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2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)最新文献

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Corrosion effects and reliability improvement of silver wire bonded contacts in automotive application 汽车用银线触点的腐蚀效应及可靠性改进
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584956
R. Klengel, S. Klengel, J. Schischka, N. Araki, M. Eto, T. Haibara, Takashi Yamada
Silver (Ag) bonding wires are mainly used in consumer products as a reliable low-cost alternative to gold (Au) bonding wires. In automotive applications, the materials are exposed to particularly harsh environmental conditions. In order to understand the influence of these conditions in the electronic package on the silver-aluminum material system, we carried out extensive studies. 4N Ag wire, Pd alloyed Ag wire and a new Ag wire with innovative additives (GX2s) were encapsulated after wire bonding on Al chip metallization in a package with a chloride and sulfur-containing molding compound and subjected to corresponding reliability tests. Then, the material behavior of the different silver wires was compared to Au wire bonds after high temperature storage life test (HTSL) and unbiased highly accelerated stress test (uHAST). After broad ion beam cross sectioning the samples were investigated subsequently by Scanning Electron Microscopy (SEM). Additionally, high resolution transmission electron microscopy (TEM) investigations with nano-spot element analyses (EDS) and electron beam diffraction were done to characterize the intermetallic compounds formed and to specify the running corrosion mechanism in correlation to the alloying elements/additives used. The results show that similar degradation mechanisms take place in the Ag-Al system compared to the Au-Al system. Both material combinations show corrosion effects after testing. However, the reliability behavior of the Ag wires can be significantly optimized by adding alloying elements such as palladium or other innovative additives. Thus, the reliability behavior of electronic assemblies can be optimized even under low-cost conditions.
银(Ag)键合线作为金(Au)键合线的可靠低成本替代品,主要用于消费产品。在汽车应用中,材料暴露在特别恶劣的环境条件下。为了了解电子封装中这些条件对银铝材料体系的影响,我们进行了广泛的研究。将4N银丝、Pd合金银丝和添加创新添加剂(GX2s)的新型银丝在Al芯片金属化上用氯化物和含硫模塑化合物进行焊丝粘接后封装,并进行相应的可靠性试验。然后,通过高温储存寿命测试(HTSL)和无偏高加速应力测试(uHAST),比较了不同银线和金线键的材料性能。经宽离子束横切后,用扫描电子显微镜对样品进行了研究。此外,采用高分辨率透射电子显微镜(TEM)、纳米点元素分析(EDS)和电子束衍射对形成的金属间化合物进行了表征,并明确了与所使用的合金元素/添加剂相关的运行腐蚀机制。结果表明,Ag-Al体系的降解机制与Au-Al体系相似。两种材料组合均表现出腐蚀效应。然而,通过添加合金元素,如钯或其他创新添加剂,可以显著优化银丝的可靠性行为。因此,即使在低成本条件下,电子组件的可靠性行为也可以得到优化。
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引用次数: 0
Top side isolation investigation of PCB embedded 1.2kV dies PCB内嵌1.2kV芯片的顶部隔离研究
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584979
Luca Link, Ankit Sharma, V. Polezhaev, T. Huesgen, M. Vaas, G. Stohrer, F. Koch
The embedding of power electronics components into the PCB increases their thermal and electrical performance. Due to lower parasitic inductances and a lower thermal resistance, the overall power density of the system can be increased. However, there is a lack on studies about the reliability of PCB embedded power electronics, especially under humidity stress. This study uses test vehicles with functional diodes embedded into the PCB. The reliability of the test vehicles is studied under HV-H3TRB conditions. A critical leakage current is observed after 200h with a benzoxazine based prepreg and after 600h for an epoxy based prepreg. A root- cause analysis revealed lift-off of the polyimide layer and subsequent electrochemical corrosion as failure mechanism. The delamination is most likely triggered by the Au surface on the chips top metal pad. A second set of test samples was fabricated using an improved surface treatment before lamination. 75% of these samples passed the 1000h H3TRB test successfully.
