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2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)最新文献

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Monolithic Ceramic IR-Emitter for Gas Analyzer 用于气体分析仪的单片陶瓷红外发射器
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584982
A. Goldberg, Birgit Manhica, S. Ziesche, M. Ebermann, A. Günther
The results developed in a research project resulted from the cooperation between Fraunhofer IKTS in the field of ceramic multilayer technology and InfraTec GmbH in the field of infrared sensors and measurement technology and were generated within the project’s duration of 4 years. New types of miniature heaters embedded in ceramics were developed and their properties regarding modulation, spectral emission, long term and high temperature stability were characterized and optimized. A new process chain based on ceramic multilayer technology was developed to produce the IR emitter, which is based on a combination of sacrificial paste technology using screen or stencil printing and Low Temperature Cofired Technology (LTCC) processing. The generated dielectric layer thicknesses of 15-20 µm are half as thick as with conventional LTCC tape manufacturing processes. To optimize the emission coefficient towards a black body, new ceramic pastes suitable for screen printing have been developed. In this way, black surfaces could be created on the radiators, which are characterized by high temperature stability and low thermal mass. First long-term studies of the IR emitter up to 2000 hours show functionality at 650 °C with low degradation.
该研究成果是由陶瓷多层技术领域的Fraunhofer IKTS和红外传感器和测量技术领域的InfraTec GmbH合作完成的,并在项目持续4年的时间内产生。研制了新型陶瓷微型加热器,并对其调制、光谱发射、长期和高温稳定性等性能进行了表征和优化。研究了一种基于陶瓷多层技术的红外发射体生产工艺链,该工艺链是基于丝网或模板印刷的牺牲糊技术和低温共烧技术(LTCC)加工的结合。产生的介电层厚度为15-20 μ m,是传统LTCC胶带制造工艺厚度的一半。为了优化对黑体的发射系数,开发了适合丝网印刷的新型陶瓷浆料。通过这种方式,可以在散热器上创建黑色表面,其特点是高温稳定性高,热质量低。第一次对红外发射器长达2000小时的长期研究表明,该发射器在650°C下具有低退化的功能。
{"title":"Monolithic Ceramic IR-Emitter for Gas Analyzer","authors":"A. Goldberg, Birgit Manhica, S. Ziesche, M. Ebermann, A. Günther","doi":"10.23919/empc53418.2021.9584982","DOIUrl":"https://doi.org/10.23919/empc53418.2021.9584982","url":null,"abstract":"The results developed in a research project resulted from the cooperation between Fraunhofer IKTS in the field of ceramic multilayer technology and InfraTec GmbH in the field of infrared sensors and measurement technology and were generated within the project’s duration of 4 years. New types of miniature heaters embedded in ceramics were developed and their properties regarding modulation, spectral emission, long term and high temperature stability were characterized and optimized. A new process chain based on ceramic multilayer technology was developed to produce the IR emitter, which is based on a combination of sacrificial paste technology using screen or stencil printing and Low Temperature Cofired Technology (LTCC) processing. The generated dielectric layer thicknesses of 15-20 µm are half as thick as with conventional LTCC tape manufacturing processes. To optimize the emission coefficient towards a black body, new ceramic pastes suitable for screen printing have been developed. In this way, black surfaces could be created on the radiators, which are characterized by high temperature stability and low thermal mass. First long-term studies of the IR emitter up to 2000 hours show functionality at 650 °C with low degradation.","PeriodicalId":348887,"journal":{"name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","volume":"97 4","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132801711","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Temperature Dependent Relaxation Behavior of Ag-Sintered Copper Joints ag烧结铜接头的温度相关松弛行为
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9585013
Z. Gökdeniz, M. Lederer, G. Khatibi, J. Nicolics
In the field of power electronics device function leads to high operating temperatures. High stresses and strains are induced as a result of mismatch in Coefficient of Thermal Expansion (CTE) leading to plastic deformation in constrained joints. The thermomechanical stresses stimulate mechanisms such as dislocation glide or creep. Especially when the homologous temperature increases, time dependent creep failure becomes a dominant issue in the joint reliability. This work is devoted to the development of a temperature dependent material model for pressure assisted silver sintered joints. This model is validated on the basis of stress relaxation experiments aside from measurements of shear strength and mechanical fatigue. For this purpose, Ag-sintered copper joints were manufactured (0-hour) and heat treated at 250 °C for 250 hours in air and in protective atmosphere. Investigations of microstructure were made by scanning electron microscopy (SEM). Shear and stress relaxation tests were conducted in a tensile machine with thermal chamber at temperatures of 25 °C, 130 °C and 200 °C. For lifetime estimation of the samples Weibull probability plots for low cycle fatigue were determined. Further, Norton power law was employed to determine material parameters such as stress exponent n and creep activation energy Q. In conclusion, a unified model of plasticity and creep was established.
