":"Silicon nanowire field emission arrays (50 × 50 pillars) were fabricated on a silicon glass hybrid wafer. The glass acts both as the support for the whole structure and insulator between cathode and extraction grid. The extraction grid matches the emitter structures and is optically aligned and adhered to the emitter chip by a vacuum compatible epoxide adhesive. These chips exhibit an emission current of about 600 $mu{mathrm{A}}$ at an extraction voltage of 300 V. The electron transmission through the grid is above 80 %. 58-hour longtime measurements were conducted showing low degradation of the emission current and high stability of electron transmission.","PeriodicalId":346266,"journal":{"name":"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)","volume":"78 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131664408","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-07-10DOI: 10.1109/IVNC57695.2023.10188973
Jordan T. Ricci, Sergei Mistyuk, C. Hunt
A flat-format vacuum light source using cathodoluminescent phosphors has been designed, modeled, and fabricated. It is found applicable to general and specialty lighting.
利用阴极发光荧光粉设计、建模并制作了一种平面真空光源。适用于普通照明和特殊照明。
{"title":"A Compact Flat Vacuum Light Source Using a Wire Cathode and Cathodoluminescent Phosphors","authors":"Jordan T. Ricci, Sergei Mistyuk, C. Hunt","doi":"10.1109/IVNC57695.2023.10188973","DOIUrl":"https://doi.org/10.1109/IVNC57695.2023.10188973","url":null,"abstract":"A flat-format vacuum light source using cathodoluminescent phosphors has been designed, modeled, and fabricated. It is found applicable to general and specialty lighting.","PeriodicalId":346266,"journal":{"name":"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117281696","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-07-10DOI: 10.1109/IVNC57695.2023.10188877
L. C. Adams, G. Werner, J. Cary
A new, efficient method for optimizing NVCT geometry is presented. Previous work has shown how adjoint techniques can compute the shape gradient (i.e., gradient with respect to shape perturbations) of a prescribed-emission electron gun using only two particle-in-cell simulations [5]. This work provides an extension to the case of self-consistent emission in Hamiltonian systems by including external parameters as dynamical variables. The structure of the perturbed Hamilton's equations then yields a simple recipe for the evaluation of the adjoint problem. The adjoint problem can be evaluated as a perturbed and time-reversed version of the original simulation. From this, the full gradient can be extracted. This general approach is used to incorporate the modified emission current into the computed shape gradients, enabling full-device gradient-based optimization.
{"title":"Adjoint Optimization of Nanoscale Vacuum-Channel Transistor (NVCT) Geometry","authors":"L. C. Adams, G. Werner, J. Cary","doi":"10.1109/IVNC57695.2023.10188877","DOIUrl":"https://doi.org/10.1109/IVNC57695.2023.10188877","url":null,"abstract":"A new, efficient method for optimizing NVCT geometry is presented. Previous work has shown how adjoint techniques can compute the shape gradient (i.e., gradient with respect to shape perturbations) of a prescribed-emission electron gun using only two particle-in-cell simulations [5]. This work provides an extension to the case of self-consistent emission in Hamiltonian systems by including external parameters as dynamical variables. The structure of the perturbed Hamilton's equations then yields a simple recipe for the evaluation of the adjoint problem. The adjoint problem can be evaluated as a perturbed and time-reversed version of the original simulation. From this, the full gradient can be extracted. This general approach is used to incorporate the modified emission current into the computed shape gradients, enabling full-device gradient-based optimization.","PeriodicalId":346266,"journal":{"name":"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)","volume":"62 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116483589","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-07-10DOI: 10.1109/IVNC57695.2023.10188986
Y. Yu, K. Park
Electron beam focusing is crucial for various vacuum electron applications such as scanning electron microscope SEM), electron beam lithography (EBL), electron beam welding (EBW) and so on. We have demonstrated high quality X-ray imaging capable cold cathode electron beam design with focusing electrode. The focal spot size (FSS) and dose characteristics were improved by our focusing electrode integrated C-beam. By optimizing, as small as 0.1 mm of fss and 11.2 % of enhanced dose were confirmed. The authors believe that our sophisticated beam design will pave for next generation X-ray techniques.