电力电子元件嵌入到PCB中增加了它们的热和电气性能。由于较低的寄生电感和较低的热阻,系统的总功率密度可以增加。然而,对于PCB嵌入式电力电子器件的可靠性,特别是在湿度应力下的可靠性研究还比较缺乏。本研究使用功能二极管嵌入PCB的测试车辆。对试验车辆在HV-H3TRB工况下的可靠性进行了研究。用苯并恶嗪基预浸料在200h后观察到临界泄漏电流,用环氧基预浸料在600h后观察到临界泄漏电流。根本原因分析揭示了聚酰亚胺层的脱落和随后的电化学腐蚀是失效机制。剥离很可能是由薄片顶部金属衬垫上的Au表面引发的。第二组测试样品在层压前使用改进的表面处理制备。75%的样品成功通过了1000h H3TRB测试。
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引用次数: 2
Effect of highly increased current density in the microstructure of lead-free solder joints 高电流密度对无铅焊点微结构的影响
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584980
Dániel Straubinger, A. Géczy
In this paper we focus on the effect of highly increased current density and resulting temperatures in the microstructure of lead-free solder joints of chip-scale components in order to investigate quality and reliability aspects of these widely used components in surface mount technology (SMT). We prepared a daisy chain of zero-ohm resistors, where the current loading was set to specific values (2 A, 2,5 A) for specific components (0402, 0603) and specific trace-to-pad connections. The substrate was RO4000 type epoxy-ceramic, to increase possible thermal load on the substrate. The assembly process was performed with batch-type SMT machinery and vapour phase soldering with classic SAC305 alloy. The loading was performed on ambient atmosphere, and in drying ovens on elevated temperatures for 2500 hours. We also prepared control samples without load on ambient atmosphere. We found with cross-sections, that dissolved intermetallic compound structures (Cu6Sn5) were found in specific regions of the meniscus of surface mounted components, in the possible route of the current from the pad to the functional resistive layer of the SM resistor. The cross-section analysis was also further extended with polarized optical image investigations, where different microstructures are presented in function of the sample types. The paper also presents joint quality aspects such as shear-strength analysis. It was found that due to the current and the increased load, the microstructure of the joint changed, but extensive proof of electromigration was not present.
在本文中,我们重点研究了高电流密度和由此产生的温度对芯片级元件无铅焊点微观结构的影响,以研究这些广泛应用于表面贴装技术(SMT)的元件的质量和可靠性。我们准备了一个零欧姆电阻的菊花链,其中电流负载被设置为特定的值(2 a, 2,5 a),用于特定的组件(0402,0603)和特定的走线到焊盘连接。基板为RO4000型环氧陶瓷,以增加基板上可能的热负荷。装配过程采用批量式SMT机械,采用经典SAC305合金进行气相焊接。加载在环境气氛中进行,并在高温烘箱中进行2500小时的干燥。我们还制备了不加环境气氛负荷的对照样品。我们发现,在表面安装元件的半月板的特定区域发现了溶解的金属间化合物结构(Cu6Sn5),在电流从焊盘到SM电阻器的功能电阻层的可能路径中。截面分析还进一步扩展了偏振光学图像调查,其中不同的微观结构呈现在样品类型的函数中。本文还对节理质量进行了分析,如抗剪强度分析。结果发现,由于电流和载荷的增加,接头的显微组织发生了变化,但没有广泛的电迁移证据。
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引用次数: 0
Properties of nano-composite SACX0307-(ZnO, TiO2) solders 纳米复合SACX0307-(ZnO, TiO2)钎料的性能
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9585015
B. Illés, A. Skwarek, O. Krammer, T. Hurtony, Dániel Straubinger, J. Ratajczak, G. Harsányi, K. Witek
In the present study, SACX0307-ZnO and SACX0307-TiO2 nano-composite solder pastes were fabricated. The ceramic reinforcements were used in 1wt% and with different primary particle sizes between 50-200nm. The soldering properties and microstructure of the solder joints were investigated. The nano-particles were mixed into the solder paste by standard ball milling process. Reflow soldering technology has been applied to prepare solder joints and spreading tests from the different solder alloys. The solder joints were evaluated by shear test, and cross-sections were prepared to investigate the metallographic properties by Scanning Electron Microscopy (SEM). The different ceramic nano-particles had different effects on the solderability of solder alloys. Best results were observed in the case of TiO2 nano-particles with improved wetting and mechanical strength. The microstructural investigations showed considerable grain refinement and the modified grain boundary/interfacial properties, which could cause the increase of the mechanical parameters.