在电力电子领域,器件的功能导致工作温度高。热膨胀系数(CTE)的失配会诱发高应力和应变,从而导致受约束节点的塑性变形。热机械应力刺激了位错滑动或蠕变等机制。特别是当温度升高时,随时间变化的蠕变破坏成为影响节点可靠性的主要问题。本工作致力于开发压力辅助银烧结接头的温度依赖材料模型。除抗剪强度和机械疲劳试验外,还通过应力松弛试验对该模型进行了验证。为此,制造银烧结铜接头(0小时),并在空气和保护气氛中在250°C下热处理250小时。采用扫描电镜(SEM)对其微观结构进行了研究。剪切和应力松弛试验在带热室的拉伸机上进行,温度分别为25℃、130℃和200℃。为了估计样品的寿命,确定了低周疲劳的威布尔概率图。利用诺顿幂定律确定应力指数n、蠕变活化能q等材料参数,建立塑性与蠕变的统一模型。
{"title":"Temperature Dependent Relaxation Behavior of Ag-Sintered Copper Joints","authors":"Z. Gökdeniz, M. Lederer, G. Khatibi, J. Nicolics","doi":"10.23919/empc53418.2021.9585013","DOIUrl":"https://doi.org/10.23919/empc53418.2021.9585013","url":null,"abstract":"In the field of power electronics device function leads to high operating temperatures. High stresses and strains are induced as a result of mismatch in Coefficient of Thermal Expansion (CTE) leading to plastic deformation in constrained joints. The thermomechanical stresses stimulate mechanisms such as dislocation glide or creep. Especially when the homologous temperature increases, time dependent creep failure becomes a dominant issue in the joint reliability. This work is devoted to the development of a temperature dependent material model for pressure assisted silver sintered joints. This model is validated on the basis of stress relaxation experiments aside from measurements of shear strength and mechanical fatigue. For this purpose, Ag-sintered copper joints were manufactured (0-hour) and heat treated at 250 °C for 250 hours in air and in protective atmosphere. Investigations of microstructure were made by scanning electron microscopy (SEM). Shear and stress relaxation tests were conducted in a tensile machine with thermal chamber at temperatures of 25 °C, 130 °C and 200 °C. For lifetime estimation of the samples Weibull probability plots for low cycle fatigue were determined. Further, Norton power law was employed to determine material parameters such as stress exponent n and creep activation energy Q. In conclusion, a unified model of plasticity and creep was established.","PeriodicalId":348887,"journal":{"name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","volume":"41 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122189499","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Split-rings for heterogeneous integration of mm-Wave systems 用于毫米波系统异构集成的分裂环
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9585009
J. Köszegi, Lars Schnelle, Xingdan Jia, O. Schwanitz, I. Ndip, M. Schneider-Ramelow, K. Lang
Split-ring resonators (SRRs) are one of the fundamental building blocks of electromagnetic metamaterials. These structures play a key role in the development of future millimeter-wave (mm-Wave) components and systems. In this work, we present a study on the scaling of split-ring resonators and their models to mm-Wave frequencies with special focus on their use in heterogeneous packaging and system-integration. We model, simulate, design and measure different configurations of SRRs. Very good correlation is obtained between the analytical calculations, simulation and measurements. Finally, we investigate the impact of process variations, which occur during fabrication of the resonators.
