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2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)最新文献

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Highly Thermally Conductive Substrate Based on Graphene Film 基于石墨烯薄膜的高导热衬底
Pub Date : 2021-09-13 DOI: 10.23919/empc53418.2021.9584965
Zhenlin Lv, Chenfei Zhou, Xiuzhen Lu, Johan Liu
Heat dissipation has become one of the critical challenges of development for microelectronic products because of the increasing of heat accumulation in the devices. A novel laminated composite with high thermal conductivity was fabricated by hot-pressing using graphene films (GFs) and glass fiber reinforced epoxy resin (GFEP). The effect of GFs with different thicknesses and number of layers on the thermal properties of the composites was investigated. An in-plane thermal conductivity of $141mathrm{W}cdot mathrm{m}^{-1},cdot mathrm{K}^{-1}$ for the laminated composites with GFs and GFEP were obtained. The heat dissipation capability of GFs/GFEP composites is evaluated by infrared thermal imaging technology. The maximum temperature difference between the heating elements on GFs/GFEP composites and GFEP increases with the rise of voltage applied to the heating elements. Moreover, the heat dissipation capability of the composite is enhanced with the increased of the number of layers of GFs. The temperature of the heating element assembled on GFs/GFEP composites is $144.3^{circ}mathrm{C}$ lower than that on GFEP at the same voltage. The results indicate that the GFs/GFEP composites is a promising candidate of substrate material with high heat dissipation capability.
由于器件内热积累的不断增加,散热问题已成为微电子产品发展的关键挑战之一。以石墨烯薄膜(GFs)和玻璃纤维增强环氧树脂(GFEP)为材料,采用热压法制备了一种新型的高导热层状复合材料。研究了不同厚度和层数的GFs对复合材料热性能的影响。得到了GFs和GFEP复合材料的面内导热系数为$141mathrm{W}cdot mathrm{m}^{-1},cdot mathrm{K}^{-1}$。采用红外热成像技术对GFs/GFEP复合材料的散热性能进行了评价。GFs/GFEP复合材料的加热元件与GFEP的最大温差随着施加在加热元件上电压的升高而增大。此外,复合材料的散热能力随着碳纤维层数的增加而增强。在相同电压下,GFs/GFEP复合材料上的加热元件温度比GFEP低144.3^{circ} mathm {C}$。结果表明,GFs/GFEP复合材料是一种具有良好散热性能的基板材料。
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2021 23rd European Microelectronics and Packaging Conference & Exhibition (EMPC)
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