{"title":"Focusing Electrode on Focal Spot Size and Dose by Carbon Nanotube Based Cold Cathode Electron Beam (C-Beam)","authors":"Y. Yu, K. Park","doi":"10.1109/IVNC57695.2023.10188986","DOIUrl":"https://doi.org/10.1109/IVNC57695.2023.10188986","url":null,"abstract":"Electron beam focusing is crucial for various vacuum electron applications such as scanning electron microscope SEM), electron beam lithography (EBL), electron beam welding (EBW) and so on. We have demonstrated high quality X-ray imaging capable cold cathode electron beam design with focusing electrode. The focal spot size (FSS) and dose characteristics were improved by our focusing electrode integrated C-beam. By optimizing, as small as 0.1 mm of fss and 11.2 % of enhanced dose were confirmed. The authors believe that our sophisticated beam design will pave for next generation X-ray techniques.","PeriodicalId":346266,"journal":{"name":"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)","volume":"173 3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123506431","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-07-10DOI: 10.1109/IVNC57695.2023.10188996
H. Murata, K. Murakami, M. Nagao
We have developed a volcano-structured double-gated field emitter array (FEA). High beam focusing have been achieved by precisely arranged gate electrode, however, high current operation have not been achieved. In this study, we applied TiN coating to volcano-structured Si-FEA, which was formed by reactive sputtering of Ti target and Ar/N2 gases. The TiN coated Si-FEA achieved relatively high current of 4.5 mA/1027 tips and short-term stability of 1 mA for 60 min. Therefore, the TiN coating is promising for high current operation of FEA.
研制了一种火山构造双门控场发射极阵列(FEA)。利用精确排列的栅电极可以实现高光束聚焦，但无法实现大电流工作。在本研究中，我们将TiN涂层应用于火山结构的Si-FEA，该结构是由Ti靶和Ar/N2气体反应溅射形成的。TiN涂层的Si-FEA具有4.5 mA/1027 tips的相对高电流和1 mA 60 min的短期稳定性，因此，TiN涂层有望用于FEA的大电流运行。
{"title":"Improvement of Electron Emission Properties of Volcano-Structured Silicon Emitters by Titanium Nitride Coating","authors":"H. Murata, K. Murakami, M. Nagao","doi":"10.1109/IVNC57695.2023.10188996","DOIUrl":"https://doi.org/10.1109/IVNC57695.2023.10188996","url":null,"abstract":"We have developed a volcano-structured double-gated field emitter array (FEA). High beam focusing have been achieved by precisely arranged gate electrode, however, high current operation have not been achieved. In this study, we applied TiN coating to volcano-structured Si-FEA, which was formed by reactive sputtering of Ti target and Ar/N2 gases. The TiN coated Si-FEA achieved relatively high current of 4.5 mA/1027 tips and short-term stability of 1 mA for 60 min. Therefore, the TiN coating is promising for high current operation of FEA.","PeriodicalId":346266,"journal":{"name":"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)","volume":"1989 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120849138","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-07-10DOI: 10.1109/IVNC57695.2023.10188970
Ron Ruimy, I. Kaminer
Coherent modulation of free electron wavefunctions on ultrafast timescales became accessible in recent years thanks to advances in ultrafast transmission electron microscopy. We demonstrate how such coherent modulation of free electrons can significantly alter their coherent quantum interaction with light and matter. We suggest that such coherently modulated free electrons can become a prominent tool in quantum science and technology, enabling ultrafast gate operations and quantum tomographic measurements with exceptionally high spatial resolutions.