劈裂环谐振器是电磁超材料的基本组成部分之一。这些结构在未来毫米波(mm-Wave)组件和系统的发展中起着关键作用。在这项工作中,我们提出了一项关于劈裂环谐振器及其模型到毫米波频率的缩放研究,特别关注它们在异构封装和系统集成中的应用。我们对不同配置的srr进行建模、仿真、设计和测量。分析计算、仿真和测量结果之间有很好的相关性。最后,我们研究了在谐振器制造过程中发生的工艺变化的影响。
{"title":"Split-rings for heterogeneous integration of mm-Wave systems","authors":"J. Köszegi, Lars Schnelle, Xingdan Jia, O. Schwanitz, I. Ndip, M. Schneider-Ramelow, K. Lang","doi":"10.23919/empc53418.2021.9585009","DOIUrl":"https://doi.org/10.23919/empc53418.2021.9585009","url":null,"abstract":"Split-ring resonators (SRRs) are one of the fundamental building blocks of electromagnetic metamaterials. These structures play a key role in the development of future millimeter-wave (mm-Wave) components and systems. In this work, we present a study on the scaling of split-ring resonators and their models to mm-Wave frequencies with special focus on their use in heterogeneous packaging and system-integration. We model, simulate, design and measure different configurations of SRRs. Very good correlation is obtained between the analytical calculations, simulation and measurements. Finally, we investigate the impact of process variations, which occur during fabrication of the resonators.","PeriodicalId":348887,"journal":{"name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122192878","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Thermal Conduction of Fiber-Reinforced Polymer Under Loading 纤维增强聚合物在载荷作用下的热传导
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584987
Pei Lu, Huihui Wang, Yong Zhang, Yan Zhang, Johan Liu
Thermal performance of an epoxy resin reinforced by carbon fibers is studied by numerical simulation method. Various carbon fiber structures are taken into consideration and the effective thermal conductivity of the composite carbon fiber waved structure is obtained. The influences of the number, size, shape, spacing and arrangement of the carbon fibers on the thermal conduction of the composites are analyzed. The deformation of the composite under mechanical loading and the corresponding the thermal conductivity of the carbon fiber-reinforced epoxy resin are also investigated.
采用数值模拟方法研究了碳纤维增强环氧树脂的热性能。考虑了不同的碳纤维结构,得到了复合碳纤维波状结构的有效导热系数。分析了碳纤维的数量、尺寸、形状、间距和排列对复合材料导热性能的影响。研究了复合材料在机械载荷作用下的变形及相应的碳纤维增强环氧树脂的导热性能。
{"title":"Thermal Conduction of Fiber-Reinforced Polymer Under Loading","authors":"Pei Lu, Huihui Wang, Yong Zhang, Yan Zhang, Johan Liu","doi":"10.23919/empc53418.2021.9584987","DOIUrl":"https://doi.org/10.23919/empc53418.2021.9584987","url":null,"abstract":"Thermal performance of an epoxy resin reinforced by carbon fibers is studied by numerical simulation method. Various carbon fiber structures are taken into consideration and the effective thermal conductivity of the composite carbon fiber waved structure is obtained. The influences of the number, size, shape, spacing and arrangement of the carbon fibers on the thermal conduction of the composites are analyzed. The deformation of the composite under mechanical loading and the corresponding the thermal conductivity of the carbon fiber-reinforced epoxy resin are also investigated.","PeriodicalId":348887,"journal":{"name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121274897","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Capacitive Sensors Integrated in SIW Structures – A Proof of Concept 集成在SIW结构中的电容式传感器——概念验证
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584960
V. Buiculescu, A. Baracu, C. Buiculescu
The paper presents a circuit technique aimed to integrate interdigital transducer (IDT) based sensors, provided with either coplanar waveguide (CPW) or microstrip ports, into substrate integrated waveguide (SIW) structures for operation as transmission-type sensors. Therefore, two electromagnetically coupled SIW sections are specifically configured to make possible this conversion. In order to demonstrate the validity of the proposed sensing concept, capacitors of different values, and fully compatible with surface-mounting technology, were assembled at the CPW port of the coupled SIW section to simulate various IDT capacitive sensors. Deviation of the maximum rejection frequency from 4.32 GHz to 7.56 GHz was obtained using capacitance values from 4.7 pF down to 0 pF (i.e. open ended CPW).