本研究制备了SACX0307-ZnO和SACX0307-TiO2纳米复合锡膏。陶瓷增强剂用量为1wt%,初始粒径在50 ~ 200nm之间。研究了焊点的焊接性能和显微组织。采用标准的球磨工艺将纳米颗粒混合到锡膏中。回流焊技术已应用于不同钎料合金的焊点制备和铺焊试验。通过剪切试验对焊点进行了评价,并制备了焊点截面,通过扫描电子显微镜(SEM)研究了焊点的金相性能。不同的纳米陶瓷颗粒对钎料合金的可焊性有不同的影响。TiO2纳米颗粒的润湿性和机械强度均有改善,效果最好。显微组织研究表明,合金的晶粒细化和晶界/界面性能发生了明显的改变,这可能导致力学参数的增加。
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引用次数: 0
Impact of Micromachining Process on Cu-Sn Solid-Liquid Interdiffusion (SLID) Bonds 微加工工艺对Cu-Sn固-液互扩散键的影响
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584992
H. Xia, A. Roy, E. Bardalen, Hoang-Vu Nguyen, K. Aasmundtveit, P. Ohlckers
Copper-tin Solid-Liquid Interdiffusion (Cu-Sn SLID) bonding has shown potential for packaging of microelectromechanical system (MEMS) devices such as microbolometers due to its low cost and high-temperature stability. A thin micromachined silicon cap is desired in the packaging of microbolometers to minimize the infrared light absorption. In the preferred fabrication process flow, the Cu-Sn sealing frames are deposited on both the cap and device wafers prior to micromachining the cap wafer. This method greatly simplifies the process compared to when the metal layers are deposited after the cap etching process. However, such an approach might affect the bonding quality due to the Cu-Sn sealing frame being used directly as a mask for the cap etching. The present work addresses this concern using a cap wafer (with and without micromachining process) bonded to a device wafer using the Cu-Sn SLID technique. A dicing yield at or near 100% is achieved for both samples. The interface of Cu-Sn bonds shows a similar Cu/Cu3Sn/Cu structure between the samples without cavity and with a cavity, which indicates that the micromachining process has a minor impact on the Cu-Sn bonds. However, the measured die shear strengths of the samples with and without cavity are relatively low due to fracture at the Cu/Cu3 Sn interface and adhesion fracture at the TiW layer. The bond strength can be further improved by optimizing the Cu/Sn electroplating process and improving the adhesion layer.
铜锡固液互扩散键合(Cu-Sn slip)由于其低成本和高温稳定性,在微热计等微机电系统(MEMS)器件的封装中显示出潜力。在微辐射热计的包装中需要一个薄的微机械硅帽,以尽量减少红外光的吸收。在优选的制造工艺流程中,在微加工帽晶圆之前,将Cu-Sn密封框架沉积在帽晶圆和器件晶圆上。这种方法大大简化了过程相比,当金属层沉积后,帽蚀刻过程。然而,这种方法可能会影响键合质量,因为Cu-Sn密封框架直接用作盖刻的掩膜。目前的工作解决了这一问题,使用Cu-Sn slip技术将帽晶圆(带或不带微加工工艺)粘合到器件晶圆上。两个样品的切丁率都达到或接近100%。无空腔和有空腔样品的Cu- sn键界面呈现相似的Cu/Cu3Sn/Cu结构,说明微加工工艺对Cu- sn键的影响较小。然而,由于Cu/Cu3 Sn界面的断裂和TiW层的粘附断裂,有和没有空腔的样品的模抗剪强度相对较低。通过优化Cu/Sn电镀工艺和改善附着层,可以进一步提高镀层的结合强度。
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引用次数: 0
Thermal Properties of Laser Reduced Graphene Oxide Films 激光还原氧化石墨烯薄膜的热性能研究
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9585006
Chengqun Yu, Fei Yang, Johan Liu, Yong Zhang
In recent years, laser-reduced graphene oxide (LRGO) has received widespread interest, however, the thermal properties of graphene films obtained by laser reduction of GO are rarely reported. In this paper, a pulsed laser was used to reduce the prepared GO films. The obtained LRGO films were characterized by scanning electron microscopy (SEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS). The thermal diffusivity of the LRGO was measured as 7.3 mm2/s, higher than that of GO measured as 5.9 mm2/s. The heating performance of LRGO was performed under different DC voltages and the results show that the temperature can reach up to 91 °C with a response time of 14 s under the voltage of 18 V. The excellent electrothermal performance of LRGO films indicate that the LRGO films are promising as heating elements for various application such as defoggers.