{"title":"Quantum Nature of Electron-Light and Electron-Matter Interactions","authors":"Ron Ruimy, I. Kaminer","doi":"10.1109/IVNC57695.2023.10188970","DOIUrl":"https://doi.org/10.1109/IVNC57695.2023.10188970","url":null,"abstract":"Coherent modulation of free electron wavefunctions on ultrafast timescales became accessible in recent years thanks to advances in ultrafast transmission electron microscopy. We demonstrate how such coherent modulation of free electrons can significantly alter their coherent quantum interaction with light and matter. We suggest that such coherently modulated free electrons can become a prominent tool in quantum science and technology, enabling ultrafast gate operations and quantum tomographic measurements with exceptionally high spatial resolutions.","PeriodicalId":346266,"journal":{"name":"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129507188","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2023-07-10DOI: 10.1109/IVNC57695.2023.10188881
L. Ang, Y. Ang, Yi-man Luo, Bee Hong Tiang
In this paper, we present an overview of the novel scaling laws of thermionic emission (TE), field emission (FE) and photoemission (PE) for two-dimensional (2D) materials. For these emerging materials, we express the emission models in the form of $ln(J/K^{beta})propto 1/K$, where J is the emission current density, $K$ is temperature (T) for TE and $K$ is dc or optically field for FE and PE. Here, the scaling is $beta = 3/2$ and $beta = 1$ for electron emission in lateral (or edge) and vertical (or surface) direction, respectively, which is different from the traditional scaling of $beta = 2$ for bulk 3D materials.
{"title":"Overview of Electron Emission Laws from 2D Materials","authors":"L. Ang, Y. Ang, Yi-man Luo, Bee Hong Tiang","doi":"10.1109/IVNC57695.2023.10188881","DOIUrl":"https://doi.org/10.1109/IVNC57695.2023.10188881","url":null,"abstract":"In this paper, we present an overview of the novel scaling laws of thermionic emission (TE), field emission (FE) and photoemission (PE) for two-dimensional (2D) materials. For these emerging materials, we express the emission models in the form of $ln(J/K^{beta})propto 1/K$, where J is the emission current density, $K$ is temperature (T) for TE and $K$ is dc or optically field for FE and PE. Here, the scaling is $beta = 3/2$ and $beta = 1$ for electron emission in lateral (or edge) and vertical (or surface) direction, respectively, which is different from the traditional scaling of $beta = 2$ for bulk 3D materials.","PeriodicalId":346266,"journal":{"name":"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)","volume":"124 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126202130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Herein we introduce a novel atmospheric streamer plasma device that employs a custom-designed electrode configuration to concentrate the electric field (~60 kV/cm) in a localized region, allowing electron emission and the generation of corona and streamer discharge plasma in an atmospheric ambient. We also introduce electrohydraulic streamer discharge plasma (ESDP), a promising plasma system that combines streamer discharge plasma and plasma-activated water (PAW) at a gas-liquid interface. This system has potential applications in seed sterilization and nanoscale surface modification. Our findings demonstrate that ESDP reduces fungal contamination on Chinese kale seeds by~75% and significantly improves the proportion of healthy seedlings. The combination of nonthermal (gas discharge) plasma and PAW offers advanced disinfection solutions for various applications, including biological, medicinal, environmental, and agricultural fields.
{"title":"Electron Emission-Driven Gas-Liquid Plasma: Seed Sterilization and Surface Modification","authors":"Siwapon Srisonphan, Naowarat Tephiruk, Khomsan Ruangwong","doi":"10.1109/IVNC57695.2023.10188991","DOIUrl":"https://doi.org/10.1109/IVNC57695.2023.10188991","url":null,"abstract":"Herein we introduce a novel atmospheric streamer plasma device that employs a custom-designed electrode configuration to concentrate the electric field (~60 kV/cm) in a localized region, allowing electron emission and the generation of corona and streamer discharge plasma in an atmospheric ambient. We also introduce electrohydraulic streamer discharge plasma (ESDP), a promising plasma system that combines streamer discharge plasma and plasma-activated water (PAW) at a gas-liquid interface. This system has potential applications in seed sterilization and nanoscale surface modification. Our findings demonstrate that ESDP reduces fungal contamination on Chinese kale seeds by~75% and significantly improves the proportion of healthy seedlings. The combination of nonthermal (gas discharge) plasma and PAW offers advanced disinfection solutions for various applications, including biological, medicinal, environmental, and agricultural fields.","PeriodicalId":346266,"journal":{"name":"2023 IEEE 36th International Vacuum Nanoelectronics Conference (IVNC)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-07-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124948692","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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