本文提出了一种电路技术,旨在将具有共面波导(CPW)或微带端口的基于数字间换能器(IDT)的传感器集成到衬底集成波导(SIW)结构中,作为传输型传感器。因此,两个电磁耦合的SIW部分被特别配置,使这种转换成为可能。为了验证所提出传感概念的有效性,在耦合SIW部分的CPW端口上组装了不同值且完全兼容表面贴装技术的电容器,以模拟各种IDT电容传感器。最大抑制频率的偏差从4.32 GHz到7.56 GHz,电容值从4.7 pF降至0 pF(即开放式CPW)。
{"title":"Capacitive Sensors Integrated in SIW Structures – A Proof of Concept","authors":"V. Buiculescu, A. Baracu, C. Buiculescu","doi":"10.23919/empc53418.2021.9584960","DOIUrl":"https://doi.org/10.23919/empc53418.2021.9584960","url":null,"abstract":"The paper presents a circuit technique aimed to integrate interdigital transducer (IDT) based sensors, provided with either coplanar waveguide (CPW) or microstrip ports, into substrate integrated waveguide (SIW) structures for operation as transmission-type sensors. Therefore, two electromagnetically coupled SIW sections are specifically configured to make possible this conversion. In order to demonstrate the validity of the proposed sensing concept, capacitors of different values, and fully compatible with surface-mounting technology, were assembled at the CPW port of the coupled SIW section to simulate various IDT capacitive sensors. Deviation of the maximum rejection frequency from 4.32 GHz to 7.56 GHz was obtained using capacitance values from 4.7 pF down to 0 pF (i.e. open ended CPW).","PeriodicalId":348887,"journal":{"name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122590662","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Silver Sintering Die Attach Developments for RF, Power and Automotive Applications 用于射频,电源和汽车应用的银烧结模具附件的开发
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584971
Ruud de Wit
Smart Electronics’ market trends like 5G Telecom and Autonomous Driving are driving advanced semiconductor packaging innovations towards higher functionality, enhanced connectivity at higher frequencies, smaller form factors (miniaturization) and reduced power consumption. To meet these demands, semiconductor package designs continue to evolve towards Multiple and Thinner Die using System-in-Package and Wafer Level architectures. Especially for next generation smaller RF devices like Front End Modules, tight Keep-out-Zones, shorter interconnects and improved thermal management are key to enable next gen package designs. The industrial and automotive industry are looking in parallel for Pb solder replacement with improved (automotive) reliability for typically larger die size and metal lead frame components which is very challenging from stress point of view. This paper will describe the successful development of hybrid silver sintering die attach adhesives for RF applications and continued development work in progress to pass automotive temp cycling on larger die sizes in lead frame packages. Processing of such hybrid silver sintering adhesives on standard die attach equipment without pressure and maximum $200^{circ}mathrm{C}$ oven cure under N2 and or AIR conditions are other key development targets.