近年来,激光还原氧化石墨烯(LRGO)受到了广泛的关注,然而,通过激光还原氧化石墨烯获得的石墨烯薄膜的热性能很少被报道。本文采用脉冲激光对制备的氧化石墨烯薄膜进行还原。采用扫描电镜(SEM)、拉曼光谱(Raman spectroscopy)、x射线光电子能谱(XPS)对制备的LRGO薄膜进行了表征。LRGO的热扩散率为7.3 mm2/s,高于GO的5.9 mm2/s。研究了LRGO在不同直流电压下的加热性能,结果表明,在18 V电压下,LRGO的温度可达91℃,响应时间为14 s。LRGO薄膜优良的电热性能表明,LRGO薄膜在除雾器等各种应用中具有广阔的应用前景。
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引用次数: 0
[EMPC 2021 Front cover] [EMPC 2021封面]
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584999
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引用次数: 0
A new method for local electrochemical measurements at PCBs 多氯联苯局部电化学测量的新方法
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584943
S. Klengel, R. Klengel, T. Stephan, Bolko Mühs-Portius, D. Wilke, Michael Hahn
Corrosion occurs on metallic materials in the presence of moisture and reactive gases, such as H2 S, SO2 or NO2 and is enhanced by different substances like e.g. chlorides. Particularly electronic materials and components are affected, because they are exposed to increasingly harsh environmental conditions, resulting in damage to corrosive media (e.g. off-shore systems, electronic components in engine compartment of automobiles). Especially for the materials and contacts of micro-and power electronic components, corrosion induced processes are significant reliability limiting. Additionally, depending on process parameters, corrosion can also be induced during manufacturing (e.g. nickel corrosion in pad metallization). We developed an innovative method, based on electrochemical measurements by a local measuring cell that allows corrosion sensitivity analyses of typical metallization systems for substrates and electrical contacts in a very short time. In this paper, we present and discuss the results for electrochemical corrosion testing by the new method in correlation to standard reliability tests, like mixed flow gas testing (MFG) and neutral salt spray testing as well as standardized electrochemical testing for metallization systems pf printed circuit boards. High resolution microstructural analyses after standard testing as well as after miniaturized cyclovoltammetric testing are giving evidence for the running corrosion mechanism. The investigations carried out in this study show the application potential of the new local electrochemical test method and the usability for quality inspection of PCBs.