智能电子的市场趋势,如5G电信和自动驾驶,正在推动先进的半导体封装创新,朝着更高的功能、更高频率的增强连接、更小的外形尺寸(小型化)和更低的功耗发展。为了满足这些需求,半导体封装设计继续向使用系统级封装和晶圆级架构的多芯片和更薄芯片发展。特别是对于下一代较小的射频器件,如前端模块,紧凑的隔离区,更短的互连和改进的热管理是实现下一代封装设计的关键。工业和汽车行业正在寻找具有提高(汽车)可靠性的铅焊料替代品,用于通常较大的模具尺寸和金属引线框架组件,从应力的角度来看,这是非常有挑战性的。本文将介绍用于射频应用的混合银烧结模具粘合剂的成功开发,以及在引线框架封装中更大尺寸模具上通过汽车温度循环的持续开发工作。在无压力的标准模贴设备上加工这种混合银烧结粘合剂,并在N2和/或AIR条件下进行最高200^{circ} mathm {C}$烘箱固化是另一个关键的发展目标。
{"title":"Silver Sintering Die Attach Developments for RF, Power and Automotive Applications","authors":"Ruud de Wit","doi":"10.23919/empc53418.2021.9584971","DOIUrl":"https://doi.org/10.23919/empc53418.2021.9584971","url":null,"abstract":"Smart Electronics’ market trends like 5G Telecom and Autonomous Driving are driving advanced semiconductor packaging innovations towards higher functionality, enhanced connectivity at higher frequencies, smaller form factors (miniaturization) and reduced power consumption. To meet these demands, semiconductor package designs continue to evolve towards Multiple and Thinner Die using System-in-Package and Wafer Level architectures. Especially for next generation smaller RF devices like Front End Modules, tight Keep-out-Zones, shorter interconnects and improved thermal management are key to enable next gen package designs. The industrial and automotive industry are looking in parallel for Pb solder replacement with improved (automotive) reliability for typically larger die size and metal lead frame components which is very challenging from stress point of view. This paper will describe the successful development of hybrid silver sintering die attach adhesives for RF applications and continued development work in progress to pass automotive temp cycling on larger die sizes in lead frame packages. Processing of such hybrid silver sintering adhesives on standard die attach equipment without pressure and maximum $200^{circ}mathrm{C}$ oven cure under N2 and or AIR conditions are other key development targets.","PeriodicalId":348887,"journal":{"name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128256353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Investigation of the long-term adhesion and barrier properties of a PDMS-Parylene stack with PECVD ceramic interlayers for the conformal encapsulation of neural implants pdms -聚对二甲苯与PECVD陶瓷夹层复合材料用于神经植入物适形包封的长期粘附和屏障性能研究
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584961
N. B. Babaroud, R. Dekker, O. Holk, U. Tiringer, P. Taheri, Domonkos Horváth, T. Nánási, I. Ulbert, W. Serdijn, V. Giagka
In this paper, we investigate the long-term adhesion strength and barrier property of our recently proposed encapsulation stack that includes PDMS-Parylene C and PECVD interlayers (SiO2 and SiC) for adhesion improvement. To evaluate the adhesion strength of our proposed stack, the sample preparation consisted in depositing approximately 25 nm of SiC and 25 nm of SiO2 on half wafers, previously coated with Parylene C. Next, $50 mu mathrm{m}$ PDMS was spin-coated on top. Finally, the samples were detached from the Si wafer and soaked in a PBS solution at 67°C to accelerate the aging process. Two samples were also implanted, subcutaneously, on the left and right subscapular regions of a rat. The optical inspection and peel tests performed after two months confirmed our preliminary findings and showed a significant improvement of the adhesion in our proposed encapsulation stack compared to the case of PDMS on Parylene C alone. In addition, the X-ray photoelectron spectroscopy(XPS) analysis at the interface between SiC and Parylene C showed different peaks for the interface compared to the reference spectra, which could be an indication of a chemical bond. Finally, water vapor transmission rate (WVTR) tests were performed to investigate the barrier property of our proposed encapsulation stack against water vapor transmission. The results demonstrated that the proposed stack acts as a significantly (two orders of magnitude) higher barrier against moisture compared to only Parylene C and PDMS encapsulation layers. The proposed method yields a fully transparent encapsulation stack over a broad wavelength spectrum that can be used for the conformal encapsulation of flexible devices and thus, making them compatible with techniques such as optical imaging and optogenetics.
在本文中,我们研究了我们最近提出的封装堆栈的长期粘附强度和屏障性能,该封装堆栈包括pdms -聚对二甲苯C和PECVD中间层(SiO2和SiC),以改善粘附性。为了评估我们所提出的堆栈的粘附强度,样品制备包括在半晶圆上沉积约25 nm的SiC和25 nm的SiO2,之前涂有聚对二甲苯c,然后在顶部旋转涂覆$50 mu math {m}$ PDMS。最后,将样品从硅片上分离出来,在67°C的PBS溶液中浸泡,以加速老化过程。两个样品也被皮下植入,在大鼠的左右肩胛下区域。两个月后进行的光学检查和剥离测试证实了我们的初步发现,并显示与单独在聚对二甲苯C上使用PDMS相比,我们提议的封装堆栈的附着力有了显着改善。此外,在SiC和对二甲苯界面处的x射线光电子能谱(XPS)分析显示,与参考光谱相比,界面峰不同,这可能是化学键的指示。最后,进行了水蒸气透过率(WVTR)测试,以考察我们提出的封装堆栈对水蒸气透过的阻隔性能。结果表明,与仅使用聚二甲苯和PDMS封装层相比,所提出的堆叠具有显着(两个数量级)更高的防潮屏障。所提出的方法在宽波长范围内产生完全透明的封装堆栈,可用于柔性器件的保形封装,从而使其与光学成像和光遗传学等技术兼容。
{"title":"Investigation of the long-term adhesion and barrier properties of a PDMS-Parylene stack with PECVD ceramic interlayers for the conformal encapsulation of neural implants","authors":"N. B. Babaroud, R. Dekker, O. Holk, U. Tiringer, P. Taheri, Domonkos Horváth, T. Nánási, I. Ulbert, W. Serdijn, V. Giagka","doi":"10.23919/empc53418.2021.9584961","DOIUrl":"https://doi.org/10.23919/empc53418.2021.9584961","url":null,"abstract":"In this paper, we investigate the long-term adhesion strength and barrier property of our recently proposed encapsulation stack that includes PDMS-Parylene C and PECVD interlayers (SiO2 and SiC) for adhesion improvement. To evaluate the adhesion strength of our proposed stack, the sample preparation consisted in depositing approximately 25 nm of SiC and 25 nm of SiO2 on half wafers, previously coated with Parylene C. Next, $50 mu mathrm{m}$ PDMS was spin-coated on top. Finally, the samples were detached from the Si wafer and soaked in a PBS solution at 67°C to accelerate the aging process. Two samples were also implanted, subcutaneously, on the left and right subscapular regions of a rat. The optical inspection and peel tests performed after two months confirmed our preliminary findings and showed a significant improvement of the adhesion in our proposed encapsulation stack compared to the case of PDMS on Parylene C alone. In addition, the X-ray photoelectron spectroscopy(XPS) analysis at the interface between SiC and Parylene C showed different peaks for the interface compared to the reference spectra, which could be an indication of a chemical bond. Finally, water vapor transmission rate (WVTR) tests were performed to investigate the barrier property of our proposed encapsulation stack against water vapor transmission. The results demonstrated that the proposed stack acts as a significantly (two orders of magnitude) higher barrier against moisture compared to only Parylene C and PDMS encapsulation layers. The proposed method yields a fully transparent encapsulation stack over a broad wavelength spectrum that can be used for the conformal encapsulation of flexible devices and thus, making them compatible with techniques such as optical imaging and optogenetics.","PeriodicalId":348887,"journal":{"name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","volume":"131 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130266134","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Advanced integration technology for fabricating high-speed electro-optical sub-assembly 高速光电组件制造的先进集成技术
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584968
N. Palavesam, J. Choi, W. Hell, G. Fiol, K. Velthaus, C. Zerna, H. Gieser, C. Landesberger
Here, we report flip-chip bonding processes based on Anisotropic Conductive Film (ACF) and Sn-Ag-Cu (SAC) solder implemented for bonding three test chips (two Silicon, Si ICs on either side of an Indium Phosphide, InP IC) in series on $25{mu}mathrm{m}$ thick polyimide foil substrates. Si ICs were bonded only with SAC solder, whereas both SAC and ACF were applied for the flip-chip integration of the fragile InP chips. RF measurements were then performed on the impedance controlled paths across the polyimide foil of the fabricated assemblies to evaluate as well as to compare the RF performance of ACF and SAC solder in terms of the differential S21 parameter. The measurements revealed that when ACF is employed for interconnecting the InP chip and SAC solder for the two Si chips, a higher 3 dB bandwidth of 42 GHz was obtained whereas a 3 dB bandwidth of only 31 – 34 GHz was measured when only SAC solder was used for bonding all three ICs. These measurement results confirm that a higher bandwidth can be obtained from the assemblies when ACF is used as the interconnection material. Therefore, it can be concluded that the ACF based integration technology could be favored over solder processes for bonding high performance multi Gbit/s subassemblies, especially with higher density of contact pads.