金属材料在有湿气和反应性气体(如H2 S、SO2或NO2)存在的情况下会发生腐蚀,并且不同的物质(如氯化物)会增强腐蚀。特别是电子材料和元件受到影响,因为它们暴露在越来越恶劣的环境条件下,导致腐蚀性介质损坏(例如海上系统,汽车发动机舱中的电子元件)。特别是对于微电子和电力电子元件的材料和触点,腐蚀过程是重要的可靠性限制因素。此外,根据工艺参数的不同,在制造过程中也会产生腐蚀(例如,焊盘金属化过程中的镍腐蚀)。我们开发了一种创新的方法,基于局部测量电池的电化学测量,可以在很短的时间内对基片和电触点的典型金属化系统进行腐蚀敏感性分析。本文结合标准的可靠性试验,如混合流气体试验和中性盐雾试验,以及印刷电路板金属化系统的标准化电化学试验,介绍并讨论了用新方法进行电化学腐蚀试验的结果。经标准试验和小型化环伏安试验后的高分辨显微组织分析为运行腐蚀机理提供了证据。研究结果表明,局部电化学检测方法在pcb质量检测中的应用潜力和实用性。
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引用次数: 0
Accelerated Ageing Test and Lifetime Prediction of MOSFETs mosfet的加速老化试验及寿命预测
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584958
Jacob Maxa, M. Nowottnick
An active power cycling test-bed for a power MOSFET is presented in this publication. This setup is used to create temperature dependent load cycles of 24 parallel devices. After a passive calibration step the drain-to-source voltage is used to estimate the junction temperature. The devices are then heated until a predefined value is reached. The setup is power cycled until at least 20 channels failed and then analysed using metallographic cross-sections. Furthermore, this setup records the thermal impedance of each channel over time. With these data it is possible to detect and predict a solder fatigue (crack, void) during operation. Finally after all load cycles the results were evaluated by Weibull plots and a lifetime estimation for other temperatures is given in the way of a stress-life curve. The results suggest a comparable lifetime compared to ceramic-based components, if the substrate does not have an influence as a source of faults.
本文介绍了功率MOSFET的有源功率循环试验台。该设置用于创建24个并行设备的温度相关负载周期。经过一个无源校准步骤后,漏源电压被用来估计结温。然后加热设备,直到达到预定的值。该装置通电循环,直到至少20个通道失效,然后使用金相截面进行分析。此外,该设置记录每个通道随时间的热阻抗。有了这些数据,就可以在操作过程中检测和预测焊料疲劳(裂纹、空洞)。最后用威布尔图对各荷载循环后的结果进行了评估,并以应力-寿命曲线的方式给出了其他温度下的寿命估计。结果表明,如果衬底没有作为故障源的影响,则与基于陶瓷的组件相比,其寿命相当。
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引用次数: 0
Drop feature optimization for fine trace inkjet printing 滴特性优化精细痕迹喷墨打印
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9585004
Nihesh Mohan, Sri Krishna Bhogaraju, M. Łysień, Ludovic Schneider, F. Granek, Kerstin Lux, G. Elger
This paper presents results of an empirical investigation on drop feature optimization, subsequent fine trace printing and influence of sintering atmosphere on printed traces on polyimide substrate with Ag nanoparticle ink. The impact of printing parameters such as waveform features, jetting voltage and printhead height on drop formation and fine trace printing is investigated. The experiments revealed that drop diameter decreased by 33% after decreasing jetting voltage and overall waveform duration to a minimum functional range. From further studies, it is found that to print accurate fine traces an optimum drop spacing value in consideration with drop count should be selected which prints traces close to the required trace width dimensions. Based on these optimizations, trace width of 30 ± 2 μm can be printed with minimum pitch of 35 μm. Sintering progresses faster under air compared to nitrogen due to the efficient removal of the organic capping agents. The resulting sheet resistance under air and nitrogen were 0.1312 Ω/π and 1.8586 Ω/π respectively.
本文介绍了银纳米颗粒油墨在聚酰亚胺基板上的滴迹特征优化、后续精细印迹以及烧结气氛对印迹影响的实验研究结果。研究了波形特征、喷射电压和打印头高度等打印参数对液滴形成和细迹打印的影响。实验表明,将喷射电压和总波形持续时间降低到最小功能范围后,液滴直径减小了33%。进一步研究发现,要打印精确的细迹,应在考虑滴数的情况下选择最优滴距值,使其打印的迹线接近所需的迹线宽度尺寸。基于这些优化,可以打印出30±2 μm的迹线宽度,最小间距为35 μm。由于有机封盖剂的有效去除,在空气中烧结比在氮气中烧结得更快。在空气和氮气作用下得到的薄片阻力分别为0.1312 Ω/π和1.8586 Ω/π。
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引用次数: 0
期刊
2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)
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