在这里,我们报告了基于各向异性导电膜(ACF)和锡银铜(SAC)焊料的倒装芯片键合工艺,实现了在25{mu}mathrm{m}$厚的聚酰亚胺箔衬底上连续键合三个测试芯片(两个硅硅集成电路在一个磷化铟集成电路的两侧)。Si ic仅与SAC焊料结合,而SAC和ACF都用于脆弱的InP芯片的倒装集成。然后在制造组件的聚酰亚胺箔的阻抗控制路径上进行射频测量,以评估和比较ACF和SAC焊料在差分S21参数方面的射频性能。测量结果表明,当ACF用于连接两个Si芯片的InP芯片和SAC焊料时,获得了42 GHz的更高3db带宽,而当仅使用SAC焊料用于连接所有三个ic时,测量到的3db带宽仅为31 - 34 GHz。这些测量结果证实,当使用ACF作为互连材料时,组件可以获得更高的带宽。因此,可以得出结论,基于ACF的集成技术可以比焊料工艺更适合于连接高性能多Gbit/s子组件,特别是具有更高密度的接触片。
{"title":"Advanced integration technology for fabricating high-speed electro-optical sub-assembly","authors":"N. Palavesam, J. Choi, W. Hell, G. Fiol, K. Velthaus, C. Zerna, H. Gieser, C. Landesberger","doi":"10.23919/empc53418.2021.9584968","DOIUrl":"https://doi.org/10.23919/empc53418.2021.9584968","url":null,"abstract":"Here, we report flip-chip bonding processes based on Anisotropic Conductive Film (ACF) and Sn-Ag-Cu (SAC) solder implemented for bonding three test chips (two Silicon, Si ICs on either side of an Indium Phosphide, InP IC) in series on $25{mu}mathrm{m}$ thick polyimide foil substrates. Si ICs were bonded only with SAC solder, whereas both SAC and ACF were applied for the flip-chip integration of the fragile InP chips. RF measurements were then performed on the impedance controlled paths across the polyimide foil of the fabricated assemblies to evaluate as well as to compare the RF performance of ACF and SAC solder in terms of the differential S21 parameter. The measurements revealed that when ACF is employed for interconnecting the InP chip and SAC solder for the two Si chips, a higher 3 dB bandwidth of 42 GHz was obtained whereas a 3 dB bandwidth of only 31 – 34 GHz was measured when only SAC solder was used for bonding all three ICs. These measurement results confirm that a higher bandwidth can be obtained from the assemblies when ACF is used as the interconnection material. Therefore, it can be concluded that the ACF based integration technology could be favored over solder processes for bonding high performance multi Gbit/s subassemblies, especially with higher density of contact pads.","PeriodicalId":348887,"journal":{"name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131216579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Influence of Micro-Additives on Lead-Free Solder Joints 微量添加剂对无铅焊点的影响
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584989
A. Steenmann, Benjamin Schellscheidt, T. Licht
The change of solder materials is driven by ever new requirements and legislations. Thus, lead-free tin based solders like tin-silver-copper (SAC) have become a standard in the electrical industry, especially in high-power modules. In terms of processing and behavior, they are still different to lead-based solders. In order to obtain lead-free solders with the familiar behavior and proven performance of lead-based solders, their development continues. Micro-additives in conventionally used SAC solder can improve mechanical properties, processability and durability. To evaluate these properties, we soldered different solder alloys with three individual micro-additives each and compare them with standard SAC solder. Following shear tests and optical inspection of the solder joints provide information about the differences in reliability, durability and phase growth caused by the individual micro-additives. By comparing two solders with combined micro-additives, the interaction of the additives can be estimated. In conclusion, it is clear that micro-additives can improve the standard solder. By adding different micro-additives, solder can be adapted to the requirements of different applications.
焊料材料的变化是由新的要求和法规驱动的。因此,锡银铜(SAC)等无铅锡基焊料已成为电气行业的标准,特别是在大功率模块中。在加工和行为方面,它们与铅基焊料仍然不同。为了获得与铅基焊料相似的无铅焊料和经过验证的性能,无铅焊料的发展仍在继续。在常规使用的SAC焊料中加入微量添加剂可以改善机械性能、加工性和耐久性。为了评估这些性能,我们用三种单独的微添加剂焊接不同的钎料合金,并将其与标准SAC钎料进行比较。随后的剪切测试和焊点的光学检查提供了由单个微添加剂引起的可靠性、耐久性和相生长差异的信息。通过对比两种添加了微量添加剂的焊料,可以估计添加剂的相互作用。综上所述,微量添加剂可以明显改善标准焊料。通过添加不同的微量添加剂,焊料可以适应不同应用的要求。
{"title":"Influence of Micro-Additives on Lead-Free Solder Joints","authors":"A. Steenmann, Benjamin Schellscheidt, T. Licht","doi":"10.23919/empc53418.2021.9584989","DOIUrl":"https://doi.org/10.23919/empc53418.2021.9584989","url":null,"abstract":"The change of solder materials is driven by ever new requirements and legislations. Thus, lead-free tin based solders like tin-silver-copper (SAC) have become a standard in the electrical industry, especially in high-power modules. In terms of processing and behavior, they are still different to lead-based solders. In order to obtain lead-free solders with the familiar behavior and proven performance of lead-based solders, their development continues. Micro-additives in conventionally used SAC solder can improve mechanical properties, processability and durability. To evaluate these properties, we soldered different solder alloys with three individual micro-additives each and compare them with standard SAC solder. Following shear tests and optical inspection of the solder joints provide information about the differences in reliability, durability and phase growth caused by the individual micro-additives. By comparing two solders with combined micro-additives, the interaction of the additives can be estimated. In conclusion, it is clear that micro-additives can improve the standard solder. By adding different micro-additives, solder can be adapted to the requirements of different applications.","PeriodicalId":348887,"journal":{"name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","volume":"468 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124934143","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Optimized Packaging Solutions for Multi-Emitter Laser Modules 多发射器激光模块的优化封装解决方案
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9585014
G. Pippione, S. Codato, A. Maina, A. Mirigaldi, M. Riva, R. Paoletti
Packaged high-power diode lasers have applications in many areas ranging from optoelectronic high density data storage, high power industrial laser for material processing, to medical (chirurgical/aesthetical) applications. The paper presents the development of families of laser modules which, using the same platform and assembly lines, can achieve a specific combination of power, brightness, compactness and cost effectiveness, depending on final application. Results for products emitting at 9XXnm and at 450 nm will be presented, describing the design, the realization and the production.
封装的高功率二极管激光器在许多领域都有应用,从光电高密度数据存储、用于材料加工的高功率工业激光器到医疗(外科/美学)应用。本文介绍了激光模块系列的发展,这些模块使用相同的平台和装配线,可以根据最终应用实现功率,亮度,紧凑性和成本效益的特定组合。本文将介绍9XXnm和450nm发光产品的设计、实现和生产结果。
{"title":"Optimized Packaging Solutions for Multi-Emitter Laser Modules","authors":"G. Pippione, S. Codato, A. Maina, A. Mirigaldi, M. Riva, R. Paoletti","doi":"10.23919/empc53418.2021.9585014","DOIUrl":"https://doi.org/10.23919/empc53418.2021.9585014","url":null,"abstract":"Packaged high-power diode lasers have applications in many areas ranging from optoelectronic high density data storage, high power industrial laser for material processing, to medical (chirurgical/aesthetical) applications. The paper presents the development of families of laser modules which, using the same platform and assembly lines, can achieve a specific combination of power, brightness, compactness and cost effectiveness, depending on final application. Results for products emitting at 9XXnm and at 450 nm will be presented, describing the design, the realization and the production.","PeriodicalId":348887,"journal":{"name":"2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)","volume":"290 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116422485","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
期刊
2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